CN104328485B - 一种提高直拉硅单晶生长速度的导流筒 - Google Patents
一种提高直拉硅单晶生长速度的导流筒 Download PDFInfo
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- CN104328485B CN104328485B CN201410654165.0A CN201410654165A CN104328485B CN 104328485 B CN104328485 B CN 104328485B CN 201410654165 A CN201410654165 A CN 201410654165A CN 104328485 B CN104328485 B CN 104328485B
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- 239000013078 crystal Substances 0.000 title claims abstract description 19
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title abstract description 7
- 229910052710 silicon Inorganic materials 0.000 title abstract description 7
- 239000010703 silicon Substances 0.000 title abstract description 7
- 230000005855 radiation Effects 0.000 claims abstract description 10
- 239000000463 material Substances 0.000 claims description 42
- 238000009413 insulation Methods 0.000 claims description 11
- 238000010521 absorption reaction Methods 0.000 abstract description 3
- 238000002425 crystallisation Methods 0.000 abstract 1
- 230000008025 crystallization Effects 0.000 abstract 1
- 230000017525 heat dissipation Effects 0.000 abstract 1
- 230000008092 positive effect Effects 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 description 5
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 4
- 229910052750 molybdenum Inorganic materials 0.000 description 4
- 239000011733 molybdenum Substances 0.000 description 4
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 4
- 229910052721 tungsten Inorganic materials 0.000 description 4
- 239000010937 tungsten Substances 0.000 description 4
- 230000007812 deficiency Effects 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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CN104328485B true CN104328485B (zh) | 2017-01-04 |
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Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
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CN105239150A (zh) * | 2015-09-10 | 2016-01-13 | 上海超硅半导体有限公司 | 单晶硅生长炉用导流筒及其应用 |
CN105154966A (zh) * | 2015-10-19 | 2015-12-16 | 天津市环欧半导体材料技术有限公司 | 一种用于改善区熔硅单晶成晶的新型保温筒 |
CN105960030B (zh) * | 2016-06-30 | 2022-09-20 | 苏州市永通不锈钢有限公司 | 改变热辐射方向的均热装置 |
CN112680793B (zh) * | 2019-10-17 | 2022-02-01 | 上海新昇半导体科技有限公司 | 一种半导体晶体生长装置 |
CN112680788B (zh) * | 2019-10-17 | 2022-02-01 | 上海新昇半导体科技有限公司 | 一种半导体晶体生长装置 |
CN112921395A (zh) * | 2021-01-22 | 2021-06-08 | 上海新昇半导体科技有限公司 | 拉晶装置 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001270797A (ja) * | 2000-03-28 | 2001-10-02 | Wacker Nsce Corp | シリコン単結晶製造装置 |
WO2002031233A1 (en) * | 2000-10-06 | 2002-04-18 | Memc Electronic Materials, Inc. | Heat shield assembly for crystal pulling apparatus |
CN203583004U (zh) * | 2013-10-29 | 2014-05-07 | 洛阳单晶硅有限责任公司 | 一种分段式悬挂热屏 |
CN103882510A (zh) * | 2012-12-24 | 2014-06-25 | 九州方园新能源股份有限公司 | 一种提升单晶硅生长速度的导流筒 |
CN204251754U (zh) * | 2014-11-17 | 2015-04-08 | 天津市环欧半导体材料技术有限公司 | 一种提高直拉硅单晶生长速度的新型导流筒 |
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- 2014-11-17 CN CN201410654165.0A patent/CN104328485B/zh active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001270797A (ja) * | 2000-03-28 | 2001-10-02 | Wacker Nsce Corp | シリコン単結晶製造装置 |
WO2002031233A1 (en) * | 2000-10-06 | 2002-04-18 | Memc Electronic Materials, Inc. | Heat shield assembly for crystal pulling apparatus |
CN103882510A (zh) * | 2012-12-24 | 2014-06-25 | 九州方园新能源股份有限公司 | 一种提升单晶硅生长速度的导流筒 |
CN203583004U (zh) * | 2013-10-29 | 2014-05-07 | 洛阳单晶硅有限责任公司 | 一种分段式悬挂热屏 |
CN204251754U (zh) * | 2014-11-17 | 2015-04-08 | 天津市环欧半导体材料技术有限公司 | 一种提高直拉硅单晶生长速度的新型导流筒 |
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Effective date of registration: 20181225 Address after: 300384 Tianjin Binhai New Area high tech Zone Huayuan Industrial Area (outside the ring) Hai Tai Road 12 Patentee after: Tianjin Zhonghuan Semiconductor Co., Ltd. Address before: 300384 Tianjin Binhai New Area high tech Zone Huayuan Industrial Park (outside the ring) Hai Tai Road 12 Patentee before: Huanou Semiconductor Material Technology Co., Ltd., Tianjin |
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Effective date of registration: 20190524 Address after: 010000 No. 15 Baoli Street, Saihan District, Hohhot City, Inner Mongolia Patentee after: Inner Mongolia Central Leading Semiconductor Materials Co., Ltd. Address before: 300384 Tianjin Binhai New Area high tech Zone Huayuan Industrial Area (outside the ring) Hai Tai Road 12 Patentee before: Tianjin Zhonghuan Semiconductor Co., Ltd. |
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Effective date of registration: 20220421 Address after: 010000 No. 15 Baolier Street, Saihan District, Hohhot City, Inner Mongolia Autonomous Region Patentee after: Inner Mongolia Central Leading Semiconductor Materials Co.,Ltd. Patentee after: Central leading semiconductor materials Co., Ltd Address before: 010000 No. 15 Baoli Street, Saihan District, Hohhot City, Inner Mongolia Patentee before: Inner Mongolia Central Leading Semiconductor Materials Co.,Ltd. |