CN104040323A - 线宽测量系统 - Google Patents

线宽测量系统 Download PDF

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Publication number
CN104040323A
CN104040323A CN201280048336.4A CN201280048336A CN104040323A CN 104040323 A CN104040323 A CN 104040323A CN 201280048336 A CN201280048336 A CN 201280048336A CN 104040323 A CN104040323 A CN 104040323A
Authority
CN
China
Prior art keywords
diffraction pattern
size
image
web
fourier transform
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201280048336.4A
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English (en)
Chinese (zh)
Inventor
乔轶
迈克尔·W·多莱扎尔
大卫·L·霍费尔特
杰克·W·莱
凯瑟琳·P·塔尔诺夫斯基
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
3M Innovative Properties Co
Original Assignee
3M Innovative Properties Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 3M Innovative Properties Co filed Critical 3M Innovative Properties Co
Publication of CN104040323A publication Critical patent/CN104040323A/zh
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/04—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness specially adapted for measuring length or width of objects while moving
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/04—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness specially adapted for measuring length or width of objects while moving
    • G01B11/046—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness specially adapted for measuring length or width of objects while moving for measuring width
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
CN201280048336.4A 2011-09-30 2012-09-13 线宽测量系统 Pending CN104040323A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201161542061P 2011-09-30 2011-09-30
US61/542,061 2011-09-30
PCT/US2012/055003 WO2013048744A1 (en) 2011-09-30 2012-09-13 Linewidth measurement system

Publications (1)

Publication Number Publication Date
CN104040323A true CN104040323A (zh) 2014-09-10

Family

ID=47996302

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201280048336.4A Pending CN104040323A (zh) 2011-09-30 2012-09-13 线宽测量系统

Country Status (8)

Country Link
US (1) US20140240720A1 (https=)
EP (1) EP2761281A4 (https=)
JP (1) JP2014529086A (https=)
KR (1) KR20140074970A (https=)
CN (1) CN104040323A (https=)
BR (1) BR112014007576A2 (https=)
SG (1) SG11201401017UA (https=)
WO (1) WO2013048744A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114935315A (zh) * 2022-05-13 2022-08-23 浙江工业大学 一种通过频域计算细丝衍射条纹的直径测量方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021074939A1 (en) * 2019-10-16 2021-04-22 Pirelli Tyre S.P.A. Method and apparatus for dosing a continuous elongated element

Citations (2)

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Publication number Priority date Publication date Assignee Title
CN1059792A (zh) * 1990-06-29 1992-03-25 株式会社岛津制作所 粒子尺寸分布测量仪
CN101796396A (zh) * 2007-07-26 2010-08-04 3M创新有限公司 幅材自动检测的方法和系统

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CA1082811A (en) * 1976-04-05 1980-07-29 Greenwood Mills, Inc. Diffraction pattern amplitude analysis for use in fabric inspection
US4588260A (en) * 1984-04-03 1986-05-13 The United States Of America As Represented By The Secretary Of The Air Force Phase-only optical filter for use in an optical correlation system
JPS62222380A (ja) * 1986-03-25 1987-09-30 Citizen Watch Co Ltd パタ−ン欠陥検出方法
US5317651A (en) * 1988-06-24 1994-05-31 Thomson-Csf Non-linear and adaptive signal-processing device
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JPH04299204A (ja) * 1991-03-27 1992-10-22 Toyoda Mach Works Ltd バイト端縁検出装置
JP3378032B2 (ja) * 1992-08-28 2003-02-17 浜松ホトニクス株式会社 人物照合装置
JP2796022B2 (ja) * 1992-10-29 1998-09-10 住友大阪セメント株式会社 物体識別装置
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1059792A (zh) * 1990-06-29 1992-03-25 株式会社岛津制作所 粒子尺寸分布测量仪
CN101796396A (zh) * 2007-07-26 2010-08-04 3M创新有限公司 幅材自动检测的方法和系统

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
S. RIBOLZI ET AL.: "Real-Time Fault Detection on Textiles Using Opto-electronic Processing", 《TEXTILE RESEARCH JOURNAL》 *
S. RIBOLZI ET AL.: "Real-Time Fault Detection on Textiles Using Opto-electronic Processing", 《TEXTILE RESEARCH JOURNAL》, vol. 63, no. 2, 28 February 1993 (1993-02-28), XP055183023, DOI: doi:10.1177/004051759306300201 *
SRISUDA PUANG-NGERN S AND SILVERIO P. ALMEIDA: "Converging beam optical Fourier transforms", 《AMERICAN JOURNAL OF PHYSICS》 *
卢进灯等: "逆向傅里叶变换激光测粒仪的光线计算模型", 《上海理工大学学报》 *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114935315A (zh) * 2022-05-13 2022-08-23 浙江工业大学 一种通过频域计算细丝衍射条纹的直径测量方法
CN114935315B (zh) * 2022-05-13 2024-01-16 浙江工业大学 一种通过频域计算细丝衍射条纹的直径测量方法

Also Published As

Publication number Publication date
KR20140074970A (ko) 2014-06-18
SG11201401017UA (en) 2014-04-28
WO2013048744A1 (en) 2013-04-04
US20140240720A1 (en) 2014-08-28
EP2761281A1 (en) 2014-08-06
JP2014529086A (ja) 2014-10-30
EP2761281A4 (en) 2015-06-03
BR112014007576A2 (pt) 2017-04-11

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Application publication date: 20140910