CN104040323A - 线宽测量系统 - Google Patents
线宽测量系统 Download PDFInfo
- Publication number
- CN104040323A CN104040323A CN201280048336.4A CN201280048336A CN104040323A CN 104040323 A CN104040323 A CN 104040323A CN 201280048336 A CN201280048336 A CN 201280048336A CN 104040323 A CN104040323 A CN 104040323A
- Authority
- CN
- China
- Prior art keywords
- diffraction pattern
- size
- image
- web
- fourier transform
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005259 measurement Methods 0.000 title description 5
- 239000000463 material Substances 0.000 claims abstract description 82
- 238000000034 method Methods 0.000 claims abstract description 48
- 238000004519 manufacturing process Methods 0.000 claims description 28
- 238000001514 detection method Methods 0.000 claims description 19
- 238000003384 imaging method Methods 0.000 claims description 14
- 230000003287 optical effect Effects 0.000 claims description 10
- 230000005540 biological transmission Effects 0.000 claims description 8
- 230000007547 defect Effects 0.000 claims description 7
- 230000004807 localization Effects 0.000 claims description 5
- 238000012544 monitoring process Methods 0.000 claims description 3
- 238000004886 process control Methods 0.000 claims 1
- 238000011897 real-time detection Methods 0.000 claims 1
- 238000000576 coating method Methods 0.000 description 12
- 239000011248 coating agent Substances 0.000 description 11
- 238000010586 diagram Methods 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 4
- 238000004458 analytical method Methods 0.000 description 3
- 230000006870 function Effects 0.000 description 3
- 238000007726 management method Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 230000002159 abnormal effect Effects 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
- 239000004744 fabric Substances 0.000 description 2
- CPBQJMYROZQQJC-UHFFFAOYSA-N helium neon Chemical compound [He].[Ne] CPBQJMYROZQQJC-UHFFFAOYSA-N 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000000123 paper Substances 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 241001439211 Almeida Species 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000000149 argon plasma sintering Methods 0.000 description 1
- 239000007767 bonding agent Substances 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 238000013480 data collection Methods 0.000 description 1
- 238000013500 data storage Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- -1 non-woven Substances 0.000 description 1
- 229920005787 opaque polymer Polymers 0.000 description 1
- 238000011192 particle characterization Methods 0.000 description 1
- 229920006254 polymer film Polymers 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 230000011664 signaling Effects 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000004753 textile Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 230000001052 transient effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/04—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness specially adapted for measuring length or width of objects while moving
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/04—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness specially adapted for measuring length or width of objects while moving
- G01B11/046—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness specially adapted for measuring length or width of objects while moving for measuring width
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/8901—Optical details; Scanning details
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Textile Engineering (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201161542061P | 2011-09-30 | 2011-09-30 | |
| US61/542,061 | 2011-09-30 | ||
| PCT/US2012/055003 WO2013048744A1 (en) | 2011-09-30 | 2012-09-13 | Linewidth measurement system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104040323A true CN104040323A (zh) | 2014-09-10 |
Family
ID=47996302
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201280048336.4A Pending CN104040323A (zh) | 2011-09-30 | 2012-09-13 | 线宽测量系统 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US20140240720A1 (enExample) |
| EP (1) | EP2761281A4 (enExample) |
| JP (1) | JP2014529086A (enExample) |
| KR (1) | KR20140074970A (enExample) |
| CN (1) | CN104040323A (enExample) |
| BR (1) | BR112014007576A2 (enExample) |
| SG (1) | SG11201401017UA (enExample) |
| WO (1) | WO2013048744A1 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114935315A (zh) * | 2022-05-13 | 2022-08-23 | 浙江工业大学 | 一种通过频域计算细丝衍射条纹的直径测量方法 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2021074939A1 (en) * | 2019-10-16 | 2021-04-22 | Pirelli Tyre S.P.A. | Method and apparatus for dosing a continuous elongated element |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1059792A (zh) * | 1990-06-29 | 1992-03-25 | 株式会社岛津制作所 | 粒子尺寸分布测量仪 |
| CN101796396A (zh) * | 2007-07-26 | 2010-08-04 | 3M创新有限公司 | 幅材自动检测的方法和系统 |
Family Cites Families (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3877776A (en) * | 1971-03-01 | 1975-04-15 | Matsushita Electric Industrial Co Ltd | Speckle reduction in holography |
| JPS5343300B2 (enExample) * | 1972-11-02 | 1978-11-18 | ||
| JPS5334865B2 (enExample) * | 1972-11-17 | 1978-09-22 | ||
| DE2421851C3 (de) * | 1974-05-06 | 1978-12-07 | Erwin Sick Gmbh Optik-Elektronik, 7808 Waldkirch | Verfahren zur Messung des Mittelwerts der Steigung von gedrehten Fäden |
| CA1082811A (en) * | 1976-04-05 | 1980-07-29 | Greenwood Mills, Inc. | Diffraction pattern amplitude analysis for use in fabric inspection |
| US4588260A (en) * | 1984-04-03 | 1986-05-13 | The United States Of America As Represented By The Secretary Of The Air Force | Phase-only optical filter for use in an optical correlation system |
| JPS62222380A (ja) * | 1986-03-25 | 1987-09-30 | Citizen Watch Co Ltd | パタ−ン欠陥検出方法 |
| US5317651A (en) * | 1988-06-24 | 1994-05-31 | Thomson-Csf | Non-linear and adaptive signal-processing device |
| JP2906281B2 (ja) * | 1990-09-05 | 1999-06-14 | セイコーインスツルメンツ株式会社 | 光学的パターン認識装置 |
| US5113286A (en) * | 1990-09-27 | 1992-05-12 | At&T Bell Laboratories | Diffraction grating apparatus and method of forming a surface relief pattern in diffraction grating apparatus |
| JPH04299204A (ja) * | 1991-03-27 | 1992-10-22 | Toyoda Mach Works Ltd | バイト端縁検出装置 |
| JP3378032B2 (ja) * | 1992-08-28 | 2003-02-17 | 浜松ホトニクス株式会社 | 人物照合装置 |
| JP2796022B2 (ja) * | 1992-10-29 | 1998-09-10 | 住友大阪セメント株式会社 | 物体識別装置 |
| US5629802A (en) * | 1995-01-05 | 1997-05-13 | The United States Of America As Represented By The Secretary Of The Air Force | Spatially multiplexed optical signal processor |
| US5919549A (en) * | 1996-11-27 | 1999-07-06 | Minnesota Mining And Manufacturing Company | Abrasive articles and method for the manufacture of same |
| US6362879B1 (en) * | 2000-02-25 | 2002-03-26 | Corning Incorporated | High resolution non-scanning spectrometer |
| US6567155B1 (en) * | 2000-03-16 | 2003-05-20 | Intel Corporation | Method for improved resolution of patterning using binary masks with pupil filters |
| US7221760B2 (en) * | 2001-03-30 | 2007-05-22 | The University Of Connecticut | Information security using digital holography |
| US7342659B2 (en) * | 2005-01-21 | 2008-03-11 | Carl Zeiss Meditec, Inc. | Cross-dispersed spectrometer in a spectral domain optical coherence tomography system |
| JP2008216575A (ja) * | 2007-03-02 | 2008-09-18 | Sony Corp | 画像表示方法 |
| JP2008304292A (ja) * | 2007-06-07 | 2008-12-18 | Kyushu Institute Of Technology | パルス化レーザ光を用いた回転体測定方法及びシステム |
| JP5364203B2 (ja) * | 2010-04-30 | 2013-12-11 | 浜松ホトニクス株式会社 | 観察装置 |
-
2012
- 2012-09-13 BR BR112014007576A patent/BR112014007576A2/pt not_active IP Right Cessation
- 2012-09-13 KR KR20147011517A patent/KR20140074970A/ko not_active Withdrawn
- 2012-09-13 WO PCT/US2012/055003 patent/WO2013048744A1/en not_active Ceased
- 2012-09-13 SG SG11201401017UA patent/SG11201401017UA/en unknown
- 2012-09-13 JP JP2014533572A patent/JP2014529086A/ja not_active Withdrawn
- 2012-09-13 EP EP12837003.8A patent/EP2761281A4/en not_active Withdrawn
- 2012-09-13 CN CN201280048336.4A patent/CN104040323A/zh active Pending
- 2012-09-13 US US14/347,022 patent/US20140240720A1/en not_active Abandoned
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1059792A (zh) * | 1990-06-29 | 1992-03-25 | 株式会社岛津制作所 | 粒子尺寸分布测量仪 |
| CN101796396A (zh) * | 2007-07-26 | 2010-08-04 | 3M创新有限公司 | 幅材自动检测的方法和系统 |
Non-Patent Citations (4)
| Title |
|---|
| S. RIBOLZI ET AL.: "Real-Time Fault Detection on Textiles Using Opto-electronic Processing", 《TEXTILE RESEARCH JOURNAL》 * |
| S. RIBOLZI ET AL.: "Real-Time Fault Detection on Textiles Using Opto-electronic Processing", 《TEXTILE RESEARCH JOURNAL》, vol. 63, no. 2, 28 February 1993 (1993-02-28), XP055183023, DOI: doi:10.1177/004051759306300201 * |
| SRISUDA PUANG-NGERN S AND SILVERIO P. ALMEIDA: "Converging beam optical Fourier transforms", 《AMERICAN JOURNAL OF PHYSICS》 * |
| 卢进灯等: "逆向傅里叶变换激光测粒仪的光线计算模型", 《上海理工大学学报》 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114935315A (zh) * | 2022-05-13 | 2022-08-23 | 浙江工业大学 | 一种通过频域计算细丝衍射条纹的直径测量方法 |
| CN114935315B (zh) * | 2022-05-13 | 2024-01-16 | 浙江工业大学 | 一种通过频域计算细丝衍射条纹的直径测量方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| BR112014007576A2 (pt) | 2017-04-11 |
| US20140240720A1 (en) | 2014-08-28 |
| JP2014529086A (ja) | 2014-10-30 |
| KR20140074970A (ko) | 2014-06-18 |
| SG11201401017UA (en) | 2014-04-28 |
| EP2761281A4 (en) | 2015-06-03 |
| WO2013048744A1 (en) | 2013-04-04 |
| EP2761281A1 (en) | 2014-08-06 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20140910 |