CN106767384A - Static broach MEMS gauge head constant force mode of operation implementation methods - Google Patents
Static broach MEMS gauge head constant force mode of operation implementation methods Download PDFInfo
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- CN106767384A CN106767384A CN201611045621.7A CN201611045621A CN106767384A CN 106767384 A CN106767384 A CN 106767384A CN 201611045621 A CN201611045621 A CN 201611045621A CN 106767384 A CN106767384 A CN 106767384A
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- displacement
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- tooth
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/28—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring contours or curvatures
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
The invention belongs to static broach MEMS gauge heads in micro-nano fields of measurement, and in particular to a kind of static broach MEMS gauge heads constant force mode of operation implementation method.Compared with prior art, the inventive method perceives sample surface morphology and changes by static broach MEMS sensor, and moves up and down to keep MEMS sensor fixed tooth and dynamic between cog displacement to keep constant as feedback quantity control length travel platform；Both solved the problems, such as that gauge head longitudinal direction measurement range was limited in background technology, gauge head can have been made to keep constant with institute test sample product intermolecular forces again, reduction measurement error.
Description
Technical field
The invention belongs to static broach MEMS gauge heads in micro-nano fields of measurement, and in particular to a kind of static broach MEMS is surveyed
Head constant force mode of operation implementation method.
Background technology
Static broach MEMS sensor have that low-power consumption, high sensitivity, high linearity and production in enormous quantities bring it is low into
This features such as, it is widely used in force snesor, position sensor, driver, micro-acceleration gauge, micromechanical gyro and resonance
The aspects such as device.
In recent years, geometric measurement of the research by static broach capacitive MEMS sensor application in micro-nano-scale sweeps
Retouch.As shown in figure 1, dynamic tooth is fixed on fixing end together with girder by spring beam, there is electric capacity between fixed tooth and dynamic tooth.Work as girder
When probe or microballoon the scanning sample surfaces on top, sample shows that pattern change can cause the movement of girder, so as to cause fixed tooth
With the change of dynamic between cog electric capacity.By the change of the dynamic electric capacity between tooth and fixed tooth of measurement, sample surface morphology can be perceived.
But by the sample surfaces that the problem of plateau levels precision is brought are inclined, sample itself surface inclines and MEMS
The reason such as sensor longitudinal stroke is limited, gauge head longitudinal direction measurement range is limited, general only 10 μm.
When gauge head is scanned simultaneously, due to moving the difference of relative displacement between tooth and fixed tooth, between gauge head top and institute's test sample product
Opposing force also changes therewith, and this kind change will cause the unstability of measurement error and gauge head work.
The content of the invention
(1) technical problem to be solved
The technical problem to be solved in the present invention is：A kind of static broach MEMS gauge head constant force mode of operation how is provided to realize
Method.
(2) technical scheme
In order to solve the above technical problems, the present invention provides a kind of static broach MEMS gauge heads constant force mode of operation realization side
Method, the method perceives sample surface morphology and changes by static broach MEMS sensor, and controls longitudinal position as feedback quantity
Moving stage moves up and down to keep MEMS sensor fixed tooth and dynamic between cog displacement to keep constant；；The method comprises the following steps：
Step 1：Static broach MEMS gauge heads are fixed on directly over three-dimensional localization platform, the three-dimensional localization platform is provided
The displacement of horizontal X and Y-direction, realizes the scanning of XY both directions；The displacement movement of vertical Z-direction is provided simultaneously；
Step 2：Sample is positioned on Z-direction displacement platform, positioned at the underface of gauge head, so as to testing sample is located at survey
Between head and Z-direction displacement platform；Z-direction displacement platform is by the way of coarse motion displacement platform and precision displacement table are combined；Coarse motion displacement platform reality
Now low precision operation on a large scale, precision displacement table realizes high precision displacement control using piezoelectric ceramics displacement platform, its displacement with
Apply voltage linear change thereon；
Step 3：MEMS gauge heads are divided into fixed tooth and dynamic tooth, and dynamic tooth is connected with gauge head girder, the needle point or microballoon on girder top
Perceiving sample modification of surface morphology can produce the relative displacement of girder fixed tooth and dynamic tooth；So as to cause gauge head electric capacity
The linear change of amount；
Step 4：Industrial computer gathers the voltage output value of capacitance measurement circuit, in real time display sample surface topography, instead
The control voltage of feedback output Z-direction displacement platform, realizes the Bit andits control of Z-direction displacement platform；
Step 5：Using gauge head electric capacitance change as value of feedback, the displacement of real-time regulation length travel platform makes gauge head electricity
Capacity keeps constant, can so make the dynamic relative displacement variable quantity between tooth and fixed tooth of gauge head constant, and needle point is understood by Hooke's law
It is constant with sample intermolecular forces, it is to avoid the measurement error not caused etc. by active force；
The stroke of longitudinal direction precision piezoelectric ceramics displacement platform moves phase between tooth and fixed tooth more than 100 μm much larger than gauge head simultaneously
To stroke, so as to improve the measurement stroke of gauge head；Simultaneously by the movement of XY directions displacement platform, that is, realize surveying sample surfaces shape
Looks are measured.
(3) beneficial effect
Compared with prior art, the inventive method perceives sample surface morphology and becomes by static broach MEMS sensor
Change, and move up and down to keep MEMS sensor fixed tooth and dynamic between cog displacement to keep permanent as feedback quantity control length travel platform
It is fixed；Both gauge head longitudinal direction measurement range was limited in having solved the problems, such as background technology, and gauge head can again acted on sample room is surveyed
Trying hard to keep, it is constant to hold, and reduces measurement error.
Brief description of the drawings
Fig. 1 is static broach MEMS gauge head schematic diagrames.
Fig. 2 is the structure chart involved by technical solution of the present invention.
Fig. 3 is technical solution of the present invention schematic diagram of the function.
Specific embodiment
To make the purpose of the present invention, content and advantage clearer, with reference to the accompanying drawings and examples, to of the invention
Specific embodiment is described in further detail.
To solve problem of the prior art, the present invention provides a kind of static broach MEMS gauge heads constant force mode of operation realization side
Method, the method perceives sample surface morphology and changes by static broach MEMS sensor, and controls longitudinal position as feedback quantity
Moving stage moves up and down to keep MEMS sensor fixed tooth and dynamic between cog displacement to keep constant；Both gauge head was indulged in having solved background technology
To the problem that measurement range is limited, gauge head can be made to keep constant with institute test sample product intermolecular forces again, reduce measurement error；The party
Method comprises the following steps：
Step 1：As shown in Fig. 2 static broach MEMS gauge heads are fixed on directly over three-dimensional localization platform, it is described three-dimensional fixed
Bit platform provides the displacement of horizontal X and Y-direction, realizes the scanning of XY both directions；The displacement movement of vertical Z-direction is provided simultaneously；
Step 2：Sample is positioned on Z-direction displacement platform, positioned at the underface of gauge head, so as to testing sample is located at survey
Between head and Z-direction displacement platform；Z-direction displacement platform is by the way of coarse motion displacement platform and precision displacement table are combined；Coarse motion displacement platform reality
Now low precision operation on a large scale, precision displacement table realizes high precision displacement control using piezoelectric ceramics displacement platform, its displacement with
Apply voltage linear change thereon；
Step 3：MEMS gauge heads are divided into fixed tooth and dynamic tooth, and dynamic tooth is connected with gauge head girder, the needle point or microballoon on girder top
Perceiving sample modification of surface morphology can produce the relative displacement of girder fixed tooth and dynamic tooth；So as to cause gauge head electric capacity
The linear change of amount；
Step 4：Industrial computer gathers the voltage output value of capacitance measurement circuit, in real time display sample surface topography, instead
The control voltage of feedback output Z-direction displacement platform, realizes the Bit andits control of Z-direction displacement platform；
Step 5：Using gauge head electric capacitance change as value of feedback, the displacement of real-time regulation length travel platform makes gauge head electricity
Capacity keeps constant, can so make the dynamic relative displacement variable quantity between tooth and fixed tooth of gauge head constant, and needle point is understood by Hooke's law
It is constant with sample intermolecular forces, it is to avoid the measurement error not caused etc. by active force；
The stroke of longitudinal direction precision piezoelectric ceramics displacement platform moves phase between tooth and fixed tooth more than 100 μm much larger than gauge head simultaneously
To stroke, so as to improve the measurement stroke of gauge head；Simultaneously by the movement of XY directions displacement platform, that is, realize surveying sample surfaces shape
Looks are measured.
The present invention is described in detail with reference to specific embodiment.
Embodiment 1
As shown in figure 3, the present embodiment includes following particular content：
1. rower is entered to capacitance measurement circuit and static broach MEMS gauge heads using the tractability such as nano-measuring machine instrument
It is fixed, specify the Proportional coefficient K between gauge head displacement and capacitance measurement circuit exporting change amount1, draw gauge head calibration formula：
X=K1ΔU (1)
Wherein, x is that dynamic tooth position is moved, and Δ U is capacitive detection circuit exporting change amount
2. the voltage of piezoelectric ceramics and displacement are demarcated using the tractability such as nano-measuring machine instrument, specify Uf=
K2Y, wherein, y is piezoelectric ceramics displacement, UfIt is piezoelectric ceramics applied voltage.
3. voltage output during sample is not yet contacted using capacitance measurement circuit measurement gauge head, benchmark is set to
Bias voltage U0, as the benchmark zero point of gauge head displacement.
4. the coarse-fine combination campaign of Z-direction displacement platform is controlled, using gauge head calibration formula (1), gauge head needle point is contacted detected sample
Product surface, the displacement of dynamic tooth stops inserting needle when being b μm.Assuming that the dynamic tooth of gauge head and fixed tooth maximum relative displacement are 10 μm, then 0 is made<b
<10, b is bigger, then gauge head needle point is bigger with sample intermolecular forces, can adjust b value sizes according to specimen material hardness.
5. real-time control Z-direction coarse motion and accurate moving process, when the displacement for making the dynamic tooth of gauge head is b μm, Z-direction precision piezoelectricity pottery
Porcelain displacement platform is located at half of stroke or so, so can effectively using the stroke of Z-direction precision piezoelectric ceramics platform.Now piezoelectric ceramics
Voltage is Uof, it is set to piezoelectric ceramics bias voltage.
6. horizontal position moving stage carries out the scanning of horizontal direction, the voltage variety Δ U according to capacitance measurement circuit, calculates pressure
Electroceramics applied voltage is：
Uf=-K1K2ΔU+Uof (2)
Z-direction piezoelectric ceramics displacement is followed gauge head needle point change in displacement, gauge head needle point displacement is maintained b μm.Gauge head
Dynamic is elastic construction between tooth and fixed tooth, and when the two relative displacement remains constant, according to Hooke's law, mutual intermolecular forces are also permanent
Fixed, i.e., the active force between gauge head needle point and sample is also constant.The displacement variable of piezoelectric ceramics can characterize quilt
The surface appearance feature of test sample product, can in real time be shown by industrial computer.
To sum up, the present invention is studied for static broach MEMS gauge heads in the application of micro-nano fields of measurement, proposes pin
To the implementation method of the constant force mode of operation of the type gauge head.The electric capacity of static broach MEMS gauge heads and the displacement on its girder top
Variable quantity is proportional.When static broach MEMS gauge heads are used for the scanning of measuring surface form, using static broach structure
Capacitance measurement circuit output valve be feedback quantity, the stroke of real-time regulation length travel platform can characterize surveyed sample surfaces
Shape characteristic.
The above is only the preferred embodiment of the present invention, it is noted that for the ordinary skill people of the art
For member, on the premise of the technology of the present invention principle is not departed from, some improvement and deformation can also be made, these improve and deform
Also should be regarded as protection scope of the present invention.
Claims (1)
1. a kind of static broach MEMS gauge heads constant force mode of operation implementation method, it is characterised in that the method passes through static broach
MEMS sensor perceives sample surface morphology change, and moves up and down to keep MEMS as feedback quantity control length travel platform
Sensor fixed tooth and dynamic between cog displacement keep constant；；The method comprises the following steps：
Step 1：Static broach MEMS gauge heads are fixed on directly over three-dimensional localization platform, the three-dimensional localization platform provides level
The displacement of X and Y-direction, realizes the scanning of XY both directions；The displacement movement of vertical Z-direction is provided simultaneously；
Step 2：Sample is positioned on Z-direction displacement platform, positioned at the underface of gauge head so that testing sample be located at gauge head and
Between Z-direction displacement platform；Z-direction displacement platform is by the way of coarse motion displacement platform and precision displacement table are combined；Coarse motion displacement platform is realized big
The low precision operation of scope, precision displacement table realizes high precision displacement control using piezoelectric ceramics displacement platform, and its displacement is with applying
Voltage linear change thereon；
Step 3：MEMS gauge heads are divided into fixed tooth and dynamic tooth, and dynamic tooth is connected with gauge head girder, and the needle point or microballoon on girder top are perceived
Sample modification of surface morphology can produce the relative displacement of girder fixed tooth and dynamic tooth；So as to cause gauge head capacitance
Linear change；
Step 4：Industrial computer gathers the voltage output value of capacitance measurement circuit, in real time display sample surface topography, feeds back defeated
Go out the control voltage of Z-direction displacement platform, realize the Bit andits control of Z-direction displacement platform；
Step 5：Using gauge head electric capacitance change as value of feedback, the displacement of real-time regulation length travel platform makes gauge head capacitance
Keep constant, can so make the dynamic relative displacement variable quantity between tooth and fixed tooth of gauge head constant, needle point and sample are understood by Hooke's law
Product intermolecular forces are constant, it is to avoid the measurement error not caused etc. by active force；
The stroke of longitudinal direction precision piezoelectric ceramics displacement platform moves opposing rows between tooth and fixed tooth more than 100 μm much larger than gauge head simultaneously
Journey, so as to improve the measurement stroke of gauge head；Simultaneously by the movement of XY directions displacement platform, that is, realize surveying sample surface morphology survey
Amount.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110455656A (en) * | 2019-08-26 | 2019-11-15 | 吉林大学 | The integrated micromechanics comb structure of accurate actuation/perception double mode and detection method |
| CN114062170A (en) * | 2021-11-02 | 2022-02-18 | 中国航空工业集团公司北京长城计量测试技术研究所 | Balanced type micro force value loading device and method based on comb capacitor |
-
2016
- 2016-11-24 CN CN201611045621.7A patent/CN106767384A/en active Pending
Non-Patent Citations (1)
| Title |
|---|
| 孙凤鸣: "基于MEMS的阵列式扫描探针显微镜测头理论与技术研究", 《中国博士学位论文全文数据库 工程科技Ⅱ辑》 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110455656A (en) * | 2019-08-26 | 2019-11-15 | 吉林大学 | The integrated micromechanics comb structure of accurate actuation/perception double mode and detection method |
| CN114062170A (en) * | 2021-11-02 | 2022-02-18 | 中国航空工业集团公司北京长城计量测试技术研究所 | Balanced type micro force value loading device and method based on comb capacitor |
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