JPWO2013136842A1 - Method and apparatus for driving heavy swirling body - Google Patents

Abstract

In the driving method of the swivel device 12 for turning the heavy swivel body beyond the vertical position in order to eliminate the problem that the heavy swivel body is displaced during turning due to the reversal of the backlash at low cost, A first motor 24, a first drive system 34 driven by the first motor 24, a second motor 28, a second drive system 36 driven by the second motor 28, and a first drive system 34; A common bevel gear 32 to which the power of the second drive system 36 is transmitted at the same time, and the first motor 24 and the second motor 28 of the turning body from the turning start point of the turning device 12 to a specific turning angle θ1. A first driving step for driving the turning shaft 22 and a second driving method for driving the turning shaft 22 by changing at least one of the first and second motors 24 and 28 to another driving mode after a specific turning angle θ1. And a driving process.

Description

  The present invention relates to a driving method and a turning device for a heavy-weight turning body.

  Patent Document 1 discloses a turning device that opens and closes by turning a test head (lid body) of a probe device that measures the electrical characteristics of an object to be inspected such as a semiconductor device around a support shaft. The test head of this probe device has been increasing in size year by year, and in recent years, a test head of several tons class is being designed.

  The test head is driven by a gear motor in which a motor and a speed reducer are integrated. Normally, this type of test head is configured to start turning from 0 degrees (horizontal state) and to turn to a state where the head is opened approximately 180 degrees.

JP 2006-98388 A

  When turning (opening and closing) such a heavy test head beyond the vertical position, the backlash of the drive system is reversed by the weight of the test head at a position past the vertical position, and the huge test head There was a problem that a phenomenon of misalignment occurred with a shocking sound called “Gotton”.

  Patent Document 1 proposes to adopt a worm speed reduction mechanism with a relatively small backlash for such a problem, but the fact is that the backlash cannot be completely eliminated. .

  The present invention has been made in order to solve such a conventional problem, and solves a problem that a heavy swivel body is displaced during turning due to reversal of a backlash of a drive system at a low cost. That is the issue.

  The present invention is a driving method of a turning device for turning a heavy turning body beyond a vertical position, a first motor, a first drive system driven by the first motor, a second motor, And a second drive system driven by the second motor, and a power transmission member for transmitting the power of the first drive system and the second drive system at the same time, specified from the starting point of the turning of the turning device A first driving step of driving the turning shaft of the turning body by the first motor and the second motor up to a turning angle, and at least one of the first and second motors after the specific turning angle is driven separately The above-mentioned problem is solved by adopting a configuration including a second driving step of driving the swivel shaft in place of the aspect.

  In the above-described configuration of the present invention, the “vertical position” is not the direction of the start or end surface of the turning of the turning body, or the direction perpendicular to the floor surface on which the turning device is installed, but the center of the earth, It means the position where the axis of the turning shaft of the turning body and the center of gravity of the turning body are aligned. In other words, the straight line connecting the center of gravity of the revolving structure and the axis of the revolving axis of the revolving structure is perpendicular to the ground (the surface of the earth).

  In the present invention, a first drive system and a second drive system, which are separately driven by first and second motors, respectively, are prepared for turning a heavy turn body, and the first drive system and the second drive system are prepared. Are simultaneously transmitted to a (common) power transmission member. Then, from the starting point of the turning of the turning body to a specific turning angle, both the first motor and the second motor are driven to drive the turning body (first driving step). After the specific turning angle, at least one of the first and second motors is driven in another driving mode (second driving step).

  As a result, when the driving of the revolving structure is started, that is, when a large drive torque is required, the first motor and the second motor can jointly drive the revolving structure. Also, in the vicinity where backlash inversion occurs, a large driving torque is not required for driving the revolving structure. Therefore, by changing the driving mode of the first motor and the second motor, the first driving system and the second driving system can be changed. A state in which there is no backlash can be formed in the driving of the revolving structure, and it is possible to prevent the occurrence of misalignment due to reversal of the backlash.

  When the present invention pays attention to the viewpoint of “a swiveling device for a heavy swivel”, “a swiveling device for swiveling a heavy swivel beyond a vertical position, the first motor, And a first drive system driven by the first motor, a second motor, a second drive system driven by the second motor, power of the first drive system, and power of the second drive system. A power transmission member that is transmitted at the same time, and the first motor and the second motor drive the swing axis of the swing body from the starting point of the swing of the swing body to a specific swing angle. And a second driving step of switching at least one of the first and second motors to a different driving mode and driving the turning shaft after the specific turning angle. Swivel with heavy weight . It can also be regarded as ".

  In addition, the present invention provides a “swivel device for swiveling a heavy swivel body beyond a vertical position, a first motor, a first drive system driven by the first motor, a second motor, And a second drive system driven by the second motor, and a power transmission member for transmitting the power of the first drive system and the second drive system at the same time, and a reduction ratio of the first drive system, It can also be understood as a heavy swivel turning device characterized in that the speed reduction ratio of the second drive system is different.

  Furthermore, the present invention is a turning device for turning a heavy turn body over a vertical position, the first motor, a first drive system driven by the first motor, a second motor, and A second drive system driven by the second motor; and a power transmission member that transmits power of the first drive system and the second drive system simultaneously, the first motor of the first drive system And a capacity of the second motor of the second drive system are different from each other. Can also be understood.

  ADVANTAGE OF THE INVENTION According to this invention, the malfunction which a misalignment in which a heavy turning body turns during rotation by reverse of the backlash of a drive system can be eliminated at low cost.

Sectional drawing of the principal part of the turning apparatus of the heavy turning body which concerns on an example of embodiment of this invention The principal part enlarged view of the said embodiment The schematic perspective view which shows the whole turning apparatus which concerns on the said embodiment The graph which shows the relationship between the turning angle of the cover body of the turning apparatus which concerns on the said embodiment, and a drive control aspect. The principal part top view of the turning apparatus which concerns on an example of other embodiment of this invention. Sectional view along line VI-VI in FIG. The principal part perspective view of the turning apparatus which concerns on an example of further another embodiment of this invention. The schematic perspective view which shows the whole turning apparatus which concerns on embodiment of FIG. (A) Schematic perspective view of a turning device according to an example of still another embodiment of the present invention, and (B) Schematic front view. (A) Schematic perspective view of a turning device according to an example of still another embodiment of the present invention, and (B) Schematic front view. (A) Schematic perspective view of a turning device according to an example of still another embodiment of the present invention, and (B) Schematic front view.

  Hereinafter, an example of an embodiment of the present invention will be described in detail based on the drawings.

  1 is a cross-sectional view of a main part of a swiveling device for a heavy-weight revolving body according to an example of an embodiment of the present invention, FIG. 2 is an enlarged view of a main part of FIG. 1, and FIG. is there.

  With reference to FIG. 3, this turning device 12 is for opening and closing (turning) a lid (heavy turning body) 16 of a semiconductor manufacturing apparatus (parent device) 14. In the semiconductor manufacturing apparatus 14, it is necessary to periodically open and close the heavy lid 16 with respect to the upper surface 14A of the apparatus upper surface 14A (beyond the vertical position) for taking in and out the product and cleaning in the manufacturing process. is there.

  The large lid 16 reaches several tons and is very heavy. The lid body 16 is mainly composed of a frame 18 and a lid body 20 attached to the frame 18. The frame 18 includes two arm members 18A and 18B that are attached to a drive shaft (swivel axis) 22 in a cantilever state, and a connecting member 18C that connects the distal ends of the arm members 18A and 18B. . The drive shaft 22 is rotatably supported by the hinge mechanism H1 of the support member 23. The lid body 20 is fixed to the connecting member 18C and extends substantially in parallel with the two arm members 18A and 18B.

  When the frame 18 is almost horizontal, the upper surface 14A of the semiconductor manufacturing apparatus 14 is closed, and the drive shaft 22 is rotated so that the entire lid 16 is opened. That is, the lid body 16 is in a fully open state (horizontal position: opening degree 180 degrees) from a fully closed state (horizontal position: opening degree 0 degrees) to an almost upright half-open state (vertical position: opening degree 90 degrees). It can be opened to the position. In addition, when closing the cover body 16, the same locus | trajectory can be traced reversely from the position of 180 degree | times by rotating the drive shaft 22 reversely, and this cover body 16 can be closed. In the present embodiment, the semiconductor manufacturing apparatus 14 is installed so that the opening degree of 90 degrees is a vertical position.

  Referring to FIGS. 1 and 2, the turning device 12 includes a first motor 24, a first bevel pinion (first gear) 26 of a first drive system 34 driven by the first motor 24, The second bevel pinion (second gear) 30 of the second motor 28 and the second drive system 36 driven by the second motor 28, the first bevel pinion 26 and the second bevel pinion 30 are transmitted with power simultaneously. 1. A single common bevel gear (power transmission member) 32 also serving as a second drive system is provided.

  The first motor 24 that drives the first drive system 34 and the second motor 28 that drives the second drive system 36 can be driven separately by an independent power supply drive system. Since the first drive system 34 and the second drive system 36 are exactly the same in structure, the following description will be made with a focus on the first drive system 34.

  The first drive system 34 includes the first motor 24, a front speed reduction mechanism 38, an intermediate speed reduction mechanism 40, and a final speed reduction mechanism 42.

  The first motor 24 is a three-phase induction motor. In this embodiment, the first motor 24 is not provided with a so-called inverter control mechanism. For the sake of safety, a brake mechanism (not shown) is attached to the opposite side of the first motor 24, but no particular brake mechanism is required to implement this embodiment.

  Both the pre-stage reduction mechanism 38 and the intermediate reduction mechanism 40 are constituted by an eccentric rocking type planetary gear mechanism. The two speed reduction mechanisms 38 and 40 have the same structure except that their capacities (sizes) are different. Here, for convenience, the two speed reduction mechanisms 38 and 40 are attached to the intermediate speed reduction mechanism 40 with reference to FIG. The configuration of the two speed reduction mechanisms 38 and 40 will be described using reference numerals.

  An oscillating body 48 is connected to the input shaft 44 of the intermediate speed reduction mechanism 40 (connected to an output shaft (not shown) of the front stage speed reduction mechanism 38) via a key 46. The oscillating body 48 is provided with two eccentric bodies 50 with a phase difference of 180 degrees. An external gear 54 is assembled on the outer periphery of each eccentric body 50 via a roller bearing 52. The external gear 54 is in mesh with the internal gear 56. In this embodiment, the internal gear 56 is an internal gear main body 56A integrated with the casing 58, a support pin 56B supported by the internal gear main body 56A, and a support pin 56B that is rotatably assembled to the internal gear 56A. It is comprised by the outer roller 56C etc. which comprise the internal tooth of the internal gear 56. The number of internal teeth of the internal gear 56 (the number of external rollers 56C) is slightly larger (only 1 in this example) than the number of external teeth of the external gear 54.

  An inner roller hole 60 is formed in the external gear 54, and an inner pin 64 covered with an inner roller 62 is loosely fitted in the inner roller hole 60. The inner pin 64 is press-fitted into a flange portion 66 </ b> A that is a part of the output shaft 66 of the intermediate reduction mechanism 40.

  The output shaft 66 of the intermediate speed reduction mechanism 40 is a hollow shaft having a hollow portion 66B, and the input shaft 68 of the final speed reduction mechanism 42 is inserted into the hollow portion 66B.

  The output shaft 66 of the intermediate speed reduction mechanism 40 and the input shaft 68 of the final speed reduction mechanism 42 are connected in the circumferential direction via a spline 70. Note that the input shaft 68 of the final reduction mechanism 42 has a stepped portion 68A. The step portion 68 </ b> A is in contact with the end portion of the output shaft 66 of the intermediate reduction mechanism 40. Further, a connecting block 72 that is restrained from moving toward the load side is in contact with the stepped portion 66C of the output shaft 66, and the input shaft 68 is pulled toward the anti-load side by a bolt 74 via the connecting block 72. It has been. As a result, the input shaft 68 of the final reduction mechanism 42 is connected to the output shaft 66 of the intermediate reduction mechanism 40 so as not to move on either side in the axial direction.

  The output shaft 66 of the intermediate reduction mechanism 40 and the input shaft 68 of the final reduction mechanism 42 are supported on the casing 58 by a pair of tapered roller bearings 76 and 78.

  The first bevel pinion (first gear of the first drive system) 26 is directly cut and formed at the tip of the input shaft 68 of the final reduction mechanism 42.

  Returning to FIG. 1, the second drive system 36 also includes a second motor 28, a pre-stage reduction mechanism 80, an intermediate reduction mechanism 82, and a final reduction mechanism 84. The specific configuration is the same as that of the first drive system 34. The final reduction mechanism 84 of the second drive system 36 has a second bevel pinion 30 (second gear of the second drive system) corresponding to the first bevel pinion 26 of the first drive system 34.

  The first bevel pinion 26 and the second bevel pinion 30 are simultaneously meshed with the common bevel gear 32, respectively. That is, the common bevel gear 32 serves as a part of the first drive system 34 and the second drive system 36. In the present embodiment, “a power transmission member for transmitting the power of the first gear and the second gear simultaneously”. Is equivalent to. The common bevel gear 32 is connected to the drive shaft 22 of the turning device 12 through a key 86.

  Next, a method of driving the turning device 12 will be described while explaining the operation of the turning device 12.

  When a motor shaft (not shown) of the first motor 24 rotates, an input shaft (not shown) of the pre-stage reduction mechanism 38 rotates. As described above, the structure of the front speed reduction mechanism 38 is the same as the structure of the intermediate speed reduction mechanism 40, and the operation of the speed reduction mechanisms 38 and 40 is also the same. The operation of the two speed reduction mechanisms 38 and 40 will be described.

  When the input shaft 44 rotates, the rocking body 48 rotates integrally. When the oscillating body 48 rotates, the two eccentric bodies 50 rotate eccentrically with a phase difference of 180 degrees, and the two external gears 54 oscillate with a phase difference of 180 degrees via the roller bearings 52, respectively. Each external gear 54 is in mesh with the internal gear 56. For this reason, every time the external gear 54 swings once, the phase in the circumferential direction is shifted (rotates) by one tooth with respect to the internal gear 56. This rotation component is transmitted to the flange portion 66A of the output shaft 66 through the inner roller 62 and the inner pin 64. Thereby, the reduction of the reduction ratio of 1 / (the number of teeth of the external gear) can be realized. The swing component of the external gear 54 is absorbed by loose fitting of the inner roller 62 and the inner roller hole 60.

  Since the front speed reduction mechanism 38 and the intermediate speed reduction mechanism 40 are arranged in series in this order, the front speed reduction mechanism 38 and the intermediate speed reduction mechanism 40 eventually rotate the first motor 24 at 1 / {(external teeth). The number of teeth of the gear 54) × the number of teeth of the external gear 54)} is reduced.

  When the output shaft 66 of the intermediate speed reduction mechanism 40 rotates, the input shaft 68 of the final speed reduction mechanism 42 rotates through the spline 70, and the first bevel pinion 26 provided on the input shaft 68 rotates. The rotational power of the first bevel pinion 26 is transmitted to the common bevel gear 32. At the time of this transmission, the first bevel pinion 26 and the common bevel gear 32 are engaged with each other, whereby the final reduction mechanism 42 is further decelerated according to the gear ratio between the two bevels 26 and 32, and eventually the common bevel gear 32 is included. The first drive system 34 decelerates the total reduction ratio of about 1/2000. In the present invention, the reduction ratio is not particularly limited.

  Further, the same deceleration operation as described above is also performed in the second drive system 36.

  In the present embodiment, after all, the turning drive is performed by the following drive method.

Hereinafter, it will be described in detail with reference to FIG.
<Area A: Up to a specific turning angle θ1>
When the lid 16 starts to be opened from the state in which the upper surface 14A of the semiconductor manufacturing apparatus 14 is closed, both the first motor 24 and the second motor 28 are required until the specific turning angle (opening angle from the starting point) θ is θ1. The power is turned on, and both the first drive system 34 and the second drive system 36 jointly drive the lid body 16 (first drive process). The angle “θ1” only needs to be larger than the angle at which the lid body 16 can be driven only by the first motor 24 (only one motor), and the weight of the lid body 16 and the torque of the first drive system 34 are taken into consideration. And set appropriately.

In the first driving process, the first bevel pinion 26 of the first drive system 34 and the second bevel pinion 30 of the second drive system 36 are both meshed with each other at the “open driving surface” of the common bevel gear 32. Here, the “driving surface when open” refers to “the tooth surface on the driving side that abuts when the first bevel pinion 26 or the second bevel pinion 30 drives the common bevel gear 32 when the lid 16 is opened”. ing. That is, until the specific turning angle θ1, the driving forces of the first and second motors 24 and 28 are all utilized for opening the lid 16. Since the total reduction ratio is as large as 1/2000, the lid body 16 starts to turn slowly from the starting point (opening degree 0: horizontal fully closed state).
<Area B: Driving period after a specific turning angle θ1>
Eventually, when the turning angle of the lid body 16 reaches a specific turning angle θ1, in this embodiment, the worker is either the first motor 24 or the second motor 28 (here, the second motor 28). Is turned off (second driving step in which the driving mode is changed). Since the lid body 16 is a heavy rotating body and has a very large reduction ratio, the opening speed of the lid body 16 is slow. Therefore, it is ensured that the operator can manually perform the off operation at an appropriate time. Can be done.

  In the region B, the first motor 24 that is maintained in the power-on state continues to rotate, so that the lid body 16 itself is opened between the first bevel pinion 26 of the first drive system 34 and the common bevel gear 32. Continue to turn in a state where the engagement on the driving surface is maintained.

  On the other hand, since the power of the second motor 28 is turned off, the rotation speed of the second bevel pinion 30 of the second drive system 36 decreases, and the second motor 28 is driven to open with the common bevel gear 32 until a specific turning angle θ1. The second bevel pinion 30 (which meshed with the surface) meshes with the common bevel gear 32 at the “open braking surface”. Here, the “braking surface at the time of opening” means “a braking-side tooth surface (open) when the first bevel pinion 26 or the second bevel pinion 30 brakes the common bevel gear 32 when the lid 16 is opened. The tooth surface on the side opposite to the driving surface) ”. This means that the second drive system 36 is in a reverse drive state (braking state when viewed from the opening operation of the lid body 16) rotated by the rotation of the common bevel gear 32.

  This reverse driving torque (braking torque) corresponds to the rotational resistance when the second drive system 36 and the second motor 28 are driven from the output side (common bevel gear 32 side). In short, in the region B, the lid body 16 continues to turn in the opening direction by the driving force of the first motor 24 (greater than this braking force) while receiving the braking torque from the second bevel pinion 30 side. .

The first motor 24 continues to drive the lid 16 against the braking torque of the second drive system 36 only with its own driving force, but the weight of the lid 16 in this state is almost entirely. Since the torque that is supported by the drive shaft 22 and the first motor 24 requires to turn the lid body 16 is extremely low, the turning can be sufficiently maintained even with only one drive.
<Region C: Backlash inversion period>
Eventually, the turning angle of the lid body 16 exceeds 90 degrees (vertical position), and in the conventional case, the turning angle at which the positional displacement of the lid body 16 has occurred due to the reverse of the backlash (referred to as the backlash inversion angle for convenience). It reaches. At this time, the lid body 16 tries to turn at a speed faster than the turning speed by the rotation of the first motor 24 due to its own weight. Conventionally, the so-called backlash reversal at this time has caused the lid 16 to be displaced with a loud sound.

  However, in this embodiment, at this time, the second bevel pinion 30 of the second drive system 36 already meshes with the open braking surface side of the common bevel gear 32 and continues to apply braking torque to the common bevel gear 32. Yes. In addition, the turning angle θ is in the vicinity of the backlash reversal angle, and the force to increase the opening speed due to the dead weight of the lid body 16 is still weak. Therefore, it is possible to effectively avoid the phenomenon in which the lid body 16 is displaced.

When the influence of the weight of the lid body 16 gradually increases, the first bevel pinion 26 of the first drive system 34 shifts to meshing on the brake surface side when the common bevel gear 32 is opened. When the first bevel pinion 26 is engaged with the open braking surface side of the common bevel gear 32, the regenerative braking force of the first drive system 34 and the braking force due to the rotational resistance of the second drive system 36 are then used (more The turning is continued while supporting the lid 16 (which is to be opened quickly). This is the second driving process in this embodiment. This series of operations is performed automatically only when the operator turns off the power of the second motor 24 at a specific turning angle θ1.
<Area D: Second Specific Turning Angle θ2 and Later>
When both the first bevel pinion 26 of the first drive system 34 and the second bevel pinion 30 of the second drive system 36 are engaged with each other on the open braking surface side of the common bevel gear 32 (the lid 16 is in the second state). The operator turns on the power of the second motor 28 again (a third driving step different from the second driving step). The angle “θ2” may be larger than the vertical position (90 degrees) and smaller than the angle at which the lid body 16 cannot be regeneratively braked with only the first motor 24 (only one motor). The weight is appropriately set in consideration of the weight of the lid 16 and the regenerative braking force of the first drive system 34.

  After entering the third drive step, thereafter, both the first and second drive systems 34 and 36 are in a regenerative braking state, and the turning is continued while suppressing an increase in the speed of the lid 16 in the opening direction. Become. In the case of this embodiment, the third driving process different from the second driving process is substantially the same as the first driving process. Thereby, from the start to the end of the opening operation of the lid body 16, there is no positional shift due to the reversal of the backlash of the lid body 16, and it is possible to perform the driving in which the turning speed is hardly changed.

  When the lid 16 is closed from 180 degrees to 0 degrees, the opening operation and the rotation directions of the first and second motors are opposite to those described above, and exactly the same operation is obtained. .

  According to the present embodiment, it is possible to easily prevent the displacement of the lid body 16 due to the reversal of the backlash simply by operating the power sources of the first motor 24 and the second motor 28 independently (by an operator). .

  In the present embodiment, the power of the first bevel pinion (first gear) 26 of the first drive system 34 and the power of the second bevel pinion (second gear) 30 of the second drive system 36 are the same. Since it is configured to be transmitted to a common bevel gear 32 that is one power transmission member, and this common bevel gear 32 is a gear of the final reduction mechanisms (final stages) 42 and 84 of the drive systems 34 and 36, By eliminating the backlash at this portion, the positional deviation phenomenon of the lid body 16 can be solved very effectively.

  In addition, the first and second motors 24 and 28 employed are general induction motors and do not require complicated control, so that the cost is low. In particular, at the start of turning requiring driving torque (or near the end of turning), the driving force (or regenerative braking force) of the two systems can be utilized, so the capacity of one motor is conventionally It can be done with almost half of it. Therefore, the entire apparatus can be reduced in size and handled easily. In the present embodiment, since the final reduction mechanisms 42 and 84 are orthogonal reduction mechanisms, the distance L1 from which the first and second drive systems 34 and 36 protrude from the semiconductor manufacturing apparatus 14 can be minimized. However, the overall size of the semiconductor manufacturing apparatus 14 can be reduced.

  Further, the effect that the complicated control is not required is not only in terms of cost, but the turning device 12 of the lid body 16 of the semiconductor manufacturing apparatus 14 generates electrical noise emitted from the turning control system. Since it is extremely disliked, it is also effective in the sense of “reducing electrical noise”.

  In the above-described embodiment, the second driving process different from the first driving process is realized by the method of turning off the power supply of the second motor 28. In the present invention, this second driving process is performed. In addition to this, various control methods (modification examples) are conceivable for the driving process.

  First, in the above-described embodiment, the operator himself turns off the power of the second motor 28 “manually” in the middle of turning, but is automatically turned off by switching by the control means. You may make it do. For this purpose, a means for detecting or confirming the turning angle of the lid body 16 at that time (which may be substituted by counting the elapsed time from the start of turning) is used. A first driving step of driving the drive shaft (swing axis) 22 of the lid body 16 with the first motor 24 and the second motor 28 from the turning start point (turning angle 0 degree) of the body 16 to a specific turning angle θ1; A second driving step of driving at least one of the first and second motors 24 and 28 (for example, the second motor 28) in another driving mode (for example, a control mode for turning off) after the specific turning angle θ1; The control device may be provided in the turning device 12.

  Further, for example, when either the first or second motor has an inverter control mechanism, the second driving process has the motor having the inverter control mechanism. It is good also as a process which switches so that it may decelerate relatively with respect to the motor which is not. As a result, the torque that can be applied to the braking surface at the time of opening in the drive system that has been decelerated is more positively adjusted by the “degree of deceleration” while obtaining basically the same operation as in the previous embodiment. be able to.

  In addition, when any of the motors has an inverter control mechanism, the second driving step is performed with respect to the motor that does not have the motor having the inverter control mechanism. It is good also as the process of switching so that it may be "accelerated" relatively. Even in this case, as a result, basically the same action as in the previous embodiment is obtained, but the braking speed at the time of opening in the drive system that is relatively slowed by the “degree of acceleration” is applied. The obtained torque can be adjusted indirectly. Further, in the method of increasing the rotational speed of one of the motors relative to the other, “when the first and second motors are not heavily loaded (region B), the cover body speed is positively increased. A new effect of “accelerate” is obtained. Thereby, it becomes possible to further shorten the time until the lid is fully opened to 180 degrees.

  Of course, one motor may be decelerated and the other motor may be increased. The number of motors is not limited to two. If there are three or more, it is possible to alleviate sudden changes in driving force and braking force by turning off the power in order.

  In addition, when one motor has an inverter control mechanism, a method of limiting the generated torque by applying a current limit to the one motor may be used. As a result, the load on the motor that has not been subjected to torque limitation inevitably increases, slipping increases, and the rotational speed decreases. On the other hand, the motor with the torque limit applied can maintain fast rotation with a small amount of slip (because the load is light), resulting in common use of the first and second bevel pinions of the common bevel gear. The bevel gear can be engaged with both the opening driving surface and the opening braking surface.

  If attention is paid to the action of “decelerating one motor” (if it does not necessarily have an inverter control mechanism, it only has a brake mechanism such as an electromagnetic brake or a friction brake instead). The same effect can be obtained by applying braking only to one motor provided with the brake mechanism. Further, it is possible to positively adjust the torque that can be applied to the open braking surface in the drive system that has been decelerated, depending on the “degree of braking”. That is, in the present invention, “changing the driving mode of the motor” includes not only changing the mode of controlling the motor itself, but also changing the driving mode of the motor by controlling a device attached to the motor. .

  By the way, in the said embodiment, the 1st bevel pinion 26 of the 1st drive system 34 and the 2nd bevel pinion 30 of the 2nd drive system 36 are single (it serves as the 1st, 2nd drive systems 34 and 36). The common bevel gear (power transmission member) 32 is meshed simultaneously. However, the present invention can be realized without necessarily having such a configuration.

  Specific examples of this configuration are shown in FIGS.

  In this embodiment, a first reduction gear 94 having a first bevel pinion (not shown) and a first bevel gear 92 meshing with the first bevel pinion at the final stage of the first motor 88 and the first drive system 90; A second reduction gear 102 having a second bevel pinion (not shown) and a second bevel gear 100 meshing with the second bevel pinion is provided at the final stage of the second motor 96 and the second drive system 98.

  The output shaft (output member) 95 to which the first stage bevel gear 92 of the first reduction gear 94 is fixed and the output shaft (output member) to which the second stage bevel gear 100 of the second reduction gear 102 is fixed. 101 is connected to a drive shaft (swivel axis) 104 which is a single driven member (power transmission member) via keys 106 and 108.

  In this embodiment, the first bevel pinion and the first bevel gear 92 of the first drive system 90 and the second bevel pinion and the second bevel gear 100 of the second drive system 98 are in the open-time drive surface and open-time. Each has its own braking surface.

  However, even in such a configuration, for example, in the second driving step, on the side where the motor (the first motor 88 or the second motor 96) whose driving mode is changed so as to reduce the speed is attached. In the drive system, the bevel pinion and the bevel gear of the drive system come into contact with each other on the braking surface side when the bevel gear is open. Further, in the drive system in which the control change that changes the speed is not particularly performed, the contact on the open drive surface is maintained as it is. This is equivalent to the contact state of the first bevel pinion 26 or the second bevel pinion 30 with respect to the common bevel gear 32 of the first drive system 34 and the second drive system 36 in the above embodiment, and is a drive shaft which is a driven member. This is also equivalent to the action on 22. Therefore, the basic action similar to the above configuration can be obtained also by this configuration.

  Furthermore, in the structure which concerns on this embodiment, the 1st, 2nd reduction gears 94 and 102 itself can use a normal (independent stand-alone) reduction gear. Therefore, there is a great advantage that a general-purpose speed reducer that can be used for other purposes can be used. More specifically, for example, when a bevel pinion and a bevel gear are generally manufactured, both are manufactured in “pairs”. That is, in the finishing process, a so-called familiar operation is performed in an environment where fine abrasive grains are present, and an operation for adjusting the contact between the two is performed. In the previous embodiment, since two bevel pinions mesh with one bevel gear, it may be difficult to actually perform this adjustment operation. However, in this embodiment, since a general-purpose speed reducer in which the tooth contact of two sets of bevel pinions and bevel gears is separately adjusted can be used, the drive system can be easily manufactured. Therefore, it is considered that this configuration is often more advantageous than the previous embodiment in terms of cost or delivery.

  7 and 8 show an example of still another embodiment.

  In the previous embodiment, the orthogonal speed reduction mechanism is adopted as the final stage speed reduction mechanism, but in this embodiment, the parallel shaft speed reduction mechanism 110 is adopted as the final speed stage. The first drive system 114 is driven by the first motor 111, and the second drive system 118 is driven by the second motor 113. The first spar pinion 116 at the last stage of the first drive system 114 and the second spar pinion 120 at the last stage of the second drive system 118 correspond to the first and second gears, respectively. The spar gear 122 in which the two spar pinions 120 are engaged at the same time corresponds to the power transmission member.

  In this embodiment, since the parallel axis reduction mechanism 110 is employed, manufacturing at a lower cost than in the previous embodiment can be realized. Also, the meshing between the two first and second spur pinions 116 and 120 and the one spur gear 122 does not require as severe a tooth contact adjustment as the orthogonal system as in the previous embodiment. Lower cost production is possible.

  In the above-described embodiment, the same motors (configuration and capacity) are used for the first and second motors and the first and second drive systems. However, according to the present invention, the first and second motors or the first and second drive systems do not necessarily have the same configuration or capacity. In particular, if the motor capacity is different, the slip characteristics of both motors differ when the load changes depending on the driving force or turning angle, so the effect on speed changes and the braking characteristics during regenerative braking also differ. Come. In other words, this means that there is a higher possibility that a characteristic that matches the individual circumstances of each swivel device can be obtained, and the degree of freedom in design is expanded. . In addition, a more preferable operation and effect may be obtained by making the configuration of each drive system different. For example, the last stage on the side that is always driven is configured with a bevel gear set, and the drive system on the side that turns off the power is configured with a hypoid gear set or a worm gear set, thereby increasing the driving efficiency on the constantly driven side. It is possible to design to further increase the reverse driving resistance (braking force) generated on the side where the power is turned off while maintaining.

  In the above embodiment, the operator manually switches the driving process at the specific turning angles θ1 and θ2 with the intention of reducing the generation of electrical noise and reducing the cost. Needless to say, the control means may be configured so that not only the angle θ1 but also the driving process at θ2 is switched, the turning device itself has this switching function.

  Moreover, in the said embodiment, the example in which a 1st, 2nd drive system was comprised in the gear reduction mechanism in which backlash exists inevitably exists was shown. However, even if, for example, the drive system of the revolving structure is composed of a drive mechanism that does not have backlash itself, such as drive by a traction roller or drive by a pulley, The present invention can also be applied effectively when there are keys, splines, and the like, and there is a risk of backlash occurring in this portion.

  Moreover, in the said embodiment, although the example to which a turning body turns 180 degree | times from horizontal to horizontal was shown, as long as it is turning over a vertical position, the specific angle of turning is not ask | required.

  Here, in the embodiments so far, the configuration of “control is made so as to drive in a different driving manner after a specific turning angle” has been adopted. That is, one drive system is configured to function as “braking” relatively to the other drive system depending on the turning angle.

  However, the present invention does not change the drive mode at a specific turning angle, for example, by automatically performing “differentiation” appropriate for the configuration of the first drive system and the configuration of the second drive system. It can also be configured such that similar switching is performed.

  Hereinafter, an example of an embodiment of a type that “differentiates” the configuration of the first drive system and the configuration of the second drive system will be described in detail.

  In this type of embodiment, for example, first, a first drive system driven by a first motor and a second drive system driven by a second motor are prepared, and the power of the first drive system and the second drive system is prepared. Are transmitted to the (common) power transmission member at the same time. At that time, the first drive system and the second drive system are differentiated. As a first example of differentiation, a configuration in which the reduction ratio of the first drive system is different from the reduction ratio of the second drive system is conceivable. As another example of the differentiation, a configuration in which the capacity of the first motor of the first drive system is different from the capacity of the second motor of the second drive system can be considered.

  Due to these differentiations, it is possible to prevent the displacement of the revolving body due to the reversal of the backlash of the drive system.

  Hereinafter, a more specific description will be given from an example in which the speed reduction ratio is differentiated.

  Also in this embodiment, as the basic hardware configuration, for example, the configuration already described (the configuration shown in FIGS. 1 to 3) can be used. However, in this embodiment, the reduction gear ratio G2 of the second drive system 36 is slightly larger (for example, by 1 to 2) than the reduction gear ratio G1 of the first drive system 34 (for example, by 1 to 2). (Or less), it is set to be slightly larger (reduction ratio G1 <reduction ratio G2). Specifically, the reduction ratio of the reduction ratio G2 of the second drive system 36 may be changed by changing the number of gear teeth in any part of the second drive system 36. The extent to which the reduction ratio G2 of the entire second drive system 36 is changed by changing the number of teeth of a specific gear of the second drive system 36 varies depending on the type of gear and the number of teeth of the part to be changed. For this reason, in consideration of the entire “speed difference” to be generated between the first and second drive systems 34 and 36, the number of gear teeth of an appropriate portion may be slightly changed. The degree of change depends on the intended design method, as will be described later.

  Even if the reduction ratio G1 of the first drive system 34 and the reduction ratio G2 of the second drive system 36 are different, the common bevel gear 32 and the drive shaft 22 that rotates integrally with the common bevel gear 32 are (because they are rigid bodies). ) Rotates at a specific rotation speed. This rotational speed depends on various factors such as the ratio of the reduction ratios G1 and G2, the turning load actually applied to the lid 16, the slip ratio-torque characteristics with respect to the synchronous rotational speeds of the first and second induction motors 24 and 28, etc. It depends on you. Since the turning load changes in real time according to the turning angle θ from the start of turning, the slip of the first and second induction motors 24 and 28 also changes in real time, and therefore the actual rotation speed of the lid 16 also changes in real time.

  However, since both the first drive system 34 and the second drive system 36 drive the drive shaft 22 in the same direction (opening direction of the lid body 16), the rotation of the lid body 16 is stagnated or returned. There is no.

  Two typical design examples when the reduction ratios G1 and G2 of the first and second drive systems 34 and 36 are different are shown below.

  In the first design example, the capacities of the first and second induction motors 24 and 28 are ensured to be large and the difference between the reduction ratios G1 and G2 is set to be relatively large so that the first and second induction motors 24 and 28 can be The two-bevel pinion 30 is always designed to mesh with the common bevel gear 32 at the “open braking surface”. The second design example uses the first and second induction motors 24 and 28 having relatively small capacities and sets the difference between the reduction ratios G1 and G2 to be relatively small, thereby starting the turning with a high turning load. In some cases, both the first and second bevel pinions 26, 30 are engaged with the “open driving surface” of the common bevel gear 32 to contribute to driving the lid body 16.

  As described above, the “driving driving surface” means “the tooth surface on the driving side that abuts when the first bevel pinion 26 or the second bevel pinion 30 drives the common bevel gear 32 when the lid 16 is opened. ". The “braking surface at the time of opening” means “the tooth surface on the braking side that abuts when the first bevel pinion 26 or the second bevel pinion 30 brakes the common bevel gear 32 when the lid 16 is opened (when the lid 16 is opened). The tooth surface opposite to the drive surface) ”. In both the first and second design examples, the specific values of the reduction ratios G1 and G2 are not particularly limited as long as they are appropriately set so as to realize an intended operation.

  The first design example will be described.

  In the first design example, the capacities of the first and second induction motors 24 and 28 are ensured to be large and the difference between the reduction ratios G1 and G2 can be set so that the lid 16 can be driven even with a relatively small slip rate. It is set relatively large. Thus, the first bevel pinion (first gear) 26 of the first drive system 34 is always meshed with the common bevel gear (power transmission member) 32 on the open drive surface, and the second bevel of the second drive system 36 is engaged. The pinion (second gear) 30 can always be meshed with the common bevel gear 32 by the “open braking surface”.

  More specifically, when the capacities of the first and second induction motors 24 and 28 are large, the lid body 16 is driven at a relatively small slip rate (rotational speed close to the synchronous rotational speed). For this reason, the difference in rotational speed between the first and second drive systems 34 and 36 caused by the difference between the reduction ratios G1 and G2 becomes larger than the slip ratio, and the first bevel pinion 26 is driven with the common bevel gear 32 and the open time. The second bevel pinion 30 meshes with the common bevel gear 32 at the open braking surface. The speed difference from the lid 16 is absorbed by the slip of the first and second induction motors 24 and 28.

  This meshing mode does not change even when the lid 16 approaches the vertical position. Therefore, even if the turning proceeds to a position beyond the vertical position where the backlash is reversed in the conventional case, the second bevel pinion 30 of the second drive system 36 is always regeneratively controlled with respect to the common bevel gear 32. The power is continuously applied, and the phenomenon that the lid 16 is displaced can be effectively avoided.

  When the lid body 16 exceeds the vertical position, the weight of the lid body 16 works in a direction to increase the turning speed, but the second bevel pinion 30 of the second drive system 36 is braked when the common bevel gear 32 is opened. The lid 16 continues the opening operation slowly without running out of control because it keeps meshing with the surface and continues to give a strong regenerative braking force.

  The meshing state of the first bevel pinion 26 at this time (engagement at the opening driving surface or meshing at the opening braking surface) depends on the strength of the regenerative braking force on the second drive system 36 side and the lid body 16. It depends on the strength of the turning load (minus load) at that time. In the first design example, since the capacities of the first and second induction motors 28 are large, it is considered that the first induction motor 24 often meshes with the driving surface when the common bevel gear 32 is opened (with a light load). It is done. The speed difference is absorbed by slippage in the first induction motor 24. If the regenerative braking force of the second induction motor 28 does not provide sufficient regenerative braking, and the actual rotational speed is considerably higher than the synchronous rotational speed of the second induction motor 28, the first induction motor 24 is also open. The engagement is made on the braking surface side, and the lid 16 is supported by the regenerative braking force of both the first and second induction motors 24 and 28.

  In any case, when the lid 16 is opened, only the first and second induction motors 24 and 28 are turned on, and no special control is performed. There can be no swivel drive.

  Next, a second design example when the reduction ratios G1 and G2 of the first and second drive systems 34 and 36 are made different will be described. In this second design example, the first and second induction motors 24 and 28 having relatively small capacities are used, and the “property that increases the slip ratio when a load is applied” of the induction motor is positively utilized. It is.

  That is, in the second design example, at the start of turning with a high turning load, both the first and second bevel pinions 26 and 30 mesh with each other on the open drive surface of the common bevel gear 32, and the second is near the vertical position. The second bevel pinion 30 of the drive system 36 meshes with the open braking surface side, and thereafter both the first and second bevel pinions 26 and 30 mesh with the open brake surface of the common bevel gear 32.

  More specifically, when the capacities (basic generated torques) of the first and second induction motors 24 and 28 are not so large, the first bevel pinion 26 of the first drive system 34 in which the rotation speed is set high. Meshes with the open driving surface on the side of the common bevel gear 32 and slides greatly by receiving a large turning load when the turning angle θ is small. If the slippage of the second drive system 36 decreases below the rotational speed of the second bevel pinion 30 due to this slipping, both the first bevel pinion 26 and the second bevel pinion 30 will eventually slip and cause a common bevel gear. 32 is engaged with the driving surface at the time of opening.

  The slip of the second induction motor 28 is smaller than the slip of the first induction motor 24 because the reduction ratio of the second drive system 36 is large. However, since the second drive system 36 has a larger reduction ratio than the first drive system 34 (even if the slip of the second induction motor 28 is small and the generated torque is small), the second bevel pinion 30 changes to the common bevel gear 32. The transmitted torque is not small as it is. Eventually, the first and second induction motors 24 and 28 have the slip rate (or the rotational speed of the lid 16) so that the loads on the first bevel pinion 26 and the second bevel pinion 30 are almost the same. The second drive systems 34 and 36 are balanced, and both the drive systems 34 and 36 jointly contribute to driving the lid body 16.

  However, as the turning angle θ of the cover body 16 approaches the vicinity of the vertical position, the turning load decreases rapidly, so that the first induction motor 24 slips slightly (similar to the first design example above). In this state, the second bevel pinion 30 is engaged with the braking surface at the time of opening, and applies a regenerative braking force to the common bevel gear 32. When the turning angle θ exceeds the vertical position and approaches full opening, the first bevel pinion 26 also meshes with the open braking surface, and the first and second induction motors jointly regenerate braking force. Is formed.

  In the second design example, motors with small capacities can be used as the first and second induction motors 24 and 28, and a swiveling device that is small in size and low in cost and easy to handle can be obtained.

  Next, a design example (third design example) in which the first drive system and the second drive system are differentiated by the difference in capacity between the first and second induction motors 24 and 28 (basic magnitude of generated torque). Will be described.

  Now, for example, it is assumed that a motor with a large capacity that can basically drive the lid 16 with only one motor and a motor with a smaller capacity are prepared (the reduction ratio is the same or different. It is assumed that they are the same for ease of understanding.

  If the second induction motor 28 is an induction motor having a larger capacity than the first induction motor 24, then the second induction motor 28 having a larger capacity has the same torque as the first induction motor 24 having a smaller capacity. Small slip when handling (can rotate at high rotation speed).

  When driving of the lid body 16 is started by turning on the power of the first and second induction motors 24 and 28, the second induction motor 28 having a large capacity is swung while the lid body 16 is swung. The load 16 is received, and the lid body 16 is driven at a rotational speed that is slower by the amount of slip (smaller) than the synchronous rotational speed. That is, the lid body 16 basically turns at a rotational speed defined by the sliding of the second induction motor 28.

  At this time, the first induction motor having a small capacity is in a situation where the rotation speed must be slower in order to output the same torque. However, the common bevel gear 32 is actually rotating at a higher rotational speed. The first induction motor 24 cannot output a torque that rotates the common bevel gear 32 faster at this rotational speed (slip rate). On the other hand, the side of the common bevel gear 32 is rotated with a large rotational torque that can drive the first bevel pinion 26 (by driving by the second drive system 36). Accordingly, the first bevel pinion 26 eventually meshes with the open braking surface of the common bevel gear 32, and rather receives rotational torque from the common bevel gear 32 side. This means that the lid body 16 rotates in a resistance state (a state in which regenerative braking is generated) with respect to the opening operation of the lid body 16.

  Even if the turning load approaches the vertical position and the turning load changes (becomes lighter), the situation in which the first bevel pinion 26 meshes on the open braking surface side does not change as long as the turning load is positive. If the lid turns to a position where the backlash would reverse if it exceeded the vertical position in the past, there would have been a position shift for the backlash that would otherwise exist on the rear side in the direction of travel. In the embodiment, when the turning load is reversed, the first bevel pinion is already meshed with the open braking surface side of the common bevel gear 32 (no backlash), so that the regenerative braking can be immediately increased. Therefore, even if two motors having different capacities are used as described above, the occurrence of positional deviation can be avoided by regenerative braking on the first drive system 34 side. Note that when the influence of the weight of the lid body 16 increases beyond the vertical position, regenerative braking is applied to both the first induction motor 24 and the second induction motor 28.

  As described above, in any of the differentiation of the difference in the reduction ratio and the differentiation of the motor capacity, it is not necessary to perform electrical control at all in the first to third design examples. That is, the first and second induction motors 24 and 28 are turned on at the start of the turning of the lid 16 and turned off at the end of the turning from the start to the end of the opening operation of the lid 16. There is no position shift due to the reversal of the backlash, and it is possible to perform a turn that can sufficiently control the lid body 16.

  When closing the lid 16, the opening operation and the rotation directions of the first and second induction motors 24 and 28 are reversed, and the turning start position and the turning end position are opposite to each other. Similar effects can be obtained.

  In the present embodiment, the power of the first bevel pinion (first gear) 26 of the first drive system 34 and the power of the second bevel pinion (second gear) 30 of the second drive system 36 are the same. It is configured to be transmitted to a common bevel gear (single gear) 32 that is one power transmission member, and this common bevel gear 32 is used as a final reduction mechanism (final stage) 42, 84 of each drive system 34, 36. Therefore, the positional deviation phenomenon of the lid body 16 can be solved very effectively by eliminating the backlash at this portion.

  In the present embodiment, since the final reduction mechanisms 42 and 84 are orthogonal reduction mechanisms, the distance L1 from which the first and second drive systems 34 and 36 protrude from the semiconductor manufacturing apparatus 14 can be minimized. In this respect as well, the overall size of the semiconductor manufacturing apparatus 14 can be reduced.

  Furthermore, the employed first and second induction motors 24 and 28 are general induction motors and do not require any control for turning, so that the cost is low. The effect of not requiring this special control is not only in terms of cost, but also the turning device 12 of the lid 16 of the semiconductor manufacturing apparatus 14 generates electrical noise emitted from the turning control system. Since it is extremely disliked, it is also effective in the sense of “reducing electrical noise”.

  In the above description, only two examples of design examples with different reduction ratios and one example of design examples with different motor capacities are listed. However, the present invention is not limited to these design examples. is not. In particular, in the differentiation by the motor capacity, the turning load of the lid body 16 changes from a “large positive” value to a “small positive”, “0”, “negative” value, The degree of slippage (rotational speed) of the induction motor depends on this turning load, and the degree of dependence (slip-load characteristics) varies depending on the motor capacity. Specifically, various other designs can be considered as the design for generating the speed difference in the system.

  Furthermore, in the present invention, differentiation by speed ratio and differentiation by motor capacity may be combined. In this case, the degree of freedom of design is greatly expanded, and there is no waste (a small capacity induction motor can be used). In addition, braking can be applied more reliably near the vertical position.

  In the present invention, the number of induction motors (the number of drive systems) is not limited to two (two systems). For example, when three induction motors are provided, each bevel pinion may be simultaneously meshed with one common bevel gear. In this case, all drive systems may be differentiated in terms of reduction ratio or capacity, and there may be groups that are not particularly differentiated. Alternatively, the “one pair of induction motors” may be differentiated by reduction ratio, and the “one pair of induction motors” may be differentiated by capacity. As a result, not only can the revolving body be controlled more finely, but also the capacity of the induction motor can be further reduced.

  Even when differentiating with such a reduction ratio and motor capacity, a configuration in which two reduction gears as described with reference to FIGS. 5 and 6 are connected to a common drive shaft (swivel axis). Alternatively, a configuration using a parallel axis reduction mechanism in the final stage as described with reference to FIGS. 7 and 8 can be similarly employed.

  Furthermore, including the case where the embodiment which concerns on the control depending on the previous turning angle is employ | adopted, a structure as shown in FIGS. 9-11 is also employable.

  In the example shown in FIGS. 9A and 9B, the basic configuration is the same as the configuration described in FIGS. In addition, the same code | symbol is used for the part substantially the same as previous embodiment, and duplication description is abbreviate | omitted. Specifically, a first reduction gear 94 having a first drive system 90 and a second reduction gear 102 having a second drive system 98 are provided, and an output shaft (hollow structure) of the first reduction gear 94 (output) Member) 95 and the output shaft (output member) 101 of the second speed reducer 102 are based on a configuration in which the drive shaft (turning shaft) 104 (corresponding to 22) is connected.

  Here, the lid 16 of the semiconductor manufacturing apparatus (parent apparatus) 14 in which the turning device 12 is incorporated is self-supporting via a support member 23 constructed on the installation surface F. The support member 23 has a hinge mechanism H1. Specifically, the drive shaft 104 is inserted into a through hole provided in the support member 23, and the drive shaft 104 is rotatably supported by sliding contact with the support member 23 or via a bearing. In the embodiment of FIG. 9, the first speed reducer 94 and the second speed reducer 102 are assembled to both ends of the drive shaft 104, and drive force (or braking force) for turning is applied to both sides of the drive shaft 104. From. In other words, the drive shaft 104 is driven or braked from both sides with the arm members 18A and 18B of the frame 18 of the lid 16 interposed therebetween. For this reason, the drive shaft 104 is not strongly twisted from one end side (as in the examples of FIGS. 5 and 6), and therefore the lid body 16 is not tilted with the turning, and mechanically. Smooth turning is possible.

  The examples shown in FIGS. 10A and 10B are also based on the configuration described with reference to FIGS. 5 and 6, that is, the configuration in which two speed reducers are connected to a common drive shaft (swivel axis) 104. It is said. However, in this embodiment, the first reduction gear 94 and the second reduction gear 102 themselves are fixed to the wall surface 14A of the semiconductor manufacturing apparatus (parent device) 14 in which the turning device is incorporated via the plate 152, and The output shafts 95 and 101 of the hollow structures of the first reduction gear 94 and the second reduction gear 102 support the short drive shaft 104 so as to be integrally rotatable.

  As a result, the first reduction gear 94 and the second reduction gear 102 constitute a hinge mechanism H <b> 2 of the lid body (swivel body) 16. In this configuration, the bearing mechanism (see FIG. 6) of the output shafts 95 and 101 of the hollow structure, in which the first and second speed reducers 94 and 102 originally have the lid body 16, is used as the hinge mechanism H2 of the drive shaft 104. Since the hinge mechanism H1 of the drive shaft 104 on the swivel device 12 side as used in the support member 23 in the previous embodiment can be omitted, the cost can be further reduced.

  FIGS. 11A and 11B show a modification of FIG. In this example, it is considered that the semiconductor manufacturing apparatus (parent device) 14 in which the swivel device 12 is incorporated is generally provided with a chamber 14B for evacuating the upper portion near the lid body 16 and dislikes deformation. ing. That is, the first reduction gear 94 and the second reduction gear 102 are fixed on a base 160 connected to a base portion (specific portion) 14C having higher strength of the semiconductor manufacturing apparatus 14 in which the turning device 12 is incorporated. Each is fixed to the semiconductor manufacturing apparatus 14 via an L-shaped support leg 162. By fixing the first reduction gear 94 and the second reduction gear 102 to the support leg 162, a fixing portion is formed when the first reduction gear 94 and the second reduction gear 102 themselves constitute the hinge mechanism H2. .

  When the first speed reducer 94 and the second speed reducer 102 constitute the hinge mechanism H2, the periphery where the first speed reducer 94 and the second speed reducer 102 are fixed is opposite to the weight of the lid 16 and the turning torque. Although it is easily deformed by force, this configuration prevents the chamber 14B from being deformed from being subjected to the weight of the lid 16 or the reaction force of the turning torque, so that the deformation of the chamber 14B can be minimized. it can.

  In the embodiment in which “differentiation” of the drive system is performed, the first and second drive systems have the same configuration except for the number of teeth. However, the first and second drive systems in this case do not necessarily have the same configuration. For example, in the case where the side that contributes by driving and the side that contributes by braking are determined, a part of the driving system that contributes by driving is configured with a bevel gear set, and the side of the driving system that contributes by braking is By constituting a part with a hypoid gear set or a worm gear set, it is possible to design to further increase the braking force when entering the regenerative braking state while maintaining high overall driving efficiency.

  Furthermore, in the above-described embodiment, the “induction motor” is used as the first and second motors (both including the embodiment in which the driving mode is changed depending on the turning angle). Effective use of “characteristics that generate torque varies depending on slippage (rotation speed)” and “characteristics that absorb forced speed change from the load side by slipping”, etc., especially turning without any control system It contributed to constructing the device at low cost. However, the first and second motors according to the present invention do not necessarily have to be “induction motors”. Further, the first and second motors of the present invention do not necessarily have to have a function of absorbing slippage. For example, regarding the point of absorbing slip, there is no problem if a mechanism that allows slip such as a fluid coupling or a powder clutch is interposed in the drive system (even if the motor itself does not have a slip absorbing function). It is possible to absorb the speed difference between the two drive trains. Moreover, even if one of the first and second motors is not an induction motor (even if it is a motor that does not allow slipping), if the other is an induction motor, the speed difference between the first and second drive systems is sufficiently large. Absorbable. Also, if either or both drive systems have some kind of “control system”, both of them are not induction motors (such as magnet motors), and the drive systems are slippery. Even if it does not particularly have an absorbable mechanism, it is possible to achieve the intended effects of the present invention. In other words, the present invention does not prohibit the auxiliary driving of the first and second motors (including the case where the first and second motors are induction motors).

  INDUSTRIAL APPLICABILITY The present invention can be used for driving a turning device that turns a heavy turning body beyond a vertical position.

  Disclosure in the specification, drawings, and claims of Japan Application No. 2012-061238 filed on March 16, 2012 and Japan Application No. 2012-061239 filed on March 16, 2012 is as follows: The entirety of which is incorporated herein by reference.

DESCRIPTION OF SYMBOLS 12 ... Turning apparatus 14 ... Semiconductor manufacturing apparatus 16 ... Cover body 22 ... Drive shaft 24 ... 1st motor 26 ... 1st bevel pinion 28 ... 2nd motor 30 ... 2nd bevel pinion 32 ... Common bevel gear 34 ... 1st drive system 36 ... Second drive system 38 ... Pre-stage reduction mechanism 40 ... Intermediate reduction mechanism 42 ... Final reduction mechanism

Claims (14)

A method for driving a swiveling device that swivels a heavy swiveling body beyond a vertical position,
A first motor and a first drive system driven by the first motor;
A second motor and a second drive system driven by the second motor;
A power transmission member for simultaneously transmitting the power of the first drive system and the second drive system;
A first driving step of driving a turning shaft of the turning body with the first motor and the second motor from a turning start point of the turning device to a specific turning angle;
And a second driving step of driving the turning shaft by changing at least one of the first and second motors to a different driving mode after the specific turning angle. Method for driving the swivel device. In claim 1,
The second driving step is a driving step that can give a relative speed difference between the first motor and the second motor. A method for driving a swiveling device for a heavy swiveling body. In claim 2,
The second driving step is a driving step in which only one of the motors is turned off. In claims 1 to 3, further
After the second specific turning angle that is different from the specific turning angle is reached, the third and the second motors are driven in a driving manner different from the driving manner of the second driving step. A driving method for a swiveling device for a heavy swiveling body, comprising a driving step. A swiveling device that swivels a heavy swivel body beyond a vertical position,
A first motor and a first drive system driven by the first motor;
A second motor and a second drive system driven by the second motor;
A power transmission member for transmitting the power of the first drive system and the power of the second drive system at the same time, and the first motor and the second motor from the turning point of the turning body to a specific turning angle. A first driving step of driving the turning shaft of the turning body with a motor, and a first driving step of driving the turning shaft by changing at least one of the first and second motors to another driving mode after the specific turning angle. A control device for switching between the two driving processes is provided. A swivel device that swivels a heavy swivel body over a vertical position,
A first motor and a first drive system driven by the first motor;
A second motor and a second drive system driven by the second motor;
A power transmission member for simultaneously transmitting the power of the first drive system and the second drive system;
A heavy-duty swivel turning device, wherein the reduction ratio of the first drive system and the reduction ratio of the second drive system are different. A swivel device that swivels a heavy swivel body over a vertical position,
A first motor and a first drive system driven by the first motor;
A second motor and a second drive system driven by the second motor;
A power transmission member for simultaneously transmitting the power of the first drive system and the second drive system;
A heavy-weight swivel turning device, wherein a capacity of the first motor of the first drive system is different from a capacity of the second motor of the second drive system. In any one of Claims 5-7,
The first and second motors are induction motors. In any one of Claims 5-8,
As the power transmission member, there is provided a swiveling device for a heavy swirling body comprising a single gear in which the first gear of the first drive system and the second gear of the second drive system are meshed simultaneously. . In claim 9,
The single gear is a final stage gear. In any one of Claims 5-8,
An output member of the first drive system and an output member of the second drive system are connected to the turning shaft. In claim 11,
A first reducer having the first drive system and a second reducer having the second drive system;
The output member of the first reducer and the output member of the second reducer are connected to the turning shaft, and the first reducer and the second reducer themselves constitute a hinge mechanism of the turning body. A swiveling device for a heavy swiveling body. In claim 12,
The first speed reducer and the second speed reducer are respectively fixed to the parent device via support legs connected to specific portions of the parent device in which the turning device is incorporated, thereby fixing the hinge mechanism. A swiveling device for a heavy swirling body, characterized in that a portion is formed. In claim 7,
Furthermore, the heavy-duty swiveling device characterized in that the reduction ratio of the first drive system and the reduction ratio of the second drive system are different.

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