CN201740513U - Modularized displacement measuring device with low cost - Google Patents

Modularized displacement measuring device with low cost Download PDF

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Publication number
CN201740513U
CN201740513U CN2010202692521U CN201020269252U CN201740513U CN 201740513 U CN201740513 U CN 201740513U CN 2010202692521 U CN2010202692521 U CN 2010202692521U CN 201020269252 U CN201020269252 U CN 201020269252U CN 201740513 U CN201740513 U CN 201740513U
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displacement
rail plate
measuring device
framework
light source
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Expired - Fee Related
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CN2010202692521U
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Chinese (zh)
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杨克虎
郭建军
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China University of Mining and Technology Beijing CUMTB
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杨克虎
郭建军
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Abstract

The utility model relates to a modularized displacement measuring device with low cost, which consists of a framework, a slide lead rail, a displacement detection module and a communication display circuit. The slide lead rail contacts with a measured object and moves along the framework along with the displacement of the measured object. The displacement detection module is fixed on the framework and keeps proper distance with the slide lead rail. The movement of the slide lead rail changes the intensity of light projected on a photosensor array in the displacement detection module and changes output electric signals. A signal detection circuit in the displacement detection module processes the change and the displacement amount of the slide lead rail is obtained. A communication display circuit displays the displacement amount or provides a communication interface for external call. The displacement detection module adopts modularized design. The displacement measuring device has the advantages of simple mechanical structure, high stability, high precision, low cot and the like.

Description

Modularization is displacement measuring device cheaply
Technical field
The utility model relates to sensor, input and process field, is a kind of device that utilizes photosensor arrays to detect the testee displacement.
Background technology
Displacement measuring device can be divided into polytypes such as inductance type, condenser type, Hall-type, photo-electric according to the difference of principle of work.Because the utility model belongs to photo-electric, so following content all is at the similar technology that adopts photo-electric.The photo-electric displacement measuring device can be divided into raster pattern and laser type again, below the ultimate principle and the relative merits of these several technology is carried out concise and to the point analysis.
The ultimate principle of raster pattern displacement measuring device is: when key light grid in a pair of grating and secondary grating generation relative displacement, produce chequered with black and white regular streaks figure under interference of light and diffraction acting in conjunction, be referred to as Moire fringe.The striped that makes black alternate with white through photoelectric device conversion converts the sinusoidal wave electric signal that changes to, again through amplification, shaping, obtaining that two-way differs is 90 ° sine wave or square wave, sends into the grating digital readout counting and shows.The raster pattern displacement measuring device has advantages such as precision height, measurement range be wide, but its manufacturing process relative complex working environment is had relatively high expectations, greasy dirt and dust all can influence its reliability, thereby are applicable to laboratory and environment workshop preferably mostly.In addition, the price of grating displacement measuring device is higher, not too is applicable to some application scenarios cheaply.
The laser triangulation that mainly adopts the laser type displacement measuring device detects displacement (annotate: the return laser beam analytic approach is applicable to long distance detecting, and is relatively poor to short-range displacement detecting precision), is a kind of contactless method.Its ultimate principle is: laser instrument sends light beam and projects the generation scattering of testee surface through convergent lens, wherein a part of scattered light images on the imageing sensor through receiver lens, if testee is subjected to displacement, to cause the luminous point of body surface on the direction of laser beam, to move, and then the picture point on the imageing sensor also will move thereupon, just can calculate the displacement of testee by subsequent treatment, the resolution of these series products of great majority is below 10 μ m at present.This method needs accurately design light path, and the measurement mechanism volume is big, cost is high.
By the retrieval to prior art, present most of photo-electric displacement measuring devices also all are based on above-mentioned two kinds of principles.For example: people's such as the Wang Sheng of Central China University of Science and Technology bosom Chinese patent " a kind of laser phase grating interference displacement sensor " [application number 200710168674.2], the Sun Li of Harbin Institute of Technology rather waits people's Chinese patent " position detecting device of double grating displacement transducer metering mode and detection method thereof " [application number 200510010288.1], people's such as the Xie Fang of Beijing Jiaotong University Chinese patent " utilizes the online micro-displacement measuring system of optical fiber interference type of fiber grating ", and [application number 200710063770.0] etc. all is the grating type displacement measuring device.The laser triangulation that then is based on people's such as the Wang Lei of Xiamen University Chinese patent " from axle rotation symmetric form laser triangulation displacement transducer " [application number 200810070652.7] detects displacement.In addition, the characteristics that people's such as people's such as the Liu Gang of Tsing-Hua University Chinese patent " based on the self-mixed interference displacement sensor of two-frequency laser " [application number 200510011230.9], Chongqing Polytechnic College Zhang Xinghong Chinese patent " based on the laser grid angular displacement sensor of CD-disc data system " [application number 200710093117.9] all has structure and principle complexity realize that accordingly cost is also higher.It is a kind of and the similar technology of the utility model that the long victory of University Of Ji'nan Chinese mugwort waits people's Chinese patent " based on the displacement measuring device and the method for laser image and respective pixel distance metric " [application number 200810014281.0], but by anatomizing, 1. the LASER Light Source of invention disclosed patent and imageing sensor separate, thereby cost is higher; 2. the light source of invention disclosed patent is defined as laser; 3. the image processing equipment of invention disclosed patent is the general dsp chip.As mentioned above, disclosed optical displacement sensor mostly has defectives such as cost height, complex structure, working environment requirement harshness.
The utility model content
The utility model is intended to overcome defectives such as current optical displacement sensor cost height, complex structure, working environment requirement harshness, for this reason, the utility model provides the displacement detector of a kind of low cost, low-power consumption, modularization, simple and reliable, superior performance.This utility model expection mass cost can be controlled at below the 300RMB, and displacement measurement resolution can reach below the 10 μ m, has high performance price ratio, and very low to the working environment requirement, can satisfy the needs of most contact displacement measurements.
For reaching described purpose, the low-cost displacement measuring device of modularization of the present utility model, form integrative-structure by framework, rail plate, displacement detecting module and communication display circuit, wherein: sealing or semi-enclosed hollow structure that framework is made up of the frame more than three or three have two relative sliding eyes on two frames therein; Rail plate is installed in the sliding eye, and the two ends of rail plate are positioned at the framework outside, and rail plate is merely able to move forward and backward vertically along sliding eye; One end of rail plate is fixedlyed connected with testee, and rail plate is along with the displacement of testee is moved along sliding eye; The displacement detecting module is fixed on the inwall of framework, and the workplace of displacement detecting module is over against rail plate and keep suitable distance with it; The displacement that the displacement detecting module is used to detect the displacement of rail plate and obtains testee indirectly; The communication display circuit is connected with the displacement detecting module, is responsible for communication display circuit and displacement detecting module communicating by letter and control between the two, the display circuit of communicating by letter simultaneously be used to show testee displacement, provide communication interface for the outside use.
Wherein, described framework is any one structure in sealing or semi-enclosed hollow circuit cylinder body structure, hollow rectangular structure, hollow cube structure, quadrilateral shape structure and the three-pointed hollow star structure.
Wherein, described displacement detecting module is made up of light source, camera lens, photosensor arrays and signal deteching circuit and is packaged into a standalone module; Light source is positioned at the top of rail plate, and the light that light source sends projects above the rail plate and reflection, and the mobile meeting of rail plate causes that catoptrical light intensity changes; Camera lens is positioned on the reflection optical axis of light source, and the input end face of photosensor arrays is positioned on the output end face of camera lens, is used for the reflected light of receiving light power variation and the electric signal that output changes with light intensity; The input end of signal deteching circuit is connected with the output terminal of photosensor arrays, is used to detect the variable quantity of electric signal, and the displacement of output rail plate.
Wherein, described light source can be a LASER Light Source, or the common LED light source.
Wherein, the arrangement organizational form of described photosensor arrays can be any one mode in one-dimensional array arrangement, two-dimensional array arrangement, periodic one dimension pectination arrangement and the periodic two-dimensional comb arrangement mode.
Wherein, described photosensor arrays is made up of a plurality of photosensitive units, and each photosensitive unit all is connected with signal deteching circuit, and photosensor arrays is with the surface characteristics conversion and the corresponding with it electric signal of output of rail plate.
The beneficial effects of the utility model:
Manufacturing process is simple.Whole device has only moving component of rail plate, and this rail plate does not have specific (special) requirements to machining precision and manufacturing materials, the rail plate that uses metal, plastic or other material to make through common machining precision can be worked well, the rail plate surface does not need to carry out any special processing yet, its surface smoothness is also very little to the influence of measurement result, thereby lower to the requirement of working environment, can in various rugged environments, use.
Degree of modularity height.Existing most of photo-electric displacement measuring device all is made of light source and optics, Photoelectric Detection module, signal processing circuit three big parts, adopt split-type design, thereby integrated level is lower, cost is higher more.And displacement measuring device employing of the present utility model is the modular design proposal of high integration, the displacement detecting module is integrated light source, photosensor arrays, camera lens, signal deteching circuit, thereby have plurality of advantages such as volume is little, low in energy consumption, reliability height.The image processing equipment of invention disclosed patent is a dsp chip, and the utility model does not use special image processing equipment, thereby has further reduced cost;
Easy to install.The grating type displacement measuring device must accurately be installed key light grid and secondary grating in use, in order to prevent the influence of factors such as dust, greasy dirt, also will seal and install additional protective cover usually, and need regularly safeguard.The laser type displacement measuring device then needs accurately to design light path.And displacement measuring device of the present utility model is installed simply, only device need be installed on the Reference, and rail plate is fixed on and gets final product on the testee, and the later stage does not need special maintenance yet.
Description of drawings
The low-cost displacement measuring device system chart of Fig. 1 modularization of the present utility model;
Fig. 2 framework of the present utility model is the specific embodiment of the hollow circuit cylinder body structure of sealing;
Fig. 3 framework of the present utility model is the specific embodiment of the hollow rectangular structure of sealing;
Fig. 4 framework of the present utility model is the specific embodiment of semi-enclosed quadrilateral shape structure;
Fig. 5 a and Fig. 5 b linear array photoelectric sensors array of the present utility model and related operation synoptic diagram thereof;
Fig. 6 " pectination " photosensor arrays of the present utility model and output signal thereof;
The specific embodiment of the low-cost displacement measuring device of Fig. 7 modularization of the present utility model.
Embodiment
Provide some specific embodiments with regard to various aspects of the present utility model below:
The low-cost displacement measuring device system chart of modularization of the present utility model as shown in Figure 1, mainly form by framework 1, rail plate 2, displacement detecting module 3 and the display circuit 4 of communicating by letter, wherein: sealing or semi-enclosed hollow structure that framework 1 is made up of the frame more than three or three have two relative sliding eyes on two frames therein; Rail plate 2 is installed in the sliding eye, and the two ends of rail plate 2 are positioned at the framework outside, and rail plate 2 is merely able to move forward and backward vertically along sliding eye; One end of rail plate 2 is fixedlyed connected with testee, and rail plate 2 is along with the displacement of testee is moved along sliding eye; Displacement detecting module 3 is fixed on the inwall of framework 1, and the workplace of displacement detecting module 3 is over against rail plate 2 and keep suitable distance with it; The displacement that displacement detecting module 3 is used to detect the displacement of rail plate and obtains testee indirectly; Communication display circuit 4 is connected with displacement detecting module 3, is responsible for communication display circuit 4 and displacement detecting module 3 communicating by letter and control between the two, the display circuit 4 of communicating by letter simultaneously be used to show testee displacement, provide communication interface for the outside use.
Described framework 1 is any one structure in sealing or semi-enclosed hollow circuit cylinder body structure, hollow rectangular structure, hollow cube structure, quadrilateral shape structure and the three-pointed hollow star structure.Provide several specific embodiments with regard to framework 1 of the present utility model below:
Embodiment one: the hollow circuit cylinder body structure of sealing, as shown in Figure 2, framework 1 is the hollow circuit cylinder body structure, the hollow circuit cylinder body structure comprises a tubular frame and two circular frames, two circular frames are positioned on the axis of hollow circuit cylinder body structure, the tubular frame is fixedlyed connected with an end face of displacement detecting module 3, on two circular frames at tubular frame two ends, respectively be provided with a sliding eye 11 and a sliding eye 12, sliding eye 11 and sliding eye 12 are staggered relatively, being positioned among sliding eye 11 and the sliding eye 12 of rail plate 2, and rail plate 2 is only axially to move freely along it.Rail plate 2 can be cylindrical structure as shown in Figure 2, also can be flat strip structure, and when rail plate 2 was the strip structure, sliding eye 11 and 12 also should be corresponding rectangle, and was consistent with the cross sectional shape of rail plate 2.
Embodiment two: the hollow rectangular structure of sealing, as shown in Figure 3, framework 1 is a hollow rectangular parallelepiped body structure, is made up of six frames in front, back, left, right, up, down.On two frames a sliding eye 11 and 12 are being arranged respectively about the hollow rectangular structure, sliding eye 11 and 12 is staggered relatively, and the two ends of rail plate 2 place respectively among sliding eye 11 and 12, and rail plate 2 is only axially to move freely along it.
Embodiment three: semi-enclosed quadrilateral shape structure, as shown in Figure 4, framework 1 is semi-enclosed quadrilateral shape structure, be made up of left and right, upper and lower four frames, and the difference between the hollow rectangular structure of embodiment two has been to remove former and later two frames of rectangular parallelepiped.On two frames a sliding eye 11 and 12 are being arranged respectively about semi-enclosed quadrilateral shape structure, sliding eye 11 and 12 is staggered relatively, and the two ends of rail plate 2 place respectively among sliding eye 11 and 12, and rail plate 2 is only axially to move freely along it.
When framework 1 is enclosed construction, also should on framework 1, reserve a hole, as the interface channel of the displacement detecting module 3 that is installed in frame inner wall with communicate by letter between the display circuit 4 power supply, the telecommunication cable that are installed in the framework outside.
Displacement detecting module 3 is converted into displacement the digital quantity of setting form; Communication display circuit 4 can carry out subsequent treatment to the information that displacement detection module 3 sends over, and also can provide various communication interfaces for various information such as outside use or demonstration displacements according to actual needs.
Displacement detecting module 3 is made up of light source 31, camera lens 32, photosensor arrays 33 and signal deteching circuit 34.Displacement detecting module 3 adopts incorporate structure, and light source 31, camera lens 32, photosensor arrays 33 and signal deteching circuit 34 are packaged into an independently module, have greatly improved the stability and the reliability of system, have reduced cost.Light source 31 can be that common led light source also can be a LASER Light Source.Light source 31 is positioned at the top of rail plate 2, and the light that is sent by light source 31 projects rail plate 2 top reflections, and the displacement meeting of rail plate 2 causes that catoptrical light intensity changes; Camera lens 32 is positioned on the reflection optical axis of light source 31, and the input end face of photosensor arrays 33 is positioned on the output end face of camera lens 32, is used to receive the electric signal that reflected light that the light intensity of camera lens 32 outputs changes and output change with light intensity; The input end of signal deteching circuit 34 is connected with the output terminal of photosensor arrays 33, signal deteching circuit 34 detects this variation of the electric signal that changes with light intensity, and be translated into the digital quantity relevant or directly draw displacement with rail plate 2 displacements, and send to communication display circuit 4 handle, show or by various communication interfaces for outside use.
In several critical pieces of the low-cost displacement measuring device of modularization of the present utility model, critical component is a displacement detecting module 3, and the tissue of photosensor arrays 33 wherein and connected mode and signal deteching circuit 34 employed detection methods are cores of displacement detecting module 3.The arrangement organizational form of described photosensor arrays 33 can be any one mode in one-dimensional array arrangement, two-dimensional array arrangement, periodic one dimension pectination arrangement and the periodic two-dimensional comb arrangement mode.Described photosensor arrays 33 is made up of a plurality of photosensitive units, and each photosensitive unit all is connected with signal deteching circuit 34, and photosensor arrays 33 is with the surface characteristics conversion and the corresponding with it electric signal of output of rail plate 2.
Provide several specific embodiments at the tissue of photosensor arrays 33 and connected mode and signal deteching circuit 34 employed detection methods below.
Embodiment one: photosensor arrays 33 can adopt the arrangement mode of linear array or face battle array, for the purpose of simplifying the description, is described with the linear array arrangement mode here.Shown in Fig. 5 a, photosensor arrays 33 is formed (notes: just carry out schematic illustration here by 5 photosensitive unit 331-335, degree of accuracy and robustness in order to improve algorithm in the reality, employed photosensitive unit is usually much larger than 5), each photosensitive unit all is connected with signal deteching circuit 34.Photosensor arrays 33 can be converted into the surface characteristics of rail plate 2 the one dimension gray level image, when micro-displacement takes place in rail plate 2, the one dimension grayscale image sequence has very high correlativity, and two width of cloth one dimension gray level images before and after the displacement are carried out the precise displacement that related operation just can obtain rail plate.The image related operation is the algorithms most in use of image processing field, below its principle of carrying out displacement detecting is briefly introduced.Shown in Fig. 5 b, f iAnd g iBe respectively before rail plate 2 displacements and the one dimension gray level image after the displacement, i=1,2 ... N, wherein N is the number of photosensitive unit, N=5 here.F so iAnd g iRelated function be:
corr ( f , g ) m = Σ i = 1 N f i · g i - m - - - ( 1 )
In the formula (1), m is for postponing.G as can be seen from Fig. 5 b iBe by f iThe position that moves right obtains, and image moves the displacement of this position and rail plate 2 a definite relation is arranged.Might as well make g i=f I+1, substitution formula (1) obtains:
corr ( f , g ) m = Σ i = 1 N f i · f i + 1 - m - - - ( 2 )
In this example, obvious when postponing m=1, corr (f, g) mObtain maximum value.
Therefore this detection method is carried out related operation to adjacent two width of cloth one dimension gray level images exactly, the delay m of correspondence when obtaining related function and obtaining maximal value, and the one dimension image spatially delay and the displacement of rail plate 2 definite relation is arranged, final by calculating the displacement of rail plate 2.
Embodiment two: what in fact use in embodiment one is a kind of method that dynamically updates relevant masterplate, promptly carry out related operation for be correlated with masterplate and present image with preceding piece image, when piece image arrives instantly, piece image became the relevant masterplate of piece image down before present image replaced, and therefore relevant masterplate dynamically updates.If photosensor arrays is a kind of periodic arrangement, as shown in Figure 6, the one dimension arrangement mode that this arrangement mode is called a kind of " comb arrays (comb-array) ", whenever the photosensitive unit of some cycles (cycle is 4 here) of being separated by adopts the mode of " summation " to link together, and this way is actually a kind of method that adopts fixing masterplate to carry out related operation.Four signal A of final output, B, C, D handles by these four signals, just can obtain the sense of displacement and the displacement of guide rail.
Provide the specific embodiment of the low-cost displacement measuring device of modularization of an employing this " comb arrays (comb-array) " arrangement mode below, as shown in Figure 7.For the purpose of simplifying the description, omitted frame parts among Fig. 7, formed by rail plate 2, displacement detecting module 3 and the display circuit 4 of communicating by letter.The core component of displacement detecting module 3 has used the CYONS2100 integrated chip, CYONS2100 has comprised LASER Light Source 31, photosensor arrays 33, signal deteching circuit 34 and a PSoC (Programmable System on Chip) single-chip microcomputer 35, photosensor arrays 33 adopts the arrangement mode of " comb arrays ".CYONS2100 and matching used camera lens module 32 (concrete model: CYONSLENS2000) be assembled together, form a complete displacement detecting module 3.LASER Light Source 31 penetrates laser under the control of PSoC single-chip microcomputer 35, image on the photosensor arrays 33 through rail plate 2 reflections and camera lens 32, the electric signal of photosensor arrays 33 output AD HOC is handled the size and Orientation that draws displacement through special-purpose signal deteching circuit 34, and PSoC single-chip microcomputer 35 is finished the coordination control of follow-up signal Processing, demonstration, communication and total system.
The above; it only is the embodiment in the utility model; but protection domain of the present utility model is not limited thereto; anyly be familiar with the people of this technology in the disclosed technical scope of the utility model; can understand conversion or the replacement expected; all should be encompassed in of the present utility model comprising within the scope, therefore, protection domain of the present utility model should be as the criterion with the protection domain of claims.

Claims (6)

1. modularization displacement measuring device cheaply is characterized in that, forms integrative-structure by framework, rail plate, displacement detecting module and the display circuit of communicating by letter, wherein:
Sealing or semi-enclosed hollow structure that framework is made up of the frame more than three or three have two relative sliding eyes on two frames therein;
Rail plate is installed in the sliding eye, and the two ends of rail plate are positioned at the framework outside, and rail plate is merely able to move forward and backward vertically along sliding eye;
One end of rail plate is fixedlyed connected with testee, and rail plate is along with the displacement of testee is moved along sliding eye;
The displacement detecting module is fixed on the inwall of framework, and the workplace of displacement detecting module is over against rail plate and keep suitable distance with it; The displacement that the displacement detecting module is used to detect the displacement of rail plate and obtains testee indirectly;
The communication display circuit is connected with the displacement detecting module, is responsible for communication display circuit and displacement detecting module communicating by letter and control between the two, the display circuit of communicating by letter simultaneously be used to show testee displacement, provide communication interface for the outside use.
2. modularization according to claim 1 is displacement measuring device cheaply, it is characterized in that described framework is any one structure in sealing or semi-enclosed hollow circuit cylinder body structure, hollow rectangular structure, hollow cube structure, quadrilateral shape structure and the three-pointed hollow star structure.
3. modularization according to claim 1 is displacement measuring device cheaply, it is characterized in that, described displacement detecting module is made up of light source, camera lens, photosensor arrays and signal deteching circuit and is packaged into a standalone module; Light source is positioned at the top of rail plate, and the light that light source sends projects above the rail plate and reflection, and the mobile meeting of rail plate causes that catoptrical light intensity changes; Camera lens is positioned on the reflection optical axis of light source, and the input end face of photosensor arrays is positioned on the output end face of camera lens, is used for the reflected light of receiving light power variation and the electric signal that output changes with light intensity; The input end of signal deteching circuit is connected with the output terminal of photosensor arrays, is used to detect the variable quantity of electric signal, and the displacement of output rail plate.
4. modularization according to claim 3 is displacement measuring device cheaply, it is characterized in that, described light source can be a LASER Light Source, or the common LED light source.
5. modularization according to claim 3 is displacement measuring device cheaply, it is characterized in that the arrangement organizational form of described photosensor arrays can be any one mode in one-dimensional array arrangement, two-dimensional array arrangement, periodic one dimension pectination arrangement and the periodic two-dimensional comb arrangement mode.
6. modularization according to claim 3 is displacement measuring device cheaply, it is characterized in that, described photosensor arrays is made up of a plurality of photosensitive units, each photosensitive unit all is connected with signal deteching circuit, and photosensor arrays is with the surface characteristics conversion and the corresponding with it electric signal of output of rail plate.
CN2010202692521U 2010-07-21 2010-07-21 Modularized displacement measuring device with low cost Expired - Fee Related CN201740513U (en)

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104181939A (en) * 2014-08-14 2014-12-03 上海交通大学 Active type ultraprecise displacement locating detection method based on virtual grating ruler
CN104266577B (en) * 2014-10-21 2017-01-18 宁波高新区埃伯格测控技术有限公司 Totally-closed track type magnetic displacement measurement device
CN107421450A (en) * 2017-06-29 2017-12-01 罗琪 Optical displacement measurement device and displacement measurement method
CN110672010A (en) * 2019-10-30 2020-01-10 苏州赛腾精密电子股份有限公司 Positioning device and automatic system based on laser self-mixing interference
WO2022165654A1 (en) * 2021-02-03 2022-08-11 欧菲光集团股份有限公司 Detection apparatus, camera module and electronic device
WO2023186036A1 (en) * 2022-03-31 2023-10-05 周海涛 Controller having displacement measurement devices, and displacement control method therefor

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104181939A (en) * 2014-08-14 2014-12-03 上海交通大学 Active type ultraprecise displacement locating detection method based on virtual grating ruler
CN104266577B (en) * 2014-10-21 2017-01-18 宁波高新区埃伯格测控技术有限公司 Totally-closed track type magnetic displacement measurement device
CN107421450A (en) * 2017-06-29 2017-12-01 罗琪 Optical displacement measurement device and displacement measurement method
CN110672010A (en) * 2019-10-30 2020-01-10 苏州赛腾精密电子股份有限公司 Positioning device and automatic system based on laser self-mixing interference
CN110672010B (en) * 2019-10-30 2021-09-03 苏州赛腾精密电子股份有限公司 Positioning device and automatic system based on laser self-mixing interference
WO2022165654A1 (en) * 2021-02-03 2022-08-11 欧菲光集团股份有限公司 Detection apparatus, camera module and electronic device
WO2023186036A1 (en) * 2022-03-31 2023-10-05 周海涛 Controller having displacement measurement devices, and displacement control method therefor

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