CN103331691A - 一种浮动盘悬浮抛光装置 - Google Patents
一种浮动盘悬浮抛光装置 Download PDFInfo
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- CN103331691A CN103331691A CN2013101937746A CN201310193774A CN103331691A CN 103331691 A CN103331691 A CN 103331691A CN 2013101937746 A CN2013101937746 A CN 2013101937746A CN 201310193774 A CN201310193774 A CN 201310193774A CN 103331691 A CN103331691 A CN 103331691A
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- 238000005498 polishing Methods 0.000 title claims abstract description 55
- 239000000725 suspension Substances 0.000 title claims abstract description 27
- 239000012530 fluid Substances 0.000 claims description 9
- 239000004744 fabric Substances 0.000 claims description 3
- 239000002245 particle Substances 0.000 description 6
- 239000000758 substrate Substances 0.000 description 5
- 230000003750 conditioning effect Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000012528 membrane Substances 0.000 description 4
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000007521 mechanical polishing technique Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000012876 topography Methods 0.000 description 1
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- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
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CN201310193774.6A CN103331691B (zh) | 2013-05-22 | 2013-05-22 | 一种浮动盘悬浮抛光装置 |
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CN103331691A true CN103331691A (zh) | 2013-10-02 |
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Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103612275A (zh) * | 2013-12-05 | 2014-03-05 | 吴中区甪直渡岘工艺品厂 | 一种模切机电磁压力器 |
CN104354094A (zh) * | 2014-10-20 | 2015-02-18 | 济南大学 | 一种弹簧研磨机及研磨方法 |
CN105397639A (zh) * | 2015-12-09 | 2016-03-16 | 浙江工业大学 | 一种悬浮抛光加工间隙检测方法 |
CN105397572A (zh) * | 2015-12-09 | 2016-03-16 | 浙江工业大学 | 一种液动压悬浮抛光装置 |
CN105415153A (zh) * | 2015-12-09 | 2016-03-23 | 浙江工业大学 | 一种流体边界可控的液动压悬浮抛光装置 |
CN105538045A (zh) * | 2015-12-09 | 2016-05-04 | 浙江工业大学 | 基于自适应和固定加工间隙的液动压悬浮抛光方法及装置 |
CN107932201A (zh) * | 2017-12-19 | 2018-04-20 | 浙江工业大学 | 液动压悬浮抛光定点流体压力检测系统 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0029667A1 (en) * | 1979-11-22 | 1981-06-03 | Smiths Industries Public Limited Company | Gas-lubricated bearings and method of manufacture |
SU1252141A1 (ru) * | 1984-07-16 | 1986-08-23 | МВТУ им.Н.Э.Баумана | Инструмент дл гидродинамического полировани плоских деталей |
CN101708592A (zh) * | 2009-11-05 | 2010-05-19 | 浙江工业大学 | 用于悬浮抛光的基盘 |
CN201881287U (zh) * | 2010-11-08 | 2011-06-29 | 浙江工业大学 | 液流悬浮超精密圆柱体抛光头的配模装置 |
CN102699809A (zh) * | 2012-05-07 | 2012-10-03 | 浙江工业大学 | 可主动驱动的悬浮基盘抛光装置 |
CN203266382U (zh) * | 2013-05-22 | 2013-11-06 | 浙江工业大学 | 一种浮动盘悬浮抛光装置 |
-
2013
- 2013-05-22 CN CN201310193774.6A patent/CN103331691B/zh active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0029667A1 (en) * | 1979-11-22 | 1981-06-03 | Smiths Industries Public Limited Company | Gas-lubricated bearings and method of manufacture |
SU1252141A1 (ru) * | 1984-07-16 | 1986-08-23 | МВТУ им.Н.Э.Баумана | Инструмент дл гидродинамического полировани плоских деталей |
CN101708592A (zh) * | 2009-11-05 | 2010-05-19 | 浙江工业大学 | 用于悬浮抛光的基盘 |
CN201881287U (zh) * | 2010-11-08 | 2011-06-29 | 浙江工业大学 | 液流悬浮超精密圆柱体抛光头的配模装置 |
CN102699809A (zh) * | 2012-05-07 | 2012-10-03 | 浙江工业大学 | 可主动驱动的悬浮基盘抛光装置 |
CN203266382U (zh) * | 2013-05-22 | 2013-11-06 | 浙江工业大学 | 一种浮动盘悬浮抛光装置 |
Non-Patent Citations (1)
Title |
---|
渡边纯二等: "半导体基片的非接触抛光技术", 《半导体设备》 * |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103612275A (zh) * | 2013-12-05 | 2014-03-05 | 吴中区甪直渡岘工艺品厂 | 一种模切机电磁压力器 |
CN104354094A (zh) * | 2014-10-20 | 2015-02-18 | 济南大学 | 一种弹簧研磨机及研磨方法 |
CN105397639A (zh) * | 2015-12-09 | 2016-03-16 | 浙江工业大学 | 一种悬浮抛光加工间隙检测方法 |
CN105397572A (zh) * | 2015-12-09 | 2016-03-16 | 浙江工业大学 | 一种液动压悬浮抛光装置 |
CN105415153A (zh) * | 2015-12-09 | 2016-03-23 | 浙江工业大学 | 一种流体边界可控的液动压悬浮抛光装置 |
CN105538045A (zh) * | 2015-12-09 | 2016-05-04 | 浙江工业大学 | 基于自适应和固定加工间隙的液动压悬浮抛光方法及装置 |
CN107932201A (zh) * | 2017-12-19 | 2018-04-20 | 浙江工业大学 | 液动压悬浮抛光定点流体压力检测系统 |
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CN103331691B (zh) | 2015-06-17 |
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Effective date of registration: 20191210 Address after: 314300 room 241, building 1, new economy Pioneer Park, Tongyuan Town, Haiyan County, Jiaxing City, Zhejiang Province Patentee after: Jiaxing Huizhai home furnishing Co.,Ltd. Address before: 310018 Room 1004-1006, 17 Block 57, Baiyang Street Science Park Road, Hangzhou Economic and Technological Development Zone, Zhejiang Province Patentee before: Zhejiang Qibo Intellectual Property Operation Co.,Ltd. Effective date of registration: 20191210 Address after: 310018 Room 1004-1006, 17 Block 57, Baiyang Street Science Park Road, Hangzhou Economic and Technological Development Zone, Zhejiang Province Patentee after: Zhejiang Qibo Intellectual Property Operation Co.,Ltd. Address before: The city Zhaohui six districts Chao Wang Road Hangzhou City, Zhejiang province 310014 18 Patentee before: Zhejiang University of Technology |
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Effective date of registration: 20200921 Address after: Room 402, building 32, No.8 Nujiang Road, Hexi District, Tianjin 300202 Patentee after: Outbay (Tianjin) robot Co.,Ltd. Address before: 314300 room 241, building 1, new economy Pioneer Park, Tongyuan Town, Haiyan County, Jiaxing City, Zhejiang Province Patentee before: Jiaxing Huizhai home furnishing Co.,Ltd. |
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Effective date of registration: 20240909 Address after: Room 403, Building 32, No. 8 Nujiang Road, Hexi District, Tianjin, with a budget of 300000 RMB Patentee after: Tianjin Yingbangni Management Consulting Co.,Ltd. Country or region after: China Address before: Room 402, building 32, No.8 Nujiang Road, Hexi District, Tianjin 300202 Patentee before: Outbay (Tianjin) robot Co.,Ltd. Country or region before: China |