CN106052518A - Quartz boat testing tool - Google Patents
Quartz boat testing tool Download PDFInfo
- Publication number
- CN106052518A CN106052518A CN201610673403.1A CN201610673403A CN106052518A CN 106052518 A CN106052518 A CN 106052518A CN 201610673403 A CN201610673403 A CN 201610673403A CN 106052518 A CN106052518 A CN 106052518A
- Authority
- CN
- China
- Prior art keywords
- quartz boat
- testing
- cubing
- positioning
- quartz
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/0002—Arrangements for supporting, fixing or guiding the measuring instrument or the object to be measured
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention relates to the technical field of quartz board testing equipment, and especially relates to a quartz boat testing tool. A quartz boat is provided with a plurality of clamping grooves at equal intervals. The testing tool comprises a bottom plate and two positioning seats on the bottom plate. A reference groove which is used for locating the quartz boat is disposed above the positioning seats. A part, located between the two positioning seats, of the bottom plate is provided with a detection mechanism. The detection mechanism comprises two vertical columns, and testing slide pieces which are matched with the clamping grooves are disposed between the two vertical columns in a sliding manner. The testing tool improves the testing efficiency of the quartz boat, provides a unified judgment standard for automation equipment, facilitates the adjustment of the automation equipment during deviation, and prevents the quartz boat testing on the automation equipment from damaging a silicon chip and affecting the productivity.
Description
Technical field
The present invention relates to quartz boat detection equipment technical field, especially relate to a kind of quartz boat cubing.
Background technology
Solaode is as emerging clean reproducible energy at present, is widely applied very much in life.Diffusion
Being a kind of critical process in manufacture of solar cells, the silicon chip carrier used in diffusion process is quartz boat, silicon slice loading
Mode is also present automatization's inserted sheet by original manual inserted sheet progress.So current quartz boat is proposed higher essence
Degree requirement, so when quartz boat is tried out need on film threading equipment repetition test, the longest, easily cause silicon chip damage and stone
English boat is damaged, have impact on normal production.And the quartz boat ratio that meets the equipment requirements of demand is relatively low.Because inserted sheet
Automation equipment have a lot of platform, it is impossible to confirmation is quartz boat precision or benchmark is not inconsistent, or deposits between multiple stage automation equipment
In difference, therefore needing a unified criterion between equipment and quartz boat, quartz boat cubing is the most in this context
At once raw.
Summary of the invention
The technical problem to be solved in the present invention is: have a lot of platform to solve the automation equipment of inserted sheet, it is impossible to confirmation is
Quartz boat precision or benchmark are not inconsistent, or the problem that there are differences between multiple stage automation equipment, now provide a kind of quartz boat
Cubing.
The technical solution adopted for the present invention to solve the technical problems is: a kind of quartz boat cubing, described quartz boat is first-class
Spacing is distributed some draw-in grooves, and this cubing includes base plate and two positioning seats being arranged on base plate, the top of described positioning seat
Offer the baseline trough for positioning quartz boat, described base plate is provided with testing agency between two described positioning seats；
Described testing agency includes two columns, and sliding to be provided with between two described columns matches with described draw-in groove
Inserted sheet.Fixing, by the detection slide plate in testing agency to quartz boat by quartz boat being placed in the baseline trough on positioning seat
On draw-in groove detect.
For enabling testing agency to check quartz boat the most faster, further, described testing agency has two,
Described testing agency lays respectively at positioning seat two ends.Manufacture quartz boat time, the draw-in groove on a quartz boat manufacture start and
Manufacture end or the most very standard, otherwise just head and the tail deviation is increasing, so by being respectively provided with a testing machine from beginning to end
Structure can quickly check quartz boat the most qualified.
Further, the outside of two described positioning seat one of which is fixed with auxiliary positioning plate.By auxiliary positioning plate
On the basis of, quartz boat can be made when cubing is fixed quartz boat to install quickly and easily and to put in place, improve the installation of quartz boat
Efficiency.
The invention has the beneficial effects as follows: quartz boat cubing of the present invention in use, by quartz boat is placed on positioning seat
On baseline trough in fixing, the detection slide plate in testing agency the draw-in groove on quartz boat is detected.The present invention improves
Examination boat efficiency, also provides a unified criterion to automation equipment, conveniently adjusts when deviation occurs in automation equipment,
Avoiding examination boat in automation equipment causes silicon chip damaged, the problem affecting production capacity.
Accompanying drawing explanation
The present invention is further described with embodiment below in conjunction with the accompanying drawings.
Fig. 1 is base and the structural representation of detent mechanism in quartz boat cubing of the present invention；
Fig. 2 is the front view of the inspection inserted sheet of quartz boat cubing of the present invention；
Fig. 3 is front view during quartz boat cubing of the present invention examination boat.
In figure: 1, base plate, 2, auxiliary positioning plate, 3, positioning seat, 301, baseline trough, 4, inspection slide plate, 5, column, 6, quartz
Boat.
Detailed description of the invention
Presently in connection with accompanying drawing, the present invention will be further described in detail.These accompanying drawings are the schematic diagram of simplification, only with
The basic structure of the illustration explanation present invention, therefore it only shows the composition relevant with the present invention.
Embodiment 1
As shown in Figure 1,2 and 3, a kind of quartz boat cubing, some draw-in groove is equidistantly distributed on described quartz boat 6, this inspection
Tool includes base plate 1 and two positioning seats 3 being arranged on base plate 1, and the opened above of described positioning seat 3 has for positioning quartz boat
The baseline trough 301 of 6, described base plate 1 is provided with testing agency between two described positioning seats 3；
Described testing agency includes two columns 5, and sliding to be provided with between two described columns 5 matches with described draw-in groove
Inspection slide plate 4.
Described testing agency has two, and described testing agency lays respectively at positioning seat 3 two ends.
The outside of two described positioning seat 3 one of which is fixed with auxiliary positioning plate 2.
Above-mentioned quartz boat cubing is when trying boat, and quartz boat 6 bottom surface has four footing, first needs to place quartz boat 6
On the positioning seat 3 of base plate 1, by the baseline trough 301 of the footing placement positioning seat 3 of quartz boat 6, and mobile quartz boat 6 and auxiliary
Location-plate 2 contacts, and completes the installation of quartz boat 6；When detection, two columns 5 offer and detects the cunning that slide plate 4 matches
Groove, slides in the chute of column 5 from top to bottom by inspection slide plate 4, is plugged in the draw-in groove on quartz boat 6 by inspection slide plate 4,
Then inspection slide plate 4 is extracted, finally observe the two ends draw-in groove on quartz boat 6 major axis the most intact, it is possible to judge quartz boat 6
The most qualified, namely draw-in groove does not has breakage, then quartz boat 6 is qualified, if any of which one end, two ends occurs that draw-in groove is damaged, then
Quartz boat 6 is defective.
The above-mentioned desirable embodiment according to the present invention is enlightenment, and by above-mentioned description, relevant staff is complete
Various change and amendment can be carried out in the range of without departing from this invention technological thought.This invention technical
Scope is not limited to the content in description, it is necessary to determine its technical scope according to right.
Claims (3)
1. a quartz boat cubing, described quartz boat is equidistantly distributed some draw-in grooves on (6), it is characterised in that: this cubing bag
Including base plate (1) and two positioning seats (3) being arranged on base plate (1), the opened above of described positioning seat (3) has for positioning stone
The baseline trough (301) of Ying Zhou (6), described base plate (1) is positioned between two described positioning seats (3) and is provided with testing agency；
Described testing agency includes two columns (5), and sliding to be provided with between two described columns (5) matches with described draw-in groove
Inspection slide plate (4).
Quartz boat cubing the most according to claim 1, it is characterised in that: described testing agency has two, described testing machine
Structure lays respectively at positioning seat (3) two ends.
Quartz boat cubing the most according to claim 2, it is characterised in that: outside two described positioning seat (3) one of which
Side is fixed with auxiliary positioning plate (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610673403.1A CN106052518A (en) | 2016-08-16 | 2016-08-16 | Quartz boat testing tool |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610673403.1A CN106052518A (en) | 2016-08-16 | 2016-08-16 | Quartz boat testing tool |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106052518A true CN106052518A (en) | 2016-10-26 |
Family
ID=57480522
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610673403.1A Pending CN106052518A (en) | 2016-08-16 | 2016-08-16 | Quartz boat testing tool |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106052518A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114739273A (en) * | 2022-03-08 | 2022-07-12 | 深圳市捷佳伟创新能源装备股份有限公司 | Checking fixture |
| CN114853320A (en) * | 2022-05-03 | 2022-08-05 | 浙江奥博石英科技股份有限公司 | Groove stick inserted sheet quartz boat processing equipment |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101750004A (en) * | 2008-12-17 | 2010-06-23 | 中芯国际集成电路制造(上海)有限公司 | Measuring tool |
| CN102175124A (en) * | 2011-01-27 | 2011-09-07 | 上海宏力半导体制造有限公司 | Quartz boat detection device and detection method |
| CN103968746A (en) * | 2013-01-25 | 2014-08-06 | 上海华虹宏力半导体制造有限公司 | Detection device for detecting deformation of quartz boat |
| CN204757969U (en) * | 2015-06-18 | 2015-11-11 | 厦门市三安集成电路有限公司 | Tool and device are measured to brilliant first spool box |
| CN205898002U (en) * | 2016-08-16 | 2017-01-18 | 常州亿晶光电科技有限公司 | Utensil is examined to quartz boat |
-
2016
- 2016-08-16 CN CN201610673403.1A patent/CN106052518A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101750004A (en) * | 2008-12-17 | 2010-06-23 | 中芯国际集成电路制造(上海)有限公司 | Measuring tool |
| CN102175124A (en) * | 2011-01-27 | 2011-09-07 | 上海宏力半导体制造有限公司 | Quartz boat detection device and detection method |
| CN103968746A (en) * | 2013-01-25 | 2014-08-06 | 上海华虹宏力半导体制造有限公司 | Detection device for detecting deformation of quartz boat |
| CN204757969U (en) * | 2015-06-18 | 2015-11-11 | 厦门市三安集成电路有限公司 | Tool and device are measured to brilliant first spool box |
| CN205898002U (en) * | 2016-08-16 | 2017-01-18 | 常州亿晶光电科技有限公司 | Utensil is examined to quartz boat |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114739273A (en) * | 2022-03-08 | 2022-07-12 | 深圳市捷佳伟创新能源装备股份有限公司 | Checking fixture |
| CN114739273B (en) * | 2022-03-08 | 2024-05-10 | 深圳市捷佳伟创新能源装备股份有限公司 | Gauge |
| CN114853320A (en) * | 2022-05-03 | 2022-08-05 | 浙江奥博石英科技股份有限公司 | Groove stick inserted sheet quartz boat processing equipment |
| CN114853320B (en) * | 2022-05-03 | 2024-02-06 | 浙江奥博石英科技股份有限公司 | Groove rod insert quartz boat processing equipment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20161026 |