CN104236464A - Laser vibration displacement sensor and measuring method thereof - Google Patents
Laser vibration displacement sensor and measuring method thereof Download PDFInfo
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Abstract
The invention provides a laser vibration displacement sensor and a measuring method of the laser vibration displacement sensor. A laser device emits laser, the laser is projected to a vibration object through a collimation system, perpendicularly scattered light returns to the laser device through the collimation system, and then a self-mixing interference system is formed. A detector measures the output power of the laser device and enables high-frequency vibration measurement of the vibration object to be achieved through signal modulation. The light enters a focusing system through diagonal scattering of the vibration object, positions of focusing light spots are obtained on the scattering detector in order to form a laser triangulation structure, the absolute distance of the object can be obtained in an inversion mode through the positions of the light spots on the scattering detector, and low-frequency displacement change of the vibration object can be measured. According to the laser vibration displacement sensor and the measuring method of the laser vibration displacement sensor, organic combination of the laser triangulation and the laser self-mixing technology is achieved under the situation that systematic complexity is not increased, and the functions of measuring high-frequency vibration and low-frequency displacement change are achieved.
Description
Technical field
The invention belongs to field of precision measurement, relate to a kind of vibration, displacement transducer, particularly a kind of in conjunction with laser from the vibration of hybrid technology and laser triangulation, displacement transducer and measuring method thereof.
Background technology
Laser triangulation is widely used in fields of measurement, mainly carries out distance, the measurements such as displacement; But for the vibration change that frequency is higher, then, under requiring that detector C CD/CMOS is operated in high frame per second state, high frame per second certainly will reduce the time shutter, affects image resolution ratio.In addition, under detector C CD/CMOS is operated in the driving frequency of 10MHz, if pixel is 2K, then detector frame per second is 5KHz, and for vibration, one-period measures ten points, then maximum vibration frequency is 500Hz; Thus laser triangulation is comparatively difficult higher than the vibration of 500Hz for frequency.
Laser is simple from hybrid technology structure, only need laser instrument and detector just can form vibration-detection system, but according to the conclusion of Zhang Yuyan PhD dissertation " based on the displacement of LD self-mixed interference and the research of speed measurement techniques " chapter 5, laser is not high for low speed (being less than 70mm/s) measuring accuracy from hybrid technology.And for low-frequency vibration, corresponding speed is general not high, so laser haves much room for improvement for low frequency vibration measurement from hybrid technology.
In addition, the laser instrument requirement that laser adopts from hybrid technology, the single vertical film of general employing runs, linewidth requirements is less than 1GHz, the semiconductor laser of the several mW of output power, but the visible laser meeting these conditions is less, and the low-cost semiconductor laser device for communication of volume production is generally at infrared band.
Summary of the invention
The invention provides a kind of laser vibrometer, displacement transducer and measuring method thereof, the measurement of the wide vibration frequency range of 0Hz ~ 20kHz can be realized.Its technical scheme is as described below:
A kind of laser vibrometer, displacement transducer, comprise optical system and Circuits System;
Under object vibration high frequency situations, the driving circuit of described Circuits System forms periodic current and drives the laser emitting laser projection of optical system on object, the scattered light of described object feeds back to laser instrument and forms self-mixed interference, and is carried out the dither demodulation of object by described Circuits System;
In object vibration low frequency situation, the driving circuit of described Circuits System forms continuous current and drives the laser emitting laser projection of optical system on object, the oblique scattered light of described object is received by focusing system, linear array detector forms hot spot, form laser triangulation structure, and carried out the low-frequency vibration demodulation of object by described Circuits System.
Described optical system comprises laser instrument, photodetector, colimated light system, focusing system and linear array detector; Described colimated light system is arranged between laser instrument and vibrating object, and described photodetector is connected with laser instrument, and for measuring the output power of laser instrument, described focusing system and linear array detector are used for the oblique scattering that detecting laser is irradiated to vibrating object;
Described Circuits System comprises Operations Analysis, and the detection circuit of the function selection unit be connected with Operations Analysis, the signal amplification circuit of photodetector and linear array detector, described Operations Analysis is connected with the driving circuit of laser instrument.
Described laser vibrometer, displacement transducer also comprise visible light source, reverberator, bundling device, and the emergent ray of described visible light source after catoptron, then after closing bundle by bundling device, forms instruction light path by colimated light system outgoing.
Bandpass filter is provided with between described focusing system and linear array detector.
According to the measuring method of above-mentioned laser vibrometer, displacement transducer, as described below:
Function selection unit selects high frequency measurement function, sensor starts from mixing detection mode: Operations Analysis controls driving circuit and forms periodic current drive laser, laser emitting laser projects on object after colimated light system, the scattered light of object feeds back to laser instrument through colimated light system, form self-mixed interference, the laser AC signal that photodetector detecting laser exports, passes the dither demodulation that arithmetic control circuit carries out object back after signal amplification circuit;
Function selection unit selects low frequency measurement function, sensor starts laser triangulation detection mode: Operations Analysis controls driving circuit and forms constant current driven laser instrument, laser emitting laser projects on object after colimated light system, the oblique scattered light of object is received by focusing system, linear array detector forms hot spot, forms laser triangulation structure; The pixel position of hot spot on linear array detector and object are along the displacement one_to_one corresponding of laser emitting laser direction; Detection circuit passes the photosignal that linear array detector receives back Operations Analysis, and Operations Analysis passes through laser image spot vegetarian refreshments change in location, the low frequency change in displacement of demodulation object.
Further, when laser instrument is infrared band measurement laser instrument, the oblique scattering of vibrating object enters in focusing system, after bandpass filter, visible ray is reflected, infrared transmission forms hot spot on linear array detector, forms laser triangulation structure, and the pixel position of hot spot on linear array detector and object are along the displacement one_to_one corresponding of laser emitting laser direction; Detection circuit passes the photosignal that linear array detector receives back Operations Analysis, and Operations Analysis passes through laser image spot vegetarian refreshments change in location, the low frequency change in displacement of demodulation object.
When laser instrument is infrared band measurement laser instrument, the emergent ray of visible light source after catoptron, then after closing bundle by bundling device, forms instruction light path by colimated light system outgoing.
The present invention, when not increasing system complexity, achieves laser triangulation and laser from the combination of hybrid technology, achieves dither and low frequency change in displacement two kinds of functions.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of embodiment 1 provided by the invention;
Fig. 2 is the schematic diagram of embodiment 2 provided by the invention;
Fig. 3 is the schematic diagram that the present invention relates to circuit structure.
Embodiment
In embodiment 1 as shown in Figure 1, laser vibrometer, displacement transducer comprise laser instrument 11, photodetector 12, colimated light system 13, focusing system 14 and linear array detector 15.
Laser instrument 11 shoot laser, projects on vibrating object 2 by colimated light system 13, vertical scattered light, laser instrument 11 is got back to by colimated light system 13, form self-mixed interference system, laser output power measured by photodetector 12, can realize object 2 dither measure by signal receiving.The oblique scattering of object 2 enters in focusing system 14, and linear array detector 15 can obtain focal beam spot position, forms laser triangulation structure.The absolute distance of object can be finally inversed by by facula position on detector, realize the low frequency change in displacement of object 2.
In embodiment 2 as shown in Figure 2, laser vibrometer, displacement transducer comprise infrared band and measure laser instrument 11, visible light source 16, reverberator 17, bundling device 18, photodetector 12, colimated light system 13, focusing system 14, bandpass filter 19 and linear array detector 15.
Infrared band measures laser instrument 11 shoot laser, project on vibrating object 2 by colimated light system 13, vertical scattered light, laser instrument 11 is got back to by colimated light system 13, form self-mixed interference system, laser output power measured by photodetector 12, can realize object 2 dither measure by signal receiving.The oblique scattering of object 2 enters in focusing system 14, and after bandpass filter 19, visible ray is reflected, and infrared transmission forms hot spot on linear array detector 15, forms laser triangulation structure.The absolute distance of object can be finally inversed by by facula position on detector, realize the low frequency change in displacement of object 2.Infrared light is invisible, and visible light source 16 emergent ray after catoptron 17, then after closing bundle by bundling device 18, forms instruction light path by colimated light system 13 outgoing.
Be specifically related to circuit part as shown in Figure 3, laser vibrometer, displacement transducer comprise laser instrument 11, photodetector 12, colimated light system 13, focusing system 14 and linear array detector 15.
Photodetector 12 generally selects silicon photoelectric diode, PIN photodiode or avalanche photodide.Linear array detector 15 generally selects CCD or the linear array CMOS photodetector of linear array.Laser instrument 11 generally selects semiconductor laser, such as 650nm laser diode.
When vibrating object 2 is in low frequency change in displacement, function selection unit 31 selects low frequency measurement shelves, Operations Analysis 32 controls driving circuit 33 and produces constant current driven laser instrument 11 shoot laser, laser projects on object 2 after colimated light system 13, the oblique scattered light of object 2 is received by focusing system 14, and linear array detector 15 forms hot spot.The pixel position of hot spot on linear array detector 15 and object 2 are along the displacement one_to_one corresponding of laser emitting laser direction.Detection circuit 35 passes the photosignal that linear array detector 15 receives back Operations Analysis 32.Operations Analysis 32, just can the low frequency change in displacement of demodulation object 2 by laser image spot vegetarian refreshments change in location.
When vibrating object 2 is in dither, function selection unit 31 selects high frequency measurement shelves, and Operations Analysis 32 controls driving circuit 33 and forms periodic current drive laser 11, and periodic current generally selects triangular wave, triangular wave frequency 320kHz.Laser instrument 11 shoot laser projects on object 2 after colimated light system 13, the scattered light of object 2 feeds back to laser instrument 11 through colimated light system 13, form self-mixed interference, the laser AC signal that photodetector 12 detecting laser 11 exports, passes the dither demodulation that arithmetic control circuit 32 carries out object 2 back after signal amplification circuit 34.
The present invention, when not increasing system complexity, achieves laser triangulation and laser from the combination of hybrid technology, achieves dither and low frequency change in displacement two kinds of functions, and can realize absolute distance measurement.
The present invention meets the semiconductor laser device for communication from hybrid technology application, and due to batch production, cost is lower, but mostly at infrared band, and meet visible light wave range and meet laser instrument from hybrid technology, choice is less, thus propose infrared laser to measure, the structure of visible ray instruction.
Claims (7)
1. laser vibrometer, a displacement transducer, is characterized in that: comprise optical system (1) and Circuits System (3);
Under object vibration high frequency situations, the driving circuit (33) of described Circuits System (3) forms periodic current and drives the laser emitting laser projection of optical system (1) on object (2), the scattered light of described object (2) feeds back to laser instrument (11) and forms self-mixed interference, and is carried out the dither demodulation of object (2) by described Circuits System (3);
In object vibration low frequency situation, the driving circuit (33) of described Circuits System (3) forms continuous current and drives the laser emitting laser projection of optical system (1) on object (2), the oblique scattered light of described object (2) is received by focusing system (14), linear array detector (15) forms hot spot, form laser triangulation structure, and carried out the low-frequency vibration demodulation of object (2) by described Circuits System (3).
2. laser vibrometer according to claim 1, displacement transducer, is characterized in that: described optical system (1) comprises laser instrument (11), photodetector (12), colimated light system (13), focusing system (14) and linear array detector (15); Described colimated light system (13) is arranged between laser instrument (11) and vibrating object (2), described photodetector (12) is connected with laser instrument (11), for measuring the output power of laser instrument (11), described focusing system (14) and linear array detector (15) are irradiated to the oblique scattering of vibrating object (2) for detecting laser (11);
Described Circuits System (3) comprises Operations Analysis (32), the detection circuit (35) of the function selection unit (31) be connected with Operations Analysis (32), the signal amplification circuit (34) of photodetector (12) and linear array detector (15), described Operations Analysis (32) is connected with the driving circuit (33) of laser instrument (11).
3. laser vibrometer according to claim 2, displacement transducer, it is characterized in that: also comprise visible light source (16), reverberator (17), bundling device (18), the emergent ray of described visible light source (16) is after catoptron (17), after closing bundle by bundling device (18) again, form instruction light path by colimated light system (13) outgoing.
4. laser vibrometer according to claim 3, displacement transducer, is characterized in that: be provided with bandpass filter (19) between described focusing system (14) and linear array detector (15).
5. a measuring method for laser vibrometer, displacement transducer, is characterized in that:
Function selection unit (31) selects high frequency measurement function, sensor starts from mixing detection mode: Operations Analysis (32) controls driving circuit (33) and forms periodic current drive laser (11), laser instrument (11) shoot laser projects on object (2) after colimated light system (13), the scattered light of object (2) feeds back to laser instrument (11) through colimated light system (13), form self-mixed interference, the laser AC signal that photodetector (12) detecting laser (11) exports, the dither demodulation that arithmetic control circuit (32) carries out object (2) is passed back after signal amplification circuit (34),
Function selection unit (31) selects low frequency measurement function, sensor starts laser triangulation detection mode: Operations Analysis (32) controls driving circuit (33) and forms constant current driven laser instrument (11), laser instrument (11) shoot laser projects on object (2) after colimated light system (13), the oblique scattered light of object (2) is received by focusing system (14), linear array detector (15) forms hot spot, forms laser triangulation structure; The pixel position of hot spot on linear array detector (15) and object (2) are along the displacement one_to_one corresponding of laser emitting laser direction; Detection circuit (35) passes the photosignal that linear array detector (15) receives back Operations Analysis (32), Operations Analysis (32) by laser image spot vegetarian refreshments change in location, the low frequency change in displacement of demodulation object (2).
6. the measuring method of laser vibrometer according to claim 5, displacement transducer, it is characterized in that: when laser instrument (11) is for infrared band measurement laser instrument, the oblique scattering of vibrating object (2) enters in focusing system (14), after bandpass filter (19), visible ray is reflected, infrared transmission forms hot spot on linear array detector (15), form laser triangulation structure, the pixel position of hot spot on linear array detector (15) and object (2) are along the displacement one_to_one corresponding of laser emitting laser direction; Detection circuit (35) passes the photosignal that linear array detector (15) receives back Operations Analysis (32), Operations Analysis (32) by laser image spot vegetarian refreshments change in location, the low frequency change in displacement of demodulation object (2).
7. the measuring method of laser vibrometer according to claim 5, displacement transducer, it is characterized in that: when laser instrument (11) is for infrared band measurement laser instrument, the emergent ray of visible light source (16) is after catoptron (17), after closing bundle by bundling device (18) again, form instruction light path by colimated light system (13) outgoing.
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| CN106323446A (en) * | 2016-10-10 | 2017-01-11 | 宁波舜宇智能科技有限公司 | Laser vibration measurement equipment and adjusting method thereof |
| CN106404152A (en) * | 2016-10-10 | 2017-02-15 | 宁波舜宇智能科技有限公司 | Laser used vibration measurement device and its adjustment method |
| CN106768276A (en) * | 2016-12-26 | 2017-05-31 | 浙江科聪智能科技有限公司 | Sensor, intelligent robot, artificial intelligence municipal administration Internet of Things, financial national treasury safety monitoring system |
| CN106840357A (en) * | 2016-12-26 | 2017-06-13 | 浙江科聪智能科技有限公司 | Sensor, robot, artificial intelligence municipal administration Internet of Things, financial national treasury safety monitoring system |
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| CN106996745A (en) * | 2017-04-28 | 2017-08-01 | 国网河南省电力公司电力科学研究院 | A kind of laser monitoring system of the fault displacement of breaker body |
| CN108008403A (en) * | 2017-12-11 | 2018-05-08 | 深圳市富微科创电子有限公司 | Infrared laser ranging device and method, unmanned plane and barrier-avoiding method |
| CN108662982A (en) * | 2018-05-18 | 2018-10-16 | 惠安县金建达电子科技有限公司 | It is a kind of accurately to measure the apparatus and method for moving island based on GPS and big-dipper satellite |
| CN110514285A (en) * | 2019-07-15 | 2019-11-29 | 北京工业大学 | A kind of non-contact measurement method for the vibration of lightweight rod piece bidirectional couple |
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| CN114636379A (en) * | 2022-02-16 | 2022-06-17 | 吉林博识光电科技有限公司 | Device and method for measuring diameter of invisible laser spot |
| CN114674414A (en) * | 2022-04-13 | 2022-06-28 | 中国科学院空天信息创新研究院 | Low-frequency vibration sensor based on micro-pixel centroid positioning and working method thereof |
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| WO2023129530A1 (en) * | 2021-12-27 | 2023-07-06 | ConcurrentData, Inc. | System and non-contact method for measuring vibration on surface of an object |
| CN114459592A (en) * | 2022-01-21 | 2022-05-10 | 厦门大学 | Laser speckle micro-vibration measurement system and method based on roller shutter CMOS |
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| CN114636379B (en) * | 2022-02-16 | 2024-05-14 | 吉林博识光电科技有限公司 | Device and method for measuring diameter of invisible laser spot |
| CN114674414A (en) * | 2022-04-13 | 2022-06-28 | 中国科学院空天信息创新研究院 | Low-frequency vibration sensor based on micro-pixel centroid positioning and working method thereof |
| CN114674414B (en) * | 2022-04-13 | 2023-04-28 | 中国科学院空天信息创新研究院 | Low-frequency vibration sensor based on micro-pixel centroid positioning and working method thereof |
| WO2023232460A1 (en) * | 2022-05-30 | 2023-12-07 | Ams International Ag | Self-mixing interferometry sensor module for multilayer target detection, electronic device and method of multilayer target detection |
| CN116626696A (en) * | 2023-07-20 | 2023-08-22 | 北京摩尔芯光半导体技术有限公司 | Frequency modulation continuous wave laser range unit |
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