CN103759639B - A kind of precisely locating platform method for detecting position based on area array CCD - Google Patents
A kind of precisely locating platform method for detecting position based on area array CCD Download PDFInfo
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Abstract
Based on a precisely locating platform method for detecting position for area array CCD, the position belonging to parallel precise locating platform is detected.Three laser beam emitting devices are installed in the bottom surface of parallel precise locating platform, and the triangle position do not waited by three back gauges is arranged.When locating platform moves, the intensity signal of top laser beam emitting device is received by the area array CCD being arranged on base central authorities, by data collecting card real-time by laser beam emitting device on area array CCD form hot spot position coordinates pass to computing machine, calculate locating platform current position coordinates x, y and rotational angle theta by Computer.Advantage: can in real time, position coordinates x, y of accurate detection and location platform and rotational angle theta, the non-contact measurement of two-dimensional coordinate x, y and rotational angle theta can be realized, compensate for the precision defect of traditional measurement method, can detect the position of precisely locating platform preferably, implement simple, real-time is good, stable performance, precision is higher, applied widely.
Description
Technical field
The position that the present invention relates to a kind of parallel precise locating platform is detected, and relates to a kind of precisely locating platform method for detecting position based on area array CCD specifically.
Background technology
Along with the high speed development of current nanometer technique, microoperation technology becomes one of the gordian technique in the field such as Precision Machining and precision measurement, microelectronic engineering, bioengineering, Aero-Space, nanometer science and technology, in sophisticated industry production in modern age and scientific research, occupy extremely important status.And as the important component part of microoperation technology, parallel precise locating platform obtains a wide range of applications in the technical field of micro-, nano-grade displacement and location.Parallel connection platform structure is compact, design processing is simple, temperature control is not high, error value product involve amplify little, natural frequency is high, avoid the features such as the uncontrollable repetitive error caused by vibrations, just in time catered to the requirement of high precision and microoperation, parallel institution with the exploitation contact tightly of precisely locating platform together.In addition, the drive unit of parallel precise locating platform (parallel micro-manipulator) can be arranged in frame, and therefore its dynamic property is better.Because the requirement of development to fine-limit work platform property in each precision engineering field improves constantly, the development and research of its correlation technique remains the important directions of domestic and international Experts ' Attention and tackling key problem.
Move at locating platform or in the process of locating, need the position detecting the current place of locating platform in real time, accurately, to realize accurate location.At present, position is detected and is mainly adopted the mode of the one or more combination in laser light curtain sensor, two-dimentional optical position sensor (PSD), accelerometer, gyroscope to come measurement and positioning position of platform coordinate x, y and rotational angle theta.Laser light curtain sensor being operable is low, and the output of two-dimentional optical position sensor (PSD) has serious nonlinear distortion, and accelerometer and gyrostatic combination do not reach required precision yet.Non-contact measurement cannot be realized according to piezoelectric film sensor, and adopt camera to obtain locating platform consecutive image, drawn the method for positional information by image procossing, quality, image processing method etc. by image limit, be difficult to accurate acquisition desired position information, and be difficult to realize.
Summary of the invention
The object of the invention is to provide a kind of and can be convenient to noncontact, real-time, accurate position coordinates x, y of detection and location platform and the precisely locating platform method for detecting position based on area array CCD of rotational angle theta.
In order to achieve the above object, precisely locating platform method for detecting position of the present invention is, whole locating platform system has three parallel connection transmission connecting rods, one end of three parallel connection transmission connecting rods all by three support installing on base, the other end of three kinematic links is all connected with locating platform; The bottom surface of locating platform is provided with three laser beam emitting devices, area array CCD is arranged on the central authorities of base, camera lens is had above area array CCD, area array CCD receives the intensity signal of top laser beam emitting device through camera lens, the output terminal of area array CCD is connected with the input end of data collecting card, the output terminal of data collecting card is connected with computing machine, by data collecting card real-time by laser beam emitting device on area array CCD form hot spot position coordinates pass to computing machine, calculate locating platform current position coordinates x, y and rotational angle theta by Computer;
Detection and location platform comprises the following steps:
1) laser beam emitting device of three is selected, be vertically mounted on the bottom surface of locating platform, arrange from the triangle position do not waited by its mutual spacing, area array CCD and camera lens are arranged on the central authorities of base, area array CCD output terminal is connected with computing machine by data collecting card;
2) in the process of locating platform movement, by data collecting card gather laser beam emitting device on area array CCD form the position coordinates of hot spot, and the position coordinates of hot spot is passed to computing machine;
3) according to laser beam emitting device formed on area array CCD hot spot initial position and any time position comparison, calculate locating platform position coordinates x, y now and rotational angle theta by Computer.
Described camera lens is short-focus lens, makes area array CCD obtain larger visual field in the state of short distance; Described laser beam emitting device is the laser beam emitting device that band focuses on), the hot spot of the laser beam irradiation launched on area array CCD is less than the size of single photosensitive unit on area array CCD, improves accuracy of detection; Described data collecting card duty is short-time exposure, implements short-time exposure to area array CCD, improves the resolution of detection system.
According to the distance of the size of area array CCD, position, area array CCD and locating platform, calculate the focal length of camera lens, ensure in the range of movement of locating platform, the hot spot that three laser beam emitting devices are formed all drops on area array CCD; The triangle position that laser beam emitting device adopts three back gauges not wait is arranged, by computer calculate laser beam emitting device on area array CCD form distance between hot spot, determine the position coordinates of laser beam emitting device corresponding to hot spot.
Beneficial effect, owing to have employed such scheme, area array CCD is made up of the MOS unit (capacitor) that numerous close-packed arrays is separate, under gate voltage effect, will form numerous separate potential well on a silicon substrate.Therefore, when photosensitive first face is subject to laser irradiation, light is by semiconductor absorber, and produce electron-hole pair, at this moment minority carrier is collected in darker potential well.Illumination is stronger, the electron-hole pair of generation the more, the electronics collected in potential well also the more, the electron charge collected in potential well number reflect the power of light.Because the laser intensity selected is much larger than the light intensity of the natural light of surrounding, so can by the clock on data collecting card and scanning impulse circuit to each photosensitive first sequential access, the photosensitive unit that laser is irradiated to can be judged by detected electrons electric charge, thus draw laser beam emitting device on area array CCD form the position coordinates of hot spot, then pass to computing machine.In addition, data collecting card is provided with electronic shutter, area array CCD short-time exposure, improves systemic resolution.Noncontact, real-time, accurately detection and location platform position coordinates x, y and rotational angle theta can be convenient to.
Advantage: can in real time, position coordinates x, y of accurate detection and location platform and rotational angle theta, comparatively can be easy to the non-contact measurement realizing two-dimensional coordinate x, y and rotational angle theta, easily realize robotization and compensate for the precision defect of traditional measurement method.Can detect the position of precisely locating platform preferably, implement simple, real-time is good, stable performance, and precision is higher.Meanwhile, the method also can be applicable to other similar position detection field.
Accompanying drawing explanation
Fig. 1 is detection system modular construction schematic diagram.
Fig. 2 marks schematic diagram below locating platform.
Fig. 3 is lens focus computing method schematic diagram.
Fig. 4 is three kinds of situations that laser is irradiated in the photosensitive unit of area array CCD.
Fig. 5 is corner computing method schematic diagram.
In figure, 1, locating platform; 2, base; 3, camera lens; 4, area array CCD; 5, the first laser beam emitting device; 6, the second laser beam emitting device; 7, the 3rd laser beam emitting device; 8, data collecting card; 9, computing machine; 10, the first support; 11, the second support; 12, the 3rd support; 13, the first parallel connection transmission connecting rod; 14, the second parallel connection transmission connecting rod; 15, the 3rd parallel connection transmission connecting rod.
Embodiment
Embodiment 1: this precisely locating platform method for detecting position is, whole locating platform system has three parallel connection transmission connecting rods, one end of three parallel connection transmission connecting rods all by three support installing on base 2, the other end of three parallel connection transmission connecting rods is all connected with locating platform 1, the bottom surface of locating platform 1 is provided with three laser beam emitting devices, area array CCD 4 is arranged on the central authorities of base 2, camera lens 3 is had above area array CCD 4, area array CCD 4 receives the intensity signal of top laser beam emitting device through camera lens 3, the output terminal of area array CCD 4 is connected with the input end of data collecting card 8, the output terminal of data collecting card 8 is connected with computing machine, by data collecting card 8 real-time by laser beam emitting device on area array CCD 4 form hot spot position coordinates pass to computing machine 9, the current position coordinates x of locating platform 1 is calculated by computing machine 9, y and rotational angle theta, all the time using the position coordinates of laser beam emitting device 5 as the position coordinates x of locating platform 1, y, the rotational angle theta of locating platform 1 to be compared with its initial coordinate by the real-time location coordinates of three laser beam emitting devices and obtains,
Three described parallel connection transmission connecting rods are the first parallel connection transmission connecting rod 13, second parallel connection transmission connecting rod 14 and the 3rd parallel connection transmission connecting rod 15 respectively; Three described supports are respectively the first support 10, second support 11 and the 3rd support 12; Three described laser beam emitting devices are the first laser beam emitting device 5, second laser beam emitting device 6 and the 3rd laser beam emitting device 7 respectively.
It is as follows that concrete implementation step is detected in locating platform 1 position:
1) laser beam emitting device of three is selected, be vertically mounted on the bottom surface of locating platform 1, arrange from the triangle position do not waited by its mutual spacing, area array CCD 4 and camera lens 3 are arranged on the central authorities of base 2, area array CCD 4 output terminal is connected with computing machine 9 by data collecting card 8; Select short-focus lens 3 to obtain larger visual field, and the position of foundation area array CCD 4 calculates the focal length of camera lens 3 to the distance of monitored target and required visual field, the hot spot that three laser beam emitting devices are formed drops on area array CCD 4,
Formula is
In formula: f ' is lens focus, h is area array CCD length, and L is the distance of camera lens to scenery, and H is the length of scenery, specifically as shown in Figure 3.
Select three laser beam emitting devices being with focusing function, make the hot spot be irradiated on area array CCD 4 be less than the size of its single photosensitive unit, and be vertically mounted on the bottom surface of locating platform 1 by its mutual spacing from the triangle position do not waited;
2) in the process of locating platform 1 movement, by data collecting card 8 gather laser beam emitting device on area array CCD 4 form the position coordinates of hot spot, and the position coordinates of hot spot is passed to computing machine 9;
3) by computing machine 9 calculate laser beam emitting device on area array CCD 4 form distance between hot spot, determine the position coordinates of laser beam emitting device corresponding to hot spot, and the coordinate initial with it compares position coordinates x, y and rotational angle theta of drawing locating platform 1.
Cleaning Principle: area array CCD 4 is made up of the MOS unit (capacitor) that numerous close-packed arrays is separate, under gate voltage effect, will form numerous separate potential well on a silicon substrate.Therefore, when photosensitive first face is subject to laser irradiation, light is by semiconductor absorber, and produce electron-hole pair, at this moment minority carrier is collected in darker potential well.Illumination is stronger, the electron-hole pair of generation the more, the electronics collected in potential well also the more, the electron charge collected in potential well number reflect the power of light.Because the laser intensity selected is much larger than the light intensity of the natural light of surrounding, so the clock that can pass through on data collecting card 8 and scanning impulse circuit are to each photosensitive first sequential access, the photosensitive unit that laser is irradiated to can be judged by detected electrons electric charge, thus draw laser beam emitting device on area array CCD 4 form the position coordinates of hot spot, then pass to computing machine 9.In addition, data collecting card 8 is provided with electronic shutter, area array CCD 4 short-time exposure, improves systemic resolution.
Data processing: first according to camera lens 3 focal distance f ', camera lens 3 and the vertical range of locating platform 1 and the Size calculation of single photosensitive unit appear the photosensitive elemental size on gust CCD4 and the actual range ratio on locating platform 1.Laser has following three kinds of situations when being irradiated in the photosensitive unit of area array CCD (4), as shown in Figure 4:
Situation A: when the hot spot of laser just in time drops in single photosensitive unit, using the coordinate of this photosensitive unit as the position coordinates of laser aid.
Situation B: when the hot spot of laser drops in continuous two photosensitive units, using the coordinate as laser aid of the coordinate line mid point of these two photosensitive units.
Situation C: when the hot spot of laser drops in adjacent three or four photosensitive units, using the mid point of the coordinate line of the photosensitive unit of two farthest as the coordinate of laser aid.
First three laser beam emitting devices are established as shown in Figure 2, be vertically mounted on the below of locating platform 1 from the right angle trigonometry shaped position do not waited by its mutual spacing, and select laser beam emitting device 5 to be arranged on square position, laser beam emitting device 6 is apart from laser beam emitting device 540mm, and laser beam emitting device 7 is apart from laser beam emitting device 530mm.When the position data of laser facula is transferred in computing machine 9 through data collecting card 8, by formula
relation between the real space size can trying to achieve size on area array CCD 4 and laser beam emitting device place plane, tries to achieve three real space coordinates then.If a certain moment in position fixing process, obtain three coordinates and be respectively (x1, y1), (x2, y2), (x3, y3),
Calculate
If | L1-40|<1 and | L2-30|<1, then the changing coordinates of laser beam emitting device 5 is (x1, y1).
The changing coordinates of laser beam emitting device 6 is (x2, y2).
The changing coordinates of laser beam emitting device 7 is (x3, y3).
If | L1-40|<1 and | L3-30|<1, then the changing coordinates of laser beam emitting device 5 is (x2, y2).
The changing coordinates of laser beam emitting device 6 is (x1, y1).
The changing coordinates of laser beam emitting device 7 is (x3, y3).
If | L2-40|<1 and | L1-30|<1, then the changing coordinates of laser beam emitting device 5 is (x1, y1).
The changing coordinates of laser beam emitting device 6 is (x3, y3).
The changing coordinates of laser beam emitting device 7 is (x2, y2).
If | L2-40|<1 and | L3-30|<1, then the changing coordinates of laser beam emitting device 5 is (x3, y3).
The changing coordinates of laser beam emitting device 6 is (x1, y1).
The changing coordinates of laser beam emitting device 7 is (x2, y2).
If | L3-40|<1 and | L1-30|<1, then the changing coordinates of laser beam emitting device 5 is (x2, y2).
The changing coordinates of laser beam emitting device 6 is (x3, y3).
The changing coordinates of laser beam emitting device 7 is (x3, y3).
If | L3-40|<1 and | L2-30|<1, then the changing coordinates of laser beam emitting device 5 is (x3, y3).
The changing coordinates of laser beam emitting device 6 is (x2, y2).
The changing coordinates of laser beam emitting device 7 is (x1, y1).
Wherein, for the sake of simplicity, always using the coordinate of laser beam emitting device 5 as position coordinates x, y of locating platform 1.
The concrete coordinate of three laser beam emitting devices is obtained respectively by above step, if the coordinate of obtain three laser beam emitting devices is respectively (x1 ', y1 '), (x2 ', y2 '), (x3 ', y3 '), its initial coordinate is respectively (x1, y1), (x2, y2), (x3, y3).For simplicity, the triangle formed with the line of centres of laser beam emitting device represents the plane of locating platform 1, concrete as shown in Fig. 5 (a).The coordinate that initial position and the coordinate in required moment deduct its laser beam emitting device 5 is respectively moved to true origin, as shown in Fig. 5 (b).That is, the coordinate of initial position becomes (0,0), (x2-x1, y2-y1), (x3-x1, y3-y1), and the coordinate in required moment becomes (0,0), (x2 '-x1 ', y2 '-y1 '), (x3 '-x1 ', y3 '-y1 ').
As from the foregoing, laser beam emitting device 6 becomes (x2-x1, y2-y1), (x2 '-x1 ', y2 '-y1 ') respectively at initial position and the coordinate in required moment.So first to laser beam emitting device during initial position 6 less than angle θ ' point situation discussion in a coordinate system:
As x2-x1>0 and y2-y1>=0, initially
As x2-x1>0 and y2-y1<0, initially
As x2-x1<0 and y2-y1>=0, initially
As x2-x1<0 and y2-y1<0, initially
As x2-x1=0 and y2-y1>0, initial θ '=90 °
As x2-x1=0 and y2-y1<0, initial θ '=270 °
In like manner can try to achieve required moment laser beam emitting device 6 angle θ in a coordinate system ", so the rotational angle theta=θ of locating platform 1 "-θ '.
Claims (3)
1. based on a precisely locating platform method for detecting position for area array CCD, it is characterized in that: this precisely locating platform method for detecting position is, whole locating platform system has three parallel connection transmission connecting rods (13,14,15), three parallel connection transmission connecting rods (13,14,15) one end is all by a support (10,11,12) be arranged on base (2), three kinematic links (13,14,15) the other end is all connected with locating platform (1), the bottom surface of locating platform (1) is provided with three laser beam emitting devices (5, 6, 7), area array CCD (4) is arranged on the central authorities of base (2), there is camera lens (3) area array CCD (4) top, area array CCD (4) receives top laser beam emitting device (5 through camera lens (3), 6, 7) intensity signal, the output terminal of area array CCD (4) is connected with the input end of data collecting card (8), the output terminal of data collecting card (8) is connected with computing machine, by data collecting card (8) real-time by laser beam emitting device (5, 6, 7) on area array CCD (4) form hot spot position coordinates pass to computing machine (9), the current position coordinates x of locating platform (1) is calculated by computing machine (9), y and rotational angle theta,
Detection and location platform comprises the following steps:
1) three laser beam emitting devices (5 are selected, 6,7), be vertically mounted on the bottom surface of locating platform (1), arrange from the triangle position do not waited by its mutual spacing, area array CCD (4) and camera lens (3) are arranged on the central authorities of base (2), area array CCD (4) output terminal is connected with computing machine (9) by data collecting card (8);
2) in the process of locating platform (1) movement, by data collecting card (8) gather laser beam emitting device (5,6,7) on area array CCD (4) form the position coordinates of hot spot, and the position coordinates of hot spot is passed to computing machine (9);
3) according to laser beam emitting device (5,6,7) area array CCD (4) upper form hot spot initial position and any time position comparison, calculate locating platform (1) position coordinates x, y now and rotational angle theta by computing machine (9).
2. a kind of precisely locating platform method for detecting position based on area array CCD according to claim 1, is characterized in that: described camera lens (3) is short-focus lens, makes area array CCD (4) obtain larger visual field in the state of short distance; Described laser beam emitting device (5,6,7) is the laser beam emitting device (5,6,7) that band focuses on, and the hot spot of the laser beam irradiation launched on area array CCD (4) is less than the size of the upper single photosensitive unit of area array CCD (4), improves accuracy of detection; Described data collecting card (8) chain of command battle array CCD(4) implement short-time exposure, improve the resolution of detection system.
3. a kind of precisely locating platform method for detecting position based on area array CCD according to claim 1, it is characterized in that: according to the distance of the size of area array CCD (4), position, area array CCD (4) and locating platform (1), calculate the focal length of camera lens (3), ensure in the range of movement of locating platform (1), three laser beam emitting devices (5,6,7) hot spot formed all drops on area array CCD (4); The triangle position that laser beam emitting device (5,6,7) adopts three back gauges not wait is arranged, by computing machine (9) calculate laser beam emitting device (5,6,7) on area array CCD (4) form distance between hot spot, determine the position coordinates of laser beam emitting device corresponding to hot spot (5,6,7).
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| EP3054265B1 (en) * | 2015-02-04 | 2022-04-20 | Hexagon Technology Center GmbH | Coordinate measuring machine |
| CN105021125A (en) * | 2015-06-11 | 2015-11-04 | 北京控制工程研究所 | A moving platform position measurement system and a measurement method based on a linear array CCD |
| CN105855696B (en) * | 2016-05-10 | 2018-05-22 | 西安中科微精光子制造科技有限公司 | Laser focal beam spot localization method and device |
| CN106568399B (en) * | 2016-11-04 | 2018-12-18 | 北京航空航天大学 | A kind of axis hole automatized assembly method based on laser assisted centering |
| CN109799632B (en) * | 2019-03-20 | 2022-02-18 | 四川乐仕达电子科技有限公司 | Precise laminating device and method for liquid crystal display screen and touch panel based on laser sensor |
| CN111157948B (en) * | 2020-01-06 | 2022-04-29 | 清华大学 | Six-degree-of-freedom positioning system and positioning method based on large-scale three-dimensional space |
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