CN103991141A - Multi-wire cutting guide wheel grooving technology based on high-speed steel knives - Google Patents
Multi-wire cutting guide wheel grooving technology based on high-speed steel knives Download PDFInfo
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- CN103991141A CN103991141A CN201410173464.2A CN201410173464A CN103991141A CN 103991141 A CN103991141 A CN 103991141A CN 201410173464 A CN201410173464 A CN 201410173464A CN 103991141 A CN103991141 A CN 103991141A
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- guide wheel
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Abstract
The invention discloses a multi-wire cutting guide wheel grooving technology based on high-speed steel knives. The multi-wire cutting guide wheel grooving technology includes the following steps: (1) setting the guide wheel groove spacing, the guide wheel groove depths and the grooving angles of guide wheel grooving; (2) hoisting a guide wheel to a grooving machine; (3) roughly machining the surface of the guide wheel, wherein the rotating speed of the grooving machine is set to range 300 rpm to 800 rpm, and the feeding distance per revolution ranges from 0.5 mm to 2 mm so that a poorly-used coating on the surface of the guide wheel can be removed; (4) providing a grooving basic plane on the surface of the guide wheel, wherein the rotating speed of the grooving machine is set to range 300 rpm to 1000 rpm, the feeding distance per revolution ranges from 0.05 mm to 0.5 mm, and cooling is carried out through cutting liquid; (5) carrying out grooving through the high-speed steel grooving machine, and obtaining V-type grooves in the surface of the guide wheel, wherein the grooving process is carried out with long cooling time and the low feeding speed, the rotating speed of the grooving machine is set to range 200 rpm to 500 rpm, the feeding distance per revolution ranges from 0.05 mm to 0.5 mm, and cooling is carried out through cutting liquid. The multi-wire cutting guide wheel grooving technology has the advantages of being high in machining speed, high in machining quality and the like.
Description
Technical field
The invention belongs to technical field of solar batteries, be specifically related to a kind of multi-wire saw slotting guide roller technique based on high-speed steelknife.
Background technology
As everyone knows, the basis of modern information technologies and modern electronic technology is semiconductor technology, and semiconductor silicon material is most important semi-conducting material.Multi-line cutting machine, with high production efficiency and piece rate, is widely used in the cutting field of major diameter ultra thin silicon wafers.In multi-wire saw, need to use slotting guide roller and affect to a certain extent silicon rod unit's slice number, silicon rod cut quality.
Steel wire, in guided wheel slot, moves according to existing groove, and slot pitch determines silicon wafer thickness, and groove depth can prevent the harmful effect that its wire jumper causes, and grooved is the shape of fluting, the quality of representative fluting.Existing fluting uses diamond tool fluting, and efficiency is slow.
Summary of the invention
The object of the present invention is to provide a kind of multi-wire saw slotting guide roller technique based on high-speed steelknife, this technique can improve the fluting speed of multi-wire saw slotting guide roller, improves guide wheel quality, reduces cutting cost.
Above-mentioned purpose of the present invention is achieved through the following technical solutions: a kind of multi-wire saw slotting guide roller technique based on high-speed steelknife, contains following steps:
(1) according to the guided wheel slot distance of the thickness setting slotting guide roller of target silicon chip, the steel wire diameter using during according to multi-wire saw is set groove depth, and sets fluting for V-type groove, and included angle is 55 ° ~ 90 °;
(2) guide wheel is lifted on groover, adjusts guide wheel concentricity;
(3) guide pulley surface is carried out to roughing, setting groover rotating speed is 300 rpm ~ 800rpm, often turns feeding 0.5 mm ~ 2mm, has used bad coating to remove guide pulley surface;
(4) provide the base surface of fluting in guide pulley surface, setting groover rotating speed is 300 rpm ~ 1000 rpm, often turns feeding 0.05 mm ~ 0.5mm, and cooling by cutting fluid;
(5) fluting processing: according to guided wheel slot distance, groove depth and the included angle set in step (1), slot with high-speed steel groover, in grooving process, take high cool time, low feed speed is carried out, setting groover rotating speed is 200 rpm ~ 500 rpm, often turn feeding 0.05 mm ~ 0.5mm, and cooling by cutting fluid, on the surface of guide wheel, obtain V-type fluting.
In step of the present invention (1) before slotting guide roller first through cleaning, the mortar of being infected with due to multi-wire saw to remove guide pulley surface, and remove the rusty stain of guide pulley surface.
In step of the present invention (2), adjusting guide wheel concentricity is zero, so that the center line of guide wheel and guide wheel shaft is on same straight line.
Cutting fluid described in step of the present invention (4) and step (5) is preferably Loews cutting fluid, is preferably Loews polyurethane cutting fluid.
Grooving processes of the present invention is slotted based on high-speed steelknife, use polyurethane cutting fluid as cooling fluid and lubricating fluid, use high cooling, low feeding is as fluting process operation, in integrated operation, constantly adjust the concentricity of guide wheel, and according to the thickness setting slot distance of target silicon chip, using fluting supply slot pitch as arithmetic progression, determine the distance of each fluting, use groover from tape program, do an arithmetic progression, then use the variation of arithmetic progression Data Control slot pitch, during according to multi-wire saw, the diameter of steel wire is set groove depth, for preventing steel wire wire jumper etc., can set included angle is 55 ° ~ 90 °.
Tool of the present invention has the following advantages:
(1) the present invention, by adopting suitable the speed feeding of high-speed steel necking tool and suitable cool time, coordinates with cutting fluid and can obtain better cutting power simultaneously, and specification is carefully and neatly done more for the grooved that makes to slot, and has better quality;
(2) the present invention is based on the slotting guide roller technique that high-speed steel necking tool carries out, there is process velocity fast, the features such as crudy height.
Brief description of the drawings
Fig. 1 is the guide wheel in embodiment of the present invention 1-4;
Fig. 2 be in embodiment of the present invention 1-4 at guide pulley surface fluting schematic diagram, wherein 1 is high-speed steelknife, the 2nd, guide pulley surface, the 3rd, the V-type groove that high-speed steelknife is offered.
Detailed description of the invention
Below in conjunction with accompanying drawing, this device is described further.
embodiment 1
The multi-wire saw slotting guide roller technique based on high-speed steelknife that the present embodiment provides, contains following steps:
(1) clean guide wheel, guide wheel is MWM442DM guide wheel, the general structure of guide wheel as shown in fig. 1, is removed the mortar that guide pulley surface is infected with due to multi-wire saw, removes the rusty stain of guide pulley surface;
(2) when measurement guide wheel diameter is between 190 ~ 205mm, carry out mark (be convenient to fluting, also can not carry out mark, not necessarily step) in guide pulley surface, after using in critical field, carry out next step flow process;
(3) cutter changing is (because the cutter on groover has service life, in order not affect fluting, on inspection, inappropriate cutter need to be changed, suitable cutter can be changed, and this step is not to obtain step, and cutter comprises the thick cutter using below, turning gouge and high-speed steelknife etc.), change cutter and with tool setting gauge calibration tool position;
(4) lifting guide wheel, with mechanical arm lifting guide wheel, to groover, groover can use Little Big Man qsm350 groover, and (preferably making concentricity is zero then to adjust guide wheel concentricity, make the center line of guide wheel and axle on same straight line), and measure with amesdial;
(5) roughing, can carry out roughing with thick cutter, and groover rotating speed 800rpm, often turns feeding 2mm, has used bad coating to remove guide pulley surface;
(6) fine finishining: can further carry out fine finishining with turning gouge, the base surface of slotting guide roller can be provided, can make surfacing, smooth, 700 revs/min of groover rotating speeds, often turn feeding 0.3mm, adopts Loews cutting fluid cooling;
(7) fluting processing: the guided wheel slot distance of setting slotting guide roller according to the thickness of target silicon chip, set groove depth according to steel wire diameter, and to set included angle be 55 °, its middle slot is that (slot pitch is mainly to specify according to customer requirement silicon wafer thickness to V-type groove here, groove depth is mainly specified according to steel wire diameter, and included angle can be from 55 ° to 90 °.), slot with high-speed steel groover, utilize the data setting of groover in setting using the guided wheel slot that will slot apart from as an arithmetic progression, the every step fluting distance calculating according to groover is slotted, take high cool time, low feed speed is carried out, adopt high-speed steelknife 1 to offer V-type groove 3 in guide pulley surface 2,500 revs/min of rotating speeds, often turn feeding 0.2mm, Loews cutting fluid is cooling, obtains V-type fluting on the surface of guide wheel, specifically as shown in Figure 2, this guide wheel with V-type fluting can be used for multi-line cutting machine cutting silicon rod.
embodiment 2
The multi-wire saw slotting guide roller technique based on high-speed steelknife that the present embodiment provides, contains following steps:
(1) clean guide wheel, guide wheel adopts PV600 guide wheel, and the general structure of guide wheel as shown in fig. 1, is removed the mortar that guide pulley surface is infected with due to multi-wire saw, removes the rusty stain of guide pulley surface;
(2) when measurement guide wheel diameter is between 262 ~ 265mm, carry out mark (be convenient to fluting, also can not carry out mark, not necessarily step) in guide pulley surface, after using in critical field, carry out next step flow process;
(3) cutter changing is (because the cutter on groover has service life, in order not affect fluting, on inspection, inappropriate cutter need to be changed, suitable cutter can be changed, and this step is not to obtain step, and cutter comprises the thick cutter using below, turning gouge and high-speed steelknife etc.), change cutter and with tool setting gauge calibration tool position;
(4) lifting guide wheel, with mechanical arm lifting guide wheel, to groover, groover can use Little Big Man qsm350 groover, and (preferably making concentricity is zero then to adjust guide wheel concentricity, make the center line of guide wheel and axle on same straight line), and measure with amesdial;
(5) roughing; Carry out roughing with thick cutter, groover rotating speed 700rpm, often turns feeding 2mm;
(6) fine finishining: carry out fine finishining with semicircle finishing tool, 500 revs/min of groover rotating speeds, often turn feeding 0.3mm, adopts Loews cutting fluid cooling;
(7) fluting processing: the guided wheel slot distance of setting slotting guide roller according to the thickness of target silicon chip, set groove depth according to steel wire diameter, and to set included angle be 70 °, its middle slot is that (slot pitch is mainly to specify according to customer requirement silicon wafer thickness to V-type groove here, groove depth is mainly specified according to steel wire diameter, and included angle can be from 55 ° to 90 °.), slot with high-speed steel groover, utilize the data setting of groover in setting using the guided wheel slot that will slot apart from as an arithmetic progression, the every step fluting distance calculating according to groover is slotted, take high cool time, low feed speed is carried out, and 400 revs/min of rotating speeds, often turn feeding 0.2mm, Loews cutting fluid is cooling, on the surface of guide wheel, obtain V-type fluting, specifically as shown in Figure 2, this guide wheel with V-type fluting can be used for multi-line cutting machine cutting silicon rod.
embodiment 3
The multi-wire saw slotting guide roller technique based on high-speed steelknife that the present embodiment provides, contains following steps:
(1) clean guide wheel, guide wheel adopts PV800, and the general structure of guide wheel as shown in fig. 1, is removed the mortar that guide pulley surface is infected with due to multi-wire saw, removes the rusty stain of guide pulley surface;
(2) when measurement guide wheel diameter is between 342 ~ 352mm, carry out mark (be convenient to fluting, also can not carry out mark, not necessarily step) in guide pulley surface, after using in critical field, carry out next step flow process;
(3) cutter changing is (because the cutter on groover has service life, in order not affect fluting, on inspection, inappropriate cutter need to be changed, suitable cutter can be changed, and this step is not to obtain step, and cutter comprises the thick cutter using below, turning gouge and high-speed steelknife etc.), change cutter and with tool setting gauge calibration tool position;
(4) lifting guide wheel, with mechanical arm lifting guide wheel, to groover, groover can use Little Big Man qsm350 groover, and (preferably making concentricity is zero then to adjust guide wheel concentricity, make the center line of guide wheel and axle on same straight line), and measure with amesdial;
(5) roughing; Carry out roughing with thick cutter, groover rotating speed 600/ minute, often turns feeding 2mm;
(6) fine finishining: carry out fine finishining with semicircle finishing tool, 450 revs/min of groover rotating speeds, often turn feeding 0.3mm, and Loews cutting fluid is cooling;
(7) fluting processing: the guided wheel slot distance of setting slotting guide roller according to the thickness of target silicon chip, set groove depth according to steel wire diameter, and to set included angle be 80 °, its middle slot is that (slot pitch is mainly to specify according to customer requirement silicon wafer thickness to V-type groove here, groove depth is mainly specified according to steel wire diameter, and included angle can be from 55 ° to 90 °.), slot with high-speed steel groover, utilize the data setting of groover in setting using the guided wheel slot that will slot apart from as an arithmetic progression, the every step fluting distance calculating according to groover is slotted, take high cool time, low feed speed is carried out, and 350 revs/min of rotating speeds, often turn feeding 0.2mm, Loews cutting fluid is cooling, on the surface of guide wheel, obtain V-type fluting, specifically as shown in Figure 2, this guide wheel with V-type fluting can be used for multi-line cutting machine cutting silicon rod.
embodiment 4
The multi-wire saw slotting guide roller technique based on high-speed steelknife that the present embodiment provides, contains following steps:
(1) according to the guided wheel slot distance of the thickness setting slotting guide roller of target silicon chip, set groove depth according to steel wire diameter, and to set included angle be 90 °, its middle slot is that (slot pitch is mainly to specify according to customer requirement silicon wafer thickness to V-type groove here, groove depth is mainly specified according to steel wire diameter, and included angle can be from 55 ° to 90 °.), wherein guide wheel adopts PV800, and the general structure of guide wheel is as shown in fig. 1;
(2) lifting guide wheel, with mechanical arm lifting guide wheel, to groover, groover can use Little Big Man qsm350 groover, and (preferably making concentricity is zero then to adjust guide wheel concentricity, make the center line of guide wheel and axle on same straight line), and measure with amesdial;
(3) roughing; Carry out roughing with thick cutter, groover rotating speed 300/ minute, often turns feeding 0.5mm;
(4) fine finishining: carry out fine finishining with semicircle finishing tool, 300 revs/min of groover rotating speeds, often turn feeding 0.05mm, and Loews cutting fluid is cooling;
(5) fluting processing: slot with Little Big Man qsm350 high-speed steel groover, the parameter of setting according to step (1), split scouring machine and carry out setting parameter, using the guided wheel slot distance that will slot as an arithmetic progression, the every step fluting distance calculating according to groover is slotted, take high cool time, low feed speed is carried out, 200 revs/min of rotating speeds, often turn feeding 0.05mm, Loews cutting fluid is cooling, obtains V-type fluting on the surface of guide wheel, specifically as shown in Figure 2, this guide wheel with V-type fluting can be used for multi-line cutting machine cutting silicon rod.
It is pointed out that above embodiment, only for the invention will be further described, does not represent protection scope of the present invention, nonessential amendment and adjustment that other people prompting according to the present invention is made, still belong to protection scope of the present invention.
Claims (4)
1. the multi-wire saw slotting guide roller technique based on high-speed steelknife, is characterized in that containing following steps:
(1) according to the guided wheel slot distance of the thickness setting slotting guide roller of target silicon chip, the steel wire diameter using during according to multi-wire saw is set groove depth, and sets fluting for V-type groove, and included angle is 55 ° ~ 90 °;
(2) guide wheel is lifted on groover, adjusts guide wheel concentricity;
(3) guide pulley surface is carried out to roughing, setting groover rotating speed is 300 rpm ~ 800rpm, often turns feeding 0.5 mm ~ 2mm, has used bad coating to remove guide pulley surface;
(4) provide the base surface of fluting in guide pulley surface, setting groover rotating speed is 300 rpm ~ 1000 rpm, often turns feeding 0.05 mm ~ 0.5mm, and cooling by cutting fluid;
(5) fluting processing: according to guided wheel slot distance, groove depth and the included angle set in step (1), slot with high-speed steel groover, in grooving process, take high cool time, low feed speed is carried out, setting groover rotating speed is 200 rpm ~ 500 rpm, often turn feeding 0.05 mm ~ 0.5mm, and cooling by cutting fluid, on the surface of guide wheel, obtain V-type fluting.
2. the multi-wire saw slotting guide roller technique based on high-speed steelknife according to claim 1, is characterized in that: first through cleaning before slotting guide roller in step (1).
3. the multi-wire saw slotting guide roller technique based on high-speed steelknife according to claim 1, is characterized in that: in step (2), adjusting guide wheel concentricity is zero.
4. the multi-wire saw slotting guide roller technique based on high-speed steelknife according to claim 1, is characterized in that: the cutting fluid described in step (4) and step (5) is Loews cutting fluid.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410173464.2A CN103991141A (en) | 2014-04-28 | 2014-04-28 | Multi-wire cutting guide wheel grooving technology based on high-speed steel knives |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201410173464.2A CN103991141A (en) | 2014-04-28 | 2014-04-28 | Multi-wire cutting guide wheel grooving technology based on high-speed steel knives |
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| CN103991141A true CN103991141A (en) | 2014-08-20 |
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| CN201410173464.2A Pending CN103991141A (en) | 2014-04-28 | 2014-04-28 | Multi-wire cutting guide wheel grooving technology based on high-speed steel knives |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106181590A (en) * | 2016-07-27 | 2016-12-07 | 成都青洋电子材料有限公司 | A kind of HIGH-PURITY SILICON crystalline material precision grinding technics |
| CN107775827A (en) * | 2017-09-25 | 2018-03-09 | 晶海洋半导体材料（东海）有限公司 | A kind of grooving method of multi-wire saw guide wheel |
| CN112518844A (en) * | 2020-11-15 | 2021-03-19 | 深圳千里马装饰集团有限公司 | Method for slotting back of veneer by stages |
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| US7640833B2 (en) * | 2005-04-18 | 2010-01-05 | Fujifilm Corporation | Method of manufacturing molding body having grooves thereon |
| CN101659089A (en) * | 2008-08-28 | 2010-03-03 | 上海九晶电子材料股份有限公司 | Method for slotting guide roller of multi-line cutting machine |
| CN201862792U (en) * | 2010-10-15 | 2011-06-15 | 上海启发电子科技有限公司 | Grooving cutter |
| CN102773498A (en) * | 2012-08-16 | 2012-11-14 | 保定天威英利新能源有限公司 | Method of slotting guide wheel of multiline cutting machine |
| CN203381055U (en) * | 2013-07-29 | 2014-01-08 | 苏州协鑫光伏科技有限公司 | Main roll of multi-wire sawing machine |
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2014
- 2014-04-28 CN CN201410173464.2A patent/CN103991141A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7640833B2 (en) * | 2005-04-18 | 2010-01-05 | Fujifilm Corporation | Method of manufacturing molding body having grooves thereon |
| CN101659089A (en) * | 2008-08-28 | 2010-03-03 | 上海九晶电子材料股份有限公司 | Method for slotting guide roller of multi-line cutting machine |
| CN201862792U (en) * | 2010-10-15 | 2011-06-15 | 上海启发电子科技有限公司 | Grooving cutter |
| CN102773498A (en) * | 2012-08-16 | 2012-11-14 | 保定天威英利新能源有限公司 | Method of slotting guide wheel of multiline cutting machine |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106181590A (en) * | 2016-07-27 | 2016-12-07 | 成都青洋电子材料有限公司 | A kind of HIGH-PURITY SILICON crystalline material precision grinding technics |
| CN106181590B (en) * | 2016-07-27 | 2018-08-03 | 成都青洋电子材料有限公司 | A kind of high-purity silicon crystal material precision grinding technics |
| CN107775827A (en) * | 2017-09-25 | 2018-03-09 | 晶海洋半导体材料（东海）有限公司 | A kind of grooving method of multi-wire saw guide wheel |
| CN112518844A (en) * | 2020-11-15 | 2021-03-19 | 深圳千里马装饰集团有限公司 | Method for slotting back of veneer by stages |
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Application publication date: 20140820 |