CN104067110B - 透明基板外观缺陷的分析设备 - Google Patents

透明基板外观缺陷的分析设备 Download PDF

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Publication number
CN104067110B
CN104067110B CN201280068813.3A CN201280068813A CN104067110B CN 104067110 B CN104067110 B CN 104067110B CN 201280068813 A CN201280068813 A CN 201280068813A CN 104067110 B CN104067110 B CN 104067110B
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China
Prior art keywords
illumination
pixel
substrates
substrate
camera
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Expired - Fee Related
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CN201280068813.3A
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English (en)
Chinese (zh)
Other versions
CN104067110A (zh
Inventor
M.皮雄
F.达韦纳
A.塞雷恩
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Saint Gobain Glass France SAS
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Saint Gobain Glass France SAS
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Publication of CN104067110A publication Critical patent/CN104067110A/zh
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958Inspecting transparent materials or objects, e.g. windscreens
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/89Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/70Circuitry for compensating brightness variation in the scene
    • H04N23/74Circuitry for compensating brightness variation in the scene by influencing the scene brightness using illuminating means

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  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Pathology (AREA)
  • Immunology (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Circuit Arrangement For Electric Light Sources In General (AREA)
CN201280068813.3A 2011-12-02 2012-11-28 透明基板外观缺陷的分析设备 Expired - Fee Related CN104067110B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR1161114A FR2983583B1 (fr) 2011-12-02 2011-12-02 Dispositif d'analyse des defauts d'aspect d'un substrat transparent
FR1161114 2011-12-02
PCT/FR2012/052740 WO2013098497A1 (fr) 2011-12-02 2012-11-28 Dispositif d'analyse des défauts d'aspect d'un substrat transparent

Publications (2)

Publication Number Publication Date
CN104067110A CN104067110A (zh) 2014-09-24
CN104067110B true CN104067110B (zh) 2018-05-08

Family

ID=47436085

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201280068813.3A Expired - Fee Related CN104067110B (zh) 2011-12-02 2012-11-28 透明基板外观缺陷的分析设备

Country Status (10)

Country Link
US (1) US20140368634A1 (enExample)
EP (1) EP2786129A1 (enExample)
KR (1) KR20140096158A (enExample)
CN (1) CN104067110B (enExample)
CA (1) CA2859598A1 (enExample)
DE (1) DE202012013683U1 (enExample)
EA (1) EA201491082A8 (enExample)
FR (1) FR2983583B1 (enExample)
IN (1) IN2014CN04838A (enExample)
WO (1) WO2013098497A1 (enExample)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102014008596B4 (de) 2014-06-10 2016-01-28 Grenzebach Maschinenbau Gmbh Vorrichtung und Verfahren zur schnellen und sicheren Messung von Verzerrungsfehlern in einem produzierten Floatglas - Band
GB2532056B (en) * 2014-11-07 2019-04-24 Shelton Machines Ltd Apparatus and method for inspecting contact lenses
CN108369194A (zh) * 2015-12-16 2018-08-03 株式会社理光 检查系统及检查方法
DE102016100437B4 (de) 2016-01-12 2018-08-02 Stephan Krebs Vorrichtung zur Druckbildkontrolle
EP3465171B1 (en) * 2016-05-30 2024-07-24 Bobst Mex Sa Surface inspection system and inspection method
CN108072659B (zh) * 2016-11-11 2022-05-31 三星显示有限公司 多光学视觉设备
JP6801156B2 (ja) * 2017-01-31 2020-12-16 オムロン株式会社 シート検査装置
US10289930B2 (en) * 2017-02-09 2019-05-14 Glasstech, Inc. System and associated for online measurement of the optical characteristics of a glass sheet
JP7229657B2 (ja) * 2017-08-22 2023-02-28 王子ホールディングス株式会社 積層シートの欠陥検査装置及びシート製品の製造方法
CN109142378A (zh) * 2018-09-17 2019-01-04 凌云光技术集团有限责任公司 一种显示材料外观缺陷检测装置
JP2020085587A (ja) * 2018-11-21 2020-06-04 日本電気硝子株式会社 ガラス板の製造方法、及びガラス板の製造装置
EP4158590B1 (en) * 2020-05-29 2025-10-29 Conceria Pasubio S.p.A. Method and apparatus for identifying possible surface defects of a leather hide
WO2022081370A1 (en) 2020-10-15 2022-04-21 Applied Materials, Inc. In-line metrology systems, apparatus, and methods for optical devices
DE102022133889A1 (de) * 2022-12-19 2024-06-20 Isra Vision Gmbh Verfahren zur optischen Inspektion eines Objekts und entsprechende Inspektionseinrichtung
CN117805124B (zh) * 2024-03-01 2024-06-18 杭州乔戈里科技有限公司 用于获取深沟球轴承内圈沟道图像的装置及获取图像方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19643017C1 (de) * 1996-10-18 1998-04-23 Innomess Ges Fuer Messtechnik Verfahren für die Ermittlung von optischen Fehlern in großflächigen Scheiben
DE19733431A1 (de) * 1997-03-13 1998-09-17 Tema Teubner & Mandewirth Gmbh Anordnung von Fehlerüberwachung
DE10102557B4 (de) * 2001-01-20 2005-11-17 Visotec Gmbh Verfahren und Vorrichtung zur Überprüfung von scheibenförmigen Werkstücken auf Oberflächen-oder Einschlußfehler
GB2424781B (en) * 2005-03-30 2007-11-28 Micron Technology Inc High density row ram for column parallel CMOS image sensors
DE102005050882B4 (de) 2005-10-21 2008-04-30 Isra Vision Systems Ag System und Verfahren zur optischen Inspektion von Glasscheiben
US7567344B2 (en) * 2006-05-12 2009-07-28 Corning Incorporated Apparatus and method for characterizing defects in a transparent substrate
FR2936605B1 (fr) * 2008-10-01 2014-10-31 Saint Gobain Dispositif d'analyse de la surface d'un substrat
CN101887030A (zh) 2009-05-15 2010-11-17 圣戈本玻璃法国公司 用于检测透明基板表面和/或其内部的缺陷的方法及系统
EP2253948B1 (de) * 2009-05-22 2013-01-09 Dr. Schenk GmbH Industriemesstechnik Vorrichtung und Verfahren zum optischen Untersuchen eines Gegenstandes
FR2958404B1 (fr) 2010-04-01 2012-04-27 Saint Gobain Procede et dispositif d'analyse de la qualite optique d'un substrat transparent
DE102010021853B4 (de) * 2010-05-28 2012-04-26 Isra Vision Ag Einrichtung und Verfahren zur optischen Überprüfung eines Gegenstands
US8761486B2 (en) * 2011-02-22 2014-06-24 Bio-Rad Laboratories, Inc. Line scan cytometry systems and methods

Also Published As

Publication number Publication date
IN2014CN04838A (enExample) 2015-09-18
EA201491082A8 (ru) 2015-09-30
KR20140096158A (ko) 2014-08-04
FR2983583A1 (fr) 2013-06-07
EP2786129A1 (fr) 2014-10-08
FR2983583B1 (fr) 2013-11-15
US20140368634A1 (en) 2014-12-18
DE202012013683U1 (de) 2019-07-11
WO2013098497A1 (fr) 2013-07-04
CN104067110A (zh) 2014-09-24
CA2859598A1 (fr) 2013-07-04
EA201491082A1 (ru) 2015-04-30

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SE01 Entry into force of request for substantive examination
C53 Correction of patent of invention or patent application
CB03 Change of inventor or designer information

Inventor after: M. Pippen

Inventor after: F. davaine

Inventor after: A. Serene

Inventor before: M. Pippen

Inventor before: F. davaine

Inventor before: A. Da Long

GR01 Patent grant
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20180508

Termination date: 20191128