CN203381055U - Main roll of multi-wire sawing machine - Google Patents
Main roll of multi-wire sawing machine Download PDFInfo
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- CN203381055U CN203381055U CN201320455879.XU CN201320455879U CN203381055U CN 203381055 U CN203381055 U CN 203381055U CN 201320455879 U CN201320455879 U CN 201320455879U CN 203381055 U CN203381055 U CN 203381055U
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Abstract
The utility model discloses a main roll of a multi-wire sawing machine. The main roll is provided with a plurality of annular closed wire grooves used for fixing cutting steel wire lines, the wire grooves are mutually parallel, each wire groove is provided with a groove top and a groove bottom, and the wire grooves form groove profiles which are in an inverted calabash shape with the small groove bottoms and the large groove tops on the axial cross section of the main roll. When the cutting steel wire lines are fixed in the groove profiles, due to the fact that the groove profiles and the cutting steel wire lines are in smooth surface contact, in the high-speed operating process of the cutting steel wire lines, the groove profiles can not be damaged, and scratches and stria can not happen in the process of slicing crystals. In addition, in the long-term operating process of the main roll which is provided with the groove profiles, scraps produced between the cutting steel wire lines can be timely led into the bottom ends of the inverted-calabash-shaped wire grooves and can not be accumulated in the wire grooves so that secondary grinding damage on the wire grooves and cutting steel wires can not happen, therefore, the service life of the main roll and the cutting steel wire lines is greatly prolonged, and the using cost is lowered.
Description
Technical field
The utility model relates to the section production field of semi-conducting material in photovoltaic industry, particularly relates to the multi-wire cutting machine home roll for large scale silicon crystal bar and the cutting of other hard brittle material semiconductor billets.
Background technology
When manufacturing various semiconductor photovoltaic device, the wafer that the raw material crystal ingot cutting processing that will comprise the hard brittle materials such as silicon, sapphire, pottery by slice processing is desired thickness.Because the crystal ingot cutting is the important procedure of the follow-up finished product of restriction, thus also more and more higher to its processing request.At present, production efficiency is high, processing cost is low, the machining accuracy high owing to having for the multi-wire saw technology, is widely used in the crystal ingot section production of photovoltaic industry.
Be provided with a pair of home roll be parallel to each other on the multi-line cutting machine of conventional art.The home roll skin is generally the polyurethane-coated layer, on coat, offer thousands of be parallel to each other for the fixing closed wire casing of cutting steel wire.All tighten the closed wire casing of each on adjacent home roll inside can be along with the cutting of steel silk thread of home roll high-speed motion.
In actual process, semiconductor billet (as silicon crystal bar) is pressed on the gauze that thousands of cutting of steel silk threads are formed, the gauze of high-speed motion drives the continuous grinding crystal ingot of the tough material of cutting, thereby realizes the cutting of wafer.
Please refer to the drawing 2 is V-shaped line groove 110 ' for the closed wire casing of offering on home roll in conventional art, and this wire casing 110 ' has the groove top 111 ' of close home roll external diameter and the bottom land 112 ' relative with groove top 111 '.This wire casing grooved has that processing cost is low, the fluting precision is high, be easy to the advantage such as wiring.But the side wall surface that the home roll that uses the V-shaped line groove extends inward the both sides of the tensile force that fixedly only depends on the cutting of steel silk thread of cutting of steel silk thread and V-shaped line groove is fixed, and can find out from the shaft section of home roll, between V-shaped line groove and cutting of steel silk thread, only for putting, contact.Therefore, in the process that runs up of cutting of steel silk thread and V-shaped line groove running-in period, the cutting of steel silk thread is easy to produce and beat on the both sides of V-shaped line groove, thereby causes crystal ingot yield in slicing processes lower, and stria, thick useless, the bad problem such as integral thickness deviation (TTV) is large frequently occur.If the cutting of steel silk thread is beated acutely on the both sides of V-shaped line groove, the wire jumper accident that also there will be whole piece cutting of steel silk thread to break away from from wire casing, thus cause the off-production maintenance.In addition, use the home roll of V-shaped line groove constantly in wear process, being easy to produce the skew of wire casing grooved, thereby cause its service life limited, use cost is higher.
The utility model content
Based on this, be necessary for the problems referred to above, provide a kind of and can improve the section yield of semiconductor billet (as silicon crystal bar) and can improve the home roll multi-wire cutting machine home roll in service life.
A kind of multi-wire cutting machine home roll, on described home roll, be provided with some for the fixing closed annular wire casing of cutting of steel silk thread, between described wire casing, be parallel to each other, described wire casing has near the groove top of described home roll external diameter and pushes up relative bottom land with described groove, and described wire casing has the grooved that the bottom land sulculus pushes up large inverse gourd shaped shape on the shaft section of described home roll.
Therein in embodiment, on the shaft section of described home roll, described wire casing from described groove top to described bottom land be disposed with a pair of line part, with smooth the first excessive curved portions of each described line part and with smooth the second excessive curved portions of described the first curved portions; It is axial symmetry that a pair of described line part, a pair of described the first curved portions, a pair of described the second curved portions be take the center line of described wire casing; The live apart both sides of grooved of described cucurbit shape of the arc core of the arc core of described the first curved portions and described the second curved portions, and a pair of described the first curved portions between distance be greater than all the time the distance between a pair of described the second curved portions.
Therein in embodiment, on the shaft section of described home roll, described wire casing from described groove top to described bottom land be disposed with a pair of the first curved portions, with smooth the second excessive curved portions of described the first curved portions; It is axial symmetry that a pair of described the first curved portions, a pair of described the second curved portions be take the center line of described wire casing; The live apart both sides of grooved of described cucurbit shape of the arc core of the arc core of described the first curved portions and described the second curved portions, and a pair of described the first curved portions between distance be greater than all the time the distance between a pair of described the second curved portions.
In embodiment, on the shaft section of described home roll, described bottom land is arc, V-shape or straight line therein.
In embodiment, the 1.3-4.0 that the groove depth of described wire casing is described cutting steel wire linear diameter doubly therein.
In embodiment, the groove of described wire casing top also offers the bayonet part of inside smooth contraction therein, and the width of described bayonet part is identical with the diameter of described cutting of steel silk thread.
In embodiment, the 1.2-1.4 that the ultimate range between a pair of described the first curved portions is described cutting steel wire linear diameter doubly therein.
In embodiment, between described wire casing, equidistantly arrange therein.
In embodiment, the spacing between adjacent described wire casing is 0.25mm-1.00mm therein.
Above-mentioned multi-wire cutting machine home roll has the wire casing grooved that the bottom land sulculus pushes up large inverse gourd shaped shape, when the cutting of steel silk thread is fixed in the inside of this wire casing, between wire casing and cutting of steel silk thread, smooth arc-shaped surface contacts, therefore, in the process that runs up of cutting of steel silk thread, the cutting of steel silk thread can not damage grooved, thereby guarantees that crystal is unlikely to produce the stria scratched in slicing processes.After the cutting of steel silk thread is worn down to a certain degree, factor due to its tensile force, can automatically drop to from bottom land on the smooth arc surface close to, thereby stable on the online groove of assurance cutting of steel silk thread, can not produce when beating, also can guarantee the fixing position operation on trunnion axis on home roll of cutting of steel silk thread, thereby reduced crystal ingot frequent probability that stria, thick useless, the bad problem such as integral thickness deviation (TTV) is large occur in slicing processes, improved the cutting yield of wafer.In addition, there is the home roll of this wire casing grooved in During Process of Long-term Operation, the chip produced between itself and cutting of steel silk thread can be directed to the bottom of inverse gourd shaped wire casing in time, be unlikely to be deposited in wire casing inside wire casing and cutting of steel silk thread are produced to secondary grinding destruction, thereby greatly increase the service life of home roll and cutting of steel silk thread, reduce use cost.
The accompanying drawing explanation
Fig. 1 is the multi-wire cutting machine home roll structural front view;
The wire casing structure enlarged drawing of the multi-wire cutting machine home roll that Fig. 2 is traditional design;
The wire casing structure enlarged drawing of the multi-wire cutting machine home roll that Fig. 3 is embodiment 1;
The wire casing structure enlarged drawing of the multi-wire cutting machine home roll that Fig. 4 is embodiment 2;
The wire casing structure enlarged drawing of the multi-wire cutting machine home roll that Fig. 5 is embodiment 3;
The wire casing structure enlarged drawing of the multi-wire cutting machine home roll that Fig. 6 is embodiment 4;
The wire casing structure enlarged drawing of the multi-wire cutting machine home roll that Fig. 7 is embodiment 5;
The wire casing structure enlarged drawing of the multi-wire cutting machine home roll that Fig. 8 is embodiment 6.
The specific embodiment
Please refer to the drawing 1, a kind of multi-wire cutting machine home roll structural representation in the present embodiment, be provided with on home roll 100 and somely be parallel to each other between each wire casing 110 for the fixing closed annular wire casing 110 of cutting of steel silk thread 800, and equidistantly arrange.Spacing between adjacent wire casing 110 is 0.25mm-1.00mm.
There is the groove top 111 of close home roll 100 external diameters on wire casing 110 and push up 111 relative bottom lands 112 with groove.The groove depth H that vertical range between its middle slot top 111 and bottom land 112 is wire casing.In order to prevent the extreme wire jumper problem produced due to extremely beating of cutting of steel silk thread 800, the 1.3-4.0 that the groove depth H of this wire casing is cutting of steel silk thread 800 diameters doubly.With the V-shaped line groove difference of conventional art, be that wire casing is formed with the grooved that bottom land 112 sulculuses push up 111 large inverse gourd shaped shapes on the shaft section of home roll 100.
When cutting of steel silk thread 800 is fixed in the inside of this wire casing, because shiny surface between this wire casing and cutting of steel silk thread 800 contacts, in the process that runs up of cutting of steel silk thread 800, can not damage the wire casing grooved, thereby guarantee that crystal is unlikely to produce the stria scratched in slicing processes.After cutting of steel silk thread 800 is worn down to a certain degree, because cutting of steel silk thread 800 is stretched in the factor of the tensile force on home roll 100, can automatically drop to from bottom land on the smooth arc surface close to, thereby guaranteeing that cutting of steel silk thread 800 is stable on wire casing, when can not producing cutting of steel silk thread 800 and beating, also can guarantee cutting of steel silk thread 800 fixing position operation on home roll 100, make it positioning precision and improve.Thereby can eliminate due to swing on the trunnion axis large problem of integral thickness deviation (TTV) of the crystal bar processing that causes of cutting of steel silk thread 800.
In addition, there is the home roll 100 of this wire casing grooved in During Process of Long-term Operation, the chip produced between itself and cutting of steel silk thread 800 can be directed to the bottom of inverse gourd shaped wire casing in time, be unlikely to be deposited in wire casing inside wire casing and cutting of steel silk thread 800 are produced to secondary grinding destruction, thereby greatly increase the service life of home roll 100 and cutting of steel silk thread 800, reduce use cost.
The specific embodiment of the wire casing grooved of above-mentioned inverse gourd shaped shape is described below:
Embodiment 1:
Please refer to the drawing 3, on the shaft section of home roll, wire casing 210 from groove top 211 to bottom land 212 be disposed with a pair of line part 213, with smooth the first excessive curved portions 214 of each line part 213, with smooth the second excessive curved portions 215 of the first curved portions 214 and with the smooth excessive bottom land curved portions 216 of the second curved portions 215; It is axial symmetry that a pair of line part 213, a pair of the first curved portions 214, a pair of the second curved portions 215 and bottom land curved portions 216 be take the center line of wire casing 210; The both sides of wire casing 210 grooveds of the arc core separation cucurbit shape of the arc core of the first curved portions 214 and the second curved portions 215, and the distance between a pair of the first curved portions 214 is greater than the distance between a pair of the second curved portions 215 all the time.In preferred version, the 1.2-1.4 that the ultimate range between a pair of the first curved portions 214 is cutting of steel silk thread 800 diameters doubly.
Adopt the wire casing 210 in embodiment 1, can find out on the shaft section of home roll from wire casing 210, between the wire casing of falling the calabash shape 210 and cutting of steel silk thread 800, camber line contacts, so cutting of steel silk thread 800 can be positioned at stably to wire casing 210 inside.In addition, this wire casing 210 also has the line part 213 that can retrain 800 axial wobbles of cutting of steel silk thread, therefore strengthens the stability that cutting of steel silk thread 800 is fixed on the inside of wire casing 210.Operative constraint is played in the axial wobble that cutting steel wire 200 is run up in process, thereby can avoid producing stria on silicon crystal bar.
Wherein, in the bottom land curved portions 216 of bottom land 212, also can be substituted by other structures, as V-arrangement, the shapes such as straight line, get final product so long as can make this bottom land meet in process of production the requirement that is easy to processing.
Embodiment 2:
Please refer to the drawing 4, on the shaft section of home roll, wire casing 310 from groove top 311 to bottom land 312 be disposed with a pair of line part 313, with smooth excessive the first curved portions 314 of each line part 313, with smooth excessive the second curved portions 315 of the first curved portions 314 and the bottom land horizontal part 316 be connected with the second curved portions 315; It is axial symmetry that a pair of line part 313, a pair of the first curved portions 314, a pair of the second curved portions 315 and bottom land horizontal part 316 be take the center line of wire casing 310; Wire casing 310 both sides of the arc core of the arc core of the first curved portions 314 and the second curved portions 315 separation Pear-Shaped, and a pair of the first curved portions 314 between distance be greater than all the time the distance between a pair of the second curved portions 315.
Embodiment 3:
Please refer to the drawing 5, on the shaft section of home roll, wire casing 410 from groove top 411 to bottom land 412 be disposed with a pair of the first curved portions 413, with smooth the second excessive curved portions 414 of the first curved portions 413 and with the smooth excessive bottom land curved portions 415 of the second curved portions 414; It is axial symmetry that a pair of the first curved portions 413, a pair of the second curved portions 414 and bottom land curved portions 415 be take the center line of wire casing 410; Wire casing 410 both sides of the arc core of the arc core of the first curved portions 413 and the second curved portions 414 separation Pear-Shaped, and a pair of the first curved portions 413 between distance be greater than all the time the distance between a pair of the second curved portions 414.
Adopt the wire casing 410 in embodiment 3, can find out on the shaft section of home roll from wire casing 410, cutting of steel silk thread 800 is inclusive in the interior volume that a pair of the first curved portions 413 surrounds, and with the first curved portions 413 between camber line contact.The wire casing 410 of this structure can be positioned at cutting of steel silk thread 800 inside of wire casing 410 fully.
Embodiment 4:
Please refer to the drawing 6, on the shaft section of home roll, wire casing 510 from groove top 511 to bottom land 512 be disposed with a pair of the first curved portions 513, with smooth excessive the second curved portions 514 of the first curved portions 513 and the bottom land horizontal part 515 be connected with the second curved portions 514; It is axial symmetry that a pair of the first curved portions 513, a pair of the second curved portions 514 and bottom land horizontal part 515 be take the center line of wire casing 510; Wire casing 510 both sides of the arc core Pear-Shaped of the arc core of the first curved portions 513 and the second curved portions 514, and a pair of the first curved portions 513 between distance be greater than the distance between a pair of the second curved portions 514 all the time.
At cutting of steel silk thread 800 fast in the process of operation, cutting of steel silk thread 800 can be stuck in to wire casing in order to ensure the groove top of wire casing inner and be unlikely to produce the wire jumper problem, also offer the bayonet part of inside smooth contraction on the groove top of wire casing.Wherein, the width of bayonet part is identical with the diameter of cutting of steel silk thread 800, that is to say, the width of bayonet part just can be installed into wire casing inside with cutting of steel silk thread 800 and be advisable.
According to above-mentioned distortion, the wire casing structure enlarged drawing of the wire casing embodiment 5 shown in please refer to the drawing 7, it backs down at the groove of wire casing 610 bayonet part 617 that is provided with inside smooth contraction on the basis of embodiment 1.The wire casing structure enlarged drawing of wire casing embodiment 6 shown in please refer to the drawing 8, it backs down at the groove of wire casing 710 bayonet part 717 that is provided with inside smooth contraction on the basis of embodiment 3.
To sum up, the multi-wire cutting machine home roll of introducing in the present embodiment has the following advantages:
1, can guarantee that cutting of steel silk thread 800 is stable on wire casing: between the wire casing in this example and cutting of steel silk thread 800, smooth arc-shaped surface contacts, and when cutting of steel silk thread 800 runs up, can guarantee that cutting of steel silk thread 800 is stable on wire casing.
2, can guarantee that cutting steel wire continues higher positioning precision in long-term use procedure: the cutting steel wire guide wheel cell wall that can constantly wear and tear that running up in process, when the steel wire gauge wear, during to bottom land, the axial rate of depreciation of cutting steel wire will enlarge markedly.Traditional V-shaped line groove can't guarantee that the cutting of steel silk thread is because the wearing and tearing of wire casing produce lower positional precision, need to re-start fluting processing to guide wheel.And the home roll wire casing in the present embodiment has the second curved portions of inside contraction on the basis of the first curved portions, can guarantee that the cutting of steel silk thread keeps higher positioning precision in long-term use procedure.
3, prevent the inner wire jumper problem that produces of the online groove of cutting of steel silk thread: the wire casing in this example, also offer the bayonet part of inside smooth contraction on the groove top, the width of bayonet part can just enough be installed into wire casing inside with the cutting of steel silk thread and be advisable, thereby effectively prevents from cutting wire in the inner problem that produces wire jumper of wire casing.
4, can play effect of contraction to the axial wobble of cutting of steel silk thread: also there is line part on the wire casing in this example, can retrain the axial wobble of cutting of steel silk thread.
5, can increase the service life of home roll and cutting of steel silk thread, reduce use cost: the wire casing of the present embodiment at home roll in During Process of Long-term Operation, its chip produced between the cutting of steel silk thread can be directed to the bottom of inverse gourd shaped wire casing in time, be unlikely to be deposited in wire casing inside wire casing and cutting of steel silk thread are produced to secondary grinding destruction, thereby greatly increase the service life of home roll and cutting of steel silk thread, reduce use cost.
The stress that 6, can rationally disperse wire casing: the cutting of steel silk thread is in the process of running up, usually in the angle of wire casing, can exist larger stress to concentrate, traditional V-shaped line groove is overall structure, its tip of V-arrangement at bottom land needs the tensile force that carrying is larger in process of production, therefore is easy to tear equivalent damage.And in embodiment, can adopt transition between the first arc sections, the second arc sections and bottom land to connect, and cross large bearing capacity thereby reduce between cutting of steel silk thread and bottom land, thereby realize the stress dispersion of bottom land, improve the service life of home roll.
The above embodiment has only expressed several embodiment of the present utility model, and it describes comparatively concrete and detailed, but can not therefore be interpreted as the restriction to the utility model the scope of the claims.It should be pointed out that for the person of ordinary skill of the art, without departing from the concept of the premise utility, can also make some distortion and improvement, these all belong to protection domain of the present utility model.Therefore, the protection domain of the utility model patent should be as the criterion with claims.
Claims (9)
1. a multi-wire cutting machine home roll, it is characterized in that, on described home roll, be provided with some for the fixing closed annular wire casing of cutting of steel silk thread, between described wire casing, be parallel to each other, described wire casing has near the groove top of described home roll external diameter and pushes up relative bottom land with described groove, and described wire casing has the grooved that the bottom land sulculus pushes up large inverse gourd shaped shape on the shaft section of described home roll.
2. multi-wire cutting machine home roll according to claim 1, it is characterized in that, on the shaft section of described home roll, described wire casing from described groove top to described bottom land be disposed with a pair of line part, with smooth the first excessive curved portions of each described line part and with smooth the second excessive curved portions of described the first curved portions; It is axial symmetry that a pair of described line part, a pair of described the first curved portions, a pair of described the second curved portions be take the center line of described wire casing; The live apart both sides of grooved of described cucurbit shape of the arc core of the arc core of described the first curved portions and described the second curved portions, and the distance between a pair of described the first curved portions is greater than the distance between a pair of described the second curved portions all the time.
3. multi-wire cutting machine home roll according to claim 1, it is characterized in that, on the shaft section of described home roll, described wire casing from described groove top to described bottom land be disposed with a pair of the first curved portions, with smooth the second excessive curved portions of described the first curved portions; It is axial symmetry that a pair of described the first curved portions, a pair of described the second curved portions be take the center line of described wire casing; The live apart both sides of grooved of described cucurbit shape of the arc core of the arc core of described the first curved portions and described the second curved portions, and a pair of described the first curved portions between distance be greater than all the time the distance between a pair of described the second curved portions.
4. according to the described multi-wire cutting machine home roll of claim 2 or 3, it is characterized in that, on the shaft section of described home roll, described bottom land is arc, V-shape or straight line.
5. according to the described multi-wire cutting machine home roll of claim 2 or 3, it is characterized in that, the 1.2-1.4 that the ultimate range between a pair of described the first curved portions is described cutting steel wire linear diameter doubly.
6. multi-wire cutting machine home roll according to claim 1, is characterized in that, the groove top of described wire casing also offers the bayonet part of inside smooth contraction, and the width of described bayonet part is identical with the diameter of described cutting of steel silk thread.
7. multi-wire cutting machine home roll according to claim 1, is characterized in that, the 1.3-4.0 that the groove depth of described wire casing is described cutting steel wire linear diameter doubly.
8. multi-wire cutting machine home roll according to claim 1, is characterized in that, between described wire casing, equidistantly arranges.
9. multi-wire cutting machine home roll according to claim 1, is characterized in that, the spacing between adjacent described wire casing is 0.25mm-1.00mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320455879.XU CN203381055U (en) | 2013-07-29 | 2013-07-29 | Main roll of multi-wire sawing machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320455879.XU CN203381055U (en) | 2013-07-29 | 2013-07-29 | Main roll of multi-wire sawing machine |
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| Publication Number | Publication Date |
|---|---|
| CN203381055U true CN203381055U (en) | 2014-01-08 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320455879.XU Expired - Lifetime CN203381055U (en) | 2013-07-29 | 2013-07-29 | Main roll of multi-wire sawing machine |
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| CN (1) | CN203381055U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103991141A (en) * | 2014-04-28 | 2014-08-20 | 阳光硅谷电子科技有限公司 | Multi-wire cutting guide wheel grooving technology based on high-speed steel knives |
| CN104118067A (en) * | 2014-07-08 | 2014-10-29 | 天津英利新能源有限公司 | Wire saw cutting machine tool guide wheel and manufacturing method of guide wheel wire grooves |
-
2013
- 2013-07-29 CN CN201320455879.XU patent/CN203381055U/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103991141A (en) * | 2014-04-28 | 2014-08-20 | 阳光硅谷电子科技有限公司 | Multi-wire cutting guide wheel grooving technology based on high-speed steel knives |
| CN104118067A (en) * | 2014-07-08 | 2014-10-29 | 天津英利新能源有限公司 | Wire saw cutting machine tool guide wheel and manufacturing method of guide wheel wire grooves |
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Granted publication date: 20140108 |
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| CX01 | Expiry of patent term |