CN103968746B - A kind of detection means for detecting quartz boat deformation - Google Patents
A kind of detection means for detecting quartz boat deformation Download PDFInfo
- Publication number
- CN103968746B CN103968746B CN201310028963.8A CN201310028963A CN103968746B CN 103968746 B CN103968746 B CN 103968746B CN 201310028963 A CN201310028963 A CN 201310028963A CN 103968746 B CN103968746 B CN 103968746B
- Authority
- CN
- China
- Prior art keywords
- quartz boat
- detection means
- pointer
- transmission shaft
- deformation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The present invention provides a kind of detection means for detecting quartz boat deformation, and the detection means is included：Transmission shaft on the table is vertically arranged, it can be moved up and down along the side wall of workbench；At least root pointer between the transmission shaft and quartz boat is arranged on, one end of the pointer is fixedly installed on transmission shaft, the other end is in contact with the wherein root post on quartz boat；And it is arranged on the dial plate on the pointer.The present invention extremely quick and convenient accurately can detect whether quartz boat expands deformation because of high temperature, and silicon chip improves productivity and quality because colliding, dropping and the situation generation of fragmentation damage in transmit process caused by effectively reducing therefore.
Description
Technical field
The present invention is applied to the semiconductor processing equipments such as atmospheric pressure stove, is related to a kind of for detecting what whether quartz boat deformed
Detection means.
Background technology
In semiconductor fabrication, quartz boat（quartz boat）It is for by multiple silicon chips, fixed placement exists with interval
Atmospheric pressure stove（AP FNC, atmosphere pressure furnace）Etc. a kind of device in processing equipment.
It is as shown in Figure 1 the structural representation of the interior quartz boat for being used of atmospheric pressure stove in the prior art, the quartz boat 2
It is vertically arranged in the workbench in atmospheric pressure stove（Bench）On 1.The quartz boat 2 includes some columns 22, is respectively separated and is arranged on
The outer wall surrounding of quartz boat 2.Offering for being spaced on inner surface in the quartz boat 2 and the vertical direction along quartz boat 2 is more
Individual draw-in groove 21.Each equal level of draw-in groove 21 is opened on quartz boat 2, therefore multiple draw-in grooves 21 are parallel to each other.By transmitting machinery
After the devices such as hand to be sent into atmospheric pressure stove by silicon wafer horizontal, the edge of each silicon chip can correspond to each card for snapping into different height
In groove 21, can be avoided when being processed inter-adhesive between adjacent silicon chip.
However, being generally, with 850 DEG C~1050 DEG C of high temperature, silicon chip to be diffused or is aoxidized etc. in atmospheric pressure stove
Reason.Therefore, because long-time is in the hot environment in stove, quartz boat 2 is susceptible to deformation after using a period of time,
Especially the gap shrinks of each draw-in groove 21 can be caused to deform because of the expansion of quartz boat 2 so that between each draw-in groove 21 no longer
It is arranged in parallel.In this case, if push silicon chip according further to the parameter of original setting, silicon chip edge very likely can be because
It is not exposed to draw-in groove and drops, or may be chipping because of the dilation for colliding quartz boat 2, so that
The problem of the damages such as silicon chip or quartz boat is caused to occur.
The content of the invention
It is an object of the invention to provide a kind of detection means for detecting quartz boat deformation, being capable of extremely quick and convenient essence
True detects whether quartz boat expands deformation because of high temperature, and silicon chip is in transmit process caused by effectively reducing therefore
It is middle because collide, drop and fragmentation damage situation occur, improve productivity and quality.
In order to achieve the above object, the present invention provides a kind of detection means for detecting quartz boat deformation, and it is arranged on
On workbench in atmospheric pressure stove, the detection means is included：Transmission shaft on the table is vertically arranged, it can be along work
The side wall of platform is moved up and down；At least root pointer between the transmission shaft and quartz boat is arranged on, one end of the pointer is consolidated
Surely it is arranged on transmission shaft, the other end is in contact with the wherein root post on quartz boat；And be arranged on the pointer
Dial plate.
In a preferred embodiment of the invention, the detection means includes two pointers of angled setting, every
Wherein one end of pointer is fixedly installed on transmission shaft, and the other end per root pointer then stands with wherein two on quartz boat respectively
Post is in contact.
Detection means for detecting quartz boat deformation provided by the present invention, being capable of extremely quick and convenient accurate detection
Go out whether quartz boat expands deformation because of high temperature, effectively reduce therefore caused by silicon chip in transmit process because touching
Hit, drop and the situation generation of fragmentation damage, improve productivity and quality.
Brief description of the drawings
Fig. 1 is the structural representation of quartz boat of the prior art；
Fig. 2 is the detection means for detecting quartz boat deformation of offer in the present invention；
Fig. 3 is the lateral plan of Fig. 2.
Specific embodiment
Below in conjunction with Fig. 2 and Fig. 3, by preferred specific embodiment, the present invention is described in detail.
As shown in Figures 2 and 3, it is provided by the present invention for detecting that the detection means of quartz boat deformation is arranged on atmospheric pressure
On workbench 1 in stove, the detection means is included：The transmission shaft 3 on workbench 1 is vertically arranged in, it can be along workbench 1
Side wall move up and down；It is arranged at least a root pointer 4, one end of the pointer 4 between the transmission shaft 3 and quartz boat 2
It is fixedly installed on transmission shaft 3, the other end is in contact with the wherein root post 22 on quartz boat 2；And it is arranged on the finger
Dial plate 5 on pin 4.
As shown in figure 3, in the present embodiment, the detection means includes two pointers 4 of angled setting, per root pointer
4 wherein one end is fixedly installed on transmission shaft 3, and the other end per root pointer 4 then stands with wherein two on quartz boat 2 respectively
Post 22 is in contact.
Every time start atmospheric pressure stove, it is necessary to inside it transmit silicon chip when, can first using the present invention provide detection fill
Put carries out deformation detection to quartz boat 2.Specifically detection process is：Transmission shaft 3 is moved up and down along the side wall of workbench 1, its drive
Pointer 4 is synchronous to be moved up and down, and when the end of pointer 4 sequentially passes through the multiple draw-in grooves 21 on quartz boat 2 along column 22, is often passed through
A draw-in groove 21 is crossed, dial plate 5 can produce a reading.If quartz boat 2 does not deform, the gap reading of each draw-in groove 21
Should be identical, now show between each draw-in groove 21 it is parallel, then now can carry out follow-up silicon chip according to normal condition
Transmit and processed.And work as it is actually detected during find that the reading of each draw-in groove 21 has differences, then show quartz boat 2 certain
A little positions there occurs dilatancy, cause the gap shrinks between draw-in groove 21, no longer parallel to each other, in follow-up transmission silicon chip
When should note adjusting parameter.
Further, in the present embodiment, due to being provided with the pointer 4 of detection in the both sides of the column 22 of quartz boat 2,
Therefore, it is possible to the problem on deformation of more comprehensive detection quartz boat 2.
Detection means for detecting quartz boat deformation provided by the present invention, being capable of extremely quick and convenient accurate detection
Go out whether quartz boat expands deformation because of high temperature, effectively reduce therefore caused by silicon chip in transmit process because touching
Hit, drop and the situation generation of fragmentation damage, improve productivity and quality.
Although present disclosure is discussed in detail by above preferred embodiment, but it should be appreciated that above-mentioned
Description is not considered as limitation of the present invention.After those skilled in the art have read the above, for of the invention
Various modifications and substitutions all will be apparent.Therefore, protection scope of the present invention should be limited to the appended claims.
Claims (1)
1. it is a kind of for detecting the detection means that quartz boat deforms, it is characterised in that the detection means is included：
It is vertically arranged in workbench（1）On transmission shaft（3）, it can be along workbench（1）Side wall move up and down；
It is arranged on the transmission shaft（3）With quartz boat（2）Between two root pointers（4）, and two root pointers（4）Angled setting,
Per root pointer（4）One end be fixedly installed on transmission shaft（3）On, per root pointer（4）The other end respectively with quartz boat（2）On
A wherein root post（22）It is in contact；
It is arranged on the pointer（4）On dial plate（5）.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310028963.8A CN103968746B (en) | 2013-01-25 | 2013-01-25 | A kind of detection means for detecting quartz boat deformation |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310028963.8A CN103968746B (en) | 2013-01-25 | 2013-01-25 | A kind of detection means for detecting quartz boat deformation |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103968746A CN103968746A (en) | 2014-08-06 |
| CN103968746B true CN103968746B (en) | 2017-06-06 |
Family
ID=51238552
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310028963.8A Active CN103968746B (en) | 2013-01-25 | 2013-01-25 | A kind of detection means for detecting quartz boat deformation |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103968746B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106052518A (en) * | 2016-08-16 | 2016-10-26 | 常州亿晶光电科技有限公司 | Quartz boat testing tool |
| CN114739273B (en) * | 2022-03-08 | 2024-05-10 | 深圳市捷佳伟创新能源装备股份有限公司 | Gauge |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101799268A (en) * | 2010-04-19 | 2010-08-11 | 常州亿晶光电科技有限公司 | Device for testing deformation amount of panel of solar module |
| CN201811915U (en) * | 2010-10-21 | 2011-04-27 | 上海筑邦测控科技有限公司 | Test system for initial defect of specimen |
| CN102230773A (en) * | 2011-04-13 | 2011-11-02 | 江苏正信新能源科技集团有限公司 | Device for detecting concave/convex defect on surface of battery laminate |
| CN102680322A (en) * | 2012-05-24 | 2012-09-19 | 天津英利新能源有限公司 | Silicon wafer detector |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2264896Y (en) * | 1996-10-31 | 1997-10-15 | 鹤壁派克电气有限公司 | Perpendicularity visual measuring instrument |
| JP2001074625A (en) * | 1999-09-07 | 2001-03-23 | Showa Electric Wire & Cable Co Ltd | Device for measuring amount of shear deformation |
| CN102759322A (en) * | 2012-07-18 | 2012-10-31 | 安徽池州家用机床股份有限公司 | Testing device for checking verticality of workpieces |
-
2013
- 2013-01-25 CN CN201310028963.8A patent/CN103968746B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101799268A (en) * | 2010-04-19 | 2010-08-11 | 常州亿晶光电科技有限公司 | Device for testing deformation amount of panel of solar module |
| CN201811915U (en) * | 2010-10-21 | 2011-04-27 | 上海筑邦测控科技有限公司 | Test system for initial defect of specimen |
| CN102230773A (en) * | 2011-04-13 | 2011-11-02 | 江苏正信新能源科技集团有限公司 | Device for detecting concave/convex defect on surface of battery laminate |
| CN102680322A (en) * | 2012-05-24 | 2012-09-19 | 天津英利新能源有限公司 | Silicon wafer detector |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103968746A (en) | 2014-08-06 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103646893B (en) | Wafer defect detection method | |
| CN101442018B (en) | Detection method for silicon wafer warpage degree | |
| CN103968746B (en) | A kind of detection means for detecting quartz boat deformation | |
| CN104538331A (en) | Device and method for processing wafer warping | |
| CN102412168A (en) | Wafer defect defection method and system | |
| CN204462588U (en) | A kind of lighting jig | |
| SG156539A1 (en) | A system and process for dicing integrated circuits | |
| CN101026116A (en) | Wafer detecting device and wafer detecting method | |
| CN103465642A (en) | Marking apparatus | |
| CN103646886A (en) | A wafer working method for monitoring defect conditions of multi-cavity devices | |
| CN207335651U (en) | A kind of simple flatness test device | |
| JP2014113662A (en) | Apparatus and method for drilling substrate | |
| CN108971265B (en) | A kind of unbalance loading detection method of multiple position press | |
| CN107399714A (en) | A kind of silicon chip and the method for sapphire sheet Direct Bonding | |
| CN102136438B (en) | Method for quickly detecting segment difference height between stacked frames of chip | |
| CN104022055A (en) | Deflection detecting device and method for mechanical arm of machine table | |
| CN204537990U (en) | A kind of substrate detection apparatus | |
| US20220005721A1 (en) | Method of aligning wafer | |
| CN105365052B (en) | Cutting device and method for cutting brittle material substrate by cutting device | |
| CN104582284B (en) | The preparation method of package substrate | |
| US10534353B2 (en) | System and method to reduce pre-back-grinding process defects | |
| CN204069470U (en) | A kind of structure detecting the anti-welding aligning accuracy of high-precision circuit board | |
| CN102520335A (en) | Test method of wafer | |
| KR20160078217A (en) | Scribe method and scribe apparatus | |
| CN103559566A (en) | Dispatching method for controlling process machine through defect scan result |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |