CN104254910A - Drive method and turning device for heavy turning body - Google Patents

Drive method and turning device for heavy turning body Download PDF

Info

Publication number
CN104254910A
CN104254910A CN201380004871.4A CN201380004871A CN104254910A CN 104254910 A CN104254910 A CN 104254910A CN 201380004871 A CN201380004871 A CN 201380004871A CN 104254910 A CN104254910 A CN 104254910A
Authority
CN
China
Prior art keywords
motor
drive system
drive
slewing equipment
revolving body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201380004871.4A
Other languages
Chinese (zh)
Other versions
CN104254910B (en
Inventor
芳贺卓
田村光扩
山下英隆
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Heavy Industries Ltd
Original Assignee
Sumitomo Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Heavy Industries Ltd filed Critical Sumitomo Heavy Industries Ltd
Publication of CN104254910A publication Critical patent/CN104254910A/en
Application granted granted Critical
Publication of CN104254910B publication Critical patent/CN104254910B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H57/00—General details of gearing
    • F16H57/12—Arrangements for adjusting or for taking-up backlash not provided for elsewhere
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H37/00—Combinations of mechanical gearings, not provided for in groups F16H1/00 - F16H35/00
    • F16H37/02—Combinations of mechanical gearings, not provided for in groups F16H1/00 - F16H35/00 comprising essentially only toothed or friction gearings
    • F16H37/06—Combinations of mechanical gearings, not provided for in groups F16H1/00 - F16H35/00 comprising essentially only toothed or friction gearings with a plurality of driving or driven shafts; with arrangements for dividing torque between two or more intermediate shafts
    • F16H37/065—Combinations of mechanical gearings, not provided for in groups F16H1/00 - F16H35/00 comprising essentially only toothed or friction gearings with a plurality of driving or driven shafts; with arrangements for dividing torque between two or more intermediate shafts with a plurality of driving or driven shafts
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H57/00—General details of gearing
    • F16H57/12—Arrangements for adjusting or for taking-up backlash not provided for elsewhere
    • F16H2057/121—Arrangements for adjusting or for taking-up backlash not provided for elsewhere using parallel torque paths and means to twist the two path against each other
    • F16H2057/122—Arrangements for adjusting or for taking-up backlash not provided for elsewhere using parallel torque paths and means to twist the two path against each other by using two independent drive sources, e.g. electric motors

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Gear Transmission (AREA)
  • Connection Of Motors, Electrical Generators, Mechanical Devices, And The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

In order to solve, at low cost, the problem that a heavy turning body causes a positional displacement during turning due to the reversal of a backlash, a drive method for a turning device (12) for turning a heavy turning body beyond a vertical position comprises: a first drive step in which a first motor (24), a first drive system (34) which is driven by the first motor (24), a second motor (28), a second drive system (36) which is driven by the second motor (28), and a common bevel gear (32) to which the powers of the first drive system (34) and the second drive system (36) are simultaneously transmitted are provided, and a turning shaft (22) of the turning body is driven by the first motor (24) and the second motor (28) from the starting point of the turning of the turning device (12) to a specified turning angle (theta1); and a second drive step in which from the specified angle (theta1), the first and/or the second motor (24, 28) is changed to a different drive form to drive the turning shaft (22).

Description

The driving method of heavy revolving body and slewing equipment
Technical field
The present invention relates to a kind of driving method and slewing equipment of heavy revolving body.
Background technology
Disclose a kind of by making mensuration such as the measuring head (lid) of the probe unit of the electric characteristics of the subject of semiconductor device and so on carry out the slewing equipment of opening and closing around bolster revolution in patent documentation 1.The measuring head of this probe unit maximizes year by year, also constantly designs the measuring head of several tonnes in recent years.
The gear motor that measuring head becomes to be integrated by motor and reductor drives.Usually, this kind of measuring head is configured to from 0 degree (level), start revolution, and returns back to the state opening roughly 180 degree.
Conventional art document
Patent documentation
Patent documentation 1: Japanese Unexamined Patent Publication 2006-98388 publication
Summary of the invention
The technical task that invention will solve
When turning round (opening and closing) when making this heavy test heads exceed plumb position, there are the following problems: exceeding the position of vertical upright state, the sideshake of drive system reverses because of the deadweight of measuring head, there will be huge measuring head send " bang " enormous impact sound and the phenomenon of position deviation.
In patent documentation 1, for this problem, propose the technology of the less worm gear reducer mechanism of employing sideshake, in addition, be in fact difficult to eliminate sideshake completely.
The present invention completes to solve this problem in the past, and its problem is to eliminate with low cost heavy revolving body to cause position deviation in revolution unfavorable condition because of the reversion of the sideshake of drive system.
For the means of technical solution problem
The present invention solves above-mentioned problem by being set to following structure, that is, heavy revolving body is made to exceed a driving method for plumb position and pivotal slewing equipment, wherein, described slewing equipment possesses: the 1st motor and the 1st drive system, and the 1st drive system is driven by the 1st motor; 2nd motor and the 2nd drive system, the 2nd drive system is driven by the 2nd motor; And power transmission member, the power of described 1st drive system and described 2nd drive system is delivered to this power transmission member simultaneously, described driving method comprises: the 1st drives operation, utilize described 1st motor and the 2nd motor, the gyroaxis of this revolving body is urged to specific angle of revolution from the revolution starting point of this slewing equipment; And the 2nd drives operation, after becoming described specific angle of revolution, at least one of described 1st, the 2nd motor is changed into another type of drive to drive described gyroaxis.
In said structure of the present invention, " plumb position " refers to the center of gravity arrangement position in a straight line of the center of the earth, the axle center of the gyroaxis of revolving body and revolving body, instead of refers to revolution starting point face and the terminal face or the bottom surface arranging slewing equipment relative to revolving body and vertical direction.Can also in other words, be link the center of gravity of the revolving body position vertical with ground (earth surface) with the straight line in the axle center of the gyroaxis of revolving body.
In the present invention, when making heavy revolving body turn round, prepare respectively to carry out separately the 1st drive system that drives and the 2nd drive system by the 1st motor, the 2nd motor, the power of the 1st drive system and the 2nd drive system is passed to (sharing) power transmission member simultaneously.And, in the revolution starting point of revolving body in the scope of specific angle of revolution, the 1st motor and the 2nd motor are driven simultaneously and drives revolving body (the 1st drive operation).After becoming specific angle of revolution, drive at least one (the 2nd drives operation) of the 1st motor, the 2nd motor with another type of drive.
Its result, when the driving of revolving body starts, when namely needing larger driving torque, the 1st motor and the 2nd motor can drive revolving body jointly.And, near the reversion of generation sideshake, because the driving of revolving body does not need larger driving torque, therefore the type of drive of change the 1st motor and the 2nd motor is passed through, the state of driving without sideshake of revolving body can be formed in the 1st drive system and the 2nd drive system, thus can prevent because of the reversion of sideshake that occurrence positions departs from.
In addition, when the present invention is conceived to " slewing equipment of heavy revolving body " this viewpoint, can also be interpreted as " a kind of slewing equipment of heavy revolving body, it exceedes plumb position and pivotal slewing equipment for making heavy revolving body, it is characterized in that, possess: the 1st motor and the 1st drive system, the 1st drive system is driven by the 1st motor, 2nd motor and the 2nd drive system, the 2nd drive system is driven by the 2nd motor, and power transmission member, the power of described 1st drive system and described 2nd drive system is delivered to this power transmission member simultaneously, and possess controlling organization, this controlling organization drives operation and the 2nd to drive operation to switch to the 1st, drive in operation the 1st, utilize described 1st motor and the 2nd motor, the gyroaxis of this revolving body is urged to specific angle of revolution from the revolution starting point of described revolving body, drive in operation the 2nd, after becoming described specific angle of revolution, by described 1st motor, at least one of 2nd motor changes into another type of drive to drive described gyroaxis.”。
And, the present invention can also be interpreted as " a kind of slewing equipment of heavy revolving body, it exceedes plumb position and pivotal slewing equipment for making heavy revolving body, and it is characterized in that; possess: the 1st motor and the 1st drive system, the 1st drive system is driven by the 1st motor; 2nd motor and the 2nd drive system, the 2nd drive system is driven by the 2nd motor; And power transmission member, the power of described 1st drive system and described 2nd drive system is delivered to this power transmission member simultaneously, and the speed reducing ratio of described 1st drive system is different from the speed reducing ratio of described 2nd drive system.”。
In addition, the present invention can also be interpreted as a kind of slewing equipment of heavy revolving body, and it exceedes plumb position and pivotal slewing equipment for making heavy revolving body, it is characterized in that, possess: the 1st motor and the 1st drive system, the 1st drive system is driven by the 1st motor; 2nd motor and the 2nd drive system, the 2nd drive system is driven by the 2nd motor; And power transmission member, the power of described 1st drive system and described 2nd drive system is delivered to this power transmission member simultaneously, and the capacity of described 1st motor of described 1st drive system is different from the capacity of described 2nd motor of described 2nd drive system.”。
Invention effect
According to the present invention, can eliminate with low cost heavy revolving body to cause position deviation in revolution unfavorable condition because of the reversion of the sideshake of drive system.
Accompanying drawing explanation
Fig. 1 is the major part cutaway view of the slewing equipment of heavy revolving body involved by an example of embodiments of the present invention.
Fig. 2 is the major part enlarged drawing of above-mentioned execution mode.
Fig. 3 is the summary stereogram of the entirety of the slewing equipment represented involved by above-mentioned execution mode.
Fig. 4 is the chart of the angle of revolution of the lid of the slewing equipment represented involved by above-mentioned execution mode and the relation of drived control mode.
Fig. 5 is the major part vertical view of the slewing equipment involved by an example of another embodiment of the present invention.
Fig. 6 be along Fig. 5 to the cutaway view looking VI-VI line.
Fig. 7 is the major part stereogram of the slewing equipment involved by an example of another embodiment of the invention.
Fig. 8 is the summary stereogram of the entirety of the slewing equipment involved by execution mode representing Fig. 7.
In Fig. 9, (A) is the summary stereogram of the slewing equipment involved by an example of another embodiment of the invention, and (B) is summary front view.
In Figure 10, (A) is the summary stereogram of the slewing equipment involved by an example of another embodiment of the invention, and (B) is summary front view.
In Figure 11, (A) is the summary stereogram of the slewing equipment involved by an example of another embodiment of the invention, and (B) is summary front view.
Embodiment
Below, with reference to the accompanying drawings an example of embodiments of the present invention is described in detail.
Fig. 1 is the major part cutaway view of the slewing equipment of heavy revolving body involved by an example of embodiments of the present invention, and Fig. 2 is the major part enlarged drawing of Fig. 1, and Fig. 3 is the summary stereogram representing its entirety.
With reference to figure 3, this slewing equipment 12 is for the lid (heavy revolving body) 16 of opening and closing (revolution) semiconductor-fabricating device (main device) 14.In semiconductor-fabricating device 14, in order to regularly pick and place product and clean in its manufacturing process, need relative to the heavy lid 16 of device upper surface 14A (exceeding plumb position) 180 degree of opening and closings.
Lid 16 reaches several tons time larger, and weight is very large.Lid 16 is formed primarily of framework 18 and the lid main body 20 being installed on this framework 18.Framework 18 is made up of the connecting member 18C of 2 arms parts 18A, the 18B be installed on cantilever position on driving shaft (gyroaxis) 22 and the leading section that links this arm member 18A, 18B.In addition, driving shaft 22 is rotatably freely supported on the linkage H1 of support unit 23.Described lid main body 20 is fixed on this connecting member 18C, and extends substantially in parallel relative to 2 arms parts 18A, 18B.
Slewing equipment 12 is configured to, and when framework 18 is approximate horizontal, just closes the upper surface 14A of semiconductor-fabricating device 14, opens whole lid 16 by the rotation of driving shaft 22.That is, lid 16 can exceed roughly upright half-open position (plumb position: aperture 90 degree) from full-shut position (horizontal level: aperture 0 degree), opens to the position of full-gear (horizontal level: aperture 180 degree).In addition, when closing lid 16, can be closed to making this lid 16 along identical track by the inverse position of reverse rotation driving shaft 22 from aperture 180 degree.In the present embodiment, semiconductor-fabricating device 14 is arranged to aperture 90 degree becomes plumb position.
With reference to figure 1, Fig. 2, this slewing equipment 12 possesses: the 1st motor 24 and carried out the 1st bevel pinion (the 1st gear) the 26, the 2nd motor 28 of the 1st drive system 34 driven by the 1st motor 24 and carried out the 2nd bevel pinion (the 2nd gear) 30 of the 2nd drive system 36 driven by the 2nd motor 28 and transmit the single shared bevel gear (power transmission member) 32 of the 1st, the 2nd drive system dual-purpose of power of the 1st bevel pinion 26 and the 2nd bevel pinion 30 simultaneously.
Drive the 1st motor 24 of the 1st drive system 34 and drive the 2nd motor 28 of the 2nd drive system 36 can be driven individually by independently power drives system.1st drive system 34 is identical with the structure of the 2nd drive system 36, is conceived to the 1st drive system 34 and is described therefore.
1st drive system 34 possesses described 1st motor 24, prime reducing gear 38, intermediate reduction gear mechanism 40 and final reduction mechanism 42.
Described 1st motor 24 is 3 phase induction motors.In this embodiment, the 1st motor 24 does not arrange so-called inverter control mechanism.For safety, stopper mechanism (omitting diagram) is attached to the load reverse side of the 1st motor 24, but when implementing present embodiment, does not need stopper mechanism especially.
Prime reducing gear 38 and intermediate reduction gear mechanism 40 are formed by eccentric oscillating-type planetary gear mechanism.Two reducing gears 38,40 are that capacity (size) is different, and its structure is identical, therefore, at this conveniently, also utilizes the symbol be labeled in intermediate reduction gear mechanism 40, be described the structure of two reducing gears 38,40 with reference to figure 2.
On the power shaft 44 of (linking with the not shown output shaft of prime reducing gear 38) intermediate reduction gear mechanism 40, be linked with pendular body 48 via key 46.Pendular body 48 is provided with 2 eccentric bodies 50 with the phase difference of 180 degree each other.In the periphery of each eccentric body 50, be assembled with external gear 54 via roller bearing 52.External gear 54 and internal gear 56 internal messing.In this embodiment, internal gear 56 is assembled in this fulcrum post 56B and the outer roller 56C etc. forming the internal tooth of this internal gear 56 is formed by the internal gear main body 56A, the fulcrum post 56B being supported on this internal gear main body 56A that are integrated with 58 one-tenth, shell, rotatably.The internal tooth quantity (quantity of outer roller 56C) of internal gear 56 is a little more than the external tooth quantity (in this example embodiment many 1) of external gear 54.
External gear 54 is formed interior roller aperture 60, is fitted together in this interior roller aperture 60 intermediate gap and is arranged with domestic 64 of interior roller 62.The domestic 64 flange part 66A being pressed into a part for the output shaft 66 as this intermediate reduction gear mechanism 40.
The output shaft 66 of intermediate reduction gear mechanism 40 is set as the hollow shaft with hollow bulb 66B, is inserted with the power shaft 68 of whole level reducing gear 42 in this hollow bulb 66B.
The output shaft 66 of intermediate reduction gear mechanism 40 and the power shaft 68 of whole level reducing gear 42 link in a circumferential direction via spline 70.In addition, the power shaft 68 of whole level reducing gear 42 has end difference 68A.The end abutment of the output shaft 66 of this end difference 68A and intermediate reduction gear mechanism 40.Further, the mobile restricted connecting block 72 to load-side abuts with the end difference 66C of output shaft 66, and power shaft 68 is via this connecting block 72 and pull to load reverse side by bolt 74.Thus, the power shaft 68 of whole level reducing gear 42 connects to cannot move to any side of axis relative to the output shaft 66 of intermediate reduction gear mechanism 40.
In addition, the output shaft 66 of intermediate reduction gear mechanism 40 and the power shaft 68 of whole level reducing gear 42 are supported on shell 58 by a pair taper roll bearing 76,78.
Described 1st bevel pinion (the 1st gear of the 1st drive system) 26 is formed with in vertical cut mode in the front end of the power shaft 68 of whole level reducing gear 42.
Turn back to Fig. 1, the 2nd drive system 36 also possesses the 2nd motor 28, prime reducing gear 80, intermediate reduction gear mechanism 82 and whole level reducing gear 84.Concrete structure is identical with the 1st drive system 34.The whole level reducing gear 84 of the 2nd drive system 36 has 2nd bevel pinion 30 (2nd gear of 2nd drive system) corresponding with the 1st bevel pinion 26 of the 1st drive system 34.
1st bevel pinion 26 and the 2nd bevel pinion 30 engage with shared bevel gear 32 simultaneously.That is, this shared bevel gear 32 doubles as a part for the 1st drive system 34 and the 2nd drive system 36, is equivalent to " transmitting the power transmission member of the power of the 1st gear and the 2nd gear " in present embodiment simultaneously.Share bevel gear 32 to be linked on the described driving shaft 22 of slewing equipment 12 via key 86.
Then, the effect of this slewing equipment 12 is described, and the driving method of this slewing equipment 12 is described.
If the not shown motor drive shaft of the 1st motor 24 rotates, then the not shown power shaft of prime reducing gear 38 rotates.As mentioned above, the structure of prime reducing gear 38 is identical with the structure of intermediate reduction gear mechanism 40, and the effect of reducing gear 38,40 is also identical, therefore for simplicity, with reference to the symbol of intermediate reduction gear mechanism 40, is described the effect of two reducing gears 38,40.
If power shaft 44 rotates, then pendular body 48 together rotates.If pendular body 48 rotates, then 2 eccentric bodies 50 are with the phase difference eccentric rotary of 180 degree, and 2 external gears 54 swing with the phase difference of 180 degree respectively via roller bearing 52.Each external gear 54 and internal gear 56 internal messing.Therefore, external gear 54 often swings 1 time, offsets (rotation) 1 phase place of circumferencial direction of tooth amount relative to internal gear 56.This rotation composition is delivered to the flange part 66A of output shaft 66 via interior roller 62 and domestic 64.Thereby, it is possible to realize the deceleration of the speed reducing ratio of 1/ (number of teeth of external gear).In addition, the swing composition of external gear 54 is absorbed by the movable fit of interior roller 62 and interior roller aperture 60.
Prime reducing gear 38 and intermediate reduction gear mechanism 40 configured in series successively, therefore, the rotation of this prime reducing gear 38 and intermediate reduction gear mechanism 40 the 1st motor 24 is the most at last with the number of teeth of 1/{ (number of teeth of external gear 54) × external gear 54) } high speed reducing ratio slow down.
If the output shaft 66 of intermediate reduction gear mechanism 40 rotates, then the power shaft 68 of whole level reducing gear 42 rotates via spline 70, and the 1st bevel pinion 26 be arranged on this power shaft 68 rotates.The rotary power of the 1st bevel pinion 26 is delivered to shared bevel gear 32.When carrying out this transmission, by engaging of the 1st bevel pinion 26 and shared bevel gear 32, carry out further to both 26,32 the deceleration of the corresponding whole level reducing gear 42 of gear ratio, result, by comprising the 1st drive system 34 of shared bevel gear 32, carry out the deceleration of total reduction ratio about 1/2000.In addition, in the present invention, speed reducing ratio is not particularly limited.
Further, in the 2nd drive system 36, decelerating effect same as described above is also played.
In the present embodiment, carry out revolution by following driving method to drive.
Below, be described in detail with reference to figure 4 in the lump.
< region A: > before becoming specific angle of revolution θ 1
When opening lid 16 from the state of the upper surface 14A of closed semiconductor-fabricating device 14, before specific angle of revolution (open angle from starting point) θ becomes θ 1, the power supply of the 1st motor 24 and the 2nd motor 28 both sides is switched on, and the 1st drive system 34 and the 2nd drive system 36 both sides drive lid 16 (the 1st drives operation) jointly.In addition, this angle " θ 1 " is only greater than the angle only utilizing the 1st motor 24 (only 1 motor) can drive lid 16, can consider that the weight of lid 16 and the torque etc. of the 1st drive system 34 suitably set.
Drive in operation the 1st, the 1st bevel pinion 26 of the 1st drive system 34 and the 2nd bevel pinion 30 both sides of the 2nd drive system 36 all engage in " when opening the drive surface " of shared bevel gear 32.At this, " when opening drive surface " refers to " when opening lid 16, the 1st bevel pinion 26 or the 2nd bevel pinion 30 drive the flank of tooth of the driving side abutted when sharing bevel gear 32 ".That is, before becoming specific angle of revolution θ 1, the actuating force of the 1st motor 24, the 2nd motor 28 is all applied to opening in driving of lid 16.Because total reduction ratio is 1/2000, speed reducing ratio is comparatively large, and therefore lid 16 slowly turns round from starting point (aperture 0: the full-shut position of level).
< region B: become the driving phase > after specific angle of revolution θ 1
Soon, when the angle of revolution of lid 16 reaches specific angle of revolution θ 1, in this embodiment, now, operating personnel disconnects the power supply (the change type of drive the 2nd drives operation) of any one (in this case the 2nd motor 28) in the 1st motor 24 or the 2nd motor 28.Lid 16 is heavy revolving body, and speed reducing ratio is very large, and the speed therefore opening lid 16 is comparatively slow, therefore, by the manual operation of operating personnel, also reliably can carry out opening operation in suitable period.
In the B of region, the 1st motor 24 maintaining power on state continues to rotate, and therefore lid 16 itself continues to turn round with the state engaged in drive surface during the opening of the 1st bevel pinion 26 maintaining the 1st drive system 34 and shared bevel gear 32.
On the other hand, because the power supply of the 2nd motor 28 is disconnected, therefore the rotating speed of the 2nd bevel pinion 30 of the 2nd drive system 36 declines, (before becoming specific angle of revolution θ 1, always drive surface engaging when opening with shared bevel gear 32) the 2nd bevel pinion 30 engages on " when opening braking surface " with shared bevel gear 32.At this, " when opening braking surface " refers to " when opening lid 16, the flank of tooth (with the flank of tooth of drive surface opposition side when opening) of the brake side abutted when the 1st bevel pinion 26 or the braking of the 2nd bevel pinion 30 share bevel gear 32 ".This means that the 2nd drive system 36 becomes by the rotation of shared bevel gear 32 by the reverse drive state (from the opening operation of lid 16, being on-position) rotated.
Torque (brake torque) during this reverse drive is equivalent to the 2nd drive system 36 and the 2nd motor 28 and is output rotational resistance when side (sharing bevel gear 32 side) drives.Generally speaking, in the B of region, lid 16 is subject to the brake torque from the 2nd bevel pinion 30 side, continues revolution by the actuating force of (being greater than this braking force) the 1st motor 24 to opening direction simultaneously.
The brake torque of the 2nd drive system 36 resisted by 1st motor 24, actuating force by means of only self continues to drive lid 16, but the deadweight of lid 16 is almost all supported by driving shaft 22 in this condition, the torque that 1st motor 24 rotates needed for lid 16 is extremely low, and the driving therefore by means of only 1 motor also fully can maintain revolution.
< region C: sideshake reversion phase >
Soon, the angle of revolution of lid 16, more than 90 degree (plumb positions), reaches the angle of revolution (for simplicity, being called sideshake reverse angle) of the position deviation that lid 16 occurs because of the reversion of sideshake in the past.Now, lid 16 because of deadweight for the speed of gyration than the rotation based on the 1st motor 24 faster speed revolution.In the past, so-called sideshake reversion now became lid 16 causes position deviation reason with the huge sound.
But in the present embodiment, now, the 2nd bevel pinion 30 of the 2nd drive system 36 is the braking surface side engagement when the opening of shared bevel gear 32, and continues to apply brake torque to shared bevel gear 32.And angle of revolution θ is close to sideshake reverse angle, also more weak for the strength accelerating opening speed by the deadweight of lid 16.Therefore, it is possible to effectively avoid lid 16 to cause the phenomenon of position deviation.
If the impact produced because of the deadweight of lid 16 increases gradually, then the 1st bevel pinion 26 of the 1st drive system 34 is transitioned into the engagement of the braking surface side when the opening of shared bevel gear 32.If the 1st bevel pinion 26 is the engagement of braking surface side when the opening of shared bevel gear 32, then, while supporting (for what open sooner) lid 16 by the braking force caused by the regenerative braking force of the 1st drive system 34 and the rotational resistance of the 2nd drive system 36, continue revolution.More than that the 2nd in this execution mode drives operation.These are on a series of, and operating personnel just disconnects the power supply of the 2nd motor 24 at specific angle of revolution θ 1, all automatically carry out thereafter.
< region D: become the 2nd specific angle of revolution θ 2 > later
Estimate the moment (lid 16 returns back to the moment of the 2nd specific angle of revolution θ 2) reaching the 1st bevel pinion 26 of the 1st drive system 34 and the 2nd bevel pinion 30 both sides of the 2nd drive system 36 state of braking surface side engagement when the opening of shared bevel gear 32, operating personnel connects the power supply (the drive operation different from the 2nd the 3rd drives operation) of the 2nd motor 28 again.In addition, this angle " θ 2 ", as long as be greater than plumb position (90 degree) and be less than cannot the angle of angle of regenerative braking lid 16 by means of only the 1st motor 24 (by means of only 1 motor), can consider that the weight of lid 16 and the regenerative braking force etc. of the 1st drive system 34 suitably set.
After entering the 3rd and driving operation, the 1st drive system 34, the 2nd drive system 36 both sides become regenerative braking state, and lid 16 continues revolution while the speed increase of opening direction is inhibited.In this embodiment, the drive operation different from the 2nd the 3rd drives operation substantially to drive operation identical with the 1st.Therefore, from the opening operation of lid 16 till end, the position deviation caused because of the sideshake reversion of lid 16 can not be produced, and, the almost constant driving of speed of gyration can be carried out.
In addition, when lid 16 closes to 0 degree from the state being opened into 180, only make above-mentioned opening operation and the 1st motor, the 2nd motor direction of rotation contrary to the above, just can obtain identical effect.
According to the present embodiment, (operating personnel) only needs the power supply of independent operation the 1st motor 24 and the 2nd motor 28, just can prevent from simply reversing the position deviation of the lid 16 caused because of sideshake.
And, in the present embodiment, be configured to the transmission of power of the power of the 1st bevel pinion (the 1st gear) 26 of the 1st drive system 34 and the 2nd bevel pinion (the 2nd gear) 30 of the 2nd drive system 36 to the shared bevel gear 32 as the single power transferring elements shared, and, this shared bevel gear 32 is the gear of the whole level reducing gear (final level) 42,84 of each drive system 34,36, therefore by removing the sideshake of this part, the position deviation phenomenon of lid 16 can effectively be eliminated.
Further, the 1st motor 24 adopted, the 2nd motor 28 are general induction motor, and also without the need to the control of complexity, therefore cost is low.Especially, when needing the revolution of driving torque to start (or revolution terminate near), can apply the actuating force (or regenerative braking force) of the drive system of 2 systems, therefore the capacity of every 1 motor is roughly half in the past.Therefore, not only cost is low, can also by device integral miniaturization, and it is also easy to operate.In the present embodiment, because whole level reducing gear 42,84 is orthogonal reducing gear, therefore, it is possible to the 1st drive system 34, the 2nd drive system 36 are suppressed in Min. from the distance L1 that semiconductor-fabricating device 14 is outstanding, in this, the miniaturization of semiconductor-fabricating device 14 entirety can also be realized.
And, with regard to regard to this action effect of described complex control, not only effective in cost, because the slewing equipment 12 of the lid 16 of semiconductor-fabricating device 14 is extremely responsive to the electrical noise sent from pivotal control system, be therefore also effective in the meaning of this " reduction electrical noise ".
In addition, in the above-described embodiment, the utilize the method for the power supply of disconnection the 2nd motor 28 to realize driving operation different from the 1st the 2nd drives operation, but in the present invention, drive operation for the 2nd, various control methods (variation) in addition can be considered.
The first, in the above-described embodiment, in revolution way, being disconnected the power supply of the 2nd motor 28 by operating personnel itself " manually ", but also can open from dynamic circuit breaker by utilizing the switching of controlling organization.For this reason, slewing equipment 12 can be made to possess mechanism's (also can replacing by the mode counted institute's elapsed time from turning round and starting) of the angle of revolution of the lid 16 detecting or confirm this moment, and possess controlling organization, described controlling organization " drives the 1st of the driving shaft of lid 16 (gyroaxis) 22 the to drive operation utilizing the 1st motor 24 and the 2nd motor 28 to specific angle of revolution θ 1 from the revolution starting point (0 degree, angle of revolution) of lid 16 and drives the 1st motor 24 with another type of drive (being such as set to the control mode of disconnection) after becoming described specific angle of revolution θ 1, switch between 2nd operation of at least one (such as the 2nd motor 28) of the 2nd motor 28 ".
And, such as when any one in the 1st motor, the 2nd motor has inverter control mechanism, operation can be driven to be set to that the motor with this inverter control mechanism is carried out relative to not having the mode of the motor of inverter control mechanism relative " deceleration " operation switched by the 2nd.Thus, substantially identical with execution mode above effect can being obtained, simultaneously by being somebody's turn to do " degree of deceleration ", the torque that can put on braking surface when opening in the drive system of slowing down can be adjusted more on one's own initiative.
Further, when any one motor has inverter control mechanism, operation can be driven to be set to that the motor with this inverter control mechanism is carried out relative to not having the mode of the motor of inverter control mechanism relative " speedup " operation switched by the 2nd.Nonetheless, its result also can obtain substantially identical with execution mode above effect, simultaneously by should " speedup degree ", can put on the torque of braking surface when opening in the relatively slack-off drive system of Indirect method.Further, by the rotating speed of this motor relative in the method for another speedup, " when a small amount of load puts on the 1st motor, the 2nd motor (B region), initiatively accelerating the speed of gyration of lid " this new effect can be obtained.Thereby, it is possible to shortening lid is opened fully to the time till 180 degree further.
Certainly, a motor also can be made to slow down, and make another motor speedup.The quantity of motor is also not limited to 2.When having more than 3, also the cataclysm of actuating force and braking force can be relaxed by deenergization successively.
Further, when a motor has inverter control mechanism, method generation torque limited by giving current limit to this motor can be utilized.Thus, the load not being endowed the motor of torque restriction must increase, and slides and increases, thus rotating speed declines.On the other hand, be endowed the motor of torque restriction due to suffered torque less (because load is lighter), therefore correspondingly can maintain with less slip and rotate faster, its result, can make the 1st bevel pinion of shared bevel gear, the 2nd bevel pinion respectively with drive surface during the opening of shared bevel gear and open time braking surface both sides engage.
In addition, if be conceived to " slowing down to a motor " this effect, then (even if do not have inverter control mechanism, as long as alternatively possess the stopper mechanism such as electromagnetic brake and friction brake) only braking is applied to the motor possessing this stopper mechanism, also can obtain identical action effect.Further, according to " brake applications ", the torque that may put on braking surface when opening in the drive system of deceleration can also be adjusted on one's own initiative.That is, in the present invention, " changing the type of drive of motor " refers to the situation not only comprising and change the mode controlling motor itself, also comprises the situation of the type of drive by controlling to change motor to the device of subsidiary motor.
But, the structure that the shared bevel gear (power transmission member) 32 adopting the 1st bevel pinion 26 of the 1st drive system 34 and the 2nd bevel pinion 30 of the 2nd drive system 36 single with (in the 1st drive system 34, the 2nd drive system 36 dual-purpose) in the above-described embodiment engages simultaneously.But, also can be achieved even if the present invention is not this structure.
This concrete structure is illustrated in Fig. 5 and Fig. 6.
In this embodiment, possess: the 1st reductor 94 of the 1st bevel gear 92 that the 1st motor 88 and the most final stage in the 1st drive system 90 have the 1st bevel pinion (omitting diagram) and engage with the 1st bevel pinion; And the 2nd motor 96 and the 2nd reductor 102 of the 2nd bevel gear 100 that there is the 2nd bevel pinion (omit diagram) in the final level of the 2nd drive system 98 and engage with the 2nd bevel pinion.
Further, the output shaft (output block) 101 of the 2nd bevel gear 100 of the output shaft (output block) 95 being fixed with the 1st bevel gear 92 of the final level of the 1st reductor 94 and the final level being fixed with the 2nd reductor 102 is linked on the driving shaft (gyroaxis) 104 as single driven member (power transmission member) via key 106,108.
In this embodiment, braking surface when the 1st bevel pinion of the 1st drive system 90 and the 2nd bevel pinion of the 1st bevel gear 92 and the 2nd drive system 98 and the 2nd bevel gear 100 independently to have when opening drive surface and open.
But, even this structure, such as drive in operation the 2nd, be provided with to slowly change in the drive system of the side of the motor (the 1st motor 88 or the 2nd motor 96) of type of drive, the bevel pinion of this drive system and bevel gear abut braking surface side when the opening of this bevel gear.Further, change in the drive system controlled as change speed etc. special, abutting when lasting maintenance is opened in drive surface.This with the 1st bevel pinion 26 in above-mentioned execution mode or the 2nd bevel pinion 30 identical with the abutment of the shared bevel gear 32 of the 2nd drive system 36 relative to the 1st drive system 34, also identical with to the effect of the driving shaft 22 as driven member.Therefore, by this structure, also the basic role identical with said structure can be obtained.
In addition, in preferably involved structure, the 1st reductor 94, the 2nd reductor 102 itself can use common (independently monomer) reductor.Therefore, there is the very large advantage that can be used in the general reductor that also can use in other purposes.More specifically enumerate the example of advantage, such as general when manufacturing bevel pinion and bevel gear, both are that " pairing " manufactures.That is, in finishing step, under the environment that there is fine abrasive grains, so-called trial run is carried out, the operation etc. of the tooth contact both adjusting.In execution mode above, 2 bevel pinions engage with 1 bevel gear, therefore can expect sometimes in fact being difficult to perform this adjustment operation.But, in this embodiment, the general reductor tooth contact of 2 groups of bevel pinions and bevel gear being carried out respectively adjusting by every 1 group can be used, therefore manufacture drive system very light.Therefore think, at cost or in delivery date, this structure is sometimes more favourable than execution mode above on the contrary.
An example of another execution mode shown in Fig. 7 and Fig. 8.
In execution mode above, final level reducing gear all have employed orthogonal reducing gear, but in this embodiment, final level adopts parallel axle speed reducing machine structure 110.1st drive system 114 is driven by the 1st motor 111, and the 2nd drive system 118 is driven by the 2nd motor 113.2nd spur pinion 120 of the 1st spur pinion 116 of the final level of the 1st drive system 114 and the final level of the 2nd drive system 118 is equivalent to the 1st gear, the 2nd gear respectively, and the spur gear 122 simultaneously engaged with the 1st spur pinion 116 and the 2nd spur pinion 120 is equivalent to power transmission member.
Adopt parallel axle speed reducing machine structure 110 in this embodiment, therefore compared with execution mode above, can realize manufacturing with lower cost.Further, the 1st spur pinion 116, the 2nd spur pinion 120 these two are engaged with 1 spur gear 122, unlike the orthogonal system of such as execution mode above, need to carry out harsh tooth contact adjustment, therefore in this, also can realize low cost manufacture.
In addition, in the above-described embodiment, the 1st motor, the 2nd motor and the 1st drive system, the 2nd drive system all employ identical (structure and capacity) motor and drive system.But the present invention necessarily may not require the 1st motor, the 2nd motor or the 1st drive system, the 2nd drive system is same structure or capacity.Especially, if the capacity of motor is different, then the sliding properties of two motors when load changes according to actuating force or angle of revolution dissimilates, and braking characteristic during impact and regenerative braking therefore on velocity variations also dissimilates.Its in other words, the possibility that more can be met the characteristic of the individual cases of every 1 slewing equipment improves further, design freedom expand.Further, by differently setting the structure of each drive system, sometimes more preferably action effect can be obtained.Such as, the final level of the side carrying out all the time driving is made up of bevel gear set, the drive system of the side of deenergization is made up of hypoid gear wheels or worm tooth wheels, can carry out thus designing as follows, namely, the higher drive efficiency carrying out the side driven all the time can be maintained, improve the reverse drive resistance (braking force) produced in the side of deenergization further simultaneously.
In addition, in the above-described embodiment, for the purpose of the generation reducing electrical noise and cost degradation, the switching of the driving operation under specific angle of revolution θ 1, θ 2 is manually carried out by operating personnel, but be not only angle of revolution θ 1, for the switching of the driving operation under θ 2, also certainly controlling organization can be configured to make slewing equipment itself possess this handoff functionality.
Further, in the above-described embodiment, the example being made up of the 1st drive system, the 2nd drive system the gear reduction that inevitably there is sideshake is all illustrated.But, such as, when to drive as undertaken by carry-over pinch rolls in the drive system of revolving body and be made up of without the driving mechanism of sideshake itself being undertaken by belt wheel driving, key and spline etc. is there is in whole drive system, and when this part likely produces sideshake, also effectively the present invention can be suitable for.
Further, in the above-described embodiment, revolving body is shown from level to the example of horizontal rotation 180 degree, as long as but stride across the revolution of plumb position, no matter then pivotal concrete angular dimension.
At this, in the above embodiment, have employed the structure of " after becoming specific angle of revolution, be controlled to and drive with another type of drive ".Namely be configured to, make a drive system rely on relative to another drive system the function that angle of revolution plays " braking " relatively.
But the present invention can also be configured to, even if not specially switch drive mode under specific angle of revolution, such as, by by the structure of the structure of the 1st drive system and the 2nd drive system suitably " differential ", also automatically same switching can be carried out.
Below, the example of the execution mode of the type of the structure " differential " by the structure of the 1st drive system and the 2nd drive system is described in detail.
In the execution mode of the type, such as, first, prepare the 2nd drive system of carrying out by the 1st motor the 1st drive system that drives and being undertaken by the 2nd motor driving, and be configured to make the power of the 1st drive system and the 2nd drive system be delivered to (sharing) power transmission member simultaneously.Now, implement in the 1st drive system and the 2nd drive system differential.As the differential the 1st example, the structure differently setting the speed reducing ratio of the 1st drive system and the speed reducing ratio of the 2nd drive system can be considered.As another differential example, the structure of the capacity of the capacity of the 1st motor differently setting the 1st drive system and the 2nd motor of the 2nd drive system can be considered.
Differential by these, can prevent because of drive system sideshake reversion and in revolving body occurrence positions depart from.
Below, from by differently setting speed reducing ratio and carrying out differential example, more specifically illustrate.
In this embodiment, as basic hardware configuration, the structure (structure of Fig. 1 ~ Fig. 3) such as illustrated can be utilized.But, in this embodiment, the number of teeth of the gear of the 2nd drive system 36 is set to slightly more than the number of teeth of the gear of the 1st drive system 34 (or few) (such as many or few 1 ~ 2), thus the speed reducing ratio G2 of the 2nd drive system 36 is set as the speed reducing ratio G1 (speed reducing ratio G1 < speed reducing ratio G2) being a bit larger tham the 1st drive system 34.Specifically, the speed reducing ratio of the speed reducing ratio G2 of the 2nd drive system 36 can be changed by the number of teeth of the gear changing any part of the 2nd drive system 36.Which kind of degree the speed reducing ratio G2 of the 2nd drive system 36 entirety changes by the change of the number of teeth of the particular gear of the 2nd drive system 36 actually, different from the gear kind of institute's changing section and the number of teeth.Therefore, consider, for " speed difference " of the entirety produced between the 1st drive system 34, the 2nd drive system 36, to change the number of teeth of the gear of suitable position a little.In addition, as aftermentioned, which kind of degree should be changed and depend on target design method.
Even if the speed reducing ratio G1 of the 1st drive system 34 is set to different from the speed reducing ratio G2 of the 2nd drive system 36, shares bevel gear 32 and also can rotate with specific rotating speed with the driving shaft 22 (owing to being rigid body) that this shared bevel gear 32 rotates integratedly.This rotating speed relies on various key element, the ratio of such as speed reducing ratio G1 and G2, actual put on lid 16 revolution load and relative to the synchronous speed of the 1st induction motor 24, the 2nd induction motor 28 sliding ratio-torque characteristics etc. and determine.Revolution load changes in real time according to the angle of revolution θ starting from revolution, and therefore the slip of the 1st induction motor 24, the 2nd induction motor 28 also changes in real time, thus the actual speed of lid 16 also changes in real time.
But driving shaft 22 all drives to equidirectional (opening direction of lid 16) by the 1st drive system 34 and the 2nd drive system 36, the situation that the revolution that therefore lid 16 can not occur is stagnated or returned.
Below, 2 representative design examples that speed reducing ratio G1, the G2 of the 1st drive system 34, the 2nd drive system 36 are different are shown.
1st design example is following design: the capacity guaranteeing the 1st induction motor 24, the 2nd induction motor 28 significantly, further, the difference of speed reducing ratio G1, G2 is set significantly, thus, when comprising revolution beginning, the 2nd bevel pinion 30 is engaged all the time at " when opening braking surface " with shared bevel gear 32.2nd design example is following design: use the 1st induction motor 24, the 2nd induction motor 28 compared with low capacity, and, set the difference of speed reducing ratio G1, G2 smaller, thus when turning round the higher revolution of load and starting, the 1st bevel pinion 26, the 2nd bevel pinion 30 both sides engage in " when opening the drive surface " of shared bevel gear 32 and contribute to the driving of lid 16.
As previously mentioned, " when opening drive surface " refers to " when opening lid 16, the 1st bevel pinion 26 or the 2nd bevel pinion 30 drive the flank of tooth of the driving side abutted when sharing bevel gear 32 ".Further, " when opening braking surface " refers to " when opening lid 16, the flank of tooth (with the flank of tooth of drive surface opposite side when opening) of the brake side abutted when the 1st bevel pinion 26 or the braking of the 2nd bevel pinion 30 share bevel gear 32 ".In addition, in any one design example in the 1st, the 2nd design example, the occurrence of speed reducing ratio G1, G2 suitably carries out setting with can realize target action, is not particularly limited.
Be described from the 1st design example.
1st design example is as follows: the capacity guaranteeing the 1st induction motor 24, the 2nd induction motor 28 significantly, so that also lid 16 can be driven under less sliding ratio, and, set the difference of speed reducing ratio G1, G2 significantly.Thus, the 1st bevel pinion of the 1st drive system 34 (the 1st gear) 26 can be made to engage with shared bevel gear (power transmission member) 32 drive surface when opening all the time, and the 2nd bevel pinion of 2 drive systems 36 (the 2nd gear) 30 is engaged at " when opening braking surface " with shared bevel gear 32 all the time.
More specifically illustrate, when the capacity of the 1st induction motor 24, the 2nd induction motor 28 is larger, lid 16 can drive with less sliding ratio (rotating speed close to synchronous speed).Therefore, the difference of the 1st drive system 34 come by the difference band of speed reducing ratio G1 and G2, the rotating speed of the 2nd drive system 36 becomes and is greater than this sliding ratio, 1st bevel pinion 26 engages with shared bevel gear 32 drive surface when opening, and the 2nd bevel pinion 30 engages with shared bevel gear 32 braking surface when opening.Absorbed by the slip of the 1st induction motor 24, the 2nd induction motor 28 with the speed difference of lid 16.
Even if lid 16 is near plumb position, this engagement system also can not change.Therefore, even if revolution proceed to as the reversion of sideshake in the past exceed the position of plumb position till, 2nd bevel pinion 30 of the 2nd drive system 36 also continues to give regenerative braking force to shared bevel gear 32 all the time, thus can effectively avoid lid 16 to cause the phenomenon of position deviation.
If lid 16 exceedes plumb position, then the deadweight of lid 16 is worked to the direction for accelerating speed of gyration, but due to the braking surface engagement and continue to give stronger regenerative braking force when the opening of shared bevel gear 32 of the 2nd bevel pinion 30 of the 2nd drive system 36, therefore lid 16 can not be out of control, can continue slowly to carry out opening operation.
The engagement (engagement when opening in drive surface or engagement when opening on braking surface) of the 1st bevel pinion 26 now depends on the intensity of the regenerative braking force of the 2nd drive system 36 side and the intensity of lid 16 revolution load now (negative load).In the 1st design example, the capacity of the 1st induction motor, the 2nd induction motor 28 is comparatively large, therefore thinks that the 1st induction motor 24 situation that drive surface (underload) engages when the opening of shared bevel gear 32 is more.Speed difference is absorbed by the slip in the 1st induction motor 24.If, when the regenerative braking force by means of only the 2nd induction motor 28 cannot carry out sufficient regenerative braking, and during the synchronous speed of actual speed significantly faster than the 2nd induction motor 28, the also braking surface side engagement when opening of 1st induction motor 24, by the regenerative braking force supporting lid 16 of the 1st induction motor 24, the 2nd induction motor 28 both sides.
No matter in any situation, when carrying out the opening operation of lid 16, by means of only the power supply of connection the 1st induction motor 24, the 2nd induction motor 28, completely without the need to carrying out Special controlling, just can carry out occurring being driven by the reverse revolution of the position deviation caused of sideshake.
Then, to differently set the 1st drive system 34, the speed reducing ratio G1 of the 2nd drive system 36, the situation of G2 the 2nd design example be described.In 2nd design example, use the 1st induction motor 24, the 2nd induction motor 28 compared with low capacity, actively apply " characteristic that during applying load, sliding ratio increases " of induction motor.
Namely, in the 2nd design example, when turning round the higher revolution of load and starting, 1st bevel pinion 26, the 2nd bevel pinion 30 both sides are drive surface engagement when the opening of shared bevel gear 32, near plumb position, 2nd bevel pinion 30 of the 2nd drive system 36 is the engagement of braking surface side when opening, thereafter, and the 1st bevel pinion 26, the 2nd bevel pinion 30 both sides braking surface engagement when the opening of shared bevel gear 32.
More specifically, when the capacity (basic generation torque) of the 1st induction motor 24, the 2nd induction motor 28 is not very large, speed setting is the 1st bevel pinion 26 drive surface engagement when the opening of shared bevel gear 32 side of the 1st drive system 34 faster, and by be subject to angle of revolution θ less time larger revolution load and significantly slide.By this slip, if rotating speed drops to the rotating speed of the 2nd bevel pinion 30 lower than the 2nd drive system 36, then result, the 1st bevel pinion 26 and the 2nd bevel pinion 30 both sides are the drive surface engagement when the opening of shared bevel gear 32 along with slip.
When the speed reducing ratio of the 2nd drive system 36 is larger, the slip of the 2nd induction motor 28 is correspondingly less than the slip of the 1st induction motor 24.But, the speed reducing ratio of the 2nd drive system 36 is greater than the speed reducing ratio of the 1st drive system 34, therefore (even if the slip of the 2nd induction motor 28 is less and that torque occurs is also less), the torque being passed to shared bevel gear 32 from the 2nd bevel pinion 30 also can maintain original state and can not reduce.Its result, 1st drive system 34, the 2nd drive system 36 keep balance under the load making the 1st bevel pinion 26 and the 2nd bevel pinion 30 bear becomes the sliding ratio (or rotating speed of lid 16) of roughly the same the 1st induction motor 24, the 2nd induction motor 28, and two drive systems 34,36 contribute to the driving of lid 16 jointly.
But, soon, along with the angle of revolution θ of lid 16 is close near plumb position, revolution load is die-offed, therefore the 1st induction motor 24 slides a little, (becoming the state similar with the 1st design example above) the 2nd bevel pinion 30 braking surface when opening engages, and gives regenerative braking force to shared bevel gear 32.And, if angle of revolution θ exceedes plumb position and close to standard-sized sheet, then the 1st bevel pinion 26 also braking surface engagement when opening, thus form the 1st induction motor, state that the 2nd induction motor produces regenerative braking force jointly.
In the 2nd design example, as the 1st induction motor 24, the 2nd induction motor 28, the motor that capacity is less can be used, thus small-sized, low cost can be obtained, operate slewing equipment easily.
Then, the differential design example (the 3rd design example) that the difference (size of basic generation torque) of the capacity according to the 1st induction motor 24, the 2nd induction motor 28 carries out the 1st drive system and the 2nd drive system is described.
At present, such as prepare substantially can only to utilize a motor drive the motor of the larger capacity of lid 16 and Bi Qi capacity little motor (speed reducing ratio can be the same or different, and is in this case convenient to understand, supposes identical being described).
If the capacity being set to the 2nd induction motor 28 is greater than the induction motor of the capacity of the 1st induction motor 24, then in this case, the 2nd induction motor 28 of larger capacity is bearing and slide less (can rotate with very fast rotating speed) during the torque identical compared with the 1st induction motor 24 of low capacity.
If by connecting the 1st induction motor 24, the power supply of the 2nd induction motor 28 starts to drive lid 16, the 2nd induction motor 28 that then capacity is larger accepts the revolution load of lid 16 while sliding, and drives lid 16 with the rotating speed measured accordingly with (less) slip slower in synchronous speed.That is, lid 16 turns round with the rotating speed specified by the slip of the 2nd induction motor 28 substantially.
Now, the 1st induction motor that capacity is less must become the situation of slower rotating speed when being in the identical torque of output.But, share bevel gear 32 and rotate with the rotating speed faster than it at present.Under this rotating speed (sliding ratio), the 1st induction motor 24 cannot export the torque that shared bevel gear 32 is rotated sooner.On the other hand, share bevel gear 32 side (driving by the 2nd drive system 36) to rotate so that the larger rotating torques of the 1st bevel pinion 26 can be driven.Therefore, its result, the 1st bevel pinion 26 is braking surface engagement when the opening of shared bevel gear 32, and is subject to rotating torques on the contrary from shared bevel gear 32 side.This means the opening operation relative to lid 16, rotate with the state (producing the state of regenerative braking) becoming resistance.
Even if close to plumb position and revolution load change (even if lightening), as long as revolution load just be, then the 1st bevel pinion 26 when opening braking surface side engage situation can not change.When lid exceedes the position that plumb position returns back to as the reversion of sideshake in the past, there occurs the position deviation with the sideshake respective amount be present on rear side of direct of travel in the past, but in the present embodiment, when turning round load reversion, 1st bevel pinion is braking surface side engagement (without sideshake) when the opening of shared bevel gear 32, is therefore in the situation that can regenerative braking be made immediately to increase.Therefore, two motors that use capacity like this is different, also can avoid occurrence positions to depart from by the regenerative braking of the 1st drive system 34 side.In addition, when the impact that lid 16 is conducted oneself with dignity when exceeding plumb position becomes large, regenerative braking puts on the 1st induction motor 24 and the 2nd induction motor 28 both sides.
So, the difference of speed reducing ratio differential and motor capacity differential in any one differential in, completely without the need to electrically controlling in above-mentioned 1st ~ 3rd design example.Namely, by means of only when the revolution of lid 16 starts connect the 1st induction motor 24, the 2nd induction motor 28 power supply and revolution at the end of disconnect, then start to end in the opening operation of lid 16, do not have and to be reversed the position deviation caused by the sideshake of lid 16, and, the revolution that fully can control lid 16 can be carried out.
In addition, when closing lid 16, just above-mentioned opening operation is contrary with the direction of rotation of the 1st induction motor 24, the 2nd induction motor 28, and it is contrary to the above with revolution end position to turn round starting position, can obtain identical effect.
And, be configured in the present embodiment, the transmission of power of the power of the 1st bevel pinion (the 1st gear) 26 of the 1st drive system 34 and the 2nd bevel pinion (the 2nd gear) 30 of the 2nd drive system 36 is to the shared bevel gear (single gear) 32 as the single power transferring elements shared, and, this shared bevel gear 32 is the gear of the final reducing gear (final level) 42,84 of each drive system 34,36, therefore by removing the sideshake of this part, the position deviation phenomenon of lid 16 can effectively be eliminated.
And, in the present embodiment, final reducing gear 42,84 is orthogonal reducing gear, therefore, it is possible to the 1st drive system 34, the 2nd drive system 36 are suppressed in Min. from the distance L1 that semiconductor-fabricating device 14 is outstanding, in this, the miniaturization of semiconductor-fabricating device 14 entirety can also be realized.
In addition, the 1st induction motor 24 adopted, the 2nd induction motor 28 are general induction motor, and completely without the need to carrying out for pivotal control, therefore cost is low.And, should without the need to carrying out this action effect of Special controlling, not only effective in cost, because the slewing equipment 12 of the lid 16 of semiconductor-fabricating device 14 is extremely responsive to the electrical noise sent from pivotal control system, be therefore also effective in the meaning of this " reduction electrical noise ".
In addition, in the above description, enumerated 2 examples about the design example differently setting speed reducing ratio, only enumerated 1 example about the design example differently setting motor capacity, but the present invention may not only be defined in these design example.Especially, based on motor capacity differential in, the revolution load of lid 16 changes into " just less ", " 0 ", " bearing " value from " just larger " value, and, the mobility (rotating speed) of induction motor depends on this revolution load, and degree of dependence (slip-load characteristic) is different by the capacity of each motor, therefore, specifically, the design utilizing these characteristics to make 2 drive systems produce speed difference can also expect various design in addition.
In addition, in the present invention, can combine based on the differential of speed ratio and differential based on motor capacity, now, design freedom is extremely wide, without using (induction motor compared with low capacity) lavishly, and can more reliably can also play the effect of braking near plumb position.
In addition, in the present invention, the quantity (quantity of drive system) of induction motor is also not limited to 2 (2 systems).Such as, when having 3 induction motors, 1 shared bevel gear can be made to engage with respective bevel pinion simultaneously.Now, can carry out about speed reducing ratio or capacity to all drive systems differential, especially, not differential group can also be there is.Or, can also combine as follows: differential based on speed reducing ratio is implemented for this " 1 pair of induction motor ", then implement based on capacity for this " 1 pair of induction motor " differential.Thus, more accurately can not only control revolving body, the capacity of every 1 induction motor can also be reduced further.
In addition, when utilizing this speed reducing ratio and motor capacity is carried out differential, the structure 2 reductors being linked to the structure on shared driving shaft (gyroaxis) and the final level use parallel axle speed reducing machine structure as use Fig. 7, Fig. 8 explanation as use Fig. 5, Fig. 6 above illustrates can be adopted too.
In addition, the employing comprised above relies on the situation of the execution mode involved by control that angle of revolution is carried out, and can also adopt the structure as shown in Fig. 9 ~ Figure 11.
In the example shown in Fig. 9 (A), (B), basic structure is identical with Fig. 5, structure illustrated in fig. 6.In addition, use identical symbol in the part substantially the same with execution mode above, and omit repeat specification.Specifically, based on following structure: the output shaft (output block) 101 possessing (hollow-core construction) output shaft (output block) the 95 and the 2nd reductor 102 of the 1st reductor 94 with the 1st drive system 90 and the 2nd reductor the 102,1st reductor 94 with the 2nd drive system 98 is linked to driving shaft (gyroaxis) 104 (being equivalent to 22).
At this, the lid 16 being assembled with the semiconductor-fabricating device (main device) 14 of this slewing equipment 12 is arranged via the support unit 23 constructed on installation surface F is independent.Support unit 23 has linkage H1.Specifically, in the through hole being arranged at support unit 23, inserted driving shaft 104, and driving shaft 104 is rotatably supported by the sliding contact with support unit 23 or via bearing.Further, in the execution mode of this Fig. 9, the 1st reductor 94 and the 2nd reductor 102 are assembled in the two ends of driving shaft 104, are provided for pivotal actuating force (or braking force) from the both sides of this driving shaft 104.That is, clip arm member 18A, 18B of the framework 18 of lid 16, drive from both sides or braking driving shaft 104.Therefore, from the powerful distortion of end side, therefore, can not can not there is the situation that lid 16 tilts along with revolution, can carry out mechanism and more reasonably turn round in (example as Fig. 5, Fig. 6) this driving shaft 104.
Figure 10 (A), the example shown in (B) also remain and are linked to based on the structure on shared driving shaft (gyroaxis) 104 by 2 reductors by the structure using Fig. 5, Fig. 6 to illustrate.But, in this embodiment, 1st reductor 94 and the 2nd reductor 102 itself are fixed on the wall 14A of the semiconductor-fabricating device (main device) 14 being assembled with this slewing equipment via plate 152, further, shorter driving shaft 104 supports as rotating integrally by the output shaft 95,101 of the 1st reductor 94 and the respective hollow-core construction of the 2nd reductor 102.
Its result, the 1st reductor 94 and the 2nd reductor 102 form the linkage H2 of lid (revolving body) 16.In this structure, the Bearning mechanism (with reference to figure 6) of the output shaft 95,101 of the hollow-core construction the 1st reductor 94, the 2nd reductor 102 originally just possessed is as the linkage H2 of driving shaft 104, the linkage H1 of the driving shaft 104 as being formed at slewing equipment 12 side on support unit 23 in execution mode above can be omitted, thus lid 16 correspondingly further cost degradation can be made.
Further, Figure 11 (A), (B) illustrate the variation of Figure 10.In this example embodiment, the semiconductor-fabricating device (main device) 14 being assembled with this slewing equipment 12 is generally provided with on the top near lid 16 the chamber 14B carrying out vacuum drawn, has considered the situation detesting distortion.Namely, via the support foot 162 of the L-shaped be fixed on pedestal 160,1st reductor 94 and the 2nd reductor 102 are individually fixed in semiconductor-fabricating device 14, wherein, this pedestal 160 is linked to high base portion (specific part) 14C of the intensity of this semiconductor-fabricating device 14 being assembled with this slewing equipment 12.By the 1st reductor 94 and the 2nd reductor 102 are fixed on support foot 162, itself form fixed part when forming linkage H2 at the 1st reductor 94 and the 2nd reductor 102.
When the 1st reductor 94 and the 2nd reductor 102 form linkage H2, the periphery being fixed with the 1st reductor 94 and the 2nd reductor 102 easily deforms because of the deadweight of lid 16 and the reaction force of rotational torque, but by this structure, the chamber 14B of detest distortion can not be applied in the deadweight of lid 16 and the reaction force of rotational torque, therefore, it is possible to suppress the distortion of this chamber 14B in Min..
In addition, in the execution mode of " differential " carrying out above-mentioned drive system, the 1st drive system, the 2nd drive system employ the drive system being same structure except the number of teeth.But the 1st drive system now, the 2nd drive system are without the need to being identical structure.Such as, more contribute to drive side and more contribute to brake side by determined time etc., a part for the drive system more contributing to the side driven is made up of bevel gear set, be made up of a part for the drive system more contributing to the side of braking hypoid gear wheels or worm tooth wheels, the design that overall drive efficiency improves braking force when entering regenerative braking state simultaneously further can be maintained thus higher.
In addition, in the above-described embodiment, (comprise and rely on angle of revolution and change the execution mode of type of drive, all) use " induction motor " as the 1st motor, the 2nd motor, " occur torque according to slippage (rotating speed) different characteristics ", " by the characteristic absorbing and changed speed by load-side forcibly of sliding " of effectively applying that this induction motor has thus etc., especially contribute to constructing the slewing equipment completely without control system with low cost.But the 1st motor involved in the present invention, the 2nd motor may not Seeking Truth " induction motor ".Further, the 1st motor of the present invention, the 2nd motor also might not require it is have the motor that motor itself absorbs the function of sliding.Such as, about absorption slip this point, as long as be situated between in drive system, dress such as fluid connector and powder clutch etc. allows the mechanism of slip, then (even if motor itself does not slide, absorption function also) is not a problem, and can absorb the speed difference of 2 drive systems.Further, even if any one motor in the 1st motor, the 2nd motor is not induction motor (even not allowing the motor of slip), as long as another is induction motor, then the speed difference of the 1st drive system, the 2nd drive system can fully be absorbed.And, as long as make any one or two drive systems possess certain " control system ", even if then both sides are not induction motors (such as magnet motor), and, specially do not make drive system have the mechanism that can absorb slip, can both realize the action effect required by the present invention yet.That is, the present invention does not forbid secondarily (comprising the 1st motor, the 2nd motor being the situation of induction motor) in the driving of the 1st motor, the 2nd motor carrying out any control.
Utilizability in industry
The present invention can be used in and make heavy revolving body exceed the driving of plumb position and pivotal slewing equipment.
Disclosed in the specification of Japanese publication 2012-061239 of the Japanese publication 2012-061238 of application on March 16th, 2012, application on March 16th, 2012, accompanying drawing and claims, all the elements are by reference to being applied in this specification.
Symbol description
12-slewing equipment, 14-semiconductor-fabricating device, 16-lid, 22-driving shaft, 24-the 1st motor, 26-the 1st bevel pinion, 28-the 2nd motor, 30-the 2nd bevel pinion, 32-shares bevel gear, 34-the 1st drive system, 36-the 2nd drive system, 38-prime reducing gear, 40-intermediate reduction gear mechanism, the final reducing gear of 42-.

Claims (14)

1. a driving method for the slewing equipment of heavy revolving body, it is make heavy revolving body exceed the driving method of plumb position and pivotal slewing equipment, and it is characterized in that, described slewing equipment possesses:
1st motor and the 1st drive system, the 1st drive system is driven by the 1st motor;
2nd motor and the 2nd drive system, the 2nd drive system is driven by the 2nd motor; And
Power transmission member, the power of described 1st drive system and described 2nd drive system is delivered to this power transmission member simultaneously,
Described driving method comprises:
1st drives operation, utilizes described 1st motor and the 2nd motor, the gyroaxis of this revolving body is urged to specific angle of revolution from the revolution starting point of this slewing equipment; And
2nd drive operation, after becoming described specific angle of revolution, by described 1st motor, the 2nd motor at least one change into another type of drive to drive described gyroaxis.
2. the driving method of the slewing equipment of heavy revolving body according to claim 1, is characterized in that,
Described 2nd drives operation to be the driving operation relatively can giving speed difference to described 1st motor and the 2nd motor.
3. the driving method of the slewing equipment of heavy revolving body according to claim 2, is characterized in that,
Described 2nd drives operation to be only by the driving operation of a motor disconnection.
4. the driving method of the slewing equipment of heavy revolving body according to any one of claim 1 to 3, is characterized in that,
Described driving method also comprises the 3rd and drives operation, and the 3rd drives operation after becoming the 2nd specific angle of revolution different from described specific angle of revolution, makes described 1st motor, the type of drive of the 2nd motor is different from the type of drive that the described 2nd drives operation.
5. a slewing equipment for heavy revolving body, it exceedes plumb position and pivotal slewing equipment for making heavy revolving body, it is characterized in that possessing:
1st motor and the 1st drive system, the 1st drive system is driven by the 1st motor;
2nd motor and the 2nd drive system, the 2nd drive system is driven by the 2nd motor; And
Power transmission member, the power of described 1st drive system and described 2nd drive system is delivered to this power transmission member simultaneously, and,
Possesses controlling organization, this controlling organization drives operation and the 2nd to drive operation to switch to the 1st, drive in operation the 1st, utilize described 1st motor and the 2nd motor, the gyroaxis of this revolving body is urged to specific angle of revolution from the revolution starting point of described revolving body, drive in operation the 2nd, after becoming described specific angle of revolution, by described 1st motor, the 2nd motor at least one change into another type of drive to drive described gyroaxis.
6. a slewing equipment for heavy revolving body, it exceedes plumb position and pivotal slewing equipment for making heavy revolving body, it is characterized in that possessing:
1st motor and the 1st drive system, the 1st drive system is driven by the 1st motor;
2nd motor and the 2nd drive system, the 2nd drive system is driven by the 2nd motor; And
Power transmission member, the power of described 1st drive system and described 2nd drive system is delivered to this power transmission member simultaneously,
The speed reducing ratio of described 1st drive system is different with the speed reducing ratio of described 2nd drive system.
7. a slewing equipment for heavy revolving body, it exceedes plumb position and pivotal slewing equipment for making heavy revolving body, it is characterized in that possessing:
1st motor and the 1st drive system, the 1st drive system is driven by the 1st motor;
2nd motor and the 2nd drive system, the 2nd drive system is driven by the 2nd motor; And
Power transmission member, the power of described 1st drive system and described 2nd drive system is delivered to this power transmission member simultaneously,
The capacity of described 1st motor of described 1st drive system is different from the capacity of described 2nd motor of described 2nd drive system.
8. the slewing equipment of the heavy revolving body according to any one of claim 5 to 7, is characterized in that,
Described 1st motor, the 2nd motor are induction motor.
9. the slewing equipment of the heavy revolving body according to any one of claim 5 to 8, is characterized in that,
As described power transmission member, the 1st gear of described 1st drive system and the 2nd gear of described 2nd drive system possess the single gear simultaneously engaged.
10. the slewing equipment of heavy revolving body according to claim 9, is characterized in that,
Described single gear is the gear of most final stage.
The slewing equipment of 11. heavy revolving bodies according to any one of claim 5 to 8, is characterized in that,
The output block of described 1st drive system and the output block of described 2nd drive system are linked on described gyroaxis.
The slewing equipment of 12. heavy revolving bodies according to claim 11, is characterized in that,
Possess the 1st reductor with described 1st drive system and the 2nd reductor with described 2nd drive system,
The output block of described 1st reductor and the output block of described 2nd reductor are linked on described gyroaxis, and described 1st reductor and the 2nd reductor itself form the linkage of described revolving body.
The slewing equipment of 13. heavy revolving bodies according to claim 12, is characterized in that,
Described 1st reductor and the 2nd reductor are individually fixed in main device via support foot, form the fixed part of described linkage thus, and described support foot is linked to the specific part of this main device being assembled with this slewing equipment.
The slewing equipment of 14. heavy revolving bodies according to claim 7, is characterized in that,
The speed reducing ratio of described 1st drive system is also different from the speed reducing ratio of described 2nd drive system.
CN201380004871.4A 2012-03-16 2013-01-21 The driving method and slewing equipment of heavy revolving body Active CN104254910B (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2012061239 2012-03-16
JP2012061238 2012-03-16
JP2012-061238 2012-03-16
JP2012-061239 2012-03-16
PCT/JP2013/051082 WO2013136842A1 (en) 2012-03-16 2013-01-21 Drive method and turning device for heavy turning body

Publications (2)

Publication Number Publication Date
CN104254910A true CN104254910A (en) 2014-12-31
CN104254910B CN104254910B (en) 2017-07-04

Family

ID=49160764

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201380004871.4A Active CN104254910B (en) 2012-03-16 2013-01-21 The driving method and slewing equipment of heavy revolving body

Country Status (4)

Country Link
JP (1) JP6081985B2 (en)
KR (1) KR101592484B1 (en)
CN (1) CN104254910B (en)
WO (1) WO2013136842A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104806722A (en) * 2015-04-29 2015-07-29 东北大学 Double-pendulum head structure driven by differential double motors

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6223206B2 (en) * 2014-01-27 2017-11-01 住友重機械工業株式会社 Wheel drive system for equipment installed in natural environment

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08326878A (en) * 1995-06-05 1996-12-10 Japan Aviation Electron Ind Ltd Gear device having antibacklash
JP2000046184A (en) * 1998-07-28 2000-02-18 Matsushita Electric Ind Co Ltd Lid opening/closing device
JP2004270846A (en) * 2003-03-10 2004-09-30 Ts Corporation Eccentrically swinging reduction gear, rotary drive device provided therewith and container provided with the rotary drive device
JP2005042816A (en) * 2003-07-22 2005-02-17 Ts Corporation Cover opening/closing apparatus
WO2006126623A1 (en) * 2005-05-27 2006-11-30 Matsushita Electric Industrial Co., Ltd. Power transmission device, and display device and display panel pedestal that have the power transmission device
CN101010595A (en) * 2004-09-02 2007-08-01 东京毅力科创株式会社 Turning device for heavy object

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003200375A (en) 2001-12-27 2003-07-15 Haruhisa Kawasaki Gear mechanism
JP4793809B2 (en) 2004-09-02 2011-10-12 東京エレクトロン株式会社 Heavy object turning mechanism

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08326878A (en) * 1995-06-05 1996-12-10 Japan Aviation Electron Ind Ltd Gear device having antibacklash
JP2000046184A (en) * 1998-07-28 2000-02-18 Matsushita Electric Ind Co Ltd Lid opening/closing device
JP2004270846A (en) * 2003-03-10 2004-09-30 Ts Corporation Eccentrically swinging reduction gear, rotary drive device provided therewith and container provided with the rotary drive device
JP2005042816A (en) * 2003-07-22 2005-02-17 Ts Corporation Cover opening/closing apparatus
CN101010595A (en) * 2004-09-02 2007-08-01 东京毅力科创株式会社 Turning device for heavy object
WO2006126623A1 (en) * 2005-05-27 2006-11-30 Matsushita Electric Industrial Co., Ltd. Power transmission device, and display device and display panel pedestal that have the power transmission device
CN101184939A (en) * 2005-05-27 2008-05-21 松下电器产业株式会社 Power transmission device, and display device and display panel pedestal that have the power transmission device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104806722A (en) * 2015-04-29 2015-07-29 东北大学 Double-pendulum head structure driven by differential double motors

Also Published As

Publication number Publication date
JP6081985B2 (en) 2017-02-15
CN104254910B (en) 2017-07-04
KR20140099543A (en) 2014-08-12
WO2013136842A1 (en) 2013-09-19
KR101592484B1 (en) 2016-02-18
JPWO2013136842A1 (en) 2015-08-03

Similar Documents

Publication Publication Date Title
US20160153537A1 (en) Drive gear unit
JP5380234B2 (en) Device for generating circular or directional vibrations with continuously adjustable vibration amplitude and / or vibration force
CN103291846B (en) Small tooth difference planetary transmission device adopting pin hole output and provided with adjustable clearance
CN201137672Y (en) Double inner gearing balance type few teeth difference decelerator
CN101943246B (en) Two-phase shock wave swing link movable-teeth compound transmission speed reducer
CN102203456A (en) Eccentric differential drive
CN205997708U (en) A kind of electric drive axle system based on single planetary row two shift transmission
CN104254910A (en) Drive method and turning device for heavy turning body
CN102235471B (en) Planet differential motion infinitely variable speed gear box
CN204828543U (en) Differential mechanism assembly
JP2015017664A (en) Drive device for electric vehicle
CN105570399A (en) WW-type planetary gear train-based pressure stepless speed change device
CN102341619A (en) Friction gearing
WO2018014481A1 (en) Automobile and transmission system thereof
CN212055702U (en) Planetary centrifugal stepless transmission mechanism
CN114013271A (en) Electric drive system with torque vector distribution and control method thereof
CN209458369U (en) A kind of modified satellite differential
CN203130944U (en) Wide-range high-power continuously variable transmission
CN102252071B (en) Conical friction ring speed changer and the method by the stepless transmitting torque of conical friction ring speed changer
CN209621972U (en) Few teeth difference involute deceleration mechanism
CN208605580U (en) A kind of novel three branches non-circular gear infinitely variable speed transmission
CN111396518A (en) Planetary centrifugal stepless transmission mechanism and control method thereof
JP3217060U6 (en) Micro reducer
CN101280838B (en) Complete mechanical automatic stepless speed-changing device
CN103115119A (en) Wide-range high-power infinitely variable transmission

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant