CN103969475A - Probe card device - Google Patents
Probe card device Download PDFInfo
- Publication number
- CN103969475A CN103969475A CN201410163458.9A CN201410163458A CN103969475A CN 103969475 A CN103969475 A CN 103969475A CN 201410163458 A CN201410163458 A CN 201410163458A CN 103969475 A CN103969475 A CN 103969475A
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- CN
- China
- Prior art keywords
- probe
- probe card
- card device
- groove
- contact hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
The invention provides a probe card device which comprises a probe card and a probe card platform. A groove is formed in the probe card platform and used for containing the probe card. The outer side of the probe card is provided with at least one contact hole in order to contain or move the probe card, and the contact hole is communicated with the groove. According to the probe card device, the probe card can be conveniently moved, and tests can be conducted conveniently.
Description
Technical field
The present invention relates to the chip testing field in semiconductor fabrication, relate in particular to the probe card device for IC chip test.
Background technology
Probe card device is the important proving installation in integrated circuit technology field, is applied to before integrated circuit not yet encapsulates, and does functional test for Semiconductor substrate by probe.Probe is responsible for the electrical connection between test macro and integrated circuit (IC) chip.In probe, have a lot of probes, in the time of test, the probe in probe contacts with the weld pad in Semiconductor substrate, to the output valve of Semiconductor substrate output signal or measuring semiconductor substrate signal.
Existing probe card device generally includes probe (Prober Card) and probe card platform (CardHolder), please refer to the structural representation of the probe card device of the prior art shown in Fig. 1.In probe card platform 20, be formed with groove, described groove is used for placing probe 10, the shape and size of described groove are consistent with the shape and size of described probe 10, so that just probe 10 is put into probe card platform 20, the edge of probe 10 and recess sidewall are just in time adjacent to.
The defect of prior art is, because probe 10 is just put into probe card platform 20, to make the movement of probe 10 and test convenient not.
Summary of the invention
The problem that the present invention solves is to provide a kind of probe card device, easily traveling probe card and testing.
For addressing the above problem, the invention provides a kind of probe card device, comprise probe and probe card platform, described probe card platform has groove, described groove is used for placing described probe, the arranged outside of described probe has at least one contact hole so that place or mobile described probe, and described contact hole is connected with described groove.
Alternatively, the number of described contact hole is multiple, along the one week symmetry arrangement in outside of described probe.
Alternatively, described groove be shaped as a kind of in semicircle, circle, ellipse or combination wherein.
Alternatively, described groove be shaped as semicircle, the diameter range of described groove is 2 centimetres, the outside of described semicircular diameter and described probe is tangent.
Alternatively, described groove utilizes cutting technique to cut formation to described probe station.
Compared with prior art, the present invention has the following advantages:
In the outside of described probe, (along described groove one week) is provided with at least one contact hole so that place or mobile described probe station to probe card device provided by the invention, is convenient to traveling probe card and tests.
Brief description of the drawings
Fig. 1 is the structural representation of the probe card device of prior art;
Fig. 2 is the structural representation of the probe card device of one embodiment of the invention.
Embodiment
With reference to figure 1, the defect of prior art is, because probe 10 is just put into probe card platform 20, to make the movement of probe 10 and test convenient not.
For addressing the above problem a kind of probe card device, comprise probe and probe card platform, described probe card platform has groove, described groove is used for placing described probe, the arranged outside of described probe has at least one contact hole so that place or mobile described probe, and described contact hole is connected with described groove.
Below in conjunction with specific embodiment, technical scheme of the present invention is described in detail, for technical scheme of the present invention is described better, please refer to the structural representation of the probe card device of the one embodiment of the invention shown in Fig. 2.
In the groove (not shown) of probe card platform 200, be provided with probe 100, within one week, have 4 contact holes 300 along the outside of probe 100.Owing to being provided with this contact hole 300, make the movement of probe 100.The number of described contact hole 300 is not limited to described in the present embodiment, and in other embodiments, the number of described contact hole 300 can be for still less or more.
The shape of described contact hole 300 can be geometric configuration or the irregular shape of any rule, such as the shape of described contact hole 300 can be rectangle, the shape such as square, circular, oval, but consider the difficulty of processing and fabricating and reduce the stress of probe card platform 200, preferably, described groove be shaped as a kind of in semicircle, circle, ellipse or combination wherein.As an embodiment, described groove be shaped as semicircle, the diameter range of described groove is 2 centimetres, the outside of described semicircular diameter and described probe 100 is tangent.
Described contact hole 300 utilizes cutting technique to cut formation to described probe station.The stress forming in probe card platform 200 in order to reduce cutting technique, comparatively preferred, described contact hole 300 is along the one week symmetry arrangement in outside of described probe 100.
To sum up, in the outside of described probe, (along described groove one week) is provided with at least one contact hole so that place or mobile described probe station to probe card device provided by the invention, is convenient to traveling probe card and tests.
Probe card device provided by the invention has at least one contact hole so that place or mobile described probe station in the arranged outside along described groove of described probe station; be convenient to traveling probe card and test therefore; above-mentioned preferred embodiment is only explanation technical conceive of the present invention and feature; its object is to allow person skilled in the art can understand content of the present invention and implement according to this, can not limit the scope of the invention with this.All equivalences that Spirit Essence is done according to the present invention change or modify, within all should being encompassed in protection scope of the present invention.
Claims (5)
1. a probe card device, comprise probe and probe card platform, described probe card platform has groove, described groove is used for placing described probe, it is characterized in that, the arranged outside of described probe has at least one contact hole so that place or mobile described probe, and described contact hole is connected with described groove.
2. probe card device as claimed in claim 1, is characterized in that, the number of described contact hole is multiple, along the one week symmetry arrangement in outside of described probe.
3. probe card device as claimed in claim 1, is characterized in that, described groove be shaped as a kind of in semicircle, circle, ellipse or combination wherein.
4. probe card device as claimed in claim 3, is characterized in that, described groove be shaped as semicircle, the diameter range of described groove is 2 centimetres, the outside of described semicircular diameter and described probe is tangent.
5. probe card device as claimed in claim 1, is characterized in that, described groove utilizes cutting technique to cut formation to described probe station.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410163458.9A CN103969475A (en) | 2014-04-22 | 2014-04-22 | Probe card device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410163458.9A CN103969475A (en) | 2014-04-22 | 2014-04-22 | Probe card device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103969475A true CN103969475A (en) | 2014-08-06 |
Family
ID=51239222
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410163458.9A Pending CN103969475A (en) | 2014-04-22 | 2014-04-22 | Probe card device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103969475A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108089116A (en) * | 2017-12-01 | 2018-05-29 | 上海华岭集成电路技术股份有限公司 | A kind of rotatable probe card |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03163364A (en) * | 1989-11-22 | 1991-07-15 | Texas Instr Japan Ltd | Device testing apparatus |
| CN1779468A (en) * | 2004-11-19 | 2006-05-31 | 上海华虹Nec电子有限公司 | Wire-connected circular probe chunck basilar palte |
| CN1779467A (en) * | 2004-11-19 | 2006-05-31 | 上海华虹Nec电子有限公司 | Wire-connected circular probe chunck basilar plate |
| CN201322761Y (en) * | 2008-12-01 | 2009-10-07 | 中芯国际集成电路制造(上海)有限公司 | Supporting plate for probe cards |
| CN101782598A (en) * | 2009-01-15 | 2010-07-21 | 京元电子股份有限公司 | Probe adjustment platform of vertical probe card |
| CN202837352U (en) * | 2012-10-11 | 2013-03-27 | 中芯国际集成电路制造(北京)有限公司 | Probe card mounting table and probe measuring device |
-
2014
- 2014-04-22 CN CN201410163458.9A patent/CN103969475A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03163364A (en) * | 1989-11-22 | 1991-07-15 | Texas Instr Japan Ltd | Device testing apparatus |
| CN1779468A (en) * | 2004-11-19 | 2006-05-31 | 上海华虹Nec电子有限公司 | Wire-connected circular probe chunck basilar palte |
| CN1779467A (en) * | 2004-11-19 | 2006-05-31 | 上海华虹Nec电子有限公司 | Wire-connected circular probe chunck basilar plate |
| CN201322761Y (en) * | 2008-12-01 | 2009-10-07 | 中芯国际集成电路制造(上海)有限公司 | Supporting plate for probe cards |
| CN101782598A (en) * | 2009-01-15 | 2010-07-21 | 京元电子股份有限公司 | Probe adjustment platform of vertical probe card |
| CN202837352U (en) * | 2012-10-11 | 2013-03-27 | 中芯国际集成电路制造(北京)有限公司 | Probe card mounting table and probe measuring device |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108089116A (en) * | 2017-12-01 | 2018-05-29 | 上海华岭集成电路技术股份有限公司 | A kind of rotatable probe card |
| CN108089116B (en) * | 2017-12-01 | 2020-04-14 | 上海华岭集成电路技术股份有限公司 | Rotatable probe card |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20140806 |