CN104354093A - 一种研磨机气压伺服系统 - Google Patents
一种研磨机气压伺服系统 Download PDFInfo
- Publication number
- CN104354093A CN104354093A CN201410557148.5A CN201410557148A CN104354093A CN 104354093 A CN104354093 A CN 104354093A CN 201410557148 A CN201410557148 A CN 201410557148A CN 104354093 A CN104354093 A CN 104354093A
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- Prior art keywords
- pressure
- pulling force
- sensor
- cylinder
- top lap
- Prior art date
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/34—Accessories
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
Description
Claims (5)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201410557148.5A CN104354093B (zh) | 2014-10-21 | 2014-10-21 | 一种研磨机气压伺服系统 |
Applications Claiming Priority (1)
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CN201410557148.5A CN104354093B (zh) | 2014-10-21 | 2014-10-21 | 一种研磨机气压伺服系统 |
Publications (2)
Publication Number | Publication Date |
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CN104354093A true CN104354093A (zh) | 2015-02-18 |
CN104354093B CN104354093B (zh) | 2016-09-07 |
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CN201410557148.5A Active CN104354093B (zh) | 2014-10-21 | 2014-10-21 | 一种研磨机气压伺服系统 |
Country Status (1)
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CN (1) | CN104354093B (zh) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105014521A (zh) * | 2015-05-27 | 2015-11-04 | 苏州德锐朗智能科技有限公司 | 一种平面研磨机三段式上盘升降速度控制方法 |
CN108436666A (zh) * | 2018-03-19 | 2018-08-24 | 尹强 | 一种安全阀校验维修智能一体机 |
CN113910098A (zh) * | 2021-10-19 | 2022-01-11 | 上海汉虹精密机械有限公司 | 一种用于研磨抛光机精确加压气路控制系统 |
CN114603482A (zh) * | 2020-12-03 | 2022-06-10 | 长鑫存储技术有限公司 | 压力检测系统及压力检测方法 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3691697A (en) * | 1970-09-21 | 1972-09-19 | Hamco Mach & Elect Co | Pressure control for lapping device |
JP2000127024A (ja) * | 1998-10-27 | 2000-05-09 | Toshiba Corp | ポリッシング装置及び研磨加工方法 |
CN101905444A (zh) * | 2009-06-04 | 2010-12-08 | 株式会社荏原制作所 | 修整装置、修整方法和抛光装置 |
CN102133733A (zh) * | 2011-01-06 | 2011-07-27 | 清华大学 | 一种用于cmp多腔室的气压控制系统 |
CN102133730A (zh) * | 2011-01-06 | 2011-07-27 | 清华大学 | 一种用于cmp抛光头多区的气压控制系统 |
CN103567852A (zh) * | 2012-07-23 | 2014-02-12 | 株式会社荏原制作所 | 压力控制装置、具有该压力控制装置的研磨装置及研磨方法 |
CN203738563U (zh) * | 2014-02-28 | 2014-07-30 | 江苏海事职业技术学院 | 一种基于plc的平面高速研磨机 |
-
2014
- 2014-10-21 CN CN201410557148.5A patent/CN104354093B/zh active Active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3691697A (en) * | 1970-09-21 | 1972-09-19 | Hamco Mach & Elect Co | Pressure control for lapping device |
JP2000127024A (ja) * | 1998-10-27 | 2000-05-09 | Toshiba Corp | ポリッシング装置及び研磨加工方法 |
CN101905444A (zh) * | 2009-06-04 | 2010-12-08 | 株式会社荏原制作所 | 修整装置、修整方法和抛光装置 |
CN102133733A (zh) * | 2011-01-06 | 2011-07-27 | 清华大学 | 一种用于cmp多腔室的气压控制系统 |
CN102133730A (zh) * | 2011-01-06 | 2011-07-27 | 清华大学 | 一种用于cmp抛光头多区的气压控制系统 |
CN103567852A (zh) * | 2012-07-23 | 2014-02-12 | 株式会社荏原制作所 | 压力控制装置、具有该压力控制装置的研磨装置及研磨方法 |
CN203738563U (zh) * | 2014-02-28 | 2014-07-30 | 江苏海事职业技术学院 | 一种基于plc的平面高速研磨机 |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105014521A (zh) * | 2015-05-27 | 2015-11-04 | 苏州德锐朗智能科技有限公司 | 一种平面研磨机三段式上盘升降速度控制方法 |
CN108436666A (zh) * | 2018-03-19 | 2018-08-24 | 尹强 | 一种安全阀校验维修智能一体机 |
CN114603482A (zh) * | 2020-12-03 | 2022-06-10 | 长鑫存储技术有限公司 | 压力检测系统及压力检测方法 |
CN113910098A (zh) * | 2021-10-19 | 2022-01-11 | 上海汉虹精密机械有限公司 | 一种用于研磨抛光机精确加压气路控制系统 |
CN113910098B (zh) * | 2021-10-19 | 2023-08-29 | 上海汉虹精密机械有限公司 | 一种用于研磨抛光机精确加压气路控制系统 |
Also Published As
Publication number | Publication date |
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CN104354093B (zh) | 2016-09-07 |
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Effective date of registration: 20160810 Address after: 266045 Shandong province Qingdao City, Zhengzhou Road No. 43 building 130 room A Applicant after: Qingdao Rubber Valley Intellectual Property Co.,Ltd. Address before: Taishan road Suzhou City, Jiangsu province 215299 Suzhou high tech Industrial Development Zone No. 2 Canton Technology Park 10 building 324 Applicant before: Suzhou Hexinmei Electronic Technology Co., Ltd. |
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Inventor after: Liang Tiedong Inventor before: Gao Jun Inventor before: Hu Guoliang Inventor before: Zhu Xia |
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Effective date of registration: 20170509 Address after: Dalang Zhen Xin Lian Cun 523770 Guangdong province Dongguan Lianying Road No. 1 Patentee after: Profit time watch (Dongguan) Co., Ltd. Address before: 266045 Shandong province Qingdao City, Zhengzhou Road No. 43 building 130 room A Patentee before: Qingdao Rubber Valley Intellectual Property Co.,Ltd. |
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