CN100582800C - Turning device for heavy object - Google Patents
Turning device for heavy object Download PDFInfo
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- CN100582800C CN100582800C CN 200580029555 CN200580029555A CN100582800C CN 100582800 C CN100582800 C CN 100582800C CN 200580029555 CN200580029555 CN 200580029555 CN 200580029555 A CN200580029555 A CN 200580029555A CN 100582800 C CN100582800 C CN 100582800C
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- reduction gearing
- pivoted arm
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Abstract
The present invention provides a technique of a heavy obj ect turning apparatus that is compact, that is enabled to reduce the distance between the center of gravity of a heavy object s and a pivot positioned on an axis, and that is configured so that a turning arm and a drive unit has a length in the direction of an axis passing through the pivot around which the heavy object is turned. A control unit 12 fixes a support base 13 onto a stand 3. An orthogonal axis reduction gear 6 serving as ananterior reduction gear is disposed on the front surface of a posterior reduction gear 26. The orthogonal axis reduction gear 6 has a configuration in which an output shaft is on an axis A of a planetary gear type reduction gear serving as the posterior reduction gear, and in which an input shaft is perpendicular to the axis A . The orthogonal axis reduction gear 6 is constituted by a hypoid reduction gear or a worm-geared reduction gear. A motor 16 is disposed on the bottom surface of the orthogonal axis type reduction gear 6. The bottom portion of the motor 6 is interposed between the gear 6 and the stand 3. The motor shaft of the motor 16 is connected to a gear portion including the hypoid gear or a worm wheel of the orthogonal axis reduction gear 6.
Description
Technical field
The present invention relates to turning device for heavy object, it is applied on probe device etc., is used to measure the electrical feature as the test target of semiconductor device and so on, and the weight as measuring head and so on of being configured to overturn.
Background technology
Conventionally test equipment, for example probe device comprises having being suitable for the loader unit of the conveying mechanism of transport semiconductor wafers one by one, and comprises the probe unit that is suitable for carrying out continuously electrical testing on semiconductor wafer.This probe unit has erecting bed, is arranged on the probe of this erecting bed top and is suitable for the measuring head that electricity interrupts between probe and tester, and this erecting bed structure makes semiconductor wafer carry one by one between this erecting bed and conveying mechanism.This measuring head is fixed in the rotating shaft by measuring head framework and hinge.This measuring head can rotate for example 180 ° around rotating shaft between probe device main body and maintenance area.Recently, this measuring head size increases, thereby its weight has reached 600kg to 800kg.In order to overturn, often use motor as this measuring head of weight.In addition, following patent document 1 discloses the basic technology identical with above-mentioned routine techniques.
Patent document 1:JP-A-9-298224
Summary of the invention
The problem that the present invention solves
Yet, have following problems as the structure of the conventionally test equipment of probe device and so on, wherein the weight of measuring head is by motor and gear support.Just, be used to carry the gear of the driving force of motor to increase.Equally, gear is arranged to multistage structure.As a result, the complex structure of this equipment.The cost of this equipment increases.Equally, because measuring head is around the gear upset that increases, so can't reduce the radius that overturns.The installing space of probe device increases.
The method of dealing with problems
Realize the present invention, addressing the above problem, and its purpose is, a turning device for heavy object is provided, and under the situation of the gear that does not use increase, it can reduce the length of axis direction of the rotating shaft of driver element, and has the parts of lesser amt.
Can realize the present invention by following structure or method.
(1) has the turning device for heavy object of pivoted arm and driver element, this pivoted arm is connected on the weight and around fulcrum and overturns, this driver element is suitable for driving this pivoted arm upset, it is characterized in that, comprise the planetary gear type reduction gearing, this reduction gearing has fixed part, rotate the importation, perpendicular to the rotation output of the quadrature plane surface of the axle by fulcrum be arranged on fixed part and rotate a pair of roller bearing between the output, orthogonal axes reduction gearing structure makes output shaft be positioned on the axle of described planet-shaped reduction gearing, and input shaft is perpendicular to this axle, and motor configuration makes motor shaft be parallel to the setting of quadrature plane surface, its feature also is, this pivoted arm has first plane surface on the quadrature plane surface that is connected to described rotation output, and has second plane surface, this second plane surface is connected on the described weight and places than the more close weight side of axle by fulcrum, and have second plane surface perpendicular to first plane surface, and this pivoted arm and this driver element are being arranged in the width of weight on the direction of the axle of the fulcrum of its upset by described weight.
(2) preferably, this turning device for heavy object of the present invention also comprises the shelf that supporting base that described driver element is fixed to the upper and described supporting base are placed on it, and it is characterized in that recessed portion is formed in the described shelf, and described motor is contained in the female part.
(3) have the turning device for heavy object of pivoted arm and driver element, this pivoted arm is connected on the weight and around the fulcrum upset, this driver element is suitable for driving described pivoted arm upset.Preferably, this turning device for heavy object comprises the planetary gear type reduction gearing, this reduction gearing has fixed part, rotate the importation, have perpendicular to the rotation output of the quadrature plane surface of the axle by fulcrum and be arranged on fixed part and rotate a pair of roller bearing between the output, orthogonal axes reduction gearing structure makes, output shaft is positioned on the axle of described planetary gear type reduction gearing, and input shaft is perpendicular to this axle, and motor configuration makes motor shaft be parallel to the setting of quadrature plane surface.Equally, preferably, this pivoted arm has first plane surface on the quadrature plane surface that is connected to described rotation output, also has second plane surface perpendicular to this first plane surface.In addition, this pivoted arm and this driver element are being arranged in the width of weight on the direction of the axle of the fulcrum of its upset by described weight.
Advantage of the present invention
Turning device for heavy object of the present invention has above-mentioned structure.So the present invention has following advantage.Just, according to the present invention, provide the turning device for heavy object with pivoted arm and driver element, this pivoted arm is connected on the weight and around fulcrum and overturns, and this driver element is suitable for driving the pivoted arm upset.This turning device for heavy object is characterised in that, driver element has fixed part, rotates the importation, has rotation output and planetary gear type reduction gearing perpendicular to the quadrature plane surface of the axle that passes through fulcrum, this reduction gearing has a pair of roller bearing that is arranged between fixed part and the rotation output, orthogonal axes reduction gearing structure makes output shaft be positioned on the axle of described planet-shaped reduction gearing, and input shaft is perpendicular to this axle, and motor configuration makes motor shaft be parallel to the setting of quadrature plane surface.Equally, this turning device for heavy object is characterised in that, this pivoted arm has first plane surface on the quadrature plane surface that is connected to described rotation output, also has second plane surface perpendicular to this first plane surface, this second plane surface is connected on the weight and places than the more close weight side of axle by fulcrum, and this pivoted arm and driver element are being arranged in the width of weight on the direction of the axle of the fulcrum of its upset by weight.
Adopt this structure, this turning device for heavy object can be constructed feasible, turning device for heavy object can be compact, can reduce the length on the axis direction of the rotating shaft of driver element, on the axis direction of driver element, can guarantee space segment, and this pivoted arm and driver element are being arranged in the width of weight on the direction of the axle of the fulcrum of its upset by weight.
According to the present invention, this turning device for heavy object is provided, this turning device for heavy object also comprises the shelf that supporting base that driver element is fixed to the upper and supporting base are placed on it.Equally, this turning device for heavy object is characterised in that recessed portion is formed in this shelf, and motor is contained in this recessed portion.
Adopt this structure, except advantage of the present invention shown in the claim 1, the present invention also has this turning device for heavy object can compact advantage.
According to the present invention, the turning device for heavy object with pivoted arm and driver element is provided, this pivoted arm is connected on the weight and around the fulcrum upset, this driver element is suitable for driving this pivoted arm upset.This turning device for heavy object is characterised in that, this driver element has fixed part, rotates the importation, perpendicular to the rotation output of the quadrature plane surface of the axle by fulcrum, with the planetary gear type reduction gearing, this reduction gearing has a pair of roller bearing that is arranged between fixed part and the rotation output, orthogonal axes reduction gearing structure makes output shaft be positioned on the axle of described planet-shaped reduction gearing, and input shaft is perpendicular to this axle, and motor configuration makes motor shaft be parallel to the setting of quadrature plane surface.Equally, this turning device for heavy object is characterised in that, this pivoted arm has first plane surface on the quadrature plane surface that is connected to described rotation output, also has second plane surface perpendicular to this first plane surface, this second plane surface is connected on the weight and places than the more close weight side of axle by fulcrum, and this pivoted arm and driver element are being arranged in the width of weight on the direction of the axle of the fulcrum of its upset by weight.
Adopt this structure, this turning device for heavy object can be constructed and be made that this turning device for heavy object can be compact, can reduce the length on the axis direction of the rotating shaft of driver element, on the axis direction of driver element, can guarantee space segment, and pivoted arm and driver element are being arranged in the width of weight on the direction of the axle of the fulcrum of its upset by weight.
Accompanying drawing is briefly described
Accompanying drawing 1 is a front elevation, and the preferred example of the pattern that is used to realize turning device for heavy object of the present invention has been described.
Accompanying drawing 2 is front elevations, and the preferred example that is used to realize the pattern of turning device for heavy object shown in the accompanying drawing 1 of the present invention has been described.
Accompanying drawing 3 is the side views along the direction of arrow E shown in the accompanying drawing 2, and shelf (stand) and driver element in the preferred embodiment of turning device for heavy object of the present invention have been described.
Accompanying drawing 4 is vertical sectional view, and first embodiment of turning device for heavy object of the present invention has been described.
Accompanying drawing 5 is the side views along the direction of arrow F shown in the accompanying drawing 1, and first embodiment of turning device for heavy object of the present invention has been described.
Accompanying drawing 6 is vertical sectional view, and second embodiment of turning device for heavy object of the present invention has been described.
Accompanying drawing 7 is the cut-open views along arrow G shown in the accompanying drawing 6-G direction.
Accompanying drawing 8 is the side views along the direction of arrow F shown in the accompanying drawing 1, and second embodiment of turning device for heavy object of the present invention has been described.
Realize optimal mode of the present invention
Hereinafter, describe each embodiment of turning device for heavy object of the present invention below in detail with reference to accompanying drawing.
As shown in for example accompanying drawing 1, probe device 1 comprises that formation is suitable for carrying out the probe unit probe device body of electrical testing (hereafter is " apparatus body ") 2 on the test target of for example semiconductor wafer and so on, shelf 3 with the adjacent setting in left side of apparatus body 2, play and be suitable between apparatus body 2 and retaining zone 4, overturning near the measuring head 5 and the abutment ring 8 of 180 ° weight effect by shelf 3.Semiconductor wafer conveying equipment 9 is arranged on the right side of apparatus body 2, this semiconductor wafer conveying equipment is suitable for semiconductor wafer is contained in the box (cassette), and be suitable for semiconductor wafer is loaded from box one by one, and be suitable for semiconductor wafer unloading one by one from probe unit.
Equally, the probe (not shown) is arranged in the center pit (not shown) of a plate (head plate) 10 of top board (ceiling) of constitution equipment body 2.When measuring head 5 rotated and is positioned at apparatus body 2 tops, this measuring head 5 was electrically connected to by abutment ring 8 on the splicing ear on the top surface that is arranged on probe.So, probe device 1 structure makes, for example for example receive test signal at the electrode that is positioned over the semiconductor wafer on the table top and probe place, on each is arranged at IC chip on the semiconductor wafer, carry out electrical testing then from tester by measuring head 5 and probe.
As shown in accompanying drawing 2, measuring head 5 is fixed to by pivoted arm 11 in the rotating shaft of driver element 12, the second plane surface 11b that this pivoted arm has the first plane surface 11a and forms perpendicular to this first plane surface 11a.So measuring head 5 can rotate by rotating shaft.This pivoted arm 11 rotates around the fulcrum on the axle A of the rotating shaft that is arranged on driver element 12.This pivoted arm 11 of driver element 12 rotating drive, and be arranged on by supporting base 13 on the top surface of support 3.This supporting base 13 has first and connects surperficial 13a, this first connects the surface and is connected on the driver element 12 or is connected on the connection plane surface of fixed part of the planetary gear type reduction gearing that is contained in the driver element 12 just (referring to accompanying drawing 4) on the stationary housings 28.This supporting base 13 also has the second surperficial 13b of connection and a pair of floor part 13c, the 13c perpendicular to the surperficial 13a of first connection, and this floor part is connected to first two outer end portion that connect surface 13 on two outer end portion of the surperficial 13b of second connection.
As shown in accompanying drawing 1, cutting part 28a, 28a are respectively formed at this part place to the place, side of floor part 13c, 13c of the outer radius portion of driver element 12, perhaps play the fixed part (referring to accompanying drawing 4) of planetary gear type reduction gearing of the effect of late phase reduction gearing 26, just the part place of stationary housings 28.Owing to prescinded cutting part 28a, 28a, this cutting part is respectively formed at this of outer radius portion of planetary gear type reduction gearing to floor 13c, 13c, the part place at the side of stationary housings 28 place just, so do not increasing under second plane surface and the situation by the distance between the axle A of fulcrum, just under situation about not increasing, can strengthen first of supporting base 13 to floor part 13c, 13c by this and connect surperficial 13a and be connected surperficial 13b with second as the counter-rotating radius at the weight place of measuring head and so on.As a result, can strengthen this supporting base 13.
In accompanying drawing 1, shelf 3 mounting base mounted thereto of control module is held in Reference numeral 14 expression.Reference numeral 15,15 expression bolts.Bolt 15,15 is inserted among unloading hole 15a, the 15a shown in accompanying drawing 2 and 3, and this unloading hole is formed on second and connects among the surperficial 13b, and slight elongation.Like this, the surperficial 13b located lateral of this second connection.So supporting base 13 is fixed on the shelf 3.The orthogonal axes reduction gearing orthogonal axes reduction gearing 6 that plays the front reduction gear gearing is arranged on the front of back reduction gearing 26.This orthogonal axes reduction gearing 6 has a structure, wherein the output shaft of this orthogonal axes reduction gearing 6 the planetary gear type reduction gearing the axle A on, and wherein orthogonal axes reduction gearing 6 input shaft perpendicular to the planetary gear type reduction gearing the axle A.This orthogonal axes reduction gearing 6 is made of hypoid reduction gearing or worm gear reducer gear.Reference numeral 16 expression is configured to be placed on the motor on the basal surface of orthogonal axes reduction gearing 6.The bottom of this motor 16 is arranged between gear 6 and the shelf 3.The motor shaft of motor 16 is connected on the gear parts, and this gear parts comprises the hypoid gear or the worm gear of orthogonal axes reduction gearing 6.The recessed portion 3b that comprises the hole is formed among the top surface 3a of shelf 3.The part of driver element 12, just motor 16, are contained among this recessed portion 3b.
As shown in accompanying drawing 2 and 3, the first plane surface 11a of pivoted arm 11 is connected on the rotation output of driver element 12.As shown in accompanying drawing 5 and 8, for example four lines elongated hole 11c, 11c ... hole in the part of pivoted arm 11, this part is positioned at the place, side of the second plane surface 11b.Like this, the bolt (not shown) is screwed to elongated hole 11c, 11c ... in.By with the position adjustments in the above-below direction of pivoted arm to the position of measuring head 5, thereby pivoted arm 11 is fixed on the measuring head 5.
First embodiment
Next, describe first embodiment of turning device for heavy object of the present invention below in detail with reference to attached Figure 4 and 5.
The described driver element 12 of first embodiment shown in the accompanying drawing is examples, wherein being contained in wherein reducing gear comprises and the planetary gear type reduction gearing of the effect of playing back reduction gearing 26 also comprises the hypoid reduction gearing 17 that plays the effect of front reduction gear mechanism.
Next, be described below back reduction gearing 26.
Because internal-gear mainly is arranged in the inner circumferential portion, so this back reduction gearing 26 has cylindrical inner-toothed gear element 28, this inner-toothed gear element plays the effect with stationary housings of alligator 30c2 effect in several.Back reduction gearing 26 also has a pair of external tooth gear 30c, and this external tooth gear is the external tooth gear with peritrochoid (peritrochoidal) form, the interior alligator 30c2 engagement of it and inner-toothed gear element 28, and this external tooth gear is suitable for eccentric swing.Back reduction gearing 26 also has the pinion wheel 26b that is formed on the armature spindle 26a that plays the rotation importation, play the axle 29 that rotates output, with the planetary gear type reduction gearing 31 with main bearing 30b, 30b, this main bearing plays the effect that is arranged on a pair of front and back roller bearing between inner-toothed gear element 28 and the axle 29.This armature spindle 26a is connected on one of them hypoid gear 19.Axle 29 has the first end plate 29a that its external peripheral surface engages with front main bearing 30a, with the second end plate 29c, this second end plate has loosely and is installed in leg portion 29b in the inner-toothed gear element 28, and the external peripheral surface of this second end plate 29c engages with rear min bearing 30b.Step-like cylinder connecting elements 27 usefulness bolt 27b are adjacent to be connected on the front surface of inner-toothed gear element 28.
Like this, the first end plate 29a and the second end plate 29c with leg portion 29b are adjacent to be connected to each other with tapered pin (not shown) and bolt 32, and this tapered pin joins among the axis hole 29d that is formed among the first end plate 29a and the second end plate 29c.Preceding pinion wheel 26b and the spur gear 29g engagement that is arranged on the bent axle 29f.This bent axle 29f is by the first end plate 29a and the second end plate 29c rotatably support, and engages with external tooth gear 30c by needle bearing 30c1.The rotation of armature spindle 26a is slowed down between pinion wheel 26b and spur gear 29g, and passes to bent axle 29f.The rotation of bent axle 29f causes external tooth gear 30c eccentric swing, causes axle 29 to slow down simultaneously and exports rotation.The reduction gear ratio of back reduction gearing 26 is arranged to for example about 1/100.
Incidentally, in the accompanying drawings, Reference numeral 24 expression is arranged in the axle of connecting elements 27 bearing of armature spindle in the heart.This armature spindle 26a constructs rotationally.
So pivoted arm 11 usefulness bolt (not shown) are connected on the quadrature plane surface 29i of the second end plate 29c, this quadrature plane surface is perpendicular to the axle A of the fulcrum that passes through pivoted arm 11.And, this pivoted arm 11 has the first plane surface 11a, this first plane surface is connected to and plays on the axle 29 that rotates the output effect, promptly be connected on the plane surface of the second end plate 29c, and has second a plane surface 11b, this second plane surface is connected on the weight as measuring head 5 and so on, and perpendicular to the first plane surface 11a, and this first plane surface is positioned at than the axle A by fulcrum more near the position of weight side.As shown in accompanying drawing 2, pivoted arm 11 and driver element 12 are arranged in the width D of measuring head 5, and this measuring head plays the effect of the weight in the direction of axle A of the fulcrum that is placed on by pivoted arm 11.
Incidentally, dot-and-dash line C represents weight, just the center in the direction of the axle A of measuring head 5.So, turning device for heavy object can be constructed feasible, this turning device for heavy object compactness makes as the gravity central authorities of the weight of measuring head 5 and so on and the distance that is positioned between the fulcrum on the A reduce, and makes pivoted arm 11 and driver element 12 be positioned in the width D on the direction of the A by weight.By being arranged in the distance L of point of crossing P as the center C in the direction of the axle A of the fulcrum of the weight of measuring head 5 and so on, with contact angle α (°) favour this to main bearing 30b one of them line B with by this fulcrum the axle A intersects, this main bearing be placed on the rotation output vertical flat surface side place.Have been found that this contact angle α (°) preferably be arranged to 35 ° to 45 °.
Adopt this structure, can support weight in the mode of semi-girder as measuring head 5 and so on.Equally, this weight that can stably overturn.
As shown in accompanying drawing 4, bolt-inserting hole 11d, the 11d of slight elongation ... periphery around pivoted arm 11 is provided at predetermined intervals in the part of locating in the side of its first plane surface 11a.Like this, bolt 11e, the 11e shown in the accompanying drawing 5 ... engage and be screwed among the axis hole 29e.By on the direction of driver element 12, locating weight, and at above-below direction or transversely regulate it and move, thereby weight is fixed on the pivoted arm 11.Although be described in " realizing optimal mode of the present invention ", recessed portion 3b is formed among the top surface 3a of shelf 3 among first embodiment of this turning device for heavy object similarly.Part driver element 12, just motor 16 is contained in recessed portion 3n or the hole.
Next, be described below the operation of first embodiment of turning device for heavy object of the present invention.
Subsequently, its rotating speed moment of torsion of being reduced to the hypoid gear 19 of aforesaid first level passes to and plays the armature spindle 26a that rotates the importation effect.Armature spindle 26a rotates with the speed that is reduced by the hypoid reduction gearing 17 that plays the effect of front reduction gear mechanism.Like this, moment of torsion passes to spur gear 29g, and this spur gear meshes and engages with the pinion wheel 26b of the rear end that is formed on armature spindle 26a.The bent axle 29f that the rotation of this spur gear 29g causes having the crank section that is arranged on its basic center rotates, simultaneously by roller bearing 30e and 30d supporting on the adjacent front surface that is arranged on spur gear 29g.The moment of torsion of bent axle 29f passes to adjacent external tooth gear 30c, the 30c of two row.The rotating operation of each external tooth gear 30c, 30c all causes each rotation of slowing down among the first end plate 29a and the second end plate 29c, and this end plate has the leg portion 29b that plays the axle 29 that rotates output.In addition, this second end plate 29c bolt 11e, 11e ... be adjacent to be connected on the first plane surface 11a of pivoted arm 11, and drive this pivoted arm 11 decelerations.
So, be activated as the weight of measuring head and so on, with rotate from the position shown in the dotted line shown in the accompanying drawing 1 about 180 ° to position shown in the solid line.Then, measuring head 5 is electrically connected to by abutment ring 8 on the contact on the top surface that is arranged on probe.Measuring head 5 and the probe of probe device 1 by probe received test signal from tester at the electrode place that is arranged at the semiconductor wafer on the erecting bed.Then, on each IC chip of semiconductor wafer, carry out electrical testing.
So the rotating speed that back reduction gearing 26 will play the hypoid reduction gearing 17 of front reduction gear gearing for example is reduced to approximately (1/100) of its initial speed.Equally, back reduction gearing 26 for example is reduced to approximately (1/6000) of its initial speed with the rotating speed of motor 16.Perhaps, obtain high reduction gear ratio by dualratio reduction.So, can reduce each the external diameter in front reduction gear gear 17, back reduction gearing 26 and the motor 16.Therefore, can further reduce upset radius as the weight of measuring head 5 and so on.By internal part or the design size of member or the value that shape can be selected reduction gear ratio that planetary gear type reduction gearing 31 suitably is set.Equally, the length on the direction of the axle A of driver element can be provided with shortlyer.In addition, driver element 12 can be compact.
According to the present invention, by armature spindle 26a is fixed on the pivoted arm 11, can only use the front reduction gear gear, just only use single reduction gearing to construct this turning device for heavy object.
Second embodiment
Next, describe second embodiment of turning device for heavy object of the present invention below in detail with reference to accompanying drawing 6 to 8.
Second embodiment with reference to the accompanying drawings, the example of driver element 12 has been shown in described these accompanying drawings, the reducing gear that wherein is contained in wherein comprises the planetary gear type reduction gearing that plays back reduction gearing 26 effects, also comprises the worm gear reducer gear 20 that plays the effect of front reduction gear mechanism.This worm gear reducer gear 20 belongs to a kind of of orthogonal axes reduction gearing.
Worm-gear toothing reduction gearing 20 has the worm gear 21 with 23 engagements of worm gear pinion wheel.One side of worm gear 21 is connected on the armature spindle 26a of back reduction gearing 26.The opposite side of worm gear 21 is connected on the worm-wheel shaft 21a.The front end of worm gear 21a utilizes this by the bearing 20d rotatably support on the front surface 20f that is arranged on the gear outer cover 20a that plays the support effect.So, make that worm gear 21 is rotatable.
Incidentally, by bearing 20h and 20i are separately positioned on top 20g and the bottom 20b place of gear outer cover 20a, thereby make this worm gear pinion shaft 22 be subjected to rotatable support.Incidentally, this equipment has gives back reduction gearing 26 with the moment of torsion safe transfer that plays the motor shaft 16b of input shaft effect, and prevents that the moment of torsion of back reduction gearing 26 from passing to the so-called auto-lock function of motor shaft 16b.So, can strengthen the stability in the maintenance work.
Next, be described below back reduction gearing 26.
Because internal-gear mainly is arranged in the inner circumferential portion, this back reduction gearing 26 has cylindrical inner-toothed gear element 28, and this inner-toothed gear element plays the effect with stationary housings of alligator 30c2 in several.This back reduction gearing 26 also has a pair of external tooth gear 30c, and this external tooth gear is the external tooth gear with peritrochoid (peritrochoidal) form, the interior alligator 30c2 engagement of it and inner-toothed gear element 28, and be suitable for eccentric swing.This back reduction gearing 26 also has the pinion wheel 26b that is formed on on the importation armature spindle 26a that rotates, play the axle 29 that rotates the output effect, with planetary gear type reduction gearing 31, this planetary gear type reduction gearing has and plays main bearing 30b, the 30b that is arranged on inner-toothed gear element 28 and a pair of front and back roller bearing effect of axle between 20.Armature spindle 26a is connected on one of them hypoid gear 19.This 29 has the first end plate 29a that its external peripheral surface engages with front main bearing 30a, with the second end plate 29c, this second end plate has loosely and is installed in leg portion 29b in the inner-toothed gear element 28, and the external peripheral surface of this second end plate 29c engages with rear min bearing 30b.Step-like cylinder connecting elements 27 usefulness bolt 27b are adjacent to be connected on the front surface of inner-toothed gear element 28.
Like this, the first end plate 29a and the second end plate 29c with leg portion 29b are adjacent to be connected to each other with tapered pin (not shown) and bolt 32, and this tapered pin is bonded among the axis hole 29d that is formed among the first end plate 29a and the second end plate 29c.Should preceding pinion wheel 26b and the spur gear 29g engagement that is arranged on the bent axle 29f.This bent axle 29f is by the first end plate 29a and the second end plate 29c rotatably support, and engages with external tooth gear 30c by needle bearing 30c1.The rotation of armature spindle 26a is slowed down between pinion wheel 26b and spur gear 29g, and passes to bent axle 29f.The rotation of bent axle 29f causes external tooth gear 30c eccentric swing, also causes axle 29 to slow down and exports rotation.The reduction gear ratio of back reduction gearing 26 is arranged to for example about 1/100.
So pivoted arm 11 usefulness bolt (not shown) are connected on the quadrature plane surface 29i of the second end plate 29c, this quadrature plane surface is perpendicular to the axle A of the fulcrum that passes through pivoted arm 11.And, pivoted arm 11 has the first plane surface 11a, this first plane surface is connected to and plays on the axle 29 that rotates the output effect, promptly be connected on the plane surface of the second end plate 29c, and has second a plane surface 11b, this second plane surface is connected on the weight as measuring head 5 and so on, and perpendicular to the first plane surface 11a, and this first plane surface is positioned at than the axle A by fulcrum more near the position of weight side.As shown in accompanying drawing 2, pivoted arm 11 and driver element 12 are arranged in the width D of measuring head 5, and this measuring head plays the effect of the weight on the direction of axle A of the fulcrum that is placed on by pivoted arm 11.
Incidentally, dot-and-dash line C represents weight, just the center on the axle A direction of measuring head 5.So, turning device for heavy object can be constructed and be made this turning device for heavy object compactness, reduce as the center of gravity central authorities of the weight of measuring head 5 and so on and the distance that is positioned between the fulcrum on the A, and pivoted arm 11 and driver element 12 are positioned in the width D on the direction of the axle A by weight.
Incidentally, by being arranged in the P distance L of point of crossing as the center C on the direction of the axle A of the fulcrum of the weight of measuring head 5 and so on, favour at place, this point of crossing this among the main bearing 30b one of them line B with contact angle α (°) intersect with an axle A by fulcrum, this line is placed on the vertical flat surface side place of rotation output.Have been found that this contact angle α (°) preferably be arranged to 35 ° to 45 °.
Adopt this structure, can be with the weight of semi-girder form supporting as measuring head 5 and so on.Equally, this weight that can stably overturn.
As shown in accompanying drawing 6, bolt-inserting hole 11d, the 11d of slight elongation ... be arranged in the part at place, side of its first plane surface 11a with the rotate periphery of arm 11 of desirable spaced ring.Like this, bolt 11e, the 11e shown in the accompanying drawing 8 ... engage and be screwed among the axis hole 29e.By location weight on the direction of driver element 12 and at above-below direction or transversely regulate it and move, thereby weight is fixed on the pivoted arm 11.Although be described in " realizing optimal mode of the present invention ", in second embodiment of this turning device for heavy object, recessed portion 3b is formed among the top surface 3a of shelf 3 similarly.The part of driver element 12, just motor 16 is contained in recessed portion 3b or the hole.
Next, be described below the operation of second embodiment of turning device for heavy object of the present invention.
Subsequently, its rotating speed moment of torsion of being reduced to the worm gear 21 of aforesaid first level passes to and plays the armature spindle 26a that rotates the importation.Armature spindle 26a rotates with the speed that is reduced by the worm-gear toothing reduction gearing 20 that plays the effect of front reduction gear mechanism.Like this, this moment of torsion passes to spur gear 29g, and this spur gear meshes and engages with the pinion wheel 26b of the rear end that is formed on armature spindle 26a.The bent axle 29f that the rotation of spur gear 29g causes having the crank section that is arranged on its basic center rotates, and is subjected to roller bearing 30e and 30d supporting on the adjacent front surface that is arranged on spur gear 29g simultaneously.The moment of torsion of bent axle 29f passes to adjacent external tooth gear 30c, the 30c of two row.The rotating operation of each external tooth gear 30c, 30c all causes each rotation of slowing down among the first end plate 29a and the second end plate 29c, and this end plate has the leg portion 29b that plays the axle 29 that rotates the output effect.In addition, second end plate 29c bolt 11e, 11e ... be adjacent to be connected on the first plane surface 11a of pivoted arm 11, and drive pivoted arm 11 to slow down.
So, drive weight as measuring head and so on, with rotate from the position shown in the dotted line about 180 to the accompanying drawing 1 position shown in the solid line.Then, measuring head 5 is electrically connected to by abutment ring 8 on the contact on the top surface that is arranged on probe.Measuring head 5 and the probe of probe device 1 by probe received test signal from tester at the electrode place that is arranged on the semiconductor wafer on the erecting bed.Then, on each IC chip of semiconductor wafer, carry out electrical testing.
So the rotating speed that back reduction gearing 26 will play the worm-gear toothing reduction gearing 20 of front reduction gear gearing is reduced to about (1/100) of its initial speed.Equally, back reduction gearing 26 is reduced to for example about (1/6000) of its initial speed with the rotating speed of motor 16.In addition, obtain high reduction gear ratio by dualratio reduction.So the external diameter of each in front reduction gear gear 17, back reduction gearing 26 and the motor 16 can reduce.Therefore, can further reduce upset radius as the weight of measuring head 5 and so on.The internal part by planetary gear type reduction gearing 31 suitably is set or the design size or the shape of member can be selected the value of reduction gear ratio.Equally, the length on the axle A direction of driver element can be provided with shortlyer.In addition, driver element 12 can be compact.
According to the present invention, by armature spindle 26a is fixed on the pivoted arm 11, can only use the front reduction gear gear, just only use single reduction gearing, construct this turning device for heavy object.
Claims (3)
1. the turning device for heavy object that has pivoted arm and driver element, this pivoted arm is connected on the weight and around fulcrum and overturns, this driver element is suitable for driving described pivoted arm upset, it is characterized in that, described driver element has fixed part, rotate the importation, rotate output and planetary gear type reduction gearing, this rotation output has the quadrature plane surface perpendicular to the axis that passes through fulcrum, this planetary gear type reduction gearing has a pair of roller bearing that is arranged between fixed part and the rotation output, the orthogonal axes reduction gearing, this orthogonal axes reduction gearing is configured such that the output axis is positioned on the axis of described planet-shaped reduction gearing, and input shaft is perpendicular to this axis, and motor, this electrical mechanisms causes and makes motor shaft be parallel to the setting of quadrature plane surface, and
Described pivoted arm has first plane surface and perpendicular to second plane surface of this first plane surface, described first plane surface is connected on the quadrature plane surface of described rotation output, this second plane surface is connected on the described weight and is placed on weight side by the axis of fulcrum, and described pivoted arm and described driver element are being arranged in the width of weight on the axis direction of the fulcrum of its upset by described weight.
2. turning device for heavy object as claimed in claim 1, it is characterized in that, also comprise the shelf that supporting base that described driver element is fixed to the upper and described supporting base are placed on it, and in described shelf, form recessed portion, and described motor is contained in the female part.
3. the turning device for heavy object that has pivoted arm and driver element, this pivoted arm is connected on the weight and around fulcrum and overturns, this driver element is suitable for driving described pivoted arm upset, it is characterized in that, described driver element has fixed part, rotate the importation, rotate output and planetary gear type reduction gearing, this rotation output has the quadrature plane surface perpendicular to the axis that passes through fulcrum, this reduction gearing has a pair of roller bearing that is arranged between fixed part and the rotation output, the orthogonal axes reduction gearing, this orthogonal axes reduction gearing be configured such that axle that output shaft is positioned at described planetary gear type reduction gearing is gone up and input shaft perpendicular to this axle, and motor, this electrical mechanisms causes and makes motor shaft be parallel to the setting of quadrature plane surface, and described pivoted arm has first plane surface on the quadrature plane surface that is connected to described rotation output, also have second plane surface, and described pivoted arm and described driver element are being arranged in the width of weight on the axis direction of the fulcrum of its upset by described weight perpendicular to this first plane surface.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP255107/2004 | 2004-09-02 | ||
| JP2004255107 | 2004-09-02 | ||
| JP169492/2005 | 2005-06-09 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101010595A CN101010595A (en) | 2007-08-01 |
| CN100582800C true CN100582800C (en) | 2010-01-20 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200580029555 Active CN100582800C (en) | 2004-09-02 | 2005-09-02 | Turning device for heavy object |
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| Country | Link |
|---|---|
| CN (1) | CN100582800C (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2013136842A1 (en) * | 2012-03-16 | 2013-09-19 | 住友重機械工業株式会社 | Drive method and turning device for heavy turning body |
| CN107902375B (en) * | 2017-12-28 | 2023-10-31 | 鄱阳县加西亚电子电器有限公司 | Automatic turning device of circuit breaker assembly line |
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2005
- 2005-09-02 CN CN 200580029555 patent/CN100582800C/en active Active
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| Publication number | Publication date |
|---|---|
| CN101010595A (en) | 2007-08-01 |
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