CN104251979B - 磁场方向传感器 - Google Patents
磁场方向传感器 Download PDFInfo
- Publication number
- CN104251979B CN104251979B CN201410285925.5A CN201410285925A CN104251979B CN 104251979 B CN104251979 B CN 104251979B CN 201410285925 A CN201410285925 A CN 201410285925A CN 104251979 B CN104251979 B CN 104251979B
- Authority
- CN
- China
- Prior art keywords
- array
- angle
- magnetoresistive element
- magnetic
- relative
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000004044 response Effects 0.000 claims description 33
- 238000000034 method Methods 0.000 claims description 12
- 230000003993 interaction Effects 0.000 claims description 5
- 230000015572 biosynthetic process Effects 0.000 claims description 4
- 230000005611 electricity Effects 0.000 claims description 3
- 239000000463 material Substances 0.000 description 12
- 230000005415 magnetization Effects 0.000 description 10
- 239000000758 substrate Substances 0.000 description 9
- 238000003491 array Methods 0.000 description 6
- 230000008859 change Effects 0.000 description 6
- 238000012545 processing Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 230000003321 amplification Effects 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 230000003111 delayed effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 235000013399 edible fruits Nutrition 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/16—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying resistance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/0005—Geometrical arrangement of magnetic sensor elements; Apparatus combining different magnetic sensor types
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/0094—Sensor arrays
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/09—Magnetoresistive devices
Abstract
Description
Claims (16)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US13/931,148 US9377327B2 (en) | 2013-06-28 | 2013-06-28 | Magnetic field direction sensor |
US13/931,148 | 2013-06-28 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN104251979A CN104251979A (zh) | 2014-12-31 |
CN104251979B true CN104251979B (zh) | 2017-08-01 |
Family
ID=50979640
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201410285925.5A Active CN104251979B (zh) | 2013-06-28 | 2014-06-24 | 磁场方向传感器 |
Country Status (3)
Country | Link |
---|---|
US (1) | US9377327B2 (zh) |
EP (1) | EP2818883A3 (zh) |
CN (1) | CN104251979B (zh) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6352195B2 (ja) * | 2015-01-14 | 2018-07-04 | Tdk株式会社 | 磁気センサ |
US10551215B2 (en) | 2015-06-11 | 2020-02-04 | Analog Devices Global Unlimited Company | Systems, circuits and methods for determining a position of a movable object |
US10145906B2 (en) | 2015-12-17 | 2018-12-04 | Analog Devices Global | Devices, systems and methods including magnetic structures |
US10276787B2 (en) | 2016-02-11 | 2019-04-30 | Texas Instruments Incorporated | Integrated anisotropic magnetoresistive device |
US11294003B2 (en) | 2016-03-23 | 2022-04-05 | Analog Devices International Unlimited Company | Magnetic field detector |
JP6799450B2 (ja) * | 2016-12-12 | 2020-12-16 | 株式会社東海理化電機製作所 | 磁気センサ |
WO2018173590A1 (ja) * | 2017-03-23 | 2018-09-27 | 日本電産株式会社 | 磁気センサユニット及びそれを用いた磁界方向検出方法 |
US10782154B2 (en) * | 2017-06-26 | 2020-09-22 | Texas Instruments Incorporated | Tilted segmented anisotropic magneto-resistive angular sensor |
US10739165B2 (en) | 2017-07-05 | 2020-08-11 | Analog Devices Global | Magnetic field sensor |
US10365123B2 (en) * | 2017-07-21 | 2019-07-30 | Texas Instruments Incorporated | Anisotropic magneto-resistive (AMR) angle sensor |
JP2021036199A (ja) * | 2017-10-06 | 2021-03-04 | 株式会社村田製作所 | 磁気センサ及び電流センサ |
JP6877379B2 (ja) * | 2018-03-14 | 2021-05-26 | 株式会社東芝 | センサ |
CN109752678B (zh) * | 2019-01-10 | 2021-10-19 | 东南大学 | 一种简易各向异性薄膜磁阻传感器 |
US11454437B2 (en) | 2019-04-08 | 2022-09-27 | Ii-Vi Delaware, Inc. | Frozen substance maker |
JP6997892B2 (ja) * | 2021-03-02 | 2022-01-18 | 株式会社東芝 | センサ |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4438715C1 (de) * | 1994-10-29 | 1996-05-30 | Inst Mikrostrukturtechnologie | Magnetfeldsensorchip |
DE19810838A1 (de) * | 1998-03-12 | 1999-09-16 | Siemens Ag | Sensorsubstrat für mangetoresistive Sensoren mit einer Substratschicht und darauf angeordneten Sensorelementen |
DE19843348A1 (de) * | 1998-09-22 | 2000-03-23 | Bosch Gmbh Robert | Magnetoresistives Sensorelement, insbesondere Winkelsensorelement |
US6100686A (en) * | 1997-06-13 | 2000-08-08 | U.S. Philips Corporation | Magnetic field sensor with double wheatstone bridge having magneto-resistive elements |
CN1204411C (zh) * | 2000-07-13 | 2005-06-01 | 皇家菲利浦电子有限公司 | 具有几个传感元件的磁阻角传感器 |
CN101180519A (zh) * | 2005-03-23 | 2008-05-14 | 霍尼韦尔国际公司 | 利用多个旋转构造的磁性传感器的角度位置检测 |
CN101526589A (zh) * | 2008-03-04 | 2009-09-09 | 陈艳 | 一种磁体磁场角度测量系统和测量方法 |
CN202013413U (zh) * | 2011-04-06 | 2011-10-19 | 江苏多维科技有限公司 | 单一芯片桥式磁场传感器 |
CN102830373A (zh) * | 2012-09-05 | 2012-12-19 | 复旦大学 | 一种使用45度角的三维各向异性磁场传感器及其制造方法 |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2551321B2 (ja) * | 1993-04-21 | 1996-11-06 | 日本電気株式会社 | 集積化磁気抵抗効果センサ |
DE19839446A1 (de) | 1998-08-29 | 2000-03-02 | Bosch Gmbh Robert | Anordnung zur Drehwinkelerfassung eines drehbaren Elements |
DE19839450B4 (de) | 1998-08-29 | 2004-03-11 | Institut für Mikrostrukturtechnologie und Optoelektronik (IMO) e.V. | Magnetoresistiver Sensorchip mit mindestens zwei als Halb- oder Vollbrücke ausgebildeten Meßelementen |
DE19852502A1 (de) * | 1998-11-13 | 2000-05-18 | Philips Corp Intellectual Pty | Verfahren zur Offset-Kalibrierung eines magnetoresistiven Winkelsensors |
JP3321768B2 (ja) | 1999-07-23 | 2002-09-09 | ティーディーケイ株式会社 | トンネル磁気抵抗効果素子 |
US6984978B2 (en) | 2002-02-11 | 2006-01-10 | Honeywell International Inc. | Magnetic field sensor |
JP4016857B2 (ja) * | 2002-10-18 | 2007-12-05 | ヤマハ株式会社 | 磁気センサ及びその製造方法 |
DE10308030B4 (de) * | 2003-02-24 | 2011-02-03 | Meas Deutschland Gmbh | Magnetoresistiver Sensor zur Bestimmung eines Winkels oder einer Position |
US7492554B2 (en) * | 2005-01-21 | 2009-02-17 | International Business Machines Corporation | Magnetic sensor with tilted magnetoresistive structures |
EP1860451B1 (en) * | 2005-03-17 | 2012-06-27 | Yamaha Corporation | 3-axis magnetic sensor and manufacturing method thereof |
DE102007041230B3 (de) | 2007-08-31 | 2009-04-09 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Kalibrierbarer mehrdimensionaler magnetischer Punktsensor sowie entsprechendes Verfahren und Computerprogramm dafür |
JP5170679B2 (ja) * | 2008-01-29 | 2013-03-27 | 日立金属株式会社 | 磁気センサおよび回転角度検出装置 |
US8486723B1 (en) * | 2010-08-19 | 2013-07-16 | MCube Inc. | Three axis magnetic sensor device and method |
EP2264476B1 (en) | 2009-06-17 | 2012-02-15 | Nxp B.V. | Magnetic field sensor |
EP2634592B1 (en) | 2009-07-22 | 2015-01-14 | Allegro Microsystems, LLC | Circuits and methods for generating a diagnostic mode of operation in a magnetic field sensor |
US8947082B2 (en) | 2011-10-21 | 2015-02-03 | University College Cork, National University Of Ireland | Dual-axis anisotropic magnetoresistive sensors |
US20140028307A1 (en) * | 2012-07-26 | 2014-01-30 | Udo Ausserlechner | Magnetoresistive sensor systems and methods having a yaw angle between premagnetization and magnetic field directions |
-
2013
- 2013-06-28 US US13/931,148 patent/US9377327B2/en active Active
-
2014
- 2014-06-23 EP EP20140173535 patent/EP2818883A3/en not_active Withdrawn
- 2014-06-24 CN CN201410285925.5A patent/CN104251979B/zh active Active
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4438715C1 (de) * | 1994-10-29 | 1996-05-30 | Inst Mikrostrukturtechnologie | Magnetfeldsensorchip |
US6100686A (en) * | 1997-06-13 | 2000-08-08 | U.S. Philips Corporation | Magnetic field sensor with double wheatstone bridge having magneto-resistive elements |
DE19810838A1 (de) * | 1998-03-12 | 1999-09-16 | Siemens Ag | Sensorsubstrat für mangetoresistive Sensoren mit einer Substratschicht und darauf angeordneten Sensorelementen |
DE19843348A1 (de) * | 1998-09-22 | 2000-03-23 | Bosch Gmbh Robert | Magnetoresistives Sensorelement, insbesondere Winkelsensorelement |
CN1204411C (zh) * | 2000-07-13 | 2005-06-01 | 皇家菲利浦电子有限公司 | 具有几个传感元件的磁阻角传感器 |
CN101180519A (zh) * | 2005-03-23 | 2008-05-14 | 霍尼韦尔国际公司 | 利用多个旋转构造的磁性传感器的角度位置检测 |
CN101526589A (zh) * | 2008-03-04 | 2009-09-09 | 陈艳 | 一种磁体磁场角度测量系统和测量方法 |
CN202013413U (zh) * | 2011-04-06 | 2011-10-19 | 江苏多维科技有限公司 | 单一芯片桥式磁场传感器 |
CN102830373A (zh) * | 2012-09-05 | 2012-12-19 | 复旦大学 | 一种使用45度角的三维各向异性磁场传感器及其制造方法 |
Also Published As
Publication number | Publication date |
---|---|
EP2818883A2 (en) | 2014-12-31 |
CN104251979A (zh) | 2014-12-31 |
US9377327B2 (en) | 2016-06-28 |
US20150002142A1 (en) | 2015-01-01 |
EP2818883A3 (en) | 2015-04-22 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN104251979B (zh) | 磁场方向传感器 | |
JP5500785B2 (ja) | 磁気センサ | |
US10648787B2 (en) | Rotating field sensor | |
EP2696209B1 (en) | Single-chip push-pull bridge-type magnetic field sensor | |
CN101995558B (zh) | 磁性传感器 | |
JP4807535B2 (ja) | 磁気センサ | |
JP5590349B2 (ja) | 磁気センサシステム | |
EP3029479B1 (en) | Singlechip push-pull bridge type magnetic field sensor | |
US9200884B2 (en) | Magnetic sensor system including three detection circuits | |
WO2012116659A1 (zh) | 独立封装的桥式磁场角度传感器 | |
US20160169707A1 (en) | Rotating field sensor | |
JP6331176B1 (ja) | 角度センサシステム | |
JP2014516406A (ja) | 単一チップブリッジ型磁界センサおよびその製造方法 | |
TWI665460B (zh) | 磁場感測元件以及磁場感測裝置 | |
WO2013057863A1 (ja) | 磁気センサ | |
KR20070087628A (ko) | 조정 가능한 특성을 지닌 브릿지-유형의 센서 | |
CN203587785U (zh) | 单芯片推挽桥式磁场传感器 | |
US11009562B2 (en) | Magnetic field sensing apparatus | |
US11940506B2 (en) | Magnetic sensor | |
US11061085B2 (en) | Magnetic field sensing apparatus | |
JP5989257B2 (ja) | 磁気検出装置 | |
US20180321334A1 (en) | Tmr high-sensitivity single-chip push-pull bridge magnetic filed sensor | |
US11231304B2 (en) | Magnetic field sensor and magnetic field sensing method | |
JP4773066B2 (ja) | 歯車センサ | |
TW202008002A (zh) | 磁場感測裝置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
ASS | Succession or assignment of patent right |
Owner name: ANALOG DEVICES, INC. Free format text: FORMER OWNER: ANALOG DEVICES TECHNOLOGY COMPANY Effective date: 20150105 |
|
C10 | Entry into substantive examination | ||
C41 | Transfer of patent application or patent right or utility model | ||
SE01 | Entry into force of request for substantive examination | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20150105 Address after: Bermuda (UK) Hamilton Applicant after: ANALOG DEVICES GLOBAL Address before: Bermuda (UK) Hamilton Applicant before: Analog Devices Global |
|
GR01 | Patent grant | ||
GR01 | Patent grant | ||
CP03 | Change of name, title or address | ||
CP03 | Change of name, title or address |
Address after: Limerick Patentee after: Analog Devices Global Unlimited Co. Address before: Bermuda (UK) Hamilton Patentee before: Analog Devices Global |
|
TR01 | Transfer of patent right |
Effective date of registration: 20210805 Address after: Limerick Patentee after: ANALOG DEVICES INTERNATIONAL UNLIMITED Co. Address before: Limerick Patentee before: Analog Devices Global Unlimited Co. |
|
TR01 | Transfer of patent right |