CN104181939A - Active type ultraprecise displacement locating detection method based on virtual grating ruler - Google Patents
Active type ultraprecise displacement locating detection method based on virtual grating ruler Download PDFInfo
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- CN104181939A CN104181939A CN201410401099.6A CN201410401099A CN104181939A CN 104181939 A CN104181939 A CN 104181939A CN 201410401099 A CN201410401099 A CN 201410401099A CN 104181939 A CN104181939 A CN 104181939A
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Abstract
The invention discloses an active type ultraprecise displacement locating detection method based on a virtual grating ruler in the field of position or direction control. The method comprises the steps that macro locating is firstly carried out, when locating displacement is smaller than the stripe equivalent, grating phases are vertically moved to form two paths of virtual grating ruler signals, the two paths of virtual grating ruler signals correspond to the upward movement direction and the downward movement direction respectively, and pulse counting feedback control is carried out on the two paths of virtual grating ruler signals to achieve micro locating. The virtual grating ruler with the two paths of output signals is formed to output pulses, and closed-loop pulse feedback control with the virtual grating ruler signals as feedback pulses is achieved to improve the detection control precision of a locating system.
Description
Technical field
What the present invention relates to is the method for the control field of a kind of position or direction, specifically a kind of active ultraprecise displacement location detection method based on virtual grating scale.
Background technology
It is very complicated processes that the mechanical shift of moving component is carried out to high precision Detection & Controling, particularly along with the continuous expansion of high-tech sector, characteristic dimension in fields such as micro processing field and biological operations is more and more meticulousr, detect with the requirement of positioning control more and more higher to ultraprecise, along with the continuous introducing of various advanced observing and controlling means, ultraprecise positioning precision is to nanoscale, the fast development of Subnano-class yardstick; In macro-scale, long Range Ultraprecise location more and more comes into one's own.
The restriction that the positioning precision of ultraprecise positioning system is subject to displacement detection system Measurement Resolution is very large, the resolution of position detecting system will exceed ten times of mechanical navigation system positioning precision conventionally, through the literature search of prior art is found, at present, measuring method in ultraprecise detection and localization control system mainly contains: capacitive transducer, Fabry-Perot interferometer, X ray interferometer, laser interferometer and all kinds of flying-spot microscope quasi-instrument, scanning tunnel microscope STM, scanning electron microscope SEM, Scanning capacitance microscope SCM, atomic force microscope etc., respectively there is feature.
There are much theory and applied researcies about grating positioning, mostly be the method that adopts grating signal segmentation, traditional stripe subdividing detects for reaching ultraprecise, more than at least needing 1000 segmentations, this distortion to primative streak signal waveform has proposed harsh requirement, is difficult to realize in practical application.
Pass through the retrieval of prior art is found, Chinese patent literature CN103558861, discloses a day 2014.02.05, has recorded a kind of dynamic switching method of grand micro-compound motion.Approach at grand platform the process that terminal slows down, pre-cooling microfluidic platform, realizes precision positioning by microfluidic platform, and grand, microfluidic platform also reaches stable simultaneously.The method is by according to structure and dynamic perfromance grand, microfluidic platform, determine the amplitude threshold of switching, and definite corresponding switching instant, in the time reaching switching condition in grand platform moderating process, the switching of moving, start the motion of microfluidic platform, realize the closed-loop control of microfluidic platform by absolute grating, finally reach the positioning accuracy request of platform.But the prior art, owing to adopting double-decked platform, is therefore difficult to avoid motion artifacts and kinematic error in the motion of motion is devolved on stage double-decked platform, this error will be more obvious in ultraprecise location.
Summary of the invention
The present invention is directed to prior art above shortcomings, a kind of active ultraprecise displacement location detection method based on virtual grating scale is provided, formation has the virtual grating scale output pulse of double-channel output signal, and the closed loop pulse feedback control of realization taking virtual grating scale signal as feedback pulse is to improve the detection control accuracy of positioning system.
The present invention is achieved by the following technical solutions:
The present invention relates to a kind of displacement location detection method, first carry out grand location, thereby in the time that location displacement is less than striped equivalent, move up and down raster phase and form the virtual grating scale signal of two-way, respectively corresponding upper and lower two moving directions of the virtual grating scale signal of two-way, carry out step-by-step counting FEEDBACK CONTROL to realize microposition to the virtual grating scale signal of two-way.
Described displacement location detection method specifically comprises the following steps:
Step 1, grating interferometer is fixed on the linear displacement platform of individual layer, grating interferometer forms interference fringe in visual field by imaging len, interference fringe both sides in visual field arrange respectively two photoelectric sensors, make two photoelectric sensors respectively at moving up or down in visual field by phase changer, make photoelectric sensor to producing phase shift in the reception of interference fringe, make interference fringe produce phase shift;
Step 2, in the time that linear displacement platform moves, interference fringe will move in visual field, and when fringe movement is to the phase shift position of photoelectric sensor, photo-sensor signal will will occur one and detect pulse signal, i.e. virtual grating scale signal after shaping;
Step 3, photoelectric sensor continue mobile, obtain the virtual grating scale signal of row, using virtual these row grating scale signal as position feedback pulse, realize the detection control to linear displacement platform.
Described photoelectric sensor move up or move down according to being: the moving direction of 1 linear displacement platform; 2 linear displacement platforms are whether overshoot and direction of motion changes in position fixing process, then carries out two-way close-loop feedback control.
The resolution δ ' of described virtual grating scale signal is:
wherein, X is interference fringe phase shift, and L is the spacing of adjacent interference fringe in visual field, and δ is the interference fringe resolution without phase shift.
Described grand location refers to: directly the signal of grating interferometer output is detected to pulse as feedback after shaping, linear displacement platform is carried out to pulse detection positioning control.
Described location displacement is less than striped equivalent and refers to: the resolution that the orientation distance of linear displacement platform is less than to grating interferometer.
The present invention relates to a kind of device of realizing said method, comprise: grating interferometer, imaging len, two photoelectric sensors, phase changer, controller and linear displacement platform, wherein: grating interferometer is arranged on linear displacement platform, grating interferometer forms interference fringe in visual field by imaging len, interference fringe both sides in visual field arrange respectively two photoelectric sensors, phase changer is by controller control, two photoelectric sensors are connected to realize respectively photoelectric sensor and move up or down with phase changer, make photoelectric sensor to producing phase shift in the reception of interference fringe, after shaping, there is virtual grating scale signal as position feedback pulse and transfer to controller in signal, realize the detection control of controller to linear displacement platform.
The present invention is by regulating the distance between imaging len and imaging surface, easily make in visual field more than the spacing L of adjacent interference fringe reaches 1cm, and interference fringe phase shift adopts common gearshift just can obtain the amount of movement of several microns to tens microns, so, the signal resolution of virtual grating scale signal can improve more than 1000 times by the grating interferometer signal when without phase shift.
The present invention is by the striped phase shift of low precision, obtain high-resolution virtual grating scale signal, the resolution of virtual grating scale signal improves more than 1000 times on the basis of former grating interferometer signal, detection pulse using it as ultraprecise positioning control system, has improved the accuracy of detection of positioning system; Meanwhile, adopt single-layer motion platform, avoided traditional grand/systematic error of micro-double-decked platform, control more succinctly detecting, ensure to detect and control accuracy, further improved displacement detecting control accuracy.
Brief description of the drawings
Fig. 1 is the method schematic diagram of embodiment;
Fig. 2 is the device schematic diagram of embodiment;
Fig. 3 is the striped phase shifting method schematic diagram of embodiment.
Embodiment
Below embodiments of the invention are elaborated, the present embodiment is implemented under taking technical solution of the present invention as prerequisite, provided detailed embodiment and concrete operating process, but protection scope of the present invention is not limited to following embodiment.
Embodiment
As shown in Figure 1, first the present embodiment carries out grand location, thereby in the time that location displacement is less than interferometer striped equivalent, move up and down raster phase and form the virtual grating scale signal of two-way, respectively corresponding upper and lower two moving directions of the virtual grating scale signal of two-way, carry out step-by-step counting FEEDBACK CONTROL to realize microposition to the virtual grating scale signal of two-way.
Described grand location refers to: after the signal shaping of directly grating interferometer 1 being exported, as feedback detection signal, linear displacement platform 2 is carried out to detection and location control.
The orientation distance that in the present embodiment, supposition requires linear displacement platform to start from initial point is 8.35685mm, and the signal resolution of the present embodiment grating interferometer 1 is 1.6 μ m, and grating interferometer 1 laser source wavelength is 532nm.
When grand the location, linear displacement platform 2 moves, directly by input control device after grating interferometer 1 output signal shaping, motion to linear displacement platform is controlled, complete grand position fixing process, when grand position fixing process finishes, should complete orientation distance: 8.3568mm, be the integral multiple of grating interferometer 1 resolution.
Described location displacement is less than striped equivalent and refers to: the resolution that the orientation distance of linear displacement platform 2 is less than to grating interferometer 1.
In the present embodiment, the displacement of residue location is 0.05 μ m, i.e. 50nm is less than the resolution of grating interferometer 1, enters the microposition stage.
As shown in Figures 2 and 3, microposition comprises:
Step 1, adjust grating interferometer 1 and make to only have an interference fringe in the visual field of imaging, two photoelectric sensors 4 are arranged in to striped both sides, adjust imaging len 3 and imaging surface distance, make striped visual field width, fringe spacing is 2cm.
Step 2, make photoelectric sensor 4 mobile 20 μ m in striped visual field by phase changer 5, produce phase shift.
Step 3, whenever striped arrives the phase shift position of photoelectric sensor 4, the output signal of photoelectric sensor 4 is pulsing signal after shaping circuit 6, this signal is virtual grating scale signal, this signal is transferred to controller 7 as the feedback pulse of linear displacement platform 2, by controller 7, linear displacement platform 2 is carried out to pulse feedback control, carry out microposition, simultaneously, control phase changer 5 by controller 7, continue to produce active phase shift, photoelectric sensor 4 output signals continue the virtual grating scale signal of output after shaping circuit 6, and its resolution is: 1.6nm.Repeat this process, until the linear displacement platform 2 of the feedback signal control that controller 7 provides according to virtual grating scale completes microposition process.
As shown in Figure 2, the present embodiment is by realizing and detecting with lower device, and this device comprises: grating interferometer 1, imaging len 3, two photoelectric sensors 4, phase changer 5, shaping circuit 6, controller 7 and linear displacement platforms 2.Wherein: grating interferometer 1 is arranged on linear displacement platform 2, grating interferometer 1 forms interference fringe by imaging len 3 in visual field, interference fringe both sides in visual field arrange respectively two photoelectric sensors 4, phase changer 5 is controlled by controller 7, two photoelectric sensors 4 are connected to realize photoelectric sensor 4 with phase changer 5 respectively and move up or down, make photoelectric sensor 4 to producing phase shift in the reception of interference fringe, after shaping circuit 6, there is virtual grating scale signal in photoelectric sensor 4 output signals, as position feedback pulse and transfer to controller 7, realizing controller 7 detects and controls linear displacement platform 2.
Claims (7)
1. a displacement location detection method, it is characterized in that, first carry out grand location, thereby in the time that location displacement is less than striped equivalent, move up and down raster phase and form the virtual grating scale signal of two-way, respectively corresponding upper and lower two moving directions of the virtual grating scale signal of two-way, carry out step-by-step counting FEEDBACK CONTROL to realize microposition to the virtual grating scale signal of two-way.
2. method according to claim 1, is characterized in that, specifically comprises the following steps:
Step 1, grating interferometer is fixed on the linear displacement platform of individual layer, grating interferometer forms interference fringe in visual field by imaging len, interference fringe both sides in visual field arrange respectively two photoelectric sensors, make two photoelectric sensors respectively at moving up or down in visual field by phase changer, make photoelectric sensor to producing phase shift in the reception of interference fringe, make interference fringe produce phase shift;
When step 2, the motion of linear displacement platform, when fringe movement is to the phase shift position of photoelectric sensor, photoelectric sensor output signals will occur one and detect pulse signal, i.e. virtual grating scale signal after shaping;
Step 3, photoelectric sensor continue mobile, obtain the virtual grating scale signal of row, using virtual these row grating scale signal as position feedback pulse, realize the detection control to linear displacement platform.
3. method according to claim 2, is characterized in that, what described photoelectric sensor moved up or moved down changes according to the moving direction for linear stage and whether overshoot direction of motion of linear displacement platform.
4. method according to claim 2, is characterized in that, the signal resolution δ ' of described virtual grating scale signal is:
wherein, X is interference fringe phase shift, and L is the spacing of adjacent interference fringe in visual field, and δ is the striped resolution without phase shift.
5. according to the method described in claim 1-4 any one, it is characterized in that, described grand location refers to: directly using the output signal of grating interferometer as feedback, linear displacement platform is carried out to detection and location control.
6. method according to claim 5, is characterized in that, described location displacement is less than striped equivalent and refers to: the resolution that the orientation distance of linear displacement platform is less than to grating interferometer.
7. realize the device of method described in above-mentioned any one claim for one kind, it is characterized in that, comprise: grating interferometer, imaging len, two photoelectric sensors, phase changer, shaping circuit, controller and linear displacement platform, wherein: grating interferometer is arranged on linear displacement platform, grating interferometer forms interference fringe in visual field by imaging len, interference fringe both sides in visual field arrange respectively two photoelectric sensors, phase changer is by controller control, two photoelectric sensors are connected to realize respectively photoelectric sensor and move up or down with phase changer, make photoelectric sensor to producing phase shift in the reception of interference fringe, after shaping, there is virtual grating scale signal in photoelectric sensor output signals, using this virtual grating scale signal as position feedback pulse and transfer to controller, realize the detection control of controller to linear displacement platform.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104678889A (en) * | 2014-12-25 | 2015-06-03 | 中国科学院长春光学精密机械与物理研究所 | Laser interference control method for grating mechanical ruling engine |
| CN104965529A (en) * | 2015-07-13 | 2015-10-07 | 东南大学 | Large-stroke compound ultra-precision position measurement and control system and method |
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| US5517307A (en) * | 1991-05-30 | 1996-05-14 | Rank Taylor Hobson Limited | Probe measurement apparatus using a curved grating displacement interferometer |
| CN101369155A (en) * | 2008-07-16 | 2009-02-18 | 上海大学 | Locking control method and system of large-stroke nanometer displacement positioning macro-movement bench |
| CN201740513U (en) * | 2010-07-21 | 2011-02-09 | 杨克虎 | Modularized displacement measuring device with low cost |
| CN103481321A (en) * | 2013-08-29 | 2014-01-01 | 中国科学院长春光学精密机械与物理研究所 | Nanometer positioning device and system |
| CN103558861A (en) * | 2013-10-22 | 2014-02-05 | 广东工业大学 | Dynamic switching method for macro-micro composite motion |
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2014
- 2014-08-14 CN CN201410401099.6A patent/CN104181939B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5517307A (en) * | 1991-05-30 | 1996-05-14 | Rank Taylor Hobson Limited | Probe measurement apparatus using a curved grating displacement interferometer |
| CN101369155A (en) * | 2008-07-16 | 2009-02-18 | 上海大学 | Locking control method and system of large-stroke nanometer displacement positioning macro-movement bench |
| CN201740513U (en) * | 2010-07-21 | 2011-02-09 | 杨克虎 | Modularized displacement measuring device with low cost |
| CN103481321A (en) * | 2013-08-29 | 2014-01-01 | 中国科学院长春光学精密机械与物理研究所 | Nanometer positioning device and system |
| CN103558861A (en) * | 2013-10-22 | 2014-02-05 | 广东工业大学 | Dynamic switching method for macro-micro composite motion |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104678889A (en) * | 2014-12-25 | 2015-06-03 | 中国科学院长春光学精密机械与物理研究所 | Laser interference control method for grating mechanical ruling engine |
| CN104678889B (en) * | 2014-12-25 | 2017-07-07 | 中国科学院长春光学精密机械与物理研究所 | A kind of laser interference control method of grating mechanical scratching machine |
| CN104965529A (en) * | 2015-07-13 | 2015-10-07 | 东南大学 | Large-stroke compound ultra-precision position measurement and control system and method |
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