CN101750004A - Measuring tool - Google Patents
Measuring tool Download PDFInfo
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- CN101750004A CN101750004A CN200810204776A CN200810204776A CN101750004A CN 101750004 A CN101750004 A CN 101750004A CN 200810204776 A CN200810204776 A CN 200810204776A CN 200810204776 A CN200810204776 A CN 200810204776A CN 101750004 A CN101750004 A CN 101750004A
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- crystal
- boat box
- measuring
- measurement section
- measured
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- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention provides a measuring tool used for measuring a deformation size of a wafer boat box relative to a standard shape, wherein the wafer boat box comprises an accommodating part provided with an opening. The measuring tool comprises a first measuring part and a second measuring part, wherein the first measuring part is matched with the standard shape of the accommodating part of the wafer boat box and used for measuring the deformation condition of the accommodating part of the wafer boat box; and the second measuring part is connected with the first measuring part and used for measuring the size of the opening of the accommodating part of the wafer boat part. The measuring tool can quickly and accurately detect whether the wafer boat box is deformed or not and whether the deformation size is in an acceptable range or not, and the measuring tool is not influenced by artificial errors and measuring locations. When different survey crew measure the same wafer boat box to be measured, the same measuring result can be obtained, and the wafer boat box can be measured in process equipment, thereby improving the measuring efficiency.
Description
Technical field
The present invention relates to a kind of survey instrument, relate in particular to a kind of survey instrument in order to the distortion size of measuring crystal-boat box.
Background technology
In the semiconductor product manufacturing, crystal-boat box is widely used in oxidation, diffusion and the vapour deposition operations such as (CVD) as wafer carrier, and its shape and structure has considerable influence to the semiconductor wafer quality.Specifically please refer to Fig. 1, crystal-boat box 100 comprises holding part 110, described holding part has an opening 120, described holding part 110 is surrounded by first brilliant boat rod 111, second brilliant boat rod the 112 and the 3rd brilliant boat rod 113, offer the pickup groove (not shown) of holding chip on the described brilliant boat rod, wafer can be placed in the holding part 110 of described crystal-boat box 100.At high temperature be very easy to deform owing to described brilliant boat rod, this can cause the shape of holding part 110 to change, it is big that the width of its opening 120 becomes, and then cause being loaded in the broken wafers damage in the crystal-boat box 100, and production brings great loss to semiconductor technology.Therefore must measure the crystal-boat box of all uses, whether be out of shape to judge crystal-boat box, and within the acceptable range whether the distortion size of crystal-boat box.
Now, survey instrument commonly used is a ruler, please refer to Fig. 2 A to Fig. 2 B, and in conjunction with Fig. 1, it is the fundamental diagram of the survey instrument of prior art, when being placed on ruler 200 on the opening 120, the size of opening 120 can be measured,, the degree of depth of holding part 100 can be measured when ruler 200 is inserted in the holding part 110 along the opening vertical direction, then can judge crystal-boat box 100 to be measured and whether be out of shape, and within the acceptable range whether the distortion size.But because the distortion size of crystal-boat box 100 to be measured is less, ruler 200 can not accurately be measured, and can't satisfy the accuracy requirement that semiconductor technology is produced.And, often because of personal error, make when different survey crews is measured same crystal-boat box to be measured, usually can obtain different results.In addition, when crystal-boat box 100 to be measured is placed in the high temperature furnace pipe of process apparatus, can't carry out surveying work.
Whether therefore, how to develop a kind of survey instrument, can allow operating personnel fast and detect crystal-boat box to be measured exactly and be out of shape, whether the distortion size in specialized range, has become urgent problem.
Summary of the invention
The object of the present invention is to provide a kind of survey instrument of crystal-boat box, can solve existing survey instrument and can't accurately measure crystal-boat box to be measured and whether be out of shape, and distortion size within the acceptable range problem whether.
In view of this, the invention provides a kind of survey instrument, in order to measure the distortion size of crystal-boat box with respect to standard shape, described crystal-boat box comprises holding part, described holding part has an opening, described survey instrument comprises: first measurement section, be complementary with the standard shape of described crystal-boat box holding part, and be used to measure the distortion situation of described crystal-boat box holding part; And second measurement section, be connected with described first measurement section, be used to measure the opening size of described crystal-boat box holding part.
Optionally, described first measurement section is a convexity, and described second measurement section is a right-angled trapezium.
Optionally, the bottom of described right-angled trapezium overlaps with the circle footpath of described convexity.
Optionally, described second measurement section is provided with first datum line and second datum line.
Optionally, described first datum line is the line of described right-angled trapezium two waists, and described first datum line is parallel to the base of described right-angled trapezium, and its length is 306 millimeters.
Optionally, described second datum line is the line of described right-angled trapezium two waists, and described second datum line is parallel to the base of described right-angled trapezium, and its length is 312 millimeters.
Optionally, described first measurement section and described second measurement section are structure as a whole.
Optionally, the thickness of described first measurement section is 3～4 millimeters.
Optionally, the thickness of described second measurement section is 3～4 millimeters.
Optionally, the material of described survey instrument is quartzy.
The beneficial effect of survey instrument provided by the present invention is:
1, can be fast and detect crystal-boat box to be measured exactly and whether be out of shape, and whether the distortion size is in tolerance interval.
2, the error of avoiding human factor and being caused, different survey crews is measured same crystal-boat box to be measured can draw identical measurement conclusion.
3, do not measured the restriction in place, in process apparatus, can use described survey instrument to measure yet.
Description of drawings
Fig. 1 is the sectional view of the crystal-boat box of prior art;
Fig. 2 A to Fig. 2 B is the fundamental diagram of the survey instrument of prior art;
Fig. 3 is the synoptic diagram of the survey instrument of one embodiment of the invention;
Fig. 4 A to Fig. 4 D is the fundamental diagram of the survey instrument of one embodiment of the invention.
Embodiment
Below in conjunction with the drawings and specific embodiments survey instrument proposed by the invention is described in further detail.
Please refer to Fig. 3, it is the synoptic diagram of the survey instrument that one embodiment of the invention provided, and in conjunction with Fig. 1, this survey instrument 300 comprises: first measurement section 310 and second measurement section 320, first measurement section 310 is complementary with the standard shape of the holding part 110 of crystal-boat box 100 to be measured, be convexity, be used to measure the distortion situation of the holding part 110 of crystal-boat box 100 to be measured, second measurement section 320 is connected with first measurement section 310, be right-angled trapezium, be used to measure the opening size of the holding part 110 of crystal-boat box 100 to be measured.Wherein, the bottom of described right-angled trapezium overlaps with the circle footpath of described dome.Described second measurement section 320 is used to measure the opening size of the holding part 110 of crystal-boat box 100 to be measured.Second measurement section 320 is provided with first datum line 321 and second datum line, 322, the first datum lines 321 are parallel with second datum line 322.First measurement section 310 and second measurement section 320 are structure as a whole.
In an embodiment of the present invention, the standard openings width of the holding part 110 of crystal-boat box 100 to be measured is 306 millimeters, if its A/F greater than 306 millimeters and less than 312 millimeters, is considered as crystal-boat box 100 to be measured and has been out of shape, but within the acceptable range, can continue to use.If it is undesirable that the A/F of crystal-boat box 100 to be measured is more than or equal to 312 millimeters, can not continue to use.In one embodiment of this invention, first datum line 321 is the line of described right-angled trapezium two waists, and its length is the standard openings width of the holding part 110 of crystal-boat box 100 to be measured, is 306 millimeters, and described first datum line 321 is parallel to the base of described right-angled trapezium.Second datum line 322 is the line of described right-angled trapezium two waists, and its length is 312 millimeters, and second datum line 322 is parallel with first datum line 321.Whether the opening size that first datum line 321 and second datum line 322 are used to measure holding part 110 conformance with standard.
Mention that in background technology the holding part 110 of crystal-boat box 100 to be measured is surrounded by first brilliant boat rod 111, second brilliant boat rod the 112 and the 3rd brilliant boat rod 113, offers the pickup groove of holding chip on the described brilliant boat rod.Wherein, the groove width of described pickup groove is 6 millimeters.In an embodiment of the present invention, survey instrument 300 is laminar, wherein, the thickness of first measurement section 310 and second measurement section 320 is 3 millimeters, less than the groove width of described pickup groove, therefore, survey instrument 300 can be inserted in the pickup groove of brilliant boat rod of crystal-boat box 100 to be measured, can be used to measure the distortion situation of the holding part 110 of crystal-boat box 100 to be measured, and the opening size of the holding part 110 of crystal-boat box to be measured 100.In other embodiments of the invention, also can be in conjunction with actual needs, first measurement section of described survey instrument and second measurement section are set to other thickness between 3～4 millimeters.
The principle of work of the survey instrument 300 that one embodiment of the invention provided is, please refer to Fig. 4 A to Fig. 4 B, and in conjunction with Fig. 1, when measuring the shape of holding part 110 of crystal-boat box 100 to be measured, first measurement section 310 of survey instrument 300 can be inserted in the described holding part 110, second measurement section 320 is stuck on the opening 120 of crystal-boat box 100, shown in Fig. 4 A, the shape of the lucky and described holding part 110 of the shape of described first measurement section 310 matches, can be inserted into the pickup groove bottom of the 3rd brilliant boat rod 113, very close to each other between described first measurement section 310 and the 3rd brilliant boat rod 113, can judge that then crystal-boat box 100 to be measured is not out of shape, can continue to use.
Shown in Fig. 4 B, after described first measurement section 310 is inserted into described holding part 110, the 3rd brilliant boat rod 113 of itself and crystal-boat box to be measured 100 has a gap, can't be inserted in the pickup groove of the 3rd brilliant boat rod 113, judge that then crystal-boat box 100 to be measured has been out of shape, and the distortion size has exceeded acceptable scope, and crystal-boat box 100 to be measured can't continue to use.
If first measurement section 310 can be inserted in the pickup groove of the 3rd brilliant boat rod 113, but be not inserted into the bottom of the pickup groove of the 3rd brilliant boat rod 113, also has certain interval with the bottom of the pickup groove of the 3rd brilliant boat rod 113, the holding part 110 that can judge crystal-boat box 100 to be measured has been out of shape, but within the acceptable range, can continue to use.So, can measure the shape conformance with standard whether of the holding part 110 of crystal-boat box 100 to be measured by survey instrument 300.
Continue with reference to figure 4C to Fig. 4 D, and in conjunction with Fig. 1, when the A/F of the holding part 110 of measuring crystal-boat box 100 to be measured, second measurement section 320 of survey instrument 300 can be placed on the opening 120 of crystal-boat box 100 to be measured, referring to Fig. 4 C, if described first datum line 321 coincide with the size of described opening 120 just, determine that then the A/F of crystal-boat box 100 to be measured is 306 millimeters, crystal-boat box 100 to be measured is not out of shape.
If the opening size of crystal-boat box 100 to be measured is between described first datum line 321 and second datum line 322, the A/F that is crystal-boat box 100 to be measured is greater than 306 millimeters and less than 312 millimeters, judge that then crystal-boat box 100 to be measured has been out of shape, but within the acceptable range, can continue to use.
Referring to Fig. 4 D, when described second datum line 322 and the opening size of crystal-boat box 100 to be measured are identical, the A/F that then can determine this crystal-boat box 100 to be measured is 312 millimeters, crystal-boat box 100 to be measured has been out of shape, and the distortion size has exceeded acceptable deformation range, and this crystal-boat box 100 to be measured can not continue to use.
If the opening size of crystal-boat box to be measured has exceeded second datum line 322,, judge that then this crystal-boat box 100 to be measured does not meet the use standard promptly greater than 312 millimeters.So, can whether meet the requirements, guarantee the bearing safety of wafer by the A/F that survey instrument 300 is measured crystal-boat box 100 to be measured.
Whether the use survey instrument 300 that one embodiment of the invention provided can detect crystal-boat box 110 to be measured intuitively and be out of shape, within the acceptable range whether the distortion size, also draw measurement result fast accurately, need not reading numerical values, also can draw identical measurement conclusion when the different operating personnel measure, not influenced by personal error.
In one embodiment of this invention, the material of described survey instrument 300 is quartzy, quartz material is with low cost, and has very high purity, can not pollute semi-conductor processing equipment and wafer, and quartz material is high temperature resistant, when crystal-boat box 100 to be measured is placed on the boiler tube, also can use this survey instrument 300 to measure.
In sum, survey instrument provided by the present invention, be used to measure the distortion size of crystal-boat box to be measured with respect to standard shape, described survey instrument comprises first measurement section and second measurement section, the standard shape of described first measurement section and crystal-boat box holding part to be measured is complementary, be used to measure the distortion situation of described crystal-boat box holding part to be measured, described second measurement section is connected with described first measurement section, is used to measure the opening size of described crystal-boat box holding part.Survey instrument provided by the present invention, can be fast and detect crystal-boat box to be measured exactly and whether be out of shape, whether the distortion size is in tolerance interval, and the influence that is not subjected to personal error and measures the place, different survey crews is measured same crystal-boat box to be measured can draw identical measurement conclusion, and can in process apparatus, measure to shorten and measure man-hour, improved efficiency of measurement.
Obviously, those skilled in the art can carry out various changes and modification to the present invention and not break away from the spirit and scope of the present invention.Like this, if of the present invention these are revised and modification belongs within the scope of claim of the present invention and equivalent technologies thereof, then the present invention also is intended to comprise these changes and modification interior.
Claims (10)
1. survey instrument, in order to measure the distortion size of crystal-boat box with respect to standard shape, described crystal-boat box comprises holding part, described holding part has an opening, it is characterized in that, comprising:
First measurement section is complementary with the standard shape of described crystal-boat box holding part, is used to measure the distortion situation of described crystal-boat box holding part; And
Second measurement section is connected with described first measurement section, is used to measure the opening size of described crystal-boat box holding part.
2. survey instrument as claimed in claim 1 is characterized in that, described first measurement section is a convexity, and described second measurement section is a right-angled trapezium.
3. survey instrument as claimed in claim 2 is characterized in that, the bottom of described right-angled trapezium overlaps with the circle footpath of described convexity.
4. survey instrument as claimed in claim 1 is characterized in that, described second measurement section is provided with first datum line and second datum line.
5. survey instrument as claimed in claim 4 is characterized in that, described first datum line is the line of described right-angled trapezium two waists, and described first datum line is parallel to the base of described right-angled trapezium, and its length is 306 millimeters.
6. survey instrument as claimed in claim 4 is characterized in that, described second datum line is the line of described right-angled trapezium two waists, and described second datum line is parallel to the base of described right-angled trapezium, and its length is 312 millimeters.
7. survey instrument as claimed in claim 1 is characterized in that, described first measurement section and described second measurement section are structure as a whole.
8. survey instrument as claimed in claim 1 is characterized in that, the thickness of described first measurement section is 3～4 millimeters.
9. survey instrument as claimed in claim 1 is characterized in that, the thickness of described second measurement section is 3～4 millimeters.
10. survey instrument as claimed in claim 1 is characterized in that, its material is quartzy.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200810204776XA CN101750004B (en) | 2008-12-17 | 2008-12-17 | Measuring tool |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200810204776XA CN101750004B (en) | 2008-12-17 | 2008-12-17 | Measuring tool |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101750004A true CN101750004A (en) | 2010-06-23 |
| CN101750004B CN101750004B (en) | 2011-12-28 |
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ID=42477338
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200810204776XA Expired - Fee Related CN101750004B (en) | 2008-12-17 | 2008-12-17 | Measuring tool |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101750004B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102175124A (en) * | 2011-01-27 | 2011-09-07 | 上海宏力半导体制造有限公司 | Quartz boat detection device and detection method |
| CN106052518A (en) * | 2016-08-16 | 2016-10-26 | 常州亿晶光电科技有限公司 | Quartz boat testing tool |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3081204B1 (en) * | 1999-09-29 | 2000-08-28 | 聯華電子股▲ふん▼有限公司 | Apparatus and method for wafer boat deformation degree inspection |
| CN201017857Y (en) * | 2006-12-27 | 2008-02-06 | 中芯国际集成电路制造(上海)有限公司 | Crystal boat box capable of changing dimension |
-
2008
- 2008-12-17 CN CN200810204776XA patent/CN101750004B/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102175124A (en) * | 2011-01-27 | 2011-09-07 | 上海宏力半导体制造有限公司 | Quartz boat detection device and detection method |
| CN102175124B (en) * | 2011-01-27 | 2016-02-03 | 上海华虹宏力半导体制造有限公司 | A kind of quartz boat pick-up unit and detection method |
| CN106052518A (en) * | 2016-08-16 | 2016-10-26 | 常州亿晶光电科技有限公司 | Quartz boat testing tool |
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| Publication number | Publication date |
|---|---|
| CN101750004B (en) | 2011-12-28 |
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Granted publication date: 20111228 Termination date: 20181217 |