CN104157726A - 太阳能电池及其制造方法 - Google Patents
太阳能电池及其制造方法 Download PDFInfo
- Publication number
- CN104157726A CN104157726A CN201310179816.0A CN201310179816A CN104157726A CN 104157726 A CN104157726 A CN 104157726A CN 201310179816 A CN201310179816 A CN 201310179816A CN 104157726 A CN104157726 A CN 104157726A
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- layer
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- solar cell
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- Granted
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- 238000000034 method Methods 0.000 title claims abstract description 53
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 15
- 238000006243 chemical reaction Methods 0.000 claims abstract description 47
- 239000000463 material Substances 0.000 claims description 61
- 239000004065 semiconductor Substances 0.000 claims description 42
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 32
- 229910021332 silicide Inorganic materials 0.000 claims description 29
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 claims description 29
- 229910017052 cobalt Inorganic materials 0.000 claims description 22
- 239000010941 cobalt Substances 0.000 claims description 22
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims description 22
- 229910052709 silver Inorganic materials 0.000 claims description 18
- 239000004332 silver Substances 0.000 claims description 18
- 229910052759 nickel Inorganic materials 0.000 claims description 16
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 15
- 229910052710 silicon Inorganic materials 0.000 claims description 15
- 239000010703 silicon Substances 0.000 claims description 15
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 14
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 14
- 238000005229 chemical vapour deposition Methods 0.000 claims description 14
- 239000010949 copper Substances 0.000 claims description 14
- 229910052802 copper Inorganic materials 0.000 claims description 14
- 238000005240 physical vapour deposition Methods 0.000 claims description 12
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 11
- 239000004411 aluminium Substances 0.000 claims description 11
- 229910052782 aluminium Inorganic materials 0.000 claims description 11
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 11
- 239000000203 mixture Substances 0.000 claims description 11
- 239000010936 titanium Substances 0.000 claims description 11
- 229910052719 titanium Inorganic materials 0.000 claims description 11
- 229910021341 titanium silicide Inorganic materials 0.000 claims description 11
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 10
- 238000010276 construction Methods 0.000 claims description 8
- 238000010422 painting Methods 0.000 claims description 7
- 239000000377 silicon dioxide Substances 0.000 claims description 7
- 229910044991 metal oxide Inorganic materials 0.000 claims description 6
- 150000004706 metal oxides Chemical class 0.000 claims description 6
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 5
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 5
- 238000007772 electroless plating Methods 0.000 claims description 5
- 238000007747 plating Methods 0.000 claims description 5
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 5
- 239000011135 tin Substances 0.000 claims description 5
- 229910052718 tin Inorganic materials 0.000 claims description 5
- 238000002347 injection Methods 0.000 claims 1
- 239000007924 injection Substances 0.000 claims 1
- 239000010410 layer Substances 0.000 description 235
- 238000013461 design Methods 0.000 description 11
- 239000000758 substrate Substances 0.000 description 10
- 229910052751 metal Inorganic materials 0.000 description 9
- 239000002184 metal Substances 0.000 description 9
- 238000005245 sintering Methods 0.000 description 9
- 238000002161 passivation Methods 0.000 description 8
- 238000012545 processing Methods 0.000 description 7
- 230000015572 biosynthetic process Effects 0.000 description 5
- 239000000853 adhesive Substances 0.000 description 4
- 230000001070 adhesive effect Effects 0.000 description 4
- 239000013078 crystal Substances 0.000 description 3
- 229910021417 amorphous silicon Inorganic materials 0.000 description 2
- 239000002800 charge carrier Substances 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 1
- RQIPKMUHKBASFK-UHFFFAOYSA-N [O-2].[Zn+2].[Ge+2].[In+3] Chemical compound [O-2].[Zn+2].[Ge+2].[In+3] RQIPKMUHKBASFK-UHFFFAOYSA-N 0.000 description 1
- -1 aluminium tin-oxide Chemical compound 0.000 description 1
- JYMITAMFTJDTAE-UHFFFAOYSA-N aluminum zinc oxygen(2-) Chemical compound [O-2].[Al+3].[Zn+2] JYMITAMFTJDTAE-UHFFFAOYSA-N 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0224—Electrodes
- H01L31/022408—Electrodes for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/022425—Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/547—Monocrystalline silicon PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Sustainable Development (AREA)
- Sustainable Energy (AREA)
- Life Sciences & Earth Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Photovoltaic Devices (AREA)
Abstract
Description
Claims (14)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201310179816.0A CN104157726B (zh) | 2013-05-15 | 2013-05-15 | 太阳能电池及其制造方法 |
Applications Claiming Priority (1)
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---|---|---|---|
CN201310179816.0A CN104157726B (zh) | 2013-05-15 | 2013-05-15 | 太阳能电池及其制造方法 |
Publications (2)
Publication Number | Publication Date |
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CN104157726A true CN104157726A (zh) | 2014-11-19 |
CN104157726B CN104157726B (zh) | 2017-04-12 |
Family
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Family Applications (1)
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CN201310179816.0A Expired - Fee Related CN104157726B (zh) | 2013-05-15 | 2013-05-15 | 太阳能电池及其制造方法 |
Country Status (1)
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CN (1) | CN104157726B (zh) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106653876A (zh) * | 2015-07-24 | 2017-05-10 | 钧石(中国)能源有限公司 | 一种太阳能电池 |
CN108400175A (zh) * | 2018-01-24 | 2018-08-14 | 苏州太阳井新能源有限公司 | 一种具有电镀电极的异质结太阳能电池及制备方法 |
CN108649077A (zh) * | 2018-06-21 | 2018-10-12 | 苏州太阳井新能源有限公司 | 一种无主栅双面电镀金属化太阳能电池片、制作方法和应用方法 |
CN109155341A (zh) * | 2016-04-11 | 2019-01-04 | 梅耶博格(德国)股份有限公司 | 太阳能电池制造方法、用该方法制造的太阳能电池和衬底座 |
WO2019095695A1 (zh) * | 2017-11-15 | 2019-05-23 | 君泰创新(北京)科技有限公司 | 太阳能电池和其上的复合电极及其制备方法 |
CN110808314A (zh) * | 2019-11-14 | 2020-02-18 | 西南石油大学 | 一种改善异质结太阳电池光电性能的方法 |
CN113611774A (zh) * | 2021-07-26 | 2021-11-05 | 泰州中来光电科技有限公司 | 一种钝化接触电池的电极金属化方法及电池、组件和系统 |
CN115548142A (zh) * | 2022-11-28 | 2022-12-30 | 浙江晶科能源有限公司 | 一种太阳能电池及光伏组件 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20080128019A1 (en) * | 2006-12-01 | 2008-06-05 | Applied Materials, Inc. | Method of metallizing a solar cell substrate |
CN101546792A (zh) * | 2008-03-24 | 2009-09-30 | 帕洛阿尔托研究中心公司 | 形成硅光电池的多层电极结构的方法 |
US20120060911A1 (en) * | 2010-09-10 | 2012-03-15 | Sierra Solar Power, Inc. | Solar cell with electroplated metal grid |
-
2013
- 2013-05-15 CN CN201310179816.0A patent/CN104157726B/zh not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20080128019A1 (en) * | 2006-12-01 | 2008-06-05 | Applied Materials, Inc. | Method of metallizing a solar cell substrate |
CN101546792A (zh) * | 2008-03-24 | 2009-09-30 | 帕洛阿尔托研究中心公司 | 形成硅光电池的多层电极结构的方法 |
US20120060911A1 (en) * | 2010-09-10 | 2012-03-15 | Sierra Solar Power, Inc. | Solar cell with electroplated metal grid |
Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106653876A (zh) * | 2015-07-24 | 2017-05-10 | 钧石(中国)能源有限公司 | 一种太阳能电池 |
CN109155341A (zh) * | 2016-04-11 | 2019-01-04 | 梅耶博格(德国)股份有限公司 | 太阳能电池制造方法、用该方法制造的太阳能电池和衬底座 |
CN109155341B (zh) * | 2016-04-11 | 2023-03-14 | 梅耶博格(德国)股份有限公司 | 太阳能电池制造方法、用该方法制造的太阳能电池和衬底座 |
CN110114889B (zh) * | 2017-11-15 | 2022-11-15 | 德运创鑫(北京)科技有限公司 | 太阳能电池和其上的复合电极及其制备方法 |
WO2019095695A1 (zh) * | 2017-11-15 | 2019-05-23 | 君泰创新(北京)科技有限公司 | 太阳能电池和其上的复合电极及其制备方法 |
CN110114889A (zh) * | 2017-11-15 | 2019-08-09 | 君泰创新(北京)科技有限公司 | 太阳能电池和其上的复合电极及其制备方法 |
CN108400175A (zh) * | 2018-01-24 | 2018-08-14 | 苏州太阳井新能源有限公司 | 一种具有电镀电极的异质结太阳能电池及制备方法 |
CN108649077A (zh) * | 2018-06-21 | 2018-10-12 | 苏州太阳井新能源有限公司 | 一种无主栅双面电镀金属化太阳能电池片、制作方法和应用方法 |
CN110808314A (zh) * | 2019-11-14 | 2020-02-18 | 西南石油大学 | 一种改善异质结太阳电池光电性能的方法 |
CN110808314B (zh) * | 2019-11-14 | 2021-05-11 | 西南石油大学 | 一种改善异质结太阳电池光电性能的方法 |
CN113611774A (zh) * | 2021-07-26 | 2021-11-05 | 泰州中来光电科技有限公司 | 一种钝化接触电池的电极金属化方法及电池、组件和系统 |
CN115548142A (zh) * | 2022-11-28 | 2022-12-30 | 浙江晶科能源有限公司 | 一种太阳能电池及光伏组件 |
US11961924B1 (en) | 2022-11-28 | 2024-04-16 | Zhejiang Jinko Solar Co., Ltd. | Solar cell and photovoltaic module |
Also Published As
Publication number | Publication date |
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CN104157726B (zh) | 2017-04-12 |
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PB01 | Publication | ||
C10 | Entry into substantive examination | ||
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Owner name: MOTECH INDUSTRIES INC. Free format text: FORMER OWNER: TOPCELL SOLAR INTERNATIONAL CO., LTD. Effective date: 20150528 |
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C41 | Transfer of patent application or patent right or utility model | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20150528 Address after: China Taiwan New Taipei City District North pit deep road 3 No. 248 6 floor Applicant after: Motech Industries Inc. Address before: No. 1560, Zhongshan Road section, Guanyin Township, Taoyuan County, Taiwan, China Applicant before: Topcell Solar International Co.,Ltd. |
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CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170412 Termination date: 20200515 |