CN104254910B

CN104254910B - The driving method and slewing equipment of heavy revolving body

Info

Publication number: CN104254910B
Application number: CN201380004871.4A
Authority: CN
Inventors: 芳贺卓; 田村光扩; 山下英隆
Original assignee: Sumitomo Heavy Industries Ltd
Current assignee: Sumitomo Heavy Industries Ltd
Priority date: 2012-03-16
Filing date: 2013-01-21
Publication date: 2017-07-04
Anticipated expiration: 2033-01-21
Also published as: CN104254910A; JP6081985B2; WO2013136842A1; KR101592484B1; KR20140099543A; JPWO2013136842A1

Abstract

The present invention provides a kind of driving method and slewing equipment of heavy revolving body.In order to eliminate the unfavorable condition that heavy revolving body causes positional deviation because of the reversion of sideshake in revolution with low cost, in the driving method of the slewing equipment (12) for making heavy revolving body exceed plumb position and turning round, the slewing equipment possesses the 1st motor (24) and the 1st drive system (34) being driven by the 1st motor (24), 2nd motor (28) and the 2nd drive system (36) being driven by the 2nd motor (28), and the shared bevel gear (32) of the power of the 1st drive system (34) and the 2nd drive system (36) is passed simultaneously, the driving method includes：1st drives operation, using the 1st motor (24) and the 2nd motor (28), the gyroaxis (22) of the revolving body is driven to specific angle of revolution (θ 1) from the revolution starting point of the slewing equipment (12)；And the 2nd drive operation, after as specific angle of revolution (θ 1), the 1st motor (24), the 2nd motor (28) at least one are changed into another type of drive to drive gyroaxis (22).

Description

The driving method and slewing equipment of heavy revolving body

Technical field

The present invention relates to a kind of driving method and slewing equipment of heavy revolving body.

Background technology

There is a kind of spy of the electric characteristics by the subject that makes measure such as semiconductor devices etc disclosed in patent document 1 The slewing equipment that the measuring head (lid) of needle device is turned round and is opened and closed around support shaft.The measuring head of the probe unit is big year by year Type, also constantly designs several tonnes of measuring head in recent years.

Measuring head is driven by the gear motor that motor and reductor are integrally formed.Generally, this kind of measuring head is constituted Be since 0 degree (horizontality) turn round, and return back to the state for opening substantially 180 degree.

Conventional art document

Patent document

Patent document 1：Japanese Unexamined Patent Publication 2006-98388 publications

The content of the invention

The invention technical task to be solved

When making this heavy test heads exceed plumb position and to turn round (opening and closing), there are the following problems：More than vertical The position of upright state, the sideshake of drive system is inverted because of the deadweight of measuring head, it may appear that huge measuring head send " bang " Enormous impact sound and positional deviation phenomenon.

In patent document 1, for this problem, it is proposed that use the technology of the less worm gear reducer mechanism of sideshake, separately Outward, however, it is difficult to sideshake is completely eliminated.

The present invention is completed to solve the problems, such as this conventional, and its problem is to eliminate heavy revolution with low cost Body causes the unfavorable condition of positional deviation because of the reversion of the sideshake of drive system in revolution.

Means for solving technical task

The present invention solves above-mentioned problem by being set to following structure, i.e. one kind makes heavy revolving body more than plumb position The driving method of the slewing equipment of revolution, wherein, the slewing equipment possesses：1st motor and the 1st drive system, the 1st drives System is driven by the 1st motor；2nd motor and the 2nd drive system, the 2nd drive system are carried out by the 2nd motor Drive；And power transmission member, the power of the 1st drive system and the 2nd drive system is delivered to power biography simultaneously Part is passed, the driving method includes：1st drives operation, using the 1st motor and the 2nd motor, by the revolution of the revolving body Axle is driven to specific angle of revolution from the revolution starting point of the slewing equipment；And the 2nd drive operation, as the specific angle of revolution After degree, at least one of the described 1st, the 2nd motor is changed into another type of drive to drive the gyroaxis.

In said structure of the invention, " plumb position " refer to the center of the earth, the axle center of the gyroaxis of revolving body and The center of gravity arrangement position in a straight line of revolving body, without refer to relative to revolving body revolution starting point face and terminal face or set Put back into rotary device bottom surface and vertical direction.Can also be in other words the revolution of the center of gravity and revolving body that link revolving body The straight line in the axle center of the axle position vertical with ground (earth surface).

In the present invention, when heavy revolving body is turned round, the 1st motor, the 2nd motor are ready to pass through respectively and are individually driven The 1st dynamic drive system and the 2nd drive system, the power of the 1st drive system and the 2nd drive system is transferred to (altogether simultaneously ) power transmission member.And, in the range of revolution starting point to the specific angle of revolution of revolving body, by the 1st motor and 2nd motor drives and driving rotary body simultaneously (the 1st drives operation).After as specific angle of revolution, with another driving side Formula drives at least one (the 2nd drive operation) of the 1st motor, the 2nd motor.

As a result, when the driving of revolving body starts, that is, when needing larger driving torque, the 1st motor and the 2nd motor energy Enough common driving rotary bodies.Also, in the vicinity that sideshake reversion occurs, because the driving of revolving body does not need larger driving to turn Square, therefore by changing the type of drive of the 1st motor and the 2nd motor, can in the 1st drive system and the 2nd drive system shape Into the state of the driving without sideshake of revolving body such that it is able to prevent that positional deviation occurs because of the reversion of sideshake.

In addition, when currently invention addresses during " slewing equipment of heavy revolving body " this viewpoint, additionally it is possible to be interpreted as " a kind of The slewing equipment of heavy revolving body, it exceedes the slewing equipment that plumb position is turned round to make heavy revolving body, it is characterised in that Possess：1st motor and the 1st drive system, the 1st drive system are driven by the 1st motor；2nd motor and the 2nd driving System, the 2nd drive system is driven by the 2nd motor；And power transmission member, the 1st drive system and described The power of the 2nd drive system is delivered to the power transmission member simultaneously, and possesses controlling organization, and the controlling organization drives to the 1st Sequence of starting building and the 2nd driving operation are switched over, in driving operation the 1st, using the 1st motor and the 2nd motor, by this time The gyroaxis of swivel is driven to specific angle of revolution from the revolution starting point of the revolving body, in driving operation the 2nd, is being turned into After the specific angle of revolution, the 1st motor, the 2nd motor at least one are changed into another type of drive to drive The gyroaxis.”.

Also, the present invention is it is also understood that for " a kind of slewing equipment of heavy revolving body, it is to exceed heavy revolving body Plumb position and the slewing equipment that turns round, it is characterised in that possess：1st motor and the 1st drive system, the 1st drive system are led to The 1st motor is crossed to be driven；2nd motor and the 2nd drive system, the 2nd drive system are driven by the 2nd motor； And power transmission member, the power of the 1st drive system and the 2nd drive system is delivered to the power transfering part simultaneously Part, the speed reducing ratio of the 1st drive system is different from the speed reducing ratio of the 2nd drive system.”.

In addition, the present invention is it is also understood that be a kind of slewing equipment of heavy revolving body, it is to exceed heavy revolving body Plumb position and the slewing equipment that turns round, it is characterised in that possess：1st motor and the 1st drive system, the 1st drive system are led to The 1st motor is crossed to be driven；2nd motor and the 2nd drive system, the 2nd drive system are driven by the 2nd motor； And power transmission member, the power of the 1st drive system and the 2nd drive system is delivered to the power transfering part simultaneously Part, the capacity of the 1st motor of the 1st drive system is with the capacity of the 2nd motor of the 2nd drive system not Together.”.

Invention effect

In accordance with the invention it is possible to eliminate heavy revolving body because of the reversion of the sideshake of drive system in revolution with low cost Cause the unfavorable condition of positional deviation.

Brief description of the drawings

Fig. 1 is the major part section view of the slewing equipment of the heavy revolving body involved by of embodiments of the present invention Figure.

Fig. 2 is the enlarged view of the main part of above-mentioned implementation method.

Fig. 3 is the overall summary stereogram for representing the slewing equipment involved by above-mentioned implementation method.

Fig. 4 is angle of revolution and the drive control mode of the lid for representing the slewing equipment involved by above-mentioned implementation method The chart of relation.

Fig. 5 is the major part top view of the slewing equipment involved by of another embodiment of the present invention.

Fig. 6 is to the sectional view regarding line VI -- VI along Fig. 5.

Fig. 7 is the major part stereogram of the slewing equipment involved by of another embodiment of the invention.

Fig. 8 is the overall summary stereogram of the slewing equipment involved by the implementation method for representing Fig. 7.

(A) is the summary stereogram of the slewing equipment involved by of another embodiment of the invention, (B) in Fig. 9 It is summary front view.

(A) is the summary stereogram of the slewing equipment involved by of another embodiment of the invention, (B) in Figure 10 It is summary front view.

(A) is the summary stereogram of the slewing equipment involved by of another embodiment of the invention, (B) in Figure 11 It is summary front view.

Specific embodiment

Hereinafter, with reference to the accompanying drawings to embodiments of the present invention is described in detail.

Fig. 1 is the major part section view of the slewing equipment of the heavy revolving body involved by of embodiments of the present invention Figure, Fig. 2 is the enlarged view of the main part of Fig. 1, and Fig. 3 is to represent its overall summary stereogram.

With reference to Fig. 3, the lid that the slewing equipment 12 is used to be opened and closed (revolution) semiconductor- fabricating device (master device) 14 is (heavy Revolving body) 16.In semiconductor- fabricating device 14, in order to periodically pick and place product and be cleaned, it is necessary to phase in its manufacturing process For device upper surface 14A (exceeding plumb position) the heavy lid 16 of 180 degree opening and closing.

Several tons are reached when lid 16 is larger, weight is very big.Lid 16 is mainly by framework 18 and the lid for being installed on the framework 18 Phosphor bodies 20 are constituted.Framework 18 by 2 arms part 18A, 18B for being installed on cantilever position in drive shaft (gyroaxis) 22 and The connecting member 18C for linking the leading section of the arm member 18A, 18B is constituted.In addition, drive shaft 22 is rotatably freely supported on branch The linkage H1 of bearing portion part 23.The lid main body 20 is fixed on connecting member 18C, and relative to 2 arms parts 18A, 18B extend substantially in parallel.

Slewing equipment 12 is configured to, and when framework 18 is approximate horizontal, the upper surface of semiconductor- fabricating device 14 is closed just 14A, whole lid 16 is opened by the rotation of drive shaft 22.That is, lid 16 can be from full-shut position (horizontal level：Aperture 0 Degree) exceed generally upstanding half-open position (plumb position：90 degree of aperture), open to full-gear (horizontal level：Aperture 180 Degree) position.In addition, when lid 16 is closed, can be by reversely rotating drive shaft 22 come reverse from the position of aperture 180 degree The lid 16 is closed along identical track.In the present embodiment, semiconductor- fabricating device 14 be arranged to 90 degree of aperture into It is plumb position.

With reference to Fig. 1, Fig. 2, the slewing equipment 12 possesses：1st motor 24 and be driven by the 1st motor 24 the 1st 1st bevel pinion (the 1st gear) the 26, the 2nd motor 28 of drive system 34 and the 2nd drive being driven by the 2nd motor 28 2nd bevel pinion (the 2nd gear) 30 of dynamic system 36 and simultaneously the 1st bevel pinion 26 of transmission and the 2nd bevel pinion 30 it is dynamic The 1st of power, the single shared bevel gear (power transmission member) 32 of the 2nd drive system dual-purpose.

Drive the 1st motor 24 of the 1st drive system 34 and drive the 2nd motor 28 of the 2nd drive system 36 can be by only Vertical power drives system is individually driven.1st drive system 34 is identical with the structure of the 2nd drive system 36, Therefore it is conceived to the 1st drive system 34 below to illustrate.

1st drive system 34 possesses the 1st motor 24, prime reducing gear 38, intermediate reduction gear mechanism 40 and final stage and subtracts Fast mechanism 42.

1st motor 24 is 3 phase induction motors.In this embodiment, it is not provided with the 1st motor 24 so-called Inverter control mechanism.For safety, stopper mechanism (omitting diagram) is attached to the load reverse side of the 1st motor 24, But when present embodiment is implemented, stopper mechanism is not needed especially.

Prime reducing gear 38 and intermediate reduction gear mechanism 40 are constituted by eccentric oscillating-type planetary gear mechanism.Two decelerations Mechanism 38,40 is capacity (size) different, and its structure is identical, therefore, for the sake of facilitating herein, it is labeled in reference to Fig. 2 and utilization Symbol in intermediate reduction gear mechanism 40, the structure to two reducing gears 38,40 is illustrated.

On the input shaft 44 of (with the output shaft (not shown) link of prime reducing gear 38) intermediate reduction gear mechanism 40, Pendular body 48 is linked with via key 46.2 eccentric bodies 50 are provided with the phase difference of 180 degree each other on pendular body 48.Each inclined The periphery of heart body 50, external gear 54 is assembled with via roller bearing 52.External gear 54 and the internal messing of internal gear 56.In the embodiment party In formula, internal gear 56 is by the internal tooth wheel body 56A being integrally formed with shell 58, the fulcrum post for being supported on internal tooth wheel body 56A 56B, the outer roller 56C for the internal tooth for being rotatably assembled in fulcrum post 56B and constituting the internal gear 56 etc. are constituted.Internal gear 56 Internal tooth quantity (quantity of outer roller 56C) be slightly more than the external tooth quantity (in this example embodiment many 1) of external gear 54.

Interior roller aperture 60 is formed with external gear 54, is fitted together in the intermediate gap of interior roller aperture 60 and is arranged with the domestic of interior roller 62 64.The domestic 64 flange part 66A for being pressed into the part as the output shaft 66 of the intermediate reduction gear mechanism 40.

The output shaft 66 of intermediate reduction gear mechanism 40 is set as the hollow shaft with hollow bulb 66B, in hollow bulb 66B interpolations Enter the input shaft 68 for having whole level reducing gear 42.

The input shaft 68 of the output shaft 66 of intermediate reduction gear mechanism 40 and whole level reducing gear 42 is via spline 70 in circumference side Link upwards.In addition, the input shaft 68 of whole level reducing gear 42 has end difference 68A.End difference 68A and intermediate reduction gear mechanism The end abutment of 40 output shaft 66.Also, the end difference 66C of the mobile restricted connecting block 72 to load-side and output shaft 66 Abut, input shaft 68 pulls to load reverse side via the connecting block 72 and by bolt 74.Thus, whole level reducing gear 42 is defeated Enter axle 68 and connect to any one side shifting without normal direction axial direction relative to the output shaft 66 of intermediate reduction gear mechanism 40.

In addition, the input shaft 68 of the output shaft 66 of intermediate reduction gear mechanism 40 and whole level reducing gear 42 is rolled by a pair of circular cones Sub- bearing 76,78 is supported on shell 58.

(the 1st drives to be formed with the 1st bevel pinion in vertical cut mode in the front end of the input shaft 68 of whole level reducing gear 42 1st gear of dynamic system) 26.

Fig. 1 is returned to, the 2nd drive system 36 also possesses the 2nd motor 28, prime reducing gear 80, intermediate reduction gear mechanism 82 And whole level reducing gear 84.Concrete structure is identical with the 1st drive system 34.The whole level reducing gear 84 of the 2nd drive system 36 has There is corresponding 2nd bevel pinion 30 (the 2nd gear of the 2nd drive system) of the 1st bevel pinion 26 with the 1st drive system 34.

1st bevel pinion 26 and the 2nd bevel pinion 30 are engaged with shared bevel gear 32 simultaneously.That is, the shared bevel gear 32 As the 1st drive system 34 and a part for the 2nd drive system 36, equivalent to present embodiment in " while transmitting the 1st gear With the power transmission member of the power of the 2nd gear ".Share the driving that bevel gear 32 is linked to slewing equipment 12 via key 86 On axle 22.

Then, the effect to the slewing equipment 12 is illustrated, and driving method to the slewing equipment 12 is said It is bright.

If the motor drive shaft (not shown) rotation of the 1st motor 24, the input shaft (not shown) rotation of prime reducing gear 38. As described above, the structure of prime reducing gear 38 is identical with the structure of intermediate reduction gear mechanism 40, the effect of reducing gear 38,40 It is identical, therefore for convenience, with reference to the symbol of intermediate reduction gear mechanism 40, the effect to two reducing gears 38,40 is said It is bright.

If input shaft 44 rotates, pendular body 48 is rotated together with.If pendular body 48 rotates, 2 eccentric bodies 50 are with 180 degree Phase difference eccentric rotary, 2 external gears 54 swing with the phase difference of 180 degree respectively via roller bearing 52.Each external gear 54 With the internal messing of internal gear 56.Therefore, external gear 54 often swings 1 time, relative to the circumference side that internal gear 56 offsets (rotation) 1 tooth amount To phase.The rotation composition is delivered to the flange part 66A of output shaft 66 via interior roller 62 and domestic 64.Thereby, it is possible to realize The deceleration of the speed reducing ratio of 1/ (number of teeth of external gear).In addition, external gear 54 swings composition by interior roller 62 and interior roller aperture 60 Movable fit and absorbed.

Prime reducing gear 38 and intermediate reduction gear mechanism 40 are sequentially connected in series configuration, therefore, the prime reducing gear 38 is with Between reducing gear 40 most at last the rotation of the 1st motor 24 with 1/ { number of teeth of (number of teeth of external gear 54) × external gear 54) } height Speed reducing ratio is slowed down.

If the output shaft 66 of intermediate reduction gear mechanism 40 rotates, the input shaft 68 of whole level reducing gear 42 revolves via spline 70 Turn, the 1st bevel pinion 26 being arranged on the input shaft 68 rotates.The rotary power of the 1st bevel pinion 26 is delivered to shared cone Gear 32.When the transmission is carried out, by engaging for the 1st bevel pinion 26 and shared bevel gear 32, further carry out and two The deceleration of the corresponding end level reducing gear 42 of the gear ratio of person 26,32, as a result, by the 1st driving including sharing bevel gear 32 System 34, carries out the deceleration of total reduction ratio 1/2000 or so.In addition, in the present invention, speed reducing ratio is not particularly limited.

Also, also play decelerating effect same as described above in the 2nd drive system 36.

In the present embodiment, revolution driving is carried out by following driving method.

Hereinafter, it is described in detail with reference to Fig. 4 in the lump.

＜ regions A：As ＞ before specific angle of revolution θ 1

When starting to open at lid 16 from the state of the upper surface 14A of closing semiconductor- fabricating device 14, in specific angle of revolution As before θ 1, the power supply of the 1st motor 24 and the both sides of the 2nd motor 28 is switched on to spend the θ (from the open angle of starting point), and the 1st drives System 34 and the both sides of the 2nd drive system 36 drive lid 16 jointly (the 1st drives operation).In addition, the angle " θ 1 " is as long as be more than The angle of lid 16 can be driven merely with the 1st motor 24 (only 1 motor), it may be considered that the weight of lid 16 and the 1st Torque of drive system 34 etc. is suitably set.

In operation being driven the 1st, the 1st bevel pinion 26 of the 1st drive system 34 and the 2nd conelet of the 2nd drive system 36 The both sides of gear 30 are sharing " drive surface during opening " engagement of bevel gear 32.Here, " drive surface during opening " refers to " to open During lid 16, the 1st bevel pinion 26 or the 2nd bevel pinion 30 drive the flank of tooth for sharing the driving side abutted during bevel gear 32 ". That is, before as specific angle of revolution θ 1, the opening that the 1st motor 24, the driving force of the 2nd motor 28 are applied to lid 16 is driven In dynamic.Because total reduction ratio is 1/2000, speed reducing ratio is larger, therefore lid 16 is from starting point (aperture 0：The full-shut position of level) open Begin slowly to turn round.

＜ regions B：As the driving phase ＞ after specific angle of revolution θ 1

Soon, when the angle of revolution of lid 16 reaches specific angle of revolution θ 1, in this embodiment, now, operation people The power supply that member disconnects any one (being herein the 2nd motor 28) in the 1st motor 24 or the 2nd motor 28 (changes type of drive The 2nd driving operation).Lid 16 is heavy revolving body, and speed reducing ratio is very big, therefore the speed of opening lid 16 is slower, therefore, By the manually operated of operating personnel, it is also possible to reliably turn off operation in the period of appropriate.

In the B of region, the 1st motor 24 of power on state is maintained to continue to rotate, therefore lid 16 itself is with maintenance the 1st The state for engaging when 1st bevel pinion 26 of drive system 34 is with the opening of shared bevel gear 32 in drive surface and continue back Turn.

On the other hand, because the power supply of the 2nd motor 28 is disconnected, therefore the 2nd bevel pinion 30 of the 2nd drive system 36 Rotating speed declines, (before as specific angle of revolution θ 1, being engaged in drive surface when opening with shared bevel gear 32 always) 2nd bevel pinion 30 is engaged with shared bevel gear 32 on " braking surface during opening ".Here, " braking surface during opening " refers to " when lid 16 is opened, the 1st bevel pinion 26 or the braking of the 2nd bevel pinion 30 share the brake side abutted during bevel gear 32 The flank of tooth (with open when drive surface opposition side the flank of tooth) ".This means the 2nd drive system 36 turns into by sharing bevel gear 32 Rotation and the reverse driven state that is rotated (from the point of view of the opening operation of lid 16, be on-position).

Torque (braking moment) during the reverse drive is output side (altogether equivalent to the 2nd drive system 36 and the 2nd motor 28 With the side of bevel gear 32) drive when rotational resistance.Sum it up, in the B of region, lid 16 is subject to come from the 2nd bevel pinion 30 The braking moment of side, while continuing to turn round to opening direction by the driving force of (more than the brake force) the 1st motor 24.

1st motor 24 resists the braking moment of the 2nd drive system 36, only continues to drive lid by the driving force of itself 16, but the deadweight almost all of lid 16 is supported by drive shaft 22 in this condition, turning needed for the rotation lid 16 of the 1st motor 24 Its is low for moment pole, therefore only also can fully maintain revolution by the driving of 1 motor.

＜ regions C：Sideshake inverts phase ＞

Soon, the angle of revolution of lid 16 reaches and is covered because of the reversion of sideshake in the past more than 90 degree (plumb positions) The angle of revolution (for convenience, referred to as sideshake reverse angle) of the positional deviation of body 16.Now, lid 16 be intended to because of deadweight with Speed revolution more faster than the speed of gyration of the rotation based on the 1st motor 24.In the past, so-called sideshake reversion now turns into lid The reason for body 16 causes positional deviation with the huge sound.

However, in the present embodiment, now, the 2nd bevel pinion 30 of the 2nd drive system 36 is in shared bevel gear Surface side engagement is braked during 32 opening, and braking moment is continued to sharing bevel gear 32.And, angle of revolution θ is approached Sideshake reverse angle, the strength by the deadweight opening speed to be accelerated of lid 16 is also weaker.Therefore, it is possible to be effectively prevented from lid Body 16 causes the phenomenon of positional deviation.

If the influence produced by the deadweight of lid 16 gradually increases, the mistake of the 1st bevel pinion 26 of the 1st drive system 34 Cross the engagement to the braking surface side when the opening of bevel gear 32 is shared.If the 1st bevel pinion 26 is sharing the opening of bevel gear 32 When the engagement of braking surface side, then after, hindered by the rotation of the regenerative braking force by the 1st drive system 34 and the 2nd drive system 36 Continue to turn round while brake force supporting (being intended to what is faster opened) lid 16 that power causes.Above is the in the implementation method the 2nd Drive operation.In this series of effect, operating personnel is the power supply that the 2nd motor 24 is disconnected in specific angle of revolution θ 1, thereafter All carry out automatically.

＜ regions D：As ＞ after the 2nd specific angle of revolution θ 2

Estimate the 2nd bevel pinion 30 of the 1st bevel pinion 26 and the 2nd drive system 36 that reach the 1st drive system 34 The moment of both sides' state of braking surface side engagement when the opening of bevel gear 32 is shared, (lid 16 returned back to the 2nd specific angle of revolution Spend the moment of θ 2), operating personnel is again switched on the power supply (driving the 3rd different driving operation of operation from the 2nd) of the 2nd motor 28. In addition, the angle " θ 2 " is as long as be more than plumb position (90 degree) and less than only by the 1st motor 24 (only by 1 motor) nothing The angle of the angle of method regenerative braking lid 16, it may be considered that the regeneration system of the weight of lid 16 and the 1st drive system 34 Power etc. is suitably set.

After entering the 3rd and driving operation, the 1st drive system 34, both sides of the 2nd drive system 36 turns into regenerative braking shape State, lid 16 continues revolution while the speed increase of opening direction is inhibited.In this embodiment, driven with the 2nd The 3rd different driving operation of operation substantially drives operation identical with the 1st.Therefore, since the opening operation of lid 16 up to Untill end, the positional deviation caused because the sideshake of lid 16 is inverted will not be produced, and, speed of gyration can be carried out almost Constant driving.

In addition, when lid 16 is closed to 0 degree from the state for being opened into 180, only make above-mentioned opening operation and the 1st motor, The direction of rotation of the 2nd motor is contrary to the above, it is possible to obtain identical effect.

According to present embodiment, (operating personnel) only needs the power supply of the motor 24 of independent operation the 1st and the 2nd motor 28, with regard to energy It is enough simply to prevent because of the positional deviation of the lid 16 that sideshake reversion causes.

Also, in the present embodiment, it is configured to the power of the 1st bevel pinion (the 1st gear) 26 of the 1st drive system 34 Power with the 2nd bevel pinion (the 2nd gear) 30 of the 2nd drive system 36 is delivered to as shared single power transferring element Shared bevel gear 32, also, the shared bevel gear 32 for each drive system 34,36 whole level reducing gear (final level) 42, 84 gear, therefore by removing the sideshake of the part, can effectively eliminate the positional deviation phenomenon of lid 16.

Also, the 1st motor 24, the 2nd motor 28 for being used are for general induction motor, without complicated control, because This low cost.Especially, when the revolution for needing driving torque starts (or revolution terminates nearby), can be using 2 drives of system The driving force (or regenerative braking force) of dynamic system, therefore the capacity of every 1 motor is conventional substantially half.Therefore, no Only low cost, additionally it is possible to by device integral miniaturization, it is also easy to operate.In the present embodiment, due to whole level reducing gear 42, 84 is orthogonal reducing gear, therefore, it is possible to the 1st drive system 34, the 2nd drive system 36 are protruded from semiconductor- fabricating device 14 Apart from L1 suppress in Min., at this point, can also realize the miniaturization of the entirety of semiconductor- fabricating device 14.

Also, for without the complex control this action effect, not only in terms of cost effectively, due to partly leading The electrical noise that the slewing equipment 12 pairs of the lid 16 of body manufacture device 14 sends from the control system of revolution is extremely sensitive, therefore Should be also effective in the sense that " reduction electrical noise ".

In addition, in the above-described embodiment, realizing driving operation with the 1st using the method for the power supply for disconnecting the 2nd motor 28 The 2nd different driving operations, but in the present invention, operation is driven for the 2nd, it may be considered that various controlling parties in addition Method (variation).

Firstth, in the above-described embodiment, turn round way in by operating personnel in itself it is " manual " disconnection the 2nd motor 28 electricity Source, but it is also possible to opened from dynamic circuit breaker by using the switching of controlling organization.Therefore, slewing equipment 12 can be made to possess detection or true The mechanism for recognizing the angle of revolution of the lid 16 at the moment (can also be counted with to the elapsed time since revolution Mode replacement), and possess controlling organization, the controlling organization is " in the revolution starting point (0 degree of angle of revolution) from lid 16 to spy The 1st driving of the drive shaft (gyroaxis) 22 of lid 16 is driven untill determining angle of revolution θ 1 using the 1st motor 24 and the 2nd motor 28 Operation and as driving the 1st with another type of drive (such as being set to the control mode for disconnecting) after the specific angle of revolution θ 1 Switched between motor 24, the 2nd operation of at least one (such as the 2nd motor 28) of the 2nd motor 28 ".

Also, for example when any one in the 1st motor, the 2nd motor has inverter control mechanism, can be by the 2nd Operation is driven to be set to relative relative to the motor without inverter control mechanism with the motor that will there is the inverter control mechanism The operation that the mode of " deceleration " is switched over.Thus, it is possible to obtain substantially being acted on implementation method identical above, while By " degree of deceleration ", braking surface when can put on opening in the drive system slowed down can be more on one's own initiative adjusted Torque.

Also, when any one motor has inverter control mechanism, the 2nd driving operation can be set to have The motor of the inverter control mechanism is switched over relative to the motor without inverter control mechanism with respect to the mode of " speedup " Operation.Nonetheless, its result can also obtain substantially being acted on implementation method identical above, while by being somebody's turn to do " speedup degree ", the torque of braking surface when can put on opening in the relatively slack-off drive system of Indirect method.Also, In a method of the rotating speed of motor relative to another speedup, will can obtain " putting on the 1st horse in a small amount of load Up to (B regions) during, 2 motor, actively accelerate the speed of gyration of lid " this new effect.Thereby, it is possible to further shorten lid Body be opened fully to 180 degree untill time.

It is of course also possible to make a motor slow down, and make another motor speedup.The quantity of motor is also not limited to 2 It is individual.When with more than 3, it is also possible to which deenergization relaxes the cataclysm of driving force and brake force successively.

Also, when a motor has inverter control mechanism, it is possible to use assign electric current by a motor Limit come to there is the method that torque is limited.Thus, the load for being not endowed with the motor of torque limit is inevitably enlarged, and is slided Increase, so that rotating speed declines.On the other hand, the motor of torque limit is endowed because suffered torque is smaller (due to load It is lighter), therefore correspondingly can maintain rotate faster with less slip, as a result, can make to share the 1st small of bevel gear Bevel gear, the 2nd bevel pinion respectively opening with shared bevel gear when drive surface and braking surface both sides engage when opening.

If in addition, be conceived to " slowing down to a motor " this effect, (even if not having inverter control machine Structure, as long as alternatively possessing the stopper mechanisms such as electromagnetic brake and friction brake) only to possessing the brake machine One motor of structure applies braking, it is also possible to obtain identical action effect.Also, according to " brake applications ", additionally it is possible to actively The torque of braking surface when may put on opening in the drive system that ground adjustment is slowed down.I.e., in the present invention, " motor is changed Type of drive " refers to not only comprising the situation for changing control motor mode in itself, also comprising by the device to attaching motor It is controlled come the situation of the type of drive for changing motor.

But, in the above-described embodiment using the 1st bevel pinion 26 and the 2nd drive system 36 of the 1st drive system 34 The 2nd bevel pinion 30 (power is passed with (dual-purpose in the 1st drive system 34, the 2nd drive system 36) single shared bevel gear Pass part) 32 structures for engaging simultaneously.Even if however, the present invention is not that this structure can also be achieved.

The concrete structure is illustrated in Fig. 5 and Fig. 6.

In this embodiment, possess：1st motor 88 and the 1st drive system 90 most final stage have the 1st bevel pinion (omitting diagram) and the 1st reductor 94 of the 1st bevel gear 92 engaged with the 1st bevel pinion；And the 2nd motor 96 and The final level of 2 drive systems 98 has the 2nd bevel pinion (omitting diagram) and the 2nd bevel gear engaged with the 2nd bevel pinion 100 the 2nd reductor 102.

Also, it is fixed with the output shaft (output block) 95 of the 1st bevel gear 92 of the final level of the 1st reductor 94 and fixes The output shaft (output block) 101 for having the 2nd bevel gear 100 of the final level of the 2nd reductor 102 links via key 106,108 In in the drive shaft (gyroaxis) 104 as single driven member (power transmission member).

In this embodiment, the 1st bevel pinion and the 1st bevel gear 92 and the 2nd drive system 98 of the 1st drive system 90 The 2nd bevel pinion and the 2nd bevel gear 100 independently have open when drive surface and open when braking surface.

But, even this structure, such as in driving operation the 2nd, it is being provided with to slowly change and driving In the drive system of the side of the motor (the 1st motor 88 or the 2nd motor 96) of flowing mode, the bevel pinion and cone of the drive system Gear brakes surface side abutting in the opening of the bevel gear.Also, do not changing the drivetrain of such as change speed control especially In system, abutting when being persistently maintained open in drive surface.This and the 1st bevel pinion 26 or the 2nd small bevel gear in above-mentioned implementation method Wheel is 30 identical with the abutment of the shared bevel gear 32 of the 2nd drive system 36 relative to the 1st drive system 34, also with to conduct The effect of the drive shaft 22 of driven member is identical.Therefore, by the structure, it is also possible to obtain basic with said structure identical Effect.

In addition, in preferably involved structure, the 1st reductor 94, the 2nd reductor 102 can be used itself Common (independent monomer) reductor.Therefore, with the general reductor that can also be used in other purposes can be used Very big advantage.More specifically enumerate the example of advantage, such as typically when bevel pinion and bevel gear is manufactured, Liang Zheshi " pairing " manufacture.That is, in finishing step, so-called trial operation is carried out in the environment of it there are fine abrasive grains, is adjusted Both operations of tooth contact whole etc..In implementation method above, 2 bevel pinions are engaged with 1 bevel gear, therefore can be with Expect actually being difficult to carry out the adjustment operation sometimes.However, in this embodiment, can use by 2 groups of bevel pinions with The tooth contact of bevel gear is by the every 1 group general reductor being adjusted respectively, therefore manufacture drive system is very light.Therefore recognize For in cost or in terms of delivery date, the structure is sometimes more favourable than implementation method above on the contrary.

One of another implementation method is shown in Fig. 7 and Fig. 8.

In implementation method above, final level reducing gear employs orthogonal reducing gear, but preferably In, final level uses parallel axle speed reducing machine structure 110.1st drive system 114 is driven by the 1st motor 111, the 2nd drivetrain System 118 is driven by the 2nd motor 113.1st spur pinion 116 and the 2nd drivetrain of the final level of the 1st drive system 114 2nd spur pinion 120 of the final level of system 118 is respectively equivalent to the 1st gear, the 2nd gear, with the 1st spur pinion 116 and the 2nd The spur gear 122 that spur pinion 120 is engaged simultaneously is equivalent to power transmission member.

Parallel axle speed reducing machine structure 110 is used in this embodiment, therefore compared with implementation method above, can be with more Low cost realizes manufacture.Also, for the 1st spur pinion 116, the 2nd spur pinion 120 the two with 1 spur gear 122 Engagement, unlike orthogonal system as in previous embodiment, it is necessary to carry out the tooth contact adjustment of harshness, therefore also can in this aspect It is enough to realize low cost manufacture.

In addition, in the above-described embodiment, the 1st motor, the 2nd motor and the 1st drive system, the 2nd drive system are used Identical (structure and capacity) motor and drive system.However, the present invention not necessarily requires the 1st motor, the 2nd motor or 1 drive system, the 2nd drive system are identical structure or capacity.Especially, if the capacity of motor is different, load according to driving force Or the sliding properties of angle of revolution and two motors when changing become different, therefore influence and regeneration to velocity variations Braking characteristic during braking also becomes different.In other words it can obtain more conforming to the individual cases of every 1 slewing equipment The possibility of characteristic is further improved, and design freedom expands.Also, by differently setting the structure of each drive system, Sometimes more preferably action effect can be obtained.For example, the final level of the side being driven all the time is made up of bevel gear set, by Hypoid gear group or gear on worm group constitute the drive system of the side of deenergization, thus, it is possible to be carried out as divided into Meter, i.e. be able to maintain that the drive efficiency of the side being driven all the time higher, while further improving the one of deenergization Reverse drive resistance (brake force) produced by side.

In addition, in the above-described embodiment, for the purpose of the generation for reducing electrical noise and cost degradation, by operating personnel's hand The dynamic switching for carrying out the driving operation under specific angle of revolution θ 1, θ 2, but angle of revolution θ 1 is not only, for the driving work under θ 2 The switching of sequence, also it is of course possible to be configured to controlling organization to make slewing equipment possess the handoff functionality in itself.

Also, in the above-described embodiment, all illustrate and be made up of the gear reduction for being inevitably present sideshake 1st drive system, the example of the 2nd drive system.But, for example, the drive system in revolving body is such as driven by carry-over pinch rolls It is dynamic and in the case of being driven by belt wheel and being made up of itself drive mechanism without sideshake like that, in whole drive system In there is key and spline etc., and when the part is possible to produce sideshake, it is also possible to be effectively applicable the present invention.

Also, revolving body in the above-described embodiment, is shown from level to the example of horizontal rotation 180 degree, but as long as The revolution of plumb position is across, no matter the then specific angular dimension of revolution.

Here, employ " after as specific angle of revolution, controlling into another drive in the above embodiment Flowing mode is driven " structure.It is configured to, a drive system is relied on angle of revolution relative to another drive system and send out Wave the function of relative " braking ".

But, the present invention can also be configured to, even if the not specially switch drive mode under specific angle of revolution, for example, lead to Cross the structure of the structure of the 1st drive system and the 2nd drive system suitably " differential ", it is also possible to carry out same cutting automatically Change.

Hereinafter, to by the embodiment party of the structure of the 1st drive system and the type of the structure " differential " of the 2nd drive system The example of formula is described in detail.

In the implementation method of the type, for example, first, be ready to pass through the 1st drive system that the 1st motor is driven and The 2nd drive system being driven by the 2nd motor, and be configured to make the power of the 1st drive system and the 2nd drive system same When be delivered to (shared) power transmission member.Now, implement differential in the 1st drive system and the 2nd drive system.As Differential the 1st, it may be considered that differently set the knot of the speed reducing ratio of the speed reducing ratio and the 2nd drive system of the 1st drive system Structure.As differential another example, it may be considered that differently set the capacity and the 2nd drivetrain of the 1st motor of the 1st drive system The structure of the capacity of the 2nd motor of system.

It is differential by these, it is prevented from that positional deviation occurs in revolving body because the sideshake of drive system is inverted.

Hereinafter, since by differently setting speed reducing ratio to carry out differential example, it is more particularly described.

In this embodiment, as basic hardware configuration, can utilize for example it is stated that structure (Fig. 1~Fig. 3's Structure).But, in this embodiment, the number of teeth of the gear of the 2nd drive system 36 is set to the tooth than the 1st drive system 34 , thus be set as the speed reducing ratio G2 of the 2nd drive system 36 slightly larger by the number of teeth slightly many (or few) (such as many or few 1~2) of wheel In the speed reducing ratio G1 (speed reducing ratio G1 ＜ speed reducing ratio G2) of the 1st drive system 34.Specifically, the deceleration of the 2nd drive system 36 Speed reducing ratio than G2 can be changed by the number of teeth of the gear of any part of the 2nd drive system 36 of change.2nd drive system Which kind of degree the change of the number of teeth of the particular gear that the speed reducing ratio G2 of 36 entirety passes through the 2nd drive system 36 changes actually, according to The gear species and the number of teeth of institute's changing section and it is different.Accordingly, it is considered to be intended between the 1st drive system 34, the 2nd drive system 36 Overall " speed difference " of generation, somewhat changes the number of teeth of the gear of suitable position.In addition, as be described hereinafter, which kind of should change Degree depends on target design method.

Even if the speed reducing ratio G2 of the speed reducing ratio G1 of the 1st drive system 34 and the 2nd drive system 36 is set into difference, cone is shared Gear 32 and the drive shaft 22 (due to being rigid body) integratedly rotated with the shared bevel gear 32 can also be rotated with specific rotating speed. The rotating speed rely on the ratio between various key elements, such as speed reducing ratio G1 and G2, be actually applied to lid 16 revolution load and relative to the 1 induction motor 24, sliding ratio-torque characteristics of synchronous rotational speed of the 2nd induction motor 28 etc. and determine.Revolution load according to from return The angle of revolution θ for turning to have started changes in real time, therefore the 1st induction motor 24, the slip of the 2nd induction motor 28 are also sent out in real time Changing, so that the actual speed of lid 16 also changes in real time.

But, the 1st drive system 34 and the 2nd drive system 36 are by drive shaft 22 to the equidirectional (opening of lid 16 Direction) drive, therefore the situation that the revolution of lid 16 is stagnated or returned will not occur.

Hereinafter, 2 different representative designs of the 1st drive system 34, speed reducing ratio G1, G2 of the 2nd drive system 36 are shown Example.

1st design example is following design：Significantly ensure the 1st induction motor 24, the capacity of the 2nd induction motor 28, also, Significantly set speed reducing ratio G1, G2 difference so that, including revolution start when, make the 2nd bevel pinion 30 all the time with shared bevel gear 32 engage at " braking surface during opening ".2nd design example is following design：Felt using the 1st induction motor the 24, the 2nd compared with low capacity Motor 28 is answered, also, sets the difference of speed reducing ratio G1, G2 smaller, so as to when revolution load revolution higher starts, the 1st is small The bevel gear 26, both sides of the 2nd bevel pinion 30 contributes to lid 16 " drive surface during opening " engagement of bevel gear 32 is shared Drive.

As it was previously stated, " drive surface during opening " refer to " when lid 16 is opened, the 1st bevel pinion 26 or the 2nd bevel pinion 30 drive the flank of tooth for sharing the driving side abutted during bevel gear 32 ".Also, " braking surface during opening " refers to " to open lid When 16, the 1st bevel pinion 26 or the 2nd bevel pinion 30 braking share bevel gear 32 when abutted brake side the flank of tooth (with beat The flank of tooth of drive surface opposite side when opening) ".In addition, during any one in the 1st, the 2nd design example designs example, speed reducing ratio G1, The occurrence of G2 is suitably set can realize target action, is not particularly limited.

Illustrated from the 1st design example.

Under 1st design such as：Significantly ensure the 1st induction motor 24, the capacity of the 2nd induction motor 28, with can compared with Also lid 16 can be driven under small sliding ratio, also, significantly sets the difference of speed reducing ratio G1, G2.Thereby, it is possible to make the 1st drive 1st bevel pinion (the 1st gear) 26 of dynamic system 34 drives with shared bevel gear (power transmission member) 32 when opening all the time Face is engaged, and makes the 2nd bevel pinion (the 2nd gear) 30 of 2 drive systems 36 all the time with shared bevel gear 32 in " opening when system Dynamic face " engagement.

It is more particularly described, when the capacity of the 1st induction motor 24, the 2nd induction motor 28 is larger, lid 16 can be with smaller Sliding ratio (close to the rotating speed of synchronous rotational speed) be driven.Therefore, the 1st drive system come by the difference band of speed reducing ratio G1 and G2 34th, the difference of the rotating speed of the 2nd drive system 36 goes above the sliding ratio, and the 1st bevel pinion 26 is being opened with shared bevel gear 32 When drive surface engagement, the 2nd bevel pinion 30 and shared bevel gear 32 braking surface when opening engages.Speed difference with lid 16 leads to Cross the 1st induction motor 24, the slip of the 2nd induction motor 28 and absorbed.

Even if lid 16 will not also change near plumb position, the engagement system.Therefore, even if revolution is carried out to such as in the past Untill the position more than plumb position of sideshake reversion, the 2nd bevel pinion 30 of the 2nd drive system 36 is also all the time to sharing cone tooth Wheel 32 persistently assigns regenerative braking force such that it is able to be effectively prevented from the phenomenon that lid 16 causes positional deviation.

If lid 16 exceedes plumb position, the deadweight of lid 16 is worked to the direction of speed of gyration to be accelerated, but by Braking surface is engaged and persistently assigned stronger when the 2nd bevel pinion 30 of the 2nd drive system 36 is in the opening of shared bevel gear 32 Regenerative braking force, therefore lid 16 will not be out of control, can continue slowly to carry out opening operation.

Engagement (engagement during opening in drive surface or when opening on braking surface of the 1st bevel pinion 26 now Engagement) depend on the side of the 2nd drive system 36 regenerative braking force intensity and lid 16 now revolution load (negative load) Intensity.The 1st design example in, the 1st induction motor, the 2nd induction motor 28 capacity it is larger, it is taken as that the 1st sensing horse It is more up to 24 situations that drive surface (light load) is engaged when the opening of bevel gear 32 is shared.Speed difference is by the 1st sensing horse Absorbed up to the slip in 24.If, when the regenerative braking force only by the 2nd induction motor 28 cannot sufficiently be regenerated Braking, and actual speed is when being significantly faster than the synchronous rotational speed of the 2nd induction motor 28, the 1st induction motor 24 is also braked when opening Surface side is engaged, and lid 16 is supported by the regenerative braking force of the 1st induction motor 24, both sides of the 2nd induction motor 28.

Though in the case of any, when the opening operation of lid 16 is carried out, only by connect the 1st induction motor 24, The power supply of the 2nd induction motor 28, need not completely carry out Special controlling, it becomes possible to take place without the position for occurring to be caused by sideshake reversion Put the revolution driving of deviation.

Then, to differently set the 1st drive system 34, the situation of speed reducing ratio G1, G2 of the 2nd drive system 36 the 2nd Design example is illustrated.In 2nd design example, using the 1st induction motor 24, the 2nd induction motor 28 compared with low capacity, actively should With " characteristic that sliding ratio increases when applying load " of induction motor.

That is, in the 2nd design example, when revolution load revolution higher starts, the 1st bevel pinion 26, the 2nd small bevel gear 30 both sides drive surface engagement when the opening of bevel gear 32 is shared is taken turns, near plumb position, the 2nd of the 2nd drive system 36 is small The braking surface side engagement when opening of bevel gear 30, thereafter, the 1st bevel pinion 26, both sides of the 2nd bevel pinion 30 is in shared bevel gear Braking surface engagement during 32 opening.

More specifically, when the capacity (basic generation torque) of the 1st induction motor 24, the 2nd induction motor 28 is not very In the case of big, speed setting is that the 1st bevel pinion 26 of the 1st drive system 34 faster is sharing the opening of the side of bevel gear 32 When drive surface engagement, and loaded by the larger revolution by angle of revolution θ when smaller and significantly slided.By the slip, If rotating speed is decreased below the rotating speed of the 2nd bevel pinion 30 of the 2nd drive system 36, result, the 1st bevel pinion 26 and the 2nd The both sides of bevel pinion 30 drive surface engagement when the opening of bevel gear 32 is shared with slip.

When the speed reducing ratio of the 2nd drive system 36 is larger, the slip of the 2nd induction motor 28 is respectively smaller than the 1st induction motor 24 slip.But, the speed reducing ratio of the speed reducing ratio more than the 1st drive system 34 of the 2nd drive system 36, therefore (even if the 2nd sensing The slip of motor 28 is smaller and that torque occurs is also smaller), the torque for being transferred to share bevel gear 32 from the 2nd bevel pinion 30 also can Original state is maintained without reducing.As a result, the 1st drive system 34, the 2nd drive system 36 make the and of the 1st bevel pinion 26 The load that 2nd bevel pinion 30 is born become roughly the same the 1st induction motor 24, the 2nd induction motor 28 sliding ratio (or The rotating speed of lid 16) under keep balance, two drive systems 34,36 contribute to the driving of lid 16 jointly.

However, soon, as the angle of revolution θ of lid 16 is close near plumb position, revolution load is die-offed, therefore the 1st Induction motor 24 is somewhat slided, and (turning into the state similar with the 1st design example above) the 2nd bevel pinion 30 is braked when opening Face is engaged, and assigns regenerative braking force to sharing bevel gear 32.And, if angle of revolution θ exceed plumb position and close to standard-sized sheet, Then the 1st bevel pinion 26 also braking surface engagement when opening, so as to form the 1st induction motor, the 2nd induction motor produce again jointly The state of raw brake force.

In the 2nd design example, as the 1st induction motor 24, the 2nd induction motor 28, the less horse of capacity can be used Reach such that it is able to obtain small-sized, inexpensive, operation easily slewing equipment.

Then, to according to the difference of the 1st induction motor 24, the capacity of the 2nd induction motor 28, (basic occurs the big of torque It is small) the differential design example (the 3rd design example) that carries out the 1st drive system and the 2nd drive system illustrates.

At present, for example preparing substantially can be merely with the motor and Bi Qi of the larger capacity of motor driving lid 16 Capacity small motor (speed reducing ratio can be the same or different, herein in order to make it easy to understand, assuming identical illustrating).

If the induction motor of the capacity more than the capacity of the 1st induction motor 24 of the 2nd induction motor 28 is set to, in the situation Under, the 2nd induction motor 28 of larger capacity slides smaller when bearing with 24 identical torque of the 1st induction motor compared with low capacity (can be rotated with very fast rotating speed).

If by connect the 1st induction motor 24, the 2nd induction motor 28 power supply come start drive lid 16, capacity compared with The 2nd big induction motor 28 receives the revolution load of lid 16 while sliding, with slower than synchronous rotational speed sliding with (less) The rotating speed of dynamic corresponding amount drives lid 16.That is, lid 16 is substantially returned with the rotating speed by the slip regulation of the 2nd induction motor 28 Turn.

Now, less 1st induction motor of capacity is in the shape that must turn into slower rotating speed when identical torque is exported Condition.However, share bevel gear 32 being rotated with the rotating speed faster than its at present.Under the rotating speed (sliding ratio), the nothing of the 1st induction motor 24 Method output makes to share the torque that bevel gear 32 faster rotates.On the other hand, the side of bevel gear 32 is shared (by the 2nd drive system 36 In driving) rotated with the larger rotating torques that can drive the 1st bevel pinion 26.Therefore, as a result, the 1st conelet The braking surface engagement when the opening of bevel gear 32 is shared of gear 26, is subject to rotating torques from the side of shared bevel gear 32 on the contrary.This meaning Taste the opening operation relative to lid 16, with state (producing the state of the regenerative braking) rotation as resistance.

Even if being changed (even if lightening) close to plumb position and revolution load, as long as revolution load is for just, then the 1st is small The situation of braking surface side engagement when opening of bevel gear 26 will not change.When lid is returned back to such as conventional sideshake more than plumb position During the position of reversion, the positional deviation with the sideshake respective amount being present on rear side of direct of travel was there occurs in the past, but in this implementation In mode, in revolution load reversion, the 1st bevel pinion when the opening of bevel gear 32 is shared, engage (without side by braking surface side Gap), it is thus in the situation that increase immediately regenerative braking.Therefore, so also can using two motors that capacity is different It is enough to avoid positional deviation by the regenerative braking of the side of the 1st drive system 34.In addition, when the lid 16 more than plumb position When the influence of deadweight becomes big, regenerative braking puts on the 1st induction motor 24 and the both sides of the 2nd induction motor 28.

In this way, speed reducing ratio difference it is differential and motor capacity differential in any one it is differential in, upper State the 1st~the 3rd design example in completely need not electrically be controlled.That is, only felt by connecting the 1st when the revolution of lid 16 starts Answer motor 24, the power supply of the 2nd induction motor 28 and disconnected at the end of revolution, then the opening operation in lid 16 starts to end Untill, the positional deviation caused by the sideshake reversion of lid 16 not being had, and, can carry out fully controlling lid 16 Revolution.

In addition, when lid 16 is closed, simply above-mentioned opening operation and the 1st induction motor 24, the rotation of the 2nd induction motor 28 Turn in opposite direction, and turn round starting position and revolution end position is contrary to the above, identical effect can be obtained.

Also, it is configured in the present embodiment, the power of the 1st bevel pinion (the 1st gear) 26 of the 1st drive system 34 Power with the 2nd bevel pinion (the 2nd gear) 30 of the 2nd drive system 36 is delivered to as shared single power transferring element Shared bevel gear (single gear) 32, also, the shared bevel gear 32 for each drive system 34,36 final reducing gear The gear of (final level) 42,84, therefore by removing the sideshake of the part, the position that can effectively eliminate lid 16 is inclined From phenomenon.

Also, in the present embodiment, final reducing gear 42,84 is orthogonal reducing gear, therefore, it is possible to the 1st is driven System 34, the 2nd drive system 36 suppress in Min. from what semiconductor- fabricating device 14 was protruded apart from L1, at this point, Also the miniaturization of the entirety of semiconductor- fabricating device 14 can be realized.

In addition, the 1st induction motor 24, the 2nd induction motor 28 that are used are for general induction motor, need not completely carry out For the control turned round, therefore low cost.Also, should carry out for Special controlling this action effect, not only exist Cost aspect effectively, is sent due to 12 pairs of control systems from revolution of slewing equipment of the lid 16 of semiconductor- fabricating device 14 Electrical noise is extremely sensitive, therefore is also effective in the sense that " the reduction electrical noise ".

In addition, in the above description, the design on differently setting speed reducing ratio has included 2 examples, on difference The design example of ground setting motor capacity has only enumerated 1 example, but the present invention may not only be defined in these design examples.Especially, exist In differential based on motor capacity, the revolution load of lid 16 change into from " larger just " value " less just ", " 0 ", " negative " value, also, the mobility (rotating speed) of induction motor depends on the revolution to load, and degree of dependence (slides-load spy Property) different by the capacity of each motor, therefore, specifically, 2 drive systems is produced speed difference using these characteristics Design is also contemplated that various designs in addition.

In addition, in the present invention it is possible to combination based on speed ratio differential and based on the differential of motor capacity, this When, design freedom is extremely wide, can economically use (compared with the induction motor of low capacity), and can also near plumb position More reliably play a part of braking.

In addition, in the present invention, the quantity (quantity of drive system) of induction motor is also not limited to 2 (2 systems). For example, when with 3 induction motors, can make 1 shared bevel gear with respective bevel pinion while engaging.Now, may be used It is differential on speed reducing ratio or capacity to carry out to all drive systems, especially, can also there is not differential group.Or Person, can also be combined as follows：Implement differential based on speed reducing ratio for " 1 pair of induction motor ", for " 1 pair of sense Answer motor " then implement differential based on capacity.Thus, revolving body can not only be more precisely controlled, additionally it is possible to further Reduce the capacity of every 1 induction motor.

In addition, when carrying out differential using this speed reducing ratio and motor capacity, similarly can be using such as making above With Fig. 5, Fig. 6 illustrate the structure being linked to 2 reductors in shared drive shaft (gyroaxis) and such as said using Fig. 7, Fig. 8 Bright final level uses the structure of parallel axle speed reducing machine structure.

In addition, relied on including the situation of the implementation method involved by the control that angle of revolution is carried out including use above, Can also be using the structure as shown in Fig. 9~Figure 11.

In the example shown in Fig. 9 (A), (B), basic structure is identical with Fig. 5, structure illustrated in fig. 6.In addition, Identical symbol is used in the part substantially the same with implementation method above, and omits repeat specification.Specifically, with such as Based on lower structure：Possess the 1st reductor 94 with the 1st drive system 90 and the 2nd deceleration with the 2nd drive system 98 Output shaft (the output of the reductor 102 of (hollow-core construction) output shaft (output block) the 95 and the 2nd of the reductor 94 of machine the 102, the 1st Part) 101 it is linked to drive shaft (gyroaxis) 104 (equivalent to 22).

Here, be assembled with the lid 16 of the semiconductor- fabricating device (master device) 14 of the slewing equipment 12 setting via constructing The supporting member 23 put on the F of face is independently arranged.Supporting member 23 has linkage H1.Specifically, it is being arranged at support Insert has drive shaft 104, and drive shaft 104 by the sliding contact with supporting member 23 or via bearing in the through hole of part 23 And rotatably supported.Also, in the implementation method of the Fig. 9, the 1st reductor 94 and the 2nd reductor 102 are assembled in drive The two ends of moving axis 104, the driving force (or brake force) for turning round is provided from the both sides of the drive shaft 104.That is, lid 16 is clipped Framework 18 arm member 18A, 18B, from both sides drive or braking drive shaft 104.Therefore, (such as example of Fig. 5, Fig. 6) drive Moving axis 104 will not from a side strength distort, therefore, will not occur lid 16 with revolution inclined situation, can carry out Mechanism is more reasonably turned round.

Example shown in Figure 10 (A), (B) remains on the structure for being to illustrate with use Fig. 5, Fig. 6 will 2 reductors links Based on the structure in shared drive shaft (gyroaxis) 104.But, in this embodiment, the 1st reductor 94 and the 2nd Reductor 102 itself is fixed on the semiconductor- fabricating device (master device) 14 that is assembled with the slewing equipment via plate 152 Wall 14A, also, the output shaft 95,101 of the 1st reductor 94 and the respective hollow-core construction of the 2nd reductor 102 will be shorter The supporting of drive shaft 104 is to rotate integrally.

As a result, the 1st reductor 94 and the 2nd reductor 102 constitute the linkage H2 of lid (revolving body) 16.The structure In, the Bearning mechanism (ginseng of the output shaft 95,101 of the hollow-core construction that the 1st reductor 94, the script of the 2nd reductor 102 are just possessed Examine Fig. 6) be used as the linkage H2 of drive shaft 104, can omit in implementation method above as being formed at supporting member 23 On the side of slewing equipment 12 drive shaft 104 linkage H1 such that it is able to make the correspondingly further cost degradation of lid 16.

Also, Figure 11 (A), (B) show the variation of Figure 10.In this example embodiment, it is assembled with partly leading for the slewing equipment 12 Body manufacture device (master device) 14 is general to be provided with the chamber 14B for carrying out vacuum drawn on the top for being close to lid 16, it is contemplated that Detest the situation of deformation.That is, via the support foot 162 of the L-shaped being fixed on pedestal 160, the 1st reductor 94 and the 2nd is subtracted Fast machine 102 is individually fixed in semiconductor- fabricating device 14, wherein, the pedestal 160 is linked to and is assembled with being somebody's turn to do for the slewing equipment 12 High base portion (specific part) 14C of the intensity of semiconductor- fabricating device 14.By by the 1st reductor 94 and the 2nd reductor 102 are fixed on support foot 162, and itself consolidating when constituting linkage H2 is formed in the 1st reductor 94 and the 2nd reductor 102 Determine portion.

When the 1st reductor 94 and the 2nd reductor 102 constitute linkage H2, the 1st reductor 94 and the 2nd is fixed with The periphery of reductor 102 easily deforms because of the deadweight of lid 16 and the reaction force of rotational torque, but by the structure, The deadweight of lid 16 and the reaction force of rotational torque will not be applied on the chamber 14B for detesting deformation, therefore, it is possible to by the chamber The deformation of room 14B suppresses in Min..

In addition, in the implementation method of " differential " for carrying out above-mentioned drive system, the 1st drive system, the 2nd drive system Use and be in addition to the number of teeth mutually isostructural drive system.However, the 1st drive system now, the 2nd drive system need not It must be identical structure.For example, when the side for being more conducive to drive has been determined with the side for being more conducive to braking etc., by Bevel gear set constitutes a part for the drive system of the side for being more conducive to drive, by hypoid gear group or gear on worm group Composition is more conducive to a part for the drive system of the side of braking, thus, it is possible to be maintained overall drive efficiency higher The design of brake force when entering regenerative braking state is further improved simultaneously.

In addition, in the above-described embodiment, (changed including the implementation method of type of drive including relying on angle of revolution, ) use " induction motor " as the 1st motor, the 2nd motor, thus effectively " occurred using what the induction motor had Torque different characteristic according to slippage (rotating speed) ", " being absorbed by the characteristic of load-side forcibly change speed by sliding " Deng, be particularly useful to low cost construct completely without control system slewing equipment.But, the involved in the present invention the 1st Motor, the 2nd motor not necessarily require it is " induction motor ".Also, the 1st motor of the invention, the 2nd motor are also not necessarily to There is motor to absorb the motor of the function of slip in itself for Seeking Truth.For example, this point is slided on absorbing, as long as in drive system It is situated between and fills the mechanism that such as fluid connector and powder clutch allow to slide, then (even if motor does not slide absorption in itself Function) it is not a problem, 2 speed differences of drive system can be absorbed.Even if also, any in the 1st motor, the 2nd motor One motor is not induction motor (even being impermissible for the motor for sliding), as long as another is induction motor, then can be abundant Absorb the 1st drive system, the speed difference of the 2nd drive system.As long as also, making any one or two drive systems possess certain " control system ", even if then both sides are not induction motor (such as magnet motor), also, has specially drive system The mechanism of slip can be absorbed, the action effect required by the present invention can be also realized.That is, the present invention and be not prohibited by the 1st horse Secondarily (including the 1st motor, the 2nd motor are situation of induction motor) carries out any control up in, the driving of the 2nd motor.

Industrial applicability

The present invention can be used in the driving of the slewing equipment for making heavy revolving body be turned round more than plumb position.

In Japanese publication 2012-061238, Japanese Shen filed in 16 days March in 2012 filed in 16 days March in 2012 All the elements that please be disclosed in the specification of number 2012-061239, accompanying drawing and claims are by reference to being applied at the explanation In book.

Symbol description

12- slewing equipments, 14- semiconductor- fabricating devices, 16- lids, 22- drive shafts, the motors of 24- the 1st, the conelets of 26- the 1st Gear, the motors of 28- the 2nd, the bevel pinions of 30- the 2nd, 32- shares bevel gear, the drive systems of 34- the 1st, the drive systems of 36- the 2nd, 38- prime reducing gears, 40- intermediate reduction gears mechanism, the final reducing gears of 42-.

Claims

1. a kind of slewing equipment of heavy revolving body, its to make heavy revolving body exceed the slewing equipment that plumb position is turned round, Characterized in that, possessing：

1st motor and the 1st reductor, the 1st reductor are driven by the 1st motor；

2nd motor and the 2nd reductor, the 2nd reductor are driven by the 2nd motor；

1st reductor and the 2nd reductor possess output shaft and support the Bearning mechanism of the output shaft；

The output shaft of the 1st reductor and the output shaft of the 2nd reductor are linked on the gyroaxis of the revolving body；And And,

The slewing equipment possesses controlling organization, and the controlling organization is switched over to the 1st driving operation and the 2nd driving operation, In 1st driving operation, using the 1st motor and the 2nd motor, the gyroaxis is driven from the revolution starting point of the revolving body Move to specific angle of revolution, the 2nd drive operation in, after as the specific angle of revolution, by the 1st motor, At least one of 2nd motor changes into another type of drive to drive the gyroaxis；

The Bearning mechanism of the Bearning mechanism of the 1st reductor and the 2nd reductor is used as the hinge of the gyroaxis Mechanism, the 1st reductor and the 2nd reductor constitute the linkage of the revolving body in itself.

2. a kind of slewing equipment of heavy revolving body, its to make heavy revolving body exceed the slewing equipment that plumb position is turned round, Characterized in that, possessing：

1st motor and the 1st reductor, the 1st reductor are driven by the 1st motor；

2nd motor and the 2nd reductor, the 2nd reductor are driven by the 2nd motor；

The output shaft of the 1st reductor and the output shaft of the 2nd reductor are linked on the gyroaxis of the revolving body；

The speed reducing ratio of the 1st reductor is different with the speed reducing ratio of the 2nd reductor,

3. a kind of slewing equipment of heavy revolving body, its to make heavy revolving body exceed the slewing equipment that plumb position is turned round, Characterized in that, possessing：

1st motor and the 1st reductor, the 1st reductor are driven by the 1st motor；

2nd motor and the 2nd reductor, the 2nd reductor are driven by the 2nd motor；

The capacity of the 1st motor is different from the capacity of the 2nd motor；

4. the slewing equipment of heavy revolving body according to any one of claim 1 to 3, it is characterised in that

1st motor, the 2nd motor are induction motor.

5. the slewing equipment of heavy revolving body according to any one of claim 1 to 3, it is characterised in that

1st reductor and the 2nd reductor are individually fixed in master device via support foot, are consequently formed the hinge of the revolving body The fixed part of chain mechanism, the support foot is linked to the specific part of the master device for being assembled with the slewing equipment.