CN105675922B - A kind of scanning range bearing calibration of piezoelectric ceramics tube scanner and system - Google Patents
A kind of scanning range bearing calibration of piezoelectric ceramics tube scanner and system Download PDFInfo
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Abstract
The invention discloses a kind of scanning range bearing calibration of piezoelectric ceramics tube scanner and system, method to include：Executed from calculating correction method, school for the blind and a kind of scanning range bearing calibration based on thickness of sample is selected in fitting correction method, and the actual scanning scope of piezoelectric ceramics tube scanner and the relation of thickness of sample are obtained according to selected bearing calibration；The actual (real) thickness of sample is obtained, and is corrected according to the scanning range of the actual (real) thickness and actual scanning scope of sample and the relation pair piezoelectric ceramics tube scanner of thickness of sample.The present invention is additionally arranged and calculates correction method, school for the blind executes and fitting correction method, the relation of actual scanning scope and thickness of sample can be drawn and scanning range is corrected according to the actual (real) thickness of sample, the change of the piezoelectric ceramics tube scanner scanning range caused by thickness of sample changes effectively is corrected, it is more accurate and reliable.It the composite can be widely applied to microscope technology field.
Description
Technical field
The present invention relates to microscope technology field, especially a kind of scanning range bearing calibration of piezoelectric ceramics tube scanner
And system.
Background technology
From after nineteen eighty-two PSTM (STM) appearance, and it is similar to have developed a series of activities principle successively
New microtechnic, mainly including AFM (AFM), horizontal force microscope (LFM), magnetic force microscopy (MFM), quiet
Force microscope (EFM), NFM (SNOM), piezoelectricity force microscope (PFM), scan probe acoustics microscope
(SPAM) etc., because they are all that sample is scanned using probe, while detect scanning process middle probe and sample
Interaction (interaction force between such as sample-probe), obtain sample relevant nature (such as pattern, frictional force, magnetic domain knot
Structure etc.), thus it is collectively referred to as scanning probe microscopy (SPM).
In order to reach nano level resolution ratio, scanning probe microscopy is substantially the three-dimensional according to piezoelectric scanner
Motion is scanned imaging.Due to the lagging characteristics of piezoelectric ceramics inherently, have between its deformation quantity and driving voltage bright
Aobvious non-linear relation.So that simple linear voltage drives scanner as an example, the sample motion of scanner is nonlinear, therefore its
Scanning, which obtains image, can have distortion, it is necessary to be corrected.At present, grinding for Piezoelectric scanning probe microscope system
Study carefully work to be concentrated mainly on relation and the non-linear correction method of piezoelectric ceramics deformation quantity and driving voltage, and commonly use non-thread
Property bearing calibration has open-loop calibration method and closed loop calibration method.
Open-loop calibration method, refer in advance detect scanner using nano-grade displacement detection technique, obtain scanner
Driving voltage and sample stage displacement relation, scanner in the future in use, to sweeping based on the relation obtained in advance
Retouch device and apply appropriate driving voltage, it is accurate to control the displacement of sample stage and realize linear movement.Closed loop calibration method, exactly sweeping
Retouch and displacement transducer is loaded onto in device, detect the motion of scanner sample stage (standard sample is placed with sample stage) in real time.Closed loop
Calibration method is similar with open-loop calibration method, simply displacement transducer is arranged in scanner, the displacement to scanner sample stage is entered
Row detection in real time, and real-time feedback control is carried out to scanner driving voltage, so as to realize the reality to the motion of scanner sample stage
When closed-loop control.Because closed loop calibration method must be integrated with piezoelectric scanner by displacement transducer, thus it is more using electricity at present
Hold sensor or foil gauge less sensor in equal volume.
At present, the nano-grade displacement detection method commonly used in scanner calibration includes capacitive displacement transducer method, linear
Variable differential transformer (Linear Variable Differential Transformer, LVDT) method, strain gauge method and swash
Optical interferometry, CAS Electrical Engineering Research Institute is in Application No. 200310113670.6, and entitled " piezoelectric ceramics tube scanner is non-
Just described in the patent of invention of linear correction method " non-thread using laser interference (Michelson's interferometer) correction piezoelectric ceramics
The method of property effect.
Piezoelectric scanner mainly includes piezo-ceramic tube type and flatbed etc., wherein, piezoelectric ceramic tube type scanner
There is small volume, simple in construction, stability is good, fast response time and drive control are convenient, be current resolution ratio highest,
The cheap piezoelectric scanner type of cost, therefore it is most widely used in scanning probe microscopy.Piezoelectric ceramics tube scanner
Four-quadrant segmentation is carried out to a wall electrode, and 5 independent electricity are formed with inwall electrode to split four obtained electrodes
Pole, to realize the three-dimensional motions of X-Y-Z.
Scanning probe microscopy controls piezoelectric ceramics tube scanner to be moved in X-Y plane by voltage signal, drives and visits
Pin or sample are scanned, and obtain the interaction information of probe and sample room, and according to the change of interaction information, control
Piezoelectric ceramics tube scanner moves (upper and lower telescopic moving) in Z-direction, to offset the surface undulation of sample, makes probe and sample room
Interaction keep it is constant, so as to obtain the surface informations such as the surface topography of sample.
Scanning of the piezoelectric ceramics tube scanner in X-Y plane be piezoelectric ceramic tube is made by voltage signal while elongation,
While bending caused by shortening is realized, its scanning range can because sample thickness (when by the way of Sample Scan) or
The increase of the length (when by the way of probe scanning) of probe and become big.Current scanning probe microscopy, is typically integrated with
A variety of detection techniques, and probe uses laser detection mode more, need to keep probe and laser detection system in detection process
Relative position is constant, and it is larger to implement difficulty by the way of probe scanning, therefore piezoelectric ceramics tube scanner uses sample mostly
Product scan mode.Probe has realized that generalization is given birth on a large scale substantially as the running stores in scanning probe microscopy, at present probe
Production, its geometry uniformity is fine, and the length of probe is basically unchanged, and on the other hand, in the kind of actually detected middle sample
A lot, the otherness of thickness is very big, causes the error of actual scanning scope larger, can not such as be carried out in time according to corresponding thickness
Correction can directly affect the accuracy of testing result.
However, current piezo-ceramic tube type flying-spot microscope, either using existing open-loop calibration method or closed loop
Calibration method, what is detected is all the motion of piezoelectric ceramics tube scanner sample stage rather than the motion of sample, by all samples
Thickness is all defaulted as the thickness of standard sample, it is impossible to scanning range error of the calibration caused by thickness of sample difference, it is not accurate enough
It is really and reliable.
The content of the invention
In order to solve the above technical problems, it is an object of the invention to：It is a kind of accurate and reliable to provide, and piezoelectric ceramic tube is swept
Retouch the scanning range bearing calibration of device.
Another object of the present invention is to：A kind of accurately and reliable, the scanning range of piezoelectric ceramics tube scanner is provided
Correction system.
The technical solution used in the present invention is：
A kind of scanning range bearing calibration of piezoelectric ceramics tube scanner, it is characterised in that：Comprise the following steps：
S1, executed from calculating correction method, school for the blind and a kind of scanning range based on thickness of sample is selected in fitting correction method
Bearing calibration, and actual scanning scope and the pass of thickness of sample of piezoelectric ceramics tube scanner are obtained according to selected bearing calibration
System, wherein, calculate correction method according to given piezoelectric ceramics length of tube, given sample stage highly and 1 given thickness
Standard sample obtains actual scanning scope and the relation of thickness of sample, and school for the blind is executed according to the different standard sample of two given thickness
Product obtain actual scanning scope and the relation of thickness of sample, and fitting correction method is according to a series of different standard samples for giving thickness
The result of actual scanning imaging fits actual scanning scope and the relation of thickness of sample；
S2, the actual (real) thickness for obtaining sample, and according to the actual (real) thickness and actual scanning scope of sample with
The scanning range of the relation pair piezoelectric ceramics tube scanner of thickness of sample is corrected.
Further, it is described to calculate correction method according to given piezoelectric ceramics length of tube, given sample stage height and 1
The standard sample of given thickness obtains the step for relation of actual scanning scope and thickness of sample, and it is specially：
The standard for being T0 according to given piezoelectric ceramics length of tube L, given sample stage height H and 1 given thickness
Sample obtains actual scanning scope S and thickness of sample T relational expression, the actual scanning scope S and thickness of sample T pass
It is that expression formula is：
Wherein, S0 is the scanning range of standard sample demarcation.
Further, the school for the blind executes obtains actual scanning scope and sample according to two different standard samples of given thickness
The step for relation of product thickness, it is specially：
Actual scanning scope is demarcated twice according to the standard sample that two given thickness are respectively T0 and T1, then
Result according to demarcating twice draws actual scanning scope S and thickness of sample T relational expression, the actual scanning scope S
Relational expression with thickness of sample T is：
Wherein, S0 is the scanning range for the standard sample demarcation that given thickness is T0, and S1 is the standard that given thickness is T1
The scanning range of sample demarcation.
Further, the knot that the fitting correction method is imaged according to a series of standard sample actual scanning of different given thickness
Fruit fits the step for relation of actual scanning scope and thickness of sample, and it includes：
Actual scanning imagery is carried out using a series of standard sample of different given thickness, obtains piezoelectric ceramic tube scanning
Device corresponds to the actual scanning scope of each thickness of sample；
Correspond to the actual scanning scope of each thickness of sample according to piezoelectric ceramics tube scanner, be fitted using fitting algorithm
Go out the actual scanning scope of piezoelectric ceramics tube scanner and the relation curve or relation function of thickness of sample.
Further, the step S2 includes：
S21, the actual (real) thickness for inputting sample or the automatic actual (real) thickness for obtaining sample；
S22, actual (real) thickness and actual scanning scope and the relation of thickness of sample according to sample, after offline
Processing correction method or on line emendation method are corrected to the scanning range of piezoelectric ceramics tube scanner.
Further, the step for the actual (real) thickness of the automatic acquisition sample, it is specially：
Calculated automatically according to the travel position of scanning probe microscope probe screw rod and detection imaging is carried out to sample
When probe lifting distance, so as to accurately calculate the actual (real) thickness of sample.
Further, the step for the actual (real) thickness of the automatic acquisition sample, it is specially：
The mounting distance sensor on the probe of scanning probe microscopy, base is then detected with surveying by range sensor
Distance between head accurately calculates the actual (real) thickness of sample.
Further, it is described that this is corrected to the scanning range of piezoelectric ceramics tube scanner using offline postprocessing correction method
One step, it is specially：
It is micro- to scanning probe according to the actual (real) thickness of sample and actual scanning scope and the relation of thickness of sample
Result obtained by the detection imaging control system test sample of mirror carries out off-line calibration, the result after being calibrated.
Further, it is described that this is corrected to the scanning range of piezoelectric ceramics tube scanner using on line emendation method
Step, it is specially：
Calculating correction method, school for the blind are executed to the detection imaging control system that scanning probe microscopy is integrated into fitting correction method
In system, and when being detected to sample, according to the actual (real) thickness of sample by detecting imaging control system to sweeping
Retouch scope to be calibrated automatically, directly obtain the result after calibration.
Another technical scheme for being taken of the present invention is：
A kind of scanning range correction system of piezoelectric ceramics tube scanner, including with lower module：
Chosen module, thickness of sample is based on selected one kind in fitting correction method for being executed from calculating correction method, school for the blind
Scanning range bearing calibration, and the actual scanning scope and sample of piezoelectric ceramics tube scanner are obtained according to selected bearing calibration
The relation of product thickness, wherein, correction method is calculated according to given piezoelectric ceramics length of tube, given sample stage height and 1
The standard sample of given thickness obtains actual scanning scope and the relation of thickness of sample, and school for the blind is executed according to two given thickness not
Same standard sample obtains actual scanning scope and the relation of thickness of sample, and fitting correction method is according to a series of different given thickness
Standard sample actual scanning imaging result fit actual scanning scope and the relation of thickness of sample；
Scanning range correction module, for obtaining the actual (real) thickness of sample, and according to the actual (real) thickness of sample
And the scanning range of the relation pair piezoelectric ceramics tube scanner of actual scanning scope and thickness of sample is corrected；
The output end of the chosen module is connected with the input of scanning range correction module.
The beneficial effects of the method for the present invention is：Be additionally arranged calculate correction method, school for the blind execute with fitting correction method, can draw
Actual scanning scope and the relation of thickness of sample are simultaneously corrected according to the actual (real) thickness of sample to scanning range, are effectively corrected
The change of piezoelectric ceramics tube scanner scanning range caused by thickness of sample changes, makes piezoelectric ceramics tube scanner retain original
On the basis of the advantages such as some high-resolution and low cost, the degree of accuracy of testing result is improved, meets scientific research and production
Industry applies the actual requirement to the high-resolution of scanning probe microscopy, high accuracy and low cost, more accurate and reliable.Enter
One step, the range sensor detection that can be installed automatically by the travel position of scanning probe microscope probe screw rod or on probe
Distance between base and gauge head, carry out the accurate thickness for calculating sample, it is more intelligent.Further, the reality of sample is being obtained
After the thickness of border, flexibly piezoelectric ceramic tube can be swept from offline postprocessing correction method or on line emendation method according to being actually needed
The scanning range for retouching device is corrected, more flexibly.
The beneficial effect of system of the present invention is：Chosen module is additionally arranged and calculates correction method, school for the blind executes and fitting correction
Method, the relation of actual scanning scope and thickness of sample can be drawn and in scanning range correction module according to the actual (real) thickness of sample
Scanning range is corrected, effectively corrects the change of the piezoelectric ceramics tube scanner scanning range caused by thickness of sample changes
Change, piezoelectric ceramics tube scanner is improved detection knot on the basis of the advantages such as original high-resolution and low cost are retained
The degree of accuracy of fruit, meet scientific research and industry apply to the high-resolution of scanning probe microscopy, high accuracy and it is low into
This actual requirement is more accurate and reliable.
Brief description of the drawings
Fig. 1 is a kind of overall flow figure of the scanning range bearing calibration of piezoelectric ceramics tube scanner of the present invention；
Fig. 2 is the overall structure block diagram that a kind of scanning range of piezoelectric ceramics tube scanner of the present invention corrects system；
Fig. 3 is probe scanning schematic diagram；
Fig. 4 is Sample Scan schematic diagram；
Fig. 5 is the structural representation of piezoelectric ceramic tube type scanner；
Fig. 6 is the top view of piezoelectric ceramic tube；
Fig. 7 is the overall structure view of piezoelectric ceramic tube；
Fig. 8 is the motion process schematic diagram of piezoelectric ceramic tube；
Fig. 9 is the motion process comparison diagram of the different-thickness sample of piezoelectric ceramic tube type scanner；
Figure 10 is the motion process schematic diagram for calculating piezoelectric ceramic tube corresponding to correction method；
Figure 11 is the structural representation of typical scanning probe microscope probe；
Figure 12 is the structural representation for the scanning probe microscope probe for being provided with range sensor.
Reference：1 and 7, sample；2nd, probe；3rd, scanner；4th, piezoelectric ceramic tube；5th, base；6th, sample stage；8th, it is electric
Pole lead；9th, scanner shell；10th, the first sample；11st, the second sample；12nd, gauge head；13rd, screw rod；14th, stepper motor；15th, away from
From sensor.
Embodiment
A kind of reference picture 1, scanning range bearing calibration of piezoelectric ceramics tube scanner, comprises the following steps：
S1, executed from calculating correction method, school for the blind and a kind of scanning range based on thickness of sample is selected in fitting correction method
Bearing calibration, and actual scanning scope and the pass of thickness of sample of piezoelectric ceramics tube scanner are obtained according to selected bearing calibration
System, wherein, calculate correction method according to given piezoelectric ceramics length of tube, given sample stage highly and 1 given thickness
Standard sample obtains actual scanning scope and the relation of thickness of sample, and school for the blind is executed according to the different standard sample of two given thickness
Product obtain actual scanning scope and the relation of thickness of sample, and fitting correction method is according to a series of different standard samples for giving thickness
The result of actual scanning imaging fits actual scanning scope and the relation of thickness of sample；
S2, the actual (real) thickness for obtaining sample, and according to the actual (real) thickness and actual scanning scope of sample with
The scanning range of the relation pair piezoelectric ceramics tube scanner of thickness of sample is corrected.
Be further used as preferred embodiment, it is described calculate correction method according to given piezoelectric ceramics length of tube, give
Sample stage height and 1 given thickness standard sample obtain actual scanning scope and thickness of sample be related to this step
Suddenly, it is specially：
The standard for being T0 according to given piezoelectric ceramics length of tube L, given sample stage height H and 1 given thickness
Sample obtains actual scanning scope S and thickness of sample T relational expression, the actual scanning scope S and thickness of sample T pass
It is that expression formula is：
Wherein, S0 is the scanning range of standard sample demarcation.
Preferred embodiment is further used as, the school for the blind executes to be obtained according to two different standard samples of given thickness
The step for actual scanning scope and the relation of thickness of sample, it is specially：
Actual scanning scope is demarcated twice according to the standard sample that two given thickness are respectively T0 and T1, then
Result according to demarcating twice draws actual scanning scope S and thickness of sample T relational expression, the actual scanning scope S
Relational expression with thickness of sample T is：
Wherein, S0 is the scanning range for the standard sample demarcation that given thickness is T0, and S1 is the standard that given thickness is T1
The scanning range of sample demarcation.
Preferred embodiment is further used as, the fitting correction method is according to a series of different standard samples for giving thickness
The step for result of product actual scanning imaging fits the relation of actual scanning scope and thickness of sample, it includes：
Actual scanning imagery is carried out using a series of standard sample of different given thickness, obtains piezoelectric ceramic tube scanning
Device corresponds to the actual scanning scope of each thickness of sample；
Correspond to the actual scanning scope of each thickness of sample according to piezoelectric ceramics tube scanner, be fitted using fitting algorithm
Go out the actual scanning scope of piezoelectric ceramics tube scanner and the relation curve or relation function of thickness of sample.
Preferred embodiment is further used as, the step S2 includes：
S21, the actual (real) thickness for inputting sample or the automatic actual (real) thickness for obtaining sample；
S22, actual (real) thickness and actual scanning scope and the relation of thickness of sample according to sample, after offline
Processing correction method or on line emendation method are corrected to the scanning range of piezoelectric ceramics tube scanner.
Be further used as preferred embodiment, it is described it is automatic obtain sample actual (real) thickness the step for, it has
Body is：
Calculated automatically according to the travel position of scanning probe microscope probe screw rod and detection imaging is carried out to sample
When probe lifting distance, so as to accurately calculate the actual (real) thickness of sample.
Be further used as preferred embodiment, it is described it is automatic obtain sample actual (real) thickness the step for, it has
Body is：
The mounting distance sensor on the probe of scanning probe microscopy, base is then detected with surveying by range sensor
Distance between head accurately calculates the actual (real) thickness of sample.
Be further used as preferred embodiment, it is described using offline postprocessing correction method to piezoelectric ceramics tube scanner
The step for scanning range is corrected, it is specially：
It is micro- to scanning probe according to the actual (real) thickness of sample and actual scanning scope and the relation of thickness of sample
Result obtained by the detection imaging control system test sample of mirror carries out off-line calibration, the result after being calibrated.
Preferred embodiment is further used as, it is described that piezoelectric ceramics tube scanner is swept using on line emendation method
The step for scope is corrected is retouched, it is specially：
Calculating correction method, school for the blind are executed to the detection imaging control system that scanning probe microscopy is integrated into fitting correction method
In system, and when being detected to sample, according to the actual (real) thickness of sample by detecting imaging control system to sweeping
Retouch scope to be calibrated automatically, directly obtain the result after calibration.
Reference picture 2, a kind of scanning range correction system of piezoelectric ceramics tube scanner, including with lower module：
Chosen module, thickness of sample is based on selected one kind in fitting correction method for being executed from calculating correction method, school for the blind
Scanning range bearing calibration, and the actual scanning scope and sample of piezoelectric ceramics tube scanner are obtained according to selected bearing calibration
The relation of product thickness, wherein, correction method is calculated according to given piezoelectric ceramics length of tube, given sample stage height and 1
The standard sample of given thickness obtains actual scanning scope and the relation of thickness of sample, and school for the blind is executed according to two given thickness not
Same standard sample obtains actual scanning scope and the relation of thickness of sample, and fitting correction method is according to a series of different given thickness
Standard sample actual scanning imaging result fit actual scanning scope and the relation of thickness of sample；
Scanning range correction module, for obtaining the actual (real) thickness of sample, and according to the actual (real) thickness of sample
And the scanning range of the relation pair piezoelectric ceramics tube scanner of actual scanning scope and thickness of sample is corrected；
The output end of the chosen module is connected with the input of scanning range correction module.
The present invention is described in further detail with reference to Figure of description and specific embodiment.
Embodiment one
The present embodiment illustrates to the general principle of the present invention and involved correlation theory.
Scanning probe microscopy controls probe to scan sample surfaces by piezoelectric scanner, synchronous detection and record probe
With the interaction signal of sample, so as to obtain the surface information of sample.Probe is actually probe and sample to Sample Scan
Controllable relative motion, both can be by the way of probe scanning, also can be by the way of Sample Scan, as shown in Figures 3 and 4.
In Fig. 3 and 4,1 is sample, and 2 be probe, and 3 be piezoelectric scanner, and Fig. 3 is probe scanning mode, and Fig. 4 is sample
Product scan mode.In fact, the scanning motion of probe and sample is both relative motions, both modes are equivalent, but
Current scanning probe microscopy, a variety of detection techniques are typically integrated with, and probe uses laser detection mode more, in detection
During need to keep the relative position of probe and laser detection system constant, difficulty is implemented by the way of probe scanning
It is larger, therefore scanning probe microscopy uses Sample Scan mode mostly.
The implementation process of invention is illustrated in a manner of Sample Scan below.
The principle of piezoelectric scanner is the piezoelectricity back wash effect using piezoelectric, motion is carried out by voltage accurate
Control.Piezoelectric scanner mainly has piezo-ceramic tube type and flatbed etc., wherein, because piezoelectric ceramic tube type scanner has
Have the advantages that small volume, simple in construction, stability is good, fast response time, drive control are convenient, be current resolution ratio highest, into
This cheap piezoelectric scanner type, therefore it is most widely used in scanning probe microscopy.
The structure of piezoelectric ceramic tube type scanner is as shown in figure 5, wherein, 4 be piezoelectric ceramic tube；5 be insulator foot, is risen solid
It is set for using, is typically formed by Ceramic manufacturing, there is good insulating properties and mechanical stability；6 be insulated sample platform, lower end and pressure
Electroceramics pipe connects, and sample 7 is placed on it, and 8 be contact conductor, and 9 be the shell of scanner.
Piezoelectric ceramic tube is the core of piezoelectric ceramic tube type scanner, and its structure is as shown in Figures 6 and 7.In Fig. 6 and 7, piezoelectricity
Earthenware radially polarizes, and wall electrode is split by four-quadrant, and forms 5 independent electrodes with inwall electrode Z, respectively
Represented with+X ,-X ,+Y ,-Y and Z.
As shown in figure 8, when Z electrodes voltage increase when, the electric-field intensity of divided 4 part of earthenware from inside to outside by
Cumulative to add, this 4 part axially simultaneously extends, and generates the motion along Z-direction.Voltage increase ,-X electrode when+X electrode
When voltage reduces, the electric-field intensity of the divided right part of earthenware from inside to outside reduces, and shortens vertically；And left part
Electric-field intensity increase from inside to outside, it is axially elongated.This side of earthenware is shortened and the deformation of opposite side elongation causes
Its upper end is bending to the right, produces the motion of X-direction.Similarly, the voltage change of+Y and-Y electrode can also produce the motion of Y-direction.
Therefore, wall electrode presses the single earthenware of four-quadrant segmentation, by being controlled to the voltage of 5 electrodes, it is possible to realize
The motion of X-Y-Z three-dimensionals.
The X-Y scanning directions motion of piezoelectric ceramic tube type scanner is realized by the Bending Deformation of piezoelectric ceramic tube
, therefore if thickness of sample is different, even if system driving scanner does identical motion, the sample upper surface that probe is detected
Move distance also differs, as shown in Figure 9.In Fig. 9,10 be the first sample that thickness is T1, and 11 be the second sample that thickness is T2
Product, 4 be piezoelectric scanning pipe, and 5 be insulator foot, and 6 be scanner sample stage.As seen from Figure 9, system drive flying-spot tube is carried out
During scanning, the displacement of the first sample is S1, and the displacement of the second sample is S2, if T2 ＞ T1, S2 ＞ S1, i.e. sample
Thicker, actual scanning range (i.e. displacement) is bigger.
The deformation of piezoelectric ceramic tube be the side of pipe shorten and opposite side elongation caused by, but be used for scanning probe microscopy
The physical length of the piezoelectric ceramic tube of piezoelectric scanner is bigger, is commonly used for 30mm, minimum is also 10mm or so, its upper and lower side
The border benefit in face can be ignored, therefore shape can be fitted by circular arc line after piezoelectric ceramic tube deformation, as shown in Figure 10.Figure
In 10, A is the central point that piezoelectric ceramic tube fixes end face, and B moves end face for piezoelectric ceramic tube when not applying turntable driving voltage
Central point, B ' is to apply turntable driving voltage to produce the central point that piezoelectric ceramic tube after deformation moves end face, and O is pressed when being deformation
The center of circle of electroceramics pipe circular arc；L is the length of piezoelectric ceramic tube, and H is the height of sample stage, and T0 is for calibrating piezoelectric ceramic tube
The thickness of the standard sample of scanning range, T be sample actual (real) thickness, St be piezoelectric ceramic tube move end face movement away from
From S0 is the displacement of standard sample, and S is the actual displacement of sample.
Assuming that ∠ BAB ' are θ, then have：
St=Ltan θ (1)
Due to AC and B, ' C ' is respectively the tangent line of circular arc ' two point in A and B formed after piezoelectric ceramic tube deformation, passes through letter
Single geometric proof can demonstrate,prove to obtain the θ of ∠ BAB ' of ∠ DB ' C '=2=2.Therefore, had according to geometrical relationship：
S0=St+ (H+T0) tan2 θ (2)
S=St+ (H+T) tan2 θ (3)
And the piezoelectric scanning pipe being used in scanning probe microscopy, its pipe range L are generally 30mm, under the driving of voltage,
Its bend caused by displacement St in 10 μm of magnitudes, θ is very small, only 10-4Magnitude, therefore have：The θ of tan θ=θ, tan2 θ=2.
Therefore, formula (2) and (3) can be rewritten as：
S0=St+2 (H+T0) θ (4)
S=St+2 (H+T) θ (5)
It can be obtained by formula (1), (4) and (5) simultaneous：
For the manufacturer of instrument, using length as L piezoelectric ceramic tube, highly assemble scanner for H sample stage, go out
Only need to use thickness once to demarcate the scanning range of scanner for T0 standard sample during factory, you can obtain S0.
In actual measurement, only it is to be understood that the thickness T of sample, just obtains the current actual scanning scope of the scanner from formula (6), has
Effect correction because thickness of sample change caused by measurement error, realize testing result high accuracy (the method be referred to as calculate school
Execute).
For the user of instrument, accurate encapsulation is carried out because scanner employs protection shell, can not accurately be pressed
The length L of the electroceramics pipe and height H of sample stage.In order to be made pottery to the piezoelectricity of encapsulation of unknown piezoelectric ceramic tube and sample stage yardstick
The actual scanning scope of porcelain tube scanner is corrected, and the present invention proposes a kind of blind correction of piezoelectric ceramics tube scanner
Method.The general principle that the school for the blind of piezoelectric ceramics tube scanner executes is as follows：
It can be obtained by formula (6)：
Define the geometric parameter k of piezoelectric ceramics tube scanner：
K=L+2H (8)
Then formula (7) can be rewritten as：
For the user of instrument, thickness is first used to be demarcated to obtain to the scanning range of scanner for T0 standard sample
S0, then use thickness (can be padded below the standard sample that thickness is T0 put the pad that thickness is t in practice for T1 standard sample
Piece, then T1=T0+t) scanning range of scanner is demarcated to obtain S1, T0, S0, T1, S1 are substituted into formula (8), can obtain
The geometric parameter of scanner expresses formula：
It can be obtained by formula (6) and formula (8) simultaneous：
That is, although without piezoelectric ceramic tube and sample stage scale parameter, the user of instrument still can be by adopting
Carry out more demarcation once to scanner scanning range again with the different standard sample of another thickness, obtain the geometry of scanner
Parameter k, and after k value is determined,, just can be from formula (11) only it is to be understood that the actual (real) thickness T of sample in the measurement of reality
The current actual scanning scope of the scanner is obtained, effectively correction measurement error because caused by changing thickness of sample, realize inspection
Survey the high accuracy of result.
Because the actual scanning scope and the thickness of sample of scanner have correlation, the invention also provides another school
Quasi- method-fitting correction method, this method carry out actual scanning imagery using a series of standard sample of different-thickness, obtained
The scanner corresponds to the actual scanning scope of each thickness of sample, so as to fit the actual scanning scope of the scanner and sample
The relation curve or function of product thickness, then using the relation curve or function fitted as foundation, to real caused by thickness of sample
The change of border scanning range is calibrated.Fitting correction method is a kind of empirical formula calibration method based on experimental data, as long as institute
A series of standard sample quantity of different-thickness of selection is enough and thickness range covering instrument is tested in actual use
Sample is possible to thickness, can not consider that thickness has an impact to scanning range into original, therefore its apply also for it is non-
The other types scanner of piezoelectric ceramic tube.
And for the change of the scanning range caused by thickness of sample, user can use above-mentioned calculating correction method, blind
Correction method and fitting correction method these three methods are corrected, and obtain actual scanning scope and the relation of thickness of sample.Obtain real
, can be according to the actual (real) thickness of sample using on line emendation method or offline rear place after border scanning range and the relation of thickness of sample
Reason correction method is corrected to the scanning range of piezoelectric ceramics tube scanner.
Wherein, the offline postprocessing correction method of scanning range, refer to obtaining testing result using scanning probe microscopy
Afterwards, it is contemplated that measurement error caused by thickness of sample measures to the actual (real) thickness of sample, and introduces thickness of sample
This parameter, obtained testing result is calibrated, the result after being calibrated, the result eliminates thickness of sample to sweeping
The influence of scope is retouched, effectively increases the degree of accuracy of testing result.Offline postprocessing correction rule and scanning probe microscopy control
System processed is unrelated, need to only understand the data format of testing result, you can is calibrated, the new data after generation calibration.
And the on line emendation method of scanning range, correction method, school for the blind will be calculated by, which referring to, executes and is integrated with fitting correction method
Into the detection imaging control system of scanning probe microscopy, when being detected to sample, the actual (real) thickness of sample is inputted
System or the automatic actual (real) thickness for obtaining sample, detection imaging control system carry out automatic school with actual (real) thickness to scanning range again
Standard, influence of the thickness of sample to scanning range is eliminated, calibrated result is directly obtained, effectively increases the standard of testing result
Exactness.
Compared with offline postprocessing correction method, on line emendation method is more convenient, but on line emendation method needs pair
The online scan control software of scanning probe microscopy control system is modified, and apparatus manufacture does not provide a user source journey typically
Sequence or development interface, therefore on line emendation method is typically only applicable to apparatus manufacture and embedded it in control system, makes instrument
Performance lifted.
Although the present embodiment is fixed based on probe, the scanning probe microscopy of Sample Scan formula, for probe scanning, sample
It is scanning probe microscopy that product, which are fixed, and the calibration method of the present embodiment is equally applicable, and the calibration method of the present embodiment
Calibration suitable for other using the instrument actual motion stroke of piezoelectric ceramics (particularly piezoelectric ceramic tube) driving.
Embodiment two
In order to improve the automaticity of scanning probe microscopy, use user more convenient, show for scanning probe
Micro mirror, the present invention propose to thickness of sample carry out automatic measurement technology, the technology in conjunction with the embodiments one scanning range school
Correction method, when being detected to sample, thickness of sample can be automatically obtained, realize the automatic on-line correction of scanning range.
The structure of scanning probe microscope probe used in automatic measurement is as shown in figure 11.In Figure 11,12 be gauge head, 5
It is probe for base, 2,3 be scanner, and 1 is sample, and 13 be accurate screw rod, and 14 be stepper motor.Scanning probe microscopy is by being
Probe in system control probe is scanned to obtain the surface information of sample to sample surfaces, pops one's head in mainly by gauge head and base
(Figure 11 only draws base and upper lid to show understructure) is formed, and probe is arranged on gauge head, and sample is fixed on scanner
On the sample stage of top, scanner is arranged on base, and gauge head is by three accurate Screw rod bearingses on base, each accurate screw rod
All rotated in the case where the control of a stepper motor drives, make elevating movement, to adapt to the requirement of the sample automatic measurement of different-thickness.
During detection imaging, probe contacts with sample or keeps nanoscale (i.e. 10 with sample-9M magnitudes) spacing and in the upper surface of sample
Scanning, and accurate screw rod then carries out lift adjustment according to the thickness of sample, sample is thicker, and screw rod liter must be higher.In order to ensure to survey
The level and its stability of head, detection imaging control system is by controlling three stepping motor synchronous operations to drive three screw rods same
Step lifting.Moreover, even if three screw rods are unable to synchronization lifting, according to the position of three screw rods and probe, pass through each screw rod
Travel position, the lifting distance of probe when detection imaging is carried out to sample can be also calculated automatically, so as to accurately calculate sample
Actual (real) thickness.
The automatic measurement technology of another thickness of sample is sensed by the probe mounting distance in scanning probe microscopy
What device was realized, as shown in figure 12.In Figure 12,12 be gauge head, and 5 be base, and 2 be probe, and 3 be scanner, and 1 is sample, and 13 be essence
Close screw rod, 14 be stepper motor, and 15 be range sensor.Distance between the direct measurement base of range sensor 15 and gauge head.
During detection imaging, accurate screw rod carries out lift adjustment according to the thickness of sample, and sample is thicker, and screw rod liter must get over Gao Yue, gauge head with
Distance between base is bigger, therefore according to the distance between gauge head and base during range sensor detection sample, also can accurately count
Calculate the thickness of sample.
The present embodiment obtains the travel position of screw rod according to the position of scanning probe microscope probe screw rod and probe, or
Distance on probe between mounting distance sensor detection base and gauge head, carry out the thickness that automatic and accurate calculates sample, with this
One bearing calibration is calibrated automatically to actual scanning scope in conjunction with the embodiments, directly obtains the test result after calibration.
The method and structure of the present embodiment is desirably integrated into scanning probe microscopy, realizes the reality of scanning probe microscopy
When online scanning range full-automatic correction, i.e. scanning probe microscopy automatically obtained sample when filling sample inserting needle
Actual (real) thickness, and then carry out real time calibration to scanning range with this thickness inside scanning imaging system, its testing result is actual
It is the accurate result after correction.
The scanning range bearing calibration of piezoelectric ceramic tube proposed by the present invention, effectively correct because thickness of sample change causes
Measurement error caused by the change of piezoelectric ceramics tube scanner scanning range, make piezoelectric ceramics tube scanner original in reservation
On the basis of the advantages such as high-resolution, low cost, the high accuracy of testing result is realized, meets scientific research and industry application
To the actual requirement of the high-resolution of scanning probe microscopy, high accuracy and low cost.
Above is the preferable implementation to the present invention is illustrated, but the invention is not limited to the implementation
Example, those skilled in the art can also make a variety of equivalent variations on the premise of without prejudice to spirit of the invention or replace
Change, these equivalent deformations or replacement are all contained in the application claim limited range.
Claims (10)
1. a kind of scanning range bearing calibration of piezoelectric ceramics tube scanner, from calculating correction method, school for the blind executes and fitting correction
A kind of scanning range bearing calibration based on thickness of sample is selected in method, it is characterised in that：Comprise the following steps：
The selected bearing calibration of S1, basis obtains the actual scanning scope of piezoelectric ceramics tube scanner and the relation of thickness of sample,
Wherein, standard of the correction method according to given piezoelectric ceramics length of tube, given sample stage height and 1 given thickness is calculated
Sample obtains actual scanning scope and the relation of thickness of sample, and school for the blind executes to be obtained according to two different standard samples of given thickness
It is actual according to a series of standard sample of different given thickness to actual scanning scope and the relation of thickness of sample, fitting correction method
The result of scanning imagery fits actual scanning scope and the relation of thickness of sample；
S2, the actual (real) thickness for obtaining sample, and according to the actual (real) thickness and actual scanning scope and sample of sample
The scanning range of the relation pair piezoelectric ceramics tube scanner of thickness is corrected.
A kind of 2. scanning range bearing calibration of piezoelectric ceramics tube scanner according to claim 1, it is characterised in that：Institute
State and calculate standard sample of the correction method according to given piezoelectric ceramics length of tube, given sample stage height and 1 given thickness
Product obtain the step for relation of actual scanning scope and thickness of sample, and it is specially：
The standard sample for being T0 according to given piezoelectric ceramics length of tube L, given sample stage height H and 1 given thickness
Obtain actual scanning scope S and thickness of sample T relational expression, the actual scanning scope S and thickness of sample T relation table
It is up to formula：
<mrow>
<mi>S</mi>
<mo>=</mo>
<mrow>
<mo>(</mo>
<mn>1</mn>
<mo>+</mo>
<mfrac>
<mrow>
<mn>2</mn>
<mrow>
<mo>(</mo>
<mi>T</mi>
<mo>-</mo>
<mi>T</mi>
<mn>0</mn>
<mo>)</mo>
</mrow>
</mrow>
<mrow>
<mi>L</mi>
<mo>+</mo>
<mn>2</mn>
<mi>H</mi>
<mo>+</mo>
<mn>2</mn>
<mi>T</mi>
<mn>0</mn>
</mrow>
</mfrac>
<mo>)</mo>
</mrow>
<mi>S</mi>
<mn>0</mn>
<mo>,</mo>
</mrow>
Wherein, S0 is the scanning range of standard sample demarcation.
A kind of 3. scanning range bearing calibration of piezoelectric ceramics tube scanner according to claim 1, it is characterised in that：Institute
State school for the blind and execute and be related to this according to what two different standard samples of given thickness obtained actual scanning scope and thickness of sample
Step, it is specially：
Actual scanning scope is demarcated twice according to the standard sample that two given thickness are respectively T0 and T1, then basis
The result demarcated twice draws actual scanning scope S and thickness of sample T relational expression, the actual scanning scope S and sample
Product thickness T relational expression is：
<mrow>
<mfenced open = "{" close = "">
<mtable>
<mtr>
<mtd>
<mi>S</mi>
<mo>=</mo>
<mo>(</mo>
<mn>1</mn>
<mo>+</mo>
<mfrac>
<mrow>
<mn>2</mn>
<mrow>
<mo>(</mo>
<mi>T</mi>
<mo>-</mo>
<mi>T</mi>
<mn>0</mn>
<mo>)</mo>
</mrow>
</mrow>
<mrow>
<mi>k</mi>
<mo>+</mo>
<mn>2</mn>
<mi>T</mi>
<mn>0</mn>
</mrow>
</mfrac>
<mo>)</mo>
<mi>S</mi>
<mn>0</mn>
</mtd>
</mtr>
<mtr>
<mtd>
<mi>k</mi>
<mo>=</mo>
<mfrac>
<mrow>
<mn>2</mn>
<mi>S</mi>
<mn>0</mn>
<mrow>
<mo>(</mo>
<mi>T</mi>
<mn>1</mn>
<mo>-</mo>
<mi>T</mi>
<mn>0</mn>
<mo>)</mo>
</mrow>
</mrow>
<mrow>
<mi>S</mi>
<mn>1</mn>
<mo>-</mo>
<mi>S</mi>
<mn>0</mn>
</mrow>
</mfrac>
<mo>-</mo>
<mn>2</mn>
<mi>T</mi>
<mn>0</mn>
</mtd>
</mtr>
</mtable>
</mfenced>
<mo>,</mo>
</mrow>
Wherein, S0 is the scanning range for the standard sample demarcation that given thickness is T0, and S1 is the standard sample that given thickness is T1
The scanning range of demarcation.
A kind of 4. scanning range bearing calibration of piezoelectric ceramics tube scanner according to claim 1, it is characterised in that：Institute
State the result that fitting correction method is imaged according to a series of standard sample actual scanning of different given thickness and fit actual scanning
The step for scope and the relation of thickness of sample, it includes：
Actual scanning imagery is carried out using a series of standard sample of different given thickness, obtains piezoelectric ceramics tube scanner pair
Should be in the actual scanning scope of each thickness of sample；
Correspond to the actual scanning scope of each thickness of sample according to piezoelectric ceramics tube scanner, pressure is fitted using fitting algorithm
The actual scanning scope of electroceramics tube scanner and the relation curve or relation function of thickness of sample.
A kind of 5. scanning range bearing calibration of piezoelectric ceramics tube scanner according to claim 1, it is characterised in that：Institute
Stating step S2 includes：
S21, the actual (real) thickness for inputting sample or the automatic actual (real) thickness for obtaining sample；
S22, actual (real) thickness and actual scanning scope and the relation of thickness of sample according to sample, using offline post processing
Correction method or on line emendation method are corrected to the scanning range of piezoelectric ceramics tube scanner.
A kind of 6. scanning range bearing calibration of piezoelectric ceramics tube scanner according to claim 5, it is characterised in that：Institute
The step for stating the actual (real) thickness of automatic acquisition sample, it is specially：
Visited when calculating automatically and detection imaging is carried out to sample according to the travel position of scanning probe microscope probe screw rod
The lifting distance of pin, so as to accurately calculate the actual (real) thickness of sample.
A kind of 7. scanning range bearing calibration of piezoelectric ceramics tube scanner according to claim 5, it is characterised in that：Institute
The step for stating the actual (real) thickness of automatic acquisition sample, it is specially：
The mounting distance sensor on the probe of scanning probe microscopy, then detected by range sensor between base and gauge head
Distance accurately calculate the actual (real) thickness of sample.
A kind of 8. scanning range bearing calibration of piezoelectric ceramics tube scanner according to claim 5, it is characterised in that：Institute
The step for being corrected using offline postprocessing correction method to the scanning range of piezoelectric ceramics tube scanner is stated, it is specially：
According to the actual (real) thickness of sample and actual scanning scope and the relation of thickness of sample, to scanning probe microscopy
Detect the result progress off-line calibration obtained by imaging control system test sample, the result after being calibrated.
9. a kind of scanning range bearing calibration of piezoelectric ceramics tube scanner according to claim 5,6 or 7, its feature exist
In：Described the step for being corrected using on line emendation method to the scanning range of piezoelectric ceramics tube scanner, its is specific
For：
Calculating correction method, school for the blind are executed to the detection imaging control system that scanning probe microscopy is integrated into fitting correction method
In, and when being detected to sample, according to the actual (real) thickness of sample by detecting imaging control system to scanning
Scope is calibrated automatically, directly obtains the result after calibration.
A kind of 10. scanning range correction system of piezoelectric ceramics tube scanner, it is characterised in that：Including with lower module：
Chosen module, for being executed from calculating correction method, school for the blind and a kind of sweeping based on thickness of sample being selected in fitting correction method
Scope bearing calibration is retouched, and the actual scanning scope and sample thickness of piezoelectric ceramics tube scanner are obtained according to selected bearing calibration
The relation of degree, wherein, it is given according to given piezoelectric ceramics length of tube, given sample stage height and 1 to calculate correction method
The standard sample of thickness obtains actual scanning scope and the relation of thickness of sample, and school for the blind executes different according to two given thickness
Standard sample obtains actual scanning scope and the relation of thickness of sample, and fitting correction method is according to a series of different marks for giving thickness
The result of quasi- sample actual scanning imaging fits actual scanning scope and the relation of thickness of sample；
Scanning range correction module, for obtaining the actual (real) thickness of sample, and according to the actual (real) thickness of sample and
The scanning range of the relation pair piezoelectric ceramics tube scanner of actual scanning scope and thickness of sample is corrected；
The output end of the chosen module is connected with the input of scanning range correction module.
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