CN114636379B - Device and method for measuring diameter of invisible laser spot - Google Patents
Device and method for measuring diameter of invisible laser spot Download PDFInfo
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- CN114636379B CN114636379B CN202210140687.3A CN202210140687A CN114636379B CN 114636379 B CN114636379 B CN 114636379B CN 202210140687 A CN202210140687 A CN 202210140687A CN 114636379 B CN114636379 B CN 114636379B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/08—Measuring arrangements characterised by the use of optical techniques for measuring diameters
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
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- G01M11/02—Testing optical properties
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Abstract
The invention provides a device and a method for measuring the diameter of a non-visible laser spot. Belongs to the technical field of optical detection, and in particular relates to a device and a method for measuring the diameter and power of a light spot of a non-visible strong laser system. The method solves the problems of low measurement accuracy and inaccurate measurement result of the diameter of the invisible laser light spot in the prior art. The device comprises an adjusting table, a laser emission system, a displacement control sensing system, a strong laser power testing system and a computer control system. It is mainly used for measuring the diameter of a non-visible laser spot.
Description
Technical Field
The invention belongs to the technical field of optical detection, and particularly relates to a device and a method for measuring the diameter and power of a light spot of a non-visible strong laser system.
Background
With the development of optical technology, the requirements on performance indexes of an optical system are also higher and higher, which provides new challenges for optical detection technology. The size of the spot diameter of the intense laser has an extremely important effect on the use of intense laser light. For example, when using a strong laser for laser cutting, the power density of the strong laser spot needs to be precisely controlled to obtain the desired surface cutting quality. While the actual diameter of the laser spot is affected by many factors, such as laser diffraction and spherical aberration. With the development of science and technology, higher requirements are put on the measurement of the power density of a strong laser spot and the size of the diameter of the spot. In order to ensure the energy density of the emitted laser, a diaphragm is usually added in a strong laser emission system, weak light at the edge is intercepted, the laser can generate diffraction phenomenon when passing through the edge of the diaphragm, and the beam divergence angle of the laser beam is increased, so that the diameter of a laser spot is uncontrollable, and great difficulty is often caused when a mathematical method is used for calculation, and the calculation is difficult to be accurately carried out. When the infrared camera is used for measurement, the actual spot size is different when different exposure time and different laser output power are used, sometimes the optical power of the spot center is larger, and when the supersaturation condition occurs, part of weak light areas cannot be captured by the infrared camera, so that the measurement result is inaccurate. Therefore, a detection method is needed, which can objectively evaluate the actual light spot size and the energy distribution of the light spot output by the invisible intense laser system.
Disclosure of Invention
The invention provides a device and a method for measuring the diameter of a non-visible laser spot, which aims to solve the problems in the prior art.
The utility model provides a measure invisible laser spot diameter's device, it includes adjustment platform, laser emission system, displacement control sensing system, strong laser power test system and computer control system, laser emission system includes by survey laser emitter support frame and by survey strong laser emitter, by survey strong laser emitter setting on survey laser emitter support frame, adjustment platform includes azimuth adjustment platform and every single move adjustment platform, the azimuth adjustment platform sets up on every single move adjustment platform, displacement control sensing system sets up on azimuth adjustment platform upper portion, displacement control sensing system includes base, displacement control auxiliary hardware, vertical displacement grating sensor and horizontal displacement grating sensor, control auxiliary hardware includes two vertical linear guide and a horizontal linear guide, two vertical linear guide set up at base upper surface both ends, horizontal linear guide both ends respectively with two vertical linear guide sliding fit, horizontal displacement grating sensor and horizontal linear guide sliding fit, vertical displacement grating sensor and the vertical linear guide sliding fit of base one end, displacement grating sensor includes base, displacement control auxiliary hardware, vertical displacement grating sensor and horizontal displacement grating power test system, laser power test instrument and laser power test instrument, laser power test instrument and laser power test system link to each other with the laser power test system, the laser power test instrument is strong, and laser power test instrument is strong to the laser power test system links to each other.
Furthermore, the azimuth adjusting table, the pitching adjusting table and the base are connected by bolts.
Further, the horizontal linear guide rail is provided with a horizontal displacement sliding block, the horizontal displacement sliding block is in sliding fit with the horizontal linear guide rail, and the detection head of the strong laser power tester is connected with one side of the horizontal displacement sliding block.
Still further, all be equipped with vertical displacement slider on two vertical linear guide, two vertical displacement sliders all with vertical linear guide sliding fit, two vertical displacement sliders link to each other with horizontal linear guide both ends respectively.
Furthermore, electric cabinets are arranged at the bottom ends of the two vertical linear guide rails and one end of the horizontal linear guide rail.
Still further, horizontal displacement grating sensor includes horizontal grating chi and horizontal auxiliary scale, horizontal grating chi sets up on horizontal linear guide to with the electric cabinet rigid coupling of horizontal linear guide one end, horizontal auxiliary scale links to each other with horizontal displacement slider up end, horizontal grating chi and horizontal auxiliary scale sliding fit.
Still further, vertical displacement grating sensor includes vertical grating chi and vertical auxiliary scale, vertical grating chi sets up on vertical linear guide to with the electric cabinet rigid coupling of vertical linear guide bottom, vertical auxiliary scale links to each other with vertical displacement slider one side, vertical grating chi and vertical auxiliary scale sliding fit.
Furthermore, the front end of the strong laser power probe is also provided with an adjustable diaphragm.
Further, the computer control system is connected with the electric control boxes on the vertical linear guide rail and the horizontal linear guide rail.
The invention also provides a method for measuring the diameter of the invisible laser light spot, which comprises the following steps:
Step one: fixing the tested strong laser transmitter on a tested strong laser transmitter support frame, and adjusting an azimuth adjusting table and a pitching adjusting table to enable the lens axis of the tested strong laser transmitter to be perpendicular to the plane where the detection head of the strong laser power tester moves;
Step two: estimating the diameter of a strong laser spot, determining the strokes of displacement control auxiliary hardware in the x and y directions, controlling a displacement control sensing system through a computer control system to set the motion mode, intermittent frequency and motion speed of a strong laser power tester probe so as to measure the distribution of the spot power of strong laser, wherein the motion mode of the strong laser power tester probe needs to be set to be firstly at an initial point in the x direction for pause-uniform intermittent motion, returning to the initial point in the x direction of the auxiliary hardware for controlling the displacement of the strong laser power tester probe after the probe finishes testing the strong laser power in a straight line, then ascending a height in the y direction, selecting the height according to the requirement of measurement precision, and enabling the above motions to be a measurement period, wherein when the strong laser power tester probe stops, the strong laser power tester collects the spot power of the strong laser emitted by a tested strong laser emitter at the point, and after the strong laser power tester collects the power, the movement of the strong laser power tester probe continues according to parameters set by the computer control system;
Step three: the displacement generated in the motion process of the detection head of the strong light power tester is detected by the vertical displacement grating sensor and the horizontal displacement grating sensor and sent back to the computer control system, the vertical displacement grating sensor and the horizontal displacement grating sensor record the position of the detection head of the strong laser power tester when detecting the light spot power, so as to record the power value of a certain point of the light spot, generate a displacement-power curve, form a laser power value matrix after the whole light spot plane is scanned, process the obtained laser light spot power matrix with the computer data processing system, generate a three-dimensional vector elevation graph according to the value of the data lattice, observe the power distribution condition of the strong laser light spot, zero the lattice of the strong laser blank area by the computer data processing system, process the data according to coordinates, and obtain the diameter of the light spot.
Compared with the prior art, the invention has the beneficial effects that: the distribution condition of the actual light spots of the invisible strong laser is judged by measuring the value of the light spot power of the strong laser, so that the light spot diameter of the strong laser is measured more accurately, and the measuring precision is higher.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the invention. In the drawings:
FIG. 1 is a schematic diagram of a device for measuring the diameter of a non-visible laser spot according to the present invention;
FIG. 2 is a schematic diagram of a device for measuring the diameter of a non-visible laser spot and a displacement control sensor system according to the present invention;
Fig. 3 is a schematic diagram of the front structure of a detector head of a strong laser power tester and an adjustable diaphragm assembly of a device for measuring the diameter of a non-visible laser light spot according to the present invention.
Fig. 4 is a schematic diagram of the reverse structure of the probe of the intense laser power tester and the adjustable diaphragm assembly of the device for measuring the diameter of the invisible laser light spot according to the present invention.
The device comprises a 1-tested laser emitter support frame, a 2-tested strong laser emitter, a 3-vertical displacement grating sensor, 4-displacement control auxiliary hardware, a 5-strong laser power tester probe, a 6-horizontal displacement grating sensor, a 7-strong laser power tester, an 8-computer control system, a 9-azimuth adjusting table, a 10-pitching adjusting table and an 11-adjustable diaphragm.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. It should be noted that, in the case of no conflict, embodiments of the present invention and features of the embodiments may be combined with each other, and the described embodiments are only some embodiments of the present invention, not all embodiments.
Referring to fig. 1-4 for describing the present embodiment, a device for measuring the diameter of a non-visible laser spot comprises an adjustment table, a laser emission system, a displacement control sensing system, a strong laser power test system and a computer control system 8, wherein the laser emission system comprises a laser emitter support frame 1 to be measured and a strong laser emitter 2 to be measured, the laser emitter 2 to be measured is arranged on the laser emitter support frame 1 to be measured, the adjustment table comprises an azimuth adjustment table 9 and a pitching adjustment table 10, the azimuth adjustment table 9 is arranged on the pitching adjustment table 10, the displacement control sensing system is arranged on the upper part of the azimuth adjustment table 9, the displacement control sensing system comprises a base, a displacement control auxiliary hardware 4, a vertical displacement grating sensor 3 and a horizontal displacement grating sensor 6, the control auxiliary hardware comprises two vertical linear guide rails and a horizontal linear guide rail, the two vertical linear guide rails are arranged at two ends of the upper surface of the base, the two ends of the horizontal linear guide rails are respectively in sliding fit with the two vertical linear guide rails, the horizontal linear guide rail 6 is in sliding fit with the horizontal linear guide rail, the vertical linear guide rail 3 is simultaneously with the laser power test head 7, the laser power test head 7 is in the power test head 7 and the power test head is in the power test system, the power test head is in the power test head 7 and the power test system is in the power test with the power test head 7 The vertical displacement grating sensor 3 is connected with the horizontal displacement grating sensor 6.
In this embodiment, the azimuth adjusting table 9 is placed above the elevation adjusting table 10, and the displacement control auxiliary hardware 4 is placed above the azimuth adjusting table 9, and the adjusting direction of the azimuth adjusting table 9 is to be perpendicular to the axis of the measured intensity laser transmitter 2. The strong laser power tester probe 5 is fixed on a sliding table of the displacement control auxiliary hardware 4, the displacement control auxiliary hardware 4 can perform pause-uniform intermittent motion along the x direction through the computer control system 8, the pause interval distance can be set according to the measurement precision requirement and performs reciprocating motion according to the specified requirement, and intermittent motion is performed in the y direction, namely, the motion of the strong laser power tester probe 5 is as follows: firstly, starting at an initial point in the x direction, performing pause-uniform intermittent motion, returning to the initial point in the x direction of the displacement control auxiliary hardware 4 after the detector head finishes testing strong laser power of a straight line, then lifting a height in the y direction, selecting the height according to the requirement of measurement precision, and performing the motion as a measurement period, wherein after the whole measured light surface is measured, the motion is finished. It should be noted that the measured plane is larger than the measured laser diameter, so that the diameter of the laser spot needs to be estimated, and then the stroke of the displacement control auxiliary hardware 4 in the x and y directions is determined. The composite motion of the detection head 5 of the strong laser power tester can realize that the detection head of the strong laser power tester 1 can measure the distribution of the spot power of the tested strong laser in the plane vertical to the emitted laser, the grating ruler of the horizontal displacement grating sensor 6 is fixed on the horizontal electric cabinet of the displacement control auxiliary hardware 4, the auxiliary ruler is fixed on the sliding block, and when the sliding block is horizontally displaced, the grating ruler and the auxiliary ruler of the horizontal displacement grating sensor 6 are relatively displaced, so that the displacement amount of the sliding block is recorded. Similarly, the grating ruler of the vertical displacement grating sensor 3 is fixed on the vertical sliding table of the displacement control auxiliary hardware 4, the auxiliary ruler is fixed on the vertical displacement sliding block, and the grating ruler and the auxiliary ruler of the vertical displacement grating sensor 3 can generate relative displacement so as to record the displacement of the sliding block. The computer control system 8 can set the intermittent frequency and the movement speed of the displacement control auxiliary hardware 4, can set the sampling point frequency of the strong laser power tester 7, records and processes the laser power of each point of the strong laser facula through the displacement signals of the vertical displacement grating sensor 3 and the horizontal displacement grating sensor 6 on the sliding block of the displacement control auxiliary hardware 4, and enables the laser power to generate a numerical matrix of the laser power displaced with the detection head 5 of the strong laser power tester. The calculation and control system 8 can control the start and stop of the strong laser power tester 7, the displacement control auxiliary hardware 4, the vertical displacement grating sensor 3 and the horizontal displacement grating sensor 6 simultaneously.
When the displacement control auxiliary hardware 4 is stopped, the strong laser power tester 7 collects the spot power of the strong laser emitted by the tested strong laser emitter 2 at the spot, after the strong laser power tester 7 collects the power, the displacement control auxiliary hardware 4 continues to move according to the parameters set by the computer control system 8 before, the displacement is detected by the vertical displacement grating sensor 3 and the horizontal displacement grating sensor 6, and the displacement is returned to the computer control system 8. The grating sensors 3 and 6 record the positions of the strong laser power tester probe 5 when recording the light spot power, so as to realize the recording of the power value of a certain point of the light spot, generate a displacement-power curve, form a laser power value matrix after the whole light spot plane is scanned, each value represents the power of a point, the distance between each point is determined by the parameters set by the computer control system 8 before, the distance between the points can be regulated by the time interval of the acquisition point of the optical power tester 7 and the pause time of the displacement control auxiliary hardware 4, and the power of the background light can be measured firstly for reducing the influence of the background light because the background light can be captured by the optical power tester 7, the computer data processing system 8 is used for setting the dot matrix of the strong laser blank area to zero, and the diameter of the light spot can be obtained by processing the data according to coordinates.
In this embodiment, the azimuth adjusting table 9, the elevation adjusting table 10 and the base are connected by screws.
In this embodiment, be equipped with horizontal displacement slider on the horizontal linear guide, horizontal displacement slider and horizontal linear guide sliding fit, strong laser power tester detecting head 5 links to each other with horizontal displacement slider one side, all be equipped with vertical displacement slider on two vertical linear guide, two vertical displacement sliders all with vertical linear guide sliding fit, two vertical displacement sliders link to each other with horizontal linear guide both ends respectively.
In this embodiment, electric cabinets are respectively arranged at the bottom ends of the two vertical linear guide rails and one end of the horizontal linear guide rail.
In this embodiment, the horizontal displacement grating sensor 6 includes a horizontal grating ruler and a horizontal auxiliary ruler, where the horizontal grating ruler is disposed on the horizontal linear guide rail and is fixedly connected with an electric cabinet at one end of the horizontal linear guide rail, the horizontal auxiliary ruler is connected with the upper end surface of the horizontal displacement slider, and the horizontal grating ruler is in sliding fit with the horizontal auxiliary ruler. The vertical displacement grating sensor 3 comprises a vertical grating ruler and a vertical auxiliary ruler, wherein the vertical grating ruler is arranged on the vertical linear guide rail and fixedly connected with an electric cabinet at the bottom end of the vertical linear guide rail, the vertical auxiliary ruler is connected with one side of the vertical displacement sliding block, and the vertical grating ruler is in sliding fit with the vertical auxiliary ruler.
In this embodiment, an adjustable diaphragm 11 is further disposed at the front end of the probe 5 of the intense laser power tester, and the adjustable diaphragm is configured to control the optical power acquisition precision of a certain point of the measurement light spot.
In this embodiment, the computer control system 8 is connected to electric cabinets on the vertical linear guide rail and the horizontal linear guide rail.
In this embodiment, a measurement method of a device for measuring a diameter of a non-visible laser spot is provided, which includes the following steps:
Step one: fixing the tested strong laser transmitter 2 on the tested strong laser transmitter support frame 1, and adjusting the azimuth adjusting table 9 and the pitching adjusting table 10 to enable the lens axis of the tested strong laser transmitter 2 to be perpendicular to the plane where the strong laser power tester probe 5 moves;
Step two: estimating the diameter of a strong laser spot, determining the strokes of displacement control auxiliary hardware 4x and y, controlling a displacement control sensing system through a computer control system 8 to set the motion mode, intermittent frequency and motion speed of a strong laser power tester probe 5 so as to measure the distribution of the spot power of strong laser, wherein the motion mode of the strong laser power tester probe 5 needs to be set to be firstly at an initial point in the x direction for pause-uniform intermittent motion, after the strong laser power tester probe 5 finishes testing the strong laser power of a straight line, returning to the initial point in the x direction of the auxiliary hardware for controlling the displacement of the strong laser power tester probe 5, then rising by one height in the y direction, and selecting the above height according to the requirement of measurement precision, wherein when the strong laser power tester probe 5 stops, the strong laser power tester 7 collects the spot power of the strong laser emitted by a tested strong laser emitter 2 at the point, and after the strong laser power tester 7 collects the power, the movement of the strong laser power tester probe 5 continues according to the set parameters of the computer control system 8 before;
Step three: the displacement generated in the motion process of the strong laser power tester probe 5 is detected by the vertical displacement grating sensor 3 and the horizontal displacement grating sensor 6 and returned to the computer control system 8, the positions of the vertical displacement grating sensor 3 and the horizontal displacement grating sensor 6 when the strong laser power tester probe 5 records the light spot power are used for realizing the recording of the power value of a certain point of the light spot, generating a displacement-power curve, zeroing the dot matrix of the strong laser blank area by using the computer data processing system, and processing the data according to coordinates, thus obtaining the diameter of the light spot.
The embodiment also provides a method for the power distribution of the strong laser spots, which is characterized in that the strong laser beams generally belong to Gaussian beams, the energy distribution of the strong laser beams is in accordance with Gaussian distribution in theory, but the light energy distribution of the emitted laser is not in accordance with Gaussian distribution due to other reasons such as multimode optical fibers or optical fiber core diameters of the laser transmitters, and the sizes of the spot diameters are different due to different emergent powers of the strong laser beams. Therefore, at some time, a detection method is needed to measure the distribution of the laser spot power, and the method is as follows: the obtained laser spot power matrix is subjected to data processing by a computer data processing system, and a three-dimensional sagittal height chart is generated according to the numerical value of the data lattice, so that the power distribution condition of the strong laser spots can be intuitively observed.
The embodiments of the invention disclosed above are intended only to help illustrate the invention. The examples are not intended to be exhaustive or to limit the invention to the precise forms disclosed. Many modifications and variations are possible in light of the above teaching. The embodiments were chosen and described in order to best explain the principles of the invention and the practical application, to thereby enable others skilled in the art to best understand and utilize the invention.
Claims (10)
1. A device for measuring the diameter of a non-visible laser spot, characterized in that: the laser power tester comprises an adjusting table, a laser emission system, a displacement control sensing system, a strong laser power testing system and a computer control system (8), wherein the laser emission system comprises a tested laser emitter supporting frame (1) and a tested strong laser emitter (2), the tested strong laser emitter (2) is arranged on the tested laser emitter supporting frame (1), the adjusting table comprises an azimuth adjusting table (9) and a pitching adjusting table (10), the azimuth adjusting table (9) is arranged on the pitching adjusting table (10), the displacement control sensing system is arranged on the upper part of the azimuth adjusting table (9), the displacement control sensing system comprises a base, a displacement control auxiliary hardware (4), a vertical displacement grating sensor (3) and a horizontal displacement grating sensor (6), the control auxiliary hardware (4) comprises two vertical linear guide rails and a horizontal linear guide rail, the two vertical linear guide rails are arranged at two ends of the upper surface of the base, the two ends of the horizontal linear guide rails are respectively in sliding fit with the two vertical linear guide rails, the horizontal displacement sensor (6) is in sliding fit with the horizontal linear guide rail, the vertical displacement grating sensor (3) is in sliding fit with the laser power tester (7), the laser power tester is in strong sliding fit with one end of the laser power tester (5) and the laser power tester (5) in a sliding mode, the high-intensity laser power tester (7) is connected with the high-intensity laser power tester probe (5), and the computer control system (8) is connected with the high-intensity laser power tester (7), the displacement control auxiliary hardware (4), the vertical displacement grating sensor (3) and the horizontal displacement grating sensor (6) at the same time.
2. An apparatus for measuring the diameter of a spot of a non-visible laser light as defined in claim 1, wherein: the azimuth adjusting table (9), the pitching adjusting table (10) and the base are connected through screws.
3. An apparatus for measuring the diameter of a spot of a non-visible laser light as defined in claim 1, wherein: the horizontal linear guide rail is provided with a horizontal displacement sliding block, the horizontal displacement sliding block is in sliding fit with the horizontal linear guide rail, and the detection head (5) of the strong laser power tester is connected with one side of the horizontal displacement sliding block.
4. An apparatus for measuring the diameter of a spot of a non-visible laser light as defined in claim 1, wherein: the two vertical linear guide rails are provided with vertical displacement sliding blocks, the two vertical displacement sliding blocks are in sliding fit with the vertical linear guide rails, and the two vertical displacement sliding blocks are respectively connected with two ends of the horizontal linear guide rails.
5. An apparatus for measuring the diameter of a spot of a non-visible laser light as defined in claim 1, wherein: and electric cabinets are arranged at the bottom ends of the two vertical linear guide rails and one end of the horizontal linear guide rail.
6. An apparatus for measuring the diameter of a spot of a non-visible laser light as defined in claim 5, wherein: the horizontal displacement grating sensor (6) comprises a horizontal grating ruler and a horizontal auxiliary ruler, wherein the horizontal grating ruler is arranged on the horizontal linear guide rail and fixedly connected with an electric cabinet at one end of the horizontal linear guide rail, the horizontal auxiliary ruler is connected with the upper end face of the horizontal displacement sliding block, and the horizontal grating ruler is in sliding fit with the horizontal auxiliary ruler.
7. An apparatus for measuring the diameter of a spot of a non-visible laser light as defined in claim 5, wherein: the vertical displacement grating sensor (3) comprises a vertical grating ruler and a vertical auxiliary ruler, wherein the vertical grating ruler is arranged on the vertical linear guide rail and fixedly connected with an electric cabinet at the bottom end of the vertical linear guide rail, the vertical auxiliary ruler is connected with one side of the vertical displacement sliding block, and the vertical grating ruler is in sliding fit with the vertical auxiliary ruler.
8. An apparatus for measuring the diameter of a spot of a non-visible laser light as defined in claim 1, wherein: the front end of the detector head (5) of the strong laser power tester is also provided with an adjustable diaphragm (11).
9. An apparatus for measuring the diameter of a spot of a non-visible laser light as defined in claim 5, wherein: and the computer control system (8) is connected with the electric control boxes on the vertical linear guide rail and the horizontal linear guide rail.
10. A method for measuring the diameter of a spot of a non-visible laser light as claimed in claim 1, characterized in that: it comprises the following steps:
step one: fixing the tested strong laser transmitter (2) on a tested strong laser transmitter support frame (1), and adjusting an azimuth adjusting table (9) and a pitching adjusting table (10) to enable the lens axis of the tested strong laser transmitter (2) to be perpendicular to the plane where the strong laser power tester probe (5) moves;
Step two: estimating the diameter of a strong laser spot, determining the strokes of a displacement control auxiliary hardware (4) in the x direction and the y direction, controlling a displacement control sensing system through a computer control system (8) to set the motion mode, the intermittent frequency and the motion speed of a strong laser power tester probe (5) so as to be used for measuring the distribution of the spot power of strong laser, wherein the motion mode of the strong laser power tester probe (5) needs to be set to be firstly started at an initial point in the x direction and to perform pause-uniform intermittent motion, the strong laser power tester probe (5) returns to the initial point in the x direction of the auxiliary hardware for controlling the displacement of the strong laser power tester probe (5), then rises by one height in the y direction, the height is selected according to the requirement of measurement precision, the above motion is a measurement period, when the strong laser power tester probe (5) stops, the strong laser power tester (7) collects the spot power of the strong laser emitted by the tested strong laser at the point, after the strong laser power tester (7) finishes testing the strong laser power, and the movement parameters of the laser tester probe (8) are continuously set according to the motion parameters before the movement of the laser tester probe (5) is controlled;
Step three: the displacement generated in the motion process of the detection head (5) of the strong laser power tester is detected by the vertical displacement grating sensor (3) and the horizontal displacement grating sensor (6) and sent back to the computer control system (8), the positions of the detection head (5) of the strong laser power tester when detecting the light spot power are recorded by the vertical displacement grating sensor (3) and the horizontal displacement grating sensor (6) so as to realize the recording of the power value of a certain point of the light spot, the displacement-power curve is generated, after the whole light spot plane is scanned, a laser power value matrix is formed, the obtained laser light spot power matrix is subjected to data processing by the computer data processing system, a three-dimensional vector elevation graph is generated according to the value of the data matrix, the power distribution condition of the strong laser light spot is observed, the dot matrix of the strong laser blank area is set to zero by the computer data processing system, and the data is processed according to coordinates, so that the diameter of the light spot can be obtained.
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| 复合式激光远场光斑分布定量测量技术研究;黄伟;马松山;李晓芹;郭绍禹;;激光与红外;20180820(第08期);全文 * |
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