CN104061987B - A kind of sound field and the highly sensitive quality LOAD CELLS of magnetic field coupling-type - Google Patents
A kind of sound field and the highly sensitive quality LOAD CELLS of magnetic field coupling-type Download PDFInfo
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- CN104061987B CN104061987B CN201410247912.9A CN201410247912A CN104061987B CN 104061987 B CN104061987 B CN 104061987B CN 201410247912 A CN201410247912 A CN 201410247912A CN 104061987 B CN104061987 B CN 104061987B
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Abstract
The present invention relates to a kind of sound field and the highly sensitive quality LOAD CELLS of magnetic field coupling-type, including packaged quality LOAD CELLS, the inside of quality LOAD CELLS is provided with crystal oscillation circuit, two electrodes of crystal oscillation circuit are separately positioned on the upper and lower surface of the quartz transducer wafer at quality LOAD CELLS top, upper and lower surface at quartz transducer wafer is coated with one layer of chrome plating respectively, the surface of chrome plating is coated with one layer of gold plate, the surface of the gold plate on the upper surface of sensor wafer is coated with surface-sensitive coating, the inside of quality LOAD CELLS is additionally provided with magnetic devices, magnetic devices is positioned at the underface of described quartz transducer wafer.The present invention can be used in measurement Acidity of Aikalinity, ferromagnetic particle concentration, for making the many-sides such as sonic sensor, than traditional quality LOAD CELLS, there is higher sensitivity, and simple in construction, easy to use.
Description
Technical field
The present invention relates to a kind of sound field and the highly sensitive quality LOAD CELLS of magnetic field coupling-type, belong to quality LOAD CELLS field.
Background technology
The most basic principle of QCM (QCM) is the piezoelectric effect that make use of quartz crystal: the internal each lattice of quartz crystal is regular hexagon not by External Force Acting time, if apply mechanical pressure in the both sides of wafer, the charge-site that can make lattice occurs skew to polarize, then will produce electric field on the corresponding direction of wafer；Otherwise, if adding an electric field on two electrodes of quartz crystal, wafer will produce mechanically deform, and this physical phenomenon is called piezoelectric effect.If adding alternating voltage on the two poles of the earth of wafer, wafer will produce mechanical vibration, and the mechanical vibration of wafer simultaneously can produce again alternating electric field.In the ordinary course of things, the amplitude of wafer mechanical vibration and the amplitude of alternating electric field are very small, but when the frequency of additional alternating voltage is a certain particular value, amplitude substantially strengthens, and this phenomenon is called piezoelectric resonator.It is in fact quite similar with the resonance phenomena in LC loop: when crystal does not vibrate, and it be regarded as a plate condenser so long and call electrostatic capacitance C, generally about several PF to tens PF；When crystal oscillation, it is equivalent that the inertia of mechanical vibration can use inductance L to come, and the value of general L is tens mH to hundreds of mH.Thus just constituting the agitator of QCM, the resonant frequency recorded, equal to the resonant frequency of quartz crystal oscillator plate, is converted into the signal of telecommunication again through main frame and exports by the frequency of oscillation of circuit.Owing to the resonant frequency of wafer itself is substantially only relevant with the cutting mode of wafer, geometry, size, and can being made accurately, the oscillating circuit hence with quartz resonator composition can obtain significantly high frequency stability.
Nineteen fifty-nine Sauerbrey, when being attached to the gold electrode surfaces of QCM with supposing outer blessing amount homogenous rigidity, has drawn the conclusion that the resonant frequency change of QCM is directly proportional to additional quality.For rigidity deposit, the quality that crystal oscillation frequency change △ F is proportional on working electrode deposit changes △ M.The mass change of QCM electrode surface can be obtained by this relational expression.
QCM is mainly made up of the part such as quartz crystal sensor, signal detection and data process.The basic comprising of quartz crystal sensor is substantially: from one piece of quartz crystal along becoming 35 ° of 15' cutting (AT CUT) to obtain quartz crystal oscillator plate with quartz crystal primary optical axis, applying silver layer on its two corresponding surfaces as electrode, quartz crystal is clipped in two plate electrode intermediate formation sandwich structures.Respectively a piece lead-in wire of weldering is received on pin on each electrode, add package casing and just constitute quartz-crystal resonator, its product generally with packed by metal casing, also useful glass shell, pottery or Plastic Package.
The sensitivity of quartz weighing balance is to get from Sauerbrey equation, and quartz oscillation balance frequency change △ F and mass change value △ M has following relation: △ F=Cf〃 △ M, wherein △ F is frequency change before and after the material of weighing that quartz balance is observed, △ M is mass change value before and after the material of weighing that quartz balance is observed, CfConstant coefficients during material mass is weighed for quartz balance.From above-mentioned formula, the sensitivity of QCM is by CfDetermine.
Summary of the invention
The technical problem to be solved is to provide a kind of sound field and the highly sensitive quality LOAD CELLS of magnetic field coupling-type, and this quality LOAD CELLS has higher sensitivity than above-mentioned Sauerbrey formula.
The technical scheme is that a kind of highly sensitive sound field and magnetic field coupling-type quality LOAD CELLS, including packaged quality LOAD CELLS, the inside of described quality LOAD CELLS is provided with crystal oscillation circuit, two electrodes of described crystal oscillation circuit are separately positioned on the quartz transducer wafer upper and lower surface at described quality LOAD CELLS top, upper and lower surface at described quartz transducer wafer is coated with one layer of chrome plating respectively, the surface of described chrome plating is coated with one layer of gold plate, the inside of described quality LOAD CELLS is additionally provided with magnetic devices, described magnetic devices is positioned at the underface of described quartz transducer wafer.
On the basis of technique scheme, the present invention can also do following improvement.
Further, the surface of the gold plate on the upper surface of described sensor wafer is coated with surface-sensitive coating.
Further, described surface-sensitive coating is ferromagnetic coating or ferromagnetic particle, is made up of metal simple-substance, metal alloy or organo-metallic material.
Further, described metal simple-substance is ferrum, cobalt or nickel.
Further, described metal alloy is ferroalloy, cobalt alloy or nickel alloy.
Further, described metal alloy is AlNiCo or NdFeB.
Further, described magnetic devices is permanent magnet or electric magnet.
The invention has the beneficial effects as follows: that than traditional quality LOAD CELLS there is higher sensitivity, and simple in construction, easy to use.
It is provided with magnetic devices inside the high sensitivity quality LOAD CELLS of the present invention, an electrode (quartz transducer wafer) of QCM is coated with layer of surface sensitivity coating, on this quality LOAD CELLS electricity, the coating of pole is surface-sensitive coating/gold/chromium/quartz substrate/chrome gold, when surface-sensitive coating and solution react, surface-sensitive coating will disappear from qcm sensor surface, from Sauerbrey equation, after surface-sensitive coating is etched, QCM frequency can improve.But, when using magnetic devices at the another one electrode of QCM, owing to the magnetic force between surface-sensitive coating and magnetic devices can change, the deformation that QCM quartz wafer is produced is far longer than the surface-sensitive quality of coating influence of crust deformation to QCM, thus improving the sensitivity of quality LOAD CELLS.When the distance of magnetic devices and surface-sensitive coating reduces, magnetic force can increase a lot, thus can increase the sensitivity of this quality LOAD CELLS further.
The high sensitivity quality LOAD CELLS of the present invention can be used in many-side, including measure Acidity of Aikalinity, ferromagnetic particle concentration, for making the aspects such as sonic sensor.
Described highly sensitive quality LOAD CELLS is when measuring acid solution acidity, and surface-sensitive coating needs to be energy and H+The ferromagnetic coating reacted or ferromagnetic particle, it is possible to be metal simple-substance (ferrum, cobalt, nickel etc.) or metal alloy (ferroalloy, cobalt alloy, nickel alloy etc.), it is preferred that ferrum or ferroalloy.
Described highly sensitive quality LOAD CELLS is when measuring alkali liquor alkalescence, and surface-sensitive coating needs to be energy and OH-The ferromagnetic coating reacted or ferromagnetic particle, it is preferred that AlNiCo, it is also possible to be ferromagnetic layer and Zn, Al coating below.
When magnetic devices is placed at the back side of qcm sensor, the high sensitivity quality LOAD CELLS of the present invention can also as ferromagnetic particle sensor.When ferromagnetic particle is attracted to QCM surface by magnetic devices, the frequency of qcm sensor will not decline, and can rise because of the deformation that wafer is caused by ferromagnetic power on the contrary.The position that magnetic devices is placed is more near with the distance of ferromagnetic particle, and the clever lightness of this sensor is more high.
When using the QCM of higher frequency, because high frequency QCM is thinner than low frequency QCM, thin QCM wafer can be produced bigger deformation by the magnetic force between identical ferromagnetic particle and magnetic devices.With the same principle said above, when magnetic devices and ferromagnetic particle distance closer to time, wafer can be produced bigger deformation and frequency change by magnetic force.
Some sonic sensor such as surface acoustic wave, its electrode is only in the side of sensor quartz substrate.When using this kind of sensor, the surface-sensitive coating of sensor can in the other side of surface acoustic wave quartz substrate.The side of surface acoustic wave electrode is packaged in sensor internal.Magnet is also packaged in sensor internal.Such surface acoustic wave sensor is equally possible possesses higher sensitivity.
Accompanying drawing explanation
Fig. 1 is the structural representation of high sensitivity quality LOAD CELLS of the present invention；
Fig. 2 is the partial enlarged drawing of A in Fig. 1.
In accompanying drawing, the list of parts representated by each label is as follows:
1, quality LOAD CELLS, 2, quartz transducer wafer, 3, magnetic devices, 4, chrome plating, 5, gold plate, 6, surface-sensitive coating.
Detailed description of the invention
Below in conjunction with accompanying drawing, principles of the invention and feature being described, example is served only for explaining the present invention, is not intended to limit the scope of the present invention.
As depicted in figs. 1 and 2, a kind of highly sensitive sound field and magnetic field coupling-type quality LOAD CELLS, including packaged quality LOAD CELLS 1, the inside of described quality LOAD CELLS is provided with crystal oscillation circuit, two electrodes of described crystal oscillation circuit are separately positioned on quartz transducer wafer 2 upper and lower surface at described quality LOAD CELLS 1 top, it is characterized in that, upper and lower surface at described quartz transducer wafer 2 is coated with one layer of chrome plating 4 respectively, the surface of described chrome plating 4 is coated with one layer of gold plate 5, the inside of described quality LOAD CELLS is additionally provided with magnetic devices 3, described magnetic devices 3 is positioned at the underface of described quartz transducer wafer 2.
The surface of the gold plate 5 on the upper surface of described sensor wafer 2 is coated with surface-sensitive coating 6.
Described surface-sensitive coating 6 is ferromagnetic coating or ferromagnetic particle, is made up of metal simple-substance, metal alloy or organo-metallic material.
Described metal simple-substance is ferrum, cobalt or nickel.
Described metal alloy is ferroalloy, cobalt alloy or nickel alloy.
Described metal alloy is AlNiCo or NdFeB.
Described magnetic devices 3 is permanent magnet or electric magnet.
It is provided with magnetic devices 3 inside the high sensitivity quality LOAD CELLS of the present invention, an electrode (quartz transducer wafer 2) of QCM is coated with layer of surface sensitivity coating 6, on this quality LOAD CELLS electricity, the coating of pole is surface-sensitive coating/gold/chromium/quartz substrate/chrome gold, when surface-sensitive coating 6 and solution react, surface-sensitive coating 6 will disappear from qcm sensor surface, from Sauerbrey equation, after surface-sensitive coating 6 is etched, QCM frequency can improve.But, when using magnetic devices 3 at the another one electrode of QCM, owing to the magnetic force between surface-sensitive coating 6 and magnetic devices 3 can change, the deformation that QCM quartz wafer is produced is far longer than surface-sensitive coating 6 mass influence of crust deformation to QCM, thus improving the sensitivity of quality LOAD CELLS.When the distance of magnetic devices 3 and surface-sensitive coating 6 reduces, magnetic force can increase a lot, thus can increase the sensitivity of this quality LOAD CELLS further.
The high sensitivity quality LOAD CELLS of the present invention can be used in many-side, including measure Acidity of Aikalinity, ferromagnetic particle concentration, for making the aspects such as sonic sensor, illustrate in detail below.
Embodiment 1
Sound field of the present invention and the highly sensitive quality LOAD CELLS of magnetic field coupling-type are when measuring acid solution acidity, and surface-sensitive coating needs to be energy and H+The ferromagnetic coating reacted or ferromagnetic particle, it is possible to selecting plating iron or ferroalloy, magnetic devices then can be chosen as Magnet.When electrode contacts with acid, the coating of ferrum will disappear from qcm sensor surface.From Sauerbrey equation, after iron layer is etched, the frequency of QCM can improve.But when using Magnet at additionally one side electrode of QCM, owing to the deformation that QCM quartz wafer produces is far longer than the quality of coating influence of crust deformation to QCM of ferrum by the magnetic force between Magnet and the coating of ferrum, when iron layer is etched, frequency does not improve, and can reduce on the contrary.Owing to the deformation that QCM quartz wafer produces is far longer than the quality of coating influence of crust deformation to QCM of ferrum by the magnetic force between Magnet and the coating of ferrum.This is because the deformation of the wafer that quartz wafer produces can be caused the deformation of bigger quartz wafer by magnetic force.When the distance of Magnet and plating iron layer reduces, magnetic force can increase a lot, thus can increase the sensitivity of such sensor.
Embodiment 2
Sound field of the present invention and the highly sensitive quality LOAD CELLS of magnetic field coupling-type are when measuring alkali liquor alkalescence, and surface-sensitive coating needs to be energy and OH-The ferromagnetic coating reacted or ferromagnetic particle, it is possible to select AlNiCo.Acid similar with detection acid solution, when the ferrum that sensitive coating is acid labile, here it is a highly sensitive QCM acid sensor.When the surface-sensitive coating of sensor is the magnetic material of AlNiCo etc, and this material reacts with alkali, here it is a kind of highly sensitive alkalescence sensor.
Embodiment 3
Magnetic devices is placed into the back side of qcm sensor, it is also possible to as ferromagnetic particle sensor.When ferromagnetic particle is attracted to QCM surface by magnetic devices, the frequency of qcm sensor will not decline, and can rise because of the deformation that wafer is caused by ferromagnetic power on the contrary.The position that magnetic devices is placed is more near with the distance of ferromagnetic particle, and the clever lightness of this sensor is more high.
When using the QCM of higher frequency, because high frequency QCM is thinner than low frequency QCM, thin QCM wafer can be produced bigger deformation by the magnetic force between identical ferromagnetic particle and magnetic devices.With the same principle said above, when magnetic devices and ferromagnetic particle distance closer to time, wafer can be produced bigger deformation and frequency change by magnetic force.
Embodiment 4
Sound field of the present invention and the highly sensitive quality LOAD CELLS of magnetic field coupling-type may be used for making sonic sensor, such as surface acoustic wave sensor.The electrode of surface acoustic wave sensor is only in the side of sensor quartz substrate, and when using this kind of sensor of the present invention, the surface-sensitive coating of sensor can in the other side of surface acoustic wave quartz substrate.The side of surface acoustic wave electrode is packaged in sensor internal.Magnet is also packaged in sensor internal.Such surface acoustic wave sensor is equally possible possesses higher sensitivity.
The foregoing is only presently preferred embodiments of the present invention, not in order to limit the present invention, all within the spirit and principles in the present invention, any amendment of making, equivalent replacement, improvement etc., should be included within protection scope of the present invention.
Claims (6)
- null1. a sound field and the highly sensitive quality LOAD CELLS of magnetic field coupling-type，Including packaged quality LOAD CELLS (1)，The inside of described quality LOAD CELLS is provided with crystal oscillation circuit，Two electrodes of described crystal oscillation circuit are separately positioned on quartz transducer wafer (2) upper and lower surface at described quality LOAD CELLS (1) top，Upper and lower surface described quartz transducer wafer (2) is coated with one layer of chrome plating (4) respectively，The surface of described chrome plating (4) is coated with one layer of gold plate (5),It is characterized in that，The surface of the gold plate (5) on the upper surface of described sensor wafer (2) is coated with surface-sensitive coating (6)，The inside of described quality LOAD CELLS is additionally provided with magnetic devices (3)，Described magnetic devices (3) is positioned at the underface of described quartz transducer wafer (2).
- 2. sound field and the highly sensitive quality LOAD CELLS of magnetic field coupling-type according to claim 1, it is characterised in that described surface-sensitive coating (6) is ferromagnetic coating or ferromagnetic particle, is made up of metal simple-substance, metal alloy or organo-metallic material.
- 3. sound field and the highly sensitive quality LOAD CELLS of magnetic field coupling-type according to claim 2, it is characterised in that described metal simple-substance is ferrum, cobalt or nickel.
- 4. sound field and the highly sensitive quality LOAD CELLS of magnetic field coupling-type according to claim 2, it is characterised in that described metal alloy is ferroalloy, cobalt alloy or nickel alloy.
- 5. sound field and the highly sensitive quality LOAD CELLS of magnetic field coupling-type according to claim 2, it is characterised in that described metal alloy is AlNiCo or NdFeB.
- 6. sound field and the highly sensitive quality LOAD CELLS of magnetic field coupling-type according to any one of claim 1 to 5, it is characterised in that described magnetic devices (3) is permanent magnet or electric magnet.
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| CN105300827A (en) * | 2015-11-02 | 2016-02-03 | 北京至感传感器技术研究院有限公司 | Online detection device of acid value of liquid oil |
| CN105300863A (en) * | 2015-11-20 | 2016-02-03 | 北京至感传感器技术研究院有限公司 | Detection device and detection method for ferromagnetic abrasive grains in liquid oil |
| CN105717010A (en) * | 2016-01-29 | 2016-06-29 | 武汉水天成环保科技有限公司 | Method and device for detecting acidic ultrafine micro-particles in atmosphere |
| CN105699265A (en) * | 2016-03-29 | 2016-06-22 | 北京至感传感器技术研究院有限公司 | Method and device for detecting ferromagnetic grains in liquid oil |
| CN107290392B (en) * | 2017-07-31 | 2023-07-18 | 成都信息工程大学 | QCM humidity sensor for high-stability low-humidity detection and preparation method thereof |
| CN110426451B (en) * | 2019-07-15 | 2021-12-24 | Tcl华星光电技术有限公司 | Etching rate measuring device and lateral etching rate measuring method |
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| CH625342A5 (en) * | 1976-12-18 | 1981-09-15 | Sauter August Gmbh | |
| DE19923208C1 (en) * | 1999-05-20 | 2000-10-12 | Sartorius Gmbh | Weighing device using electromagnetic force compensation has load sensor, transmission levers and associated coupling levers formed from single monolithic block |
| KR101122124B1 (en) * | 2009-11-17 | 2012-03-16 | 주식회사 아모그린텍 | Methods and systems for detecting analytes |
| GB201020939D0 (en) * | 2010-12-10 | 2011-01-26 | Cambridge Entpr Ltd | A sensing apparatus |
| CN202614627U (en) * | 2012-07-02 | 2012-12-19 | 长沙理工大学 | Quartz crystal microbalance sensor based on titanium base three-layer metal films |
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