CN214624991U - Movable accurate slicing device for flower basket silicon wafer - Google Patents

Movable accurate slicing device for flower basket silicon wafer Download PDF

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Publication number
CN214624991U
CN214624991U CN202121371824.1U CN202121371824U CN214624991U CN 214624991 U CN214624991 U CN 214624991U CN 202121371824 U CN202121371824 U CN 202121371824U CN 214624991 U CN214624991 U CN 214624991U
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China
Prior art keywords
basket
slicing
flowers
experimental
support plate
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Active
Application number
CN202121371824.1U
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Chinese (zh)
Inventor
庄岩
张飞
张凯胜
孙铁囤
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Changzhou EGing Photovoltaic Technology Co Ltd
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Changzhou EGing Photovoltaic Technology Co Ltd
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Priority to CN202121371824.1U priority Critical patent/CN214624991U/en
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Abstract

The utility model relates to the technical field of silicon wafer slicing equipment, in particular to a movable experimental accurate slicing device, which comprises a support plate and two fixing clamps arranged on the top surface of the support plate, wherein a fixing bracket, an experimental basket and a slicing basket are arranged between the two fixing clamps, the experimental basket is positioned on the left side of the slicing basket, the fixing bracket is positioned on the right side of the slicing basket, the slot opening of the experimental basket and the slot opening of the slicing basket are oppositely arranged, a plurality of push rods for pushing silicon wafers are movably arranged on the fixing bracket, the experimental basket and the slicing basket can be positioned and fixed by the fixing clamps on the top surfaces of the support plate and the support plate, and the experimental personnel can push out and transfer the silicon wafers by pushing the push rods by arranging the fixing bracket and the push rods, thereby realizing semi-automatic operation and improving the slicing efficiency, and the defects of fingerprints, scratches, fragments, hidden cracks and the like are avoided in the slicing process, and the experimental accuracy is improved.

Description

Movable accurate slicing device for flower basket silicon wafer
Technical Field
The utility model belongs to the technical field of silicon chip burst equipment technique and specifically relates to a basket of flowers silicon chip is with movable accurate burst device is related to.
Background
Silicon wafers, which are the most basic materials in the semiconductor field, can be processed into various circuit element structures, and become integrated circuit products with specific electrical functions. The silicon wafers obtained after slicing are stacked together and need to be inserted into a silicon wafer bearing box for transportation after being sliced, and the silicon wafers are very difficult to slice again due to the fact that the silicon wafers are thin and fragile. In the laboratory, the transfer of laboratory personnel and place silicon chip in the basket of flowers is manual single burst transfer, and its burst transfer efficiency is slow, and only can the basket of flowers take the silicon chip of silicon chip unable different positions of quick differentiation at both ends, cause the silicon chip damage easily in the transfer process, influence experiment rate of accuracy.
SUMMERY OF THE UTILITY MODEL
The to-be-solved technical problem of the utility model is: in order to overcome the problems that in the prior art, the slicing transfer efficiency is low, silicon wafers at different positions cannot be rapidly distinguished only by taking the silicon wafers at two ends by a basket, the silicon wafers are easily damaged in the transfer process, and the experiment accuracy is influenced, the movable accurate slicing device for the basket silicon wafers is provided.
The utility model provides a technical scheme that its technical problem adopted is: a movable experimental accurate slicing device comprises a support plate and two fixing clamps arranged on the top surface of the support plate, wherein a fixing support, an experimental basket with clamping grooves and a slicing basket are arranged between the two fixing clamps, the experimental basket is positioned on the left side of the slicing basket, the fixing support is positioned on the right side of the slicing basket, the clamping groove notches of the experimental basket and the clamping groove notches of the slicing basket are oppositely arranged, a plurality of pushing rods used for pushing silicon wafers are movably arranged on the fixing support, the pushing rods and the clamping grooves of the slicing basket are in one-to-one correspondence, the fixing clamps on the top surfaces of the support plate and the support plate can play a role in positioning and fixing the experimental basket and the slicing basket, and through the arrangement of the fixing support and the automatic pushing rods, an experimenter pushes out and transfers the silicon wafers through the pushing rods, so that semi-operation is realized, and thus the slicing efficiency is improved, and the defects of fingerprints, scratches, fragments, hidden cracks and the like are avoided in the slicing process, and the experimental accuracy is improved.
In order to solve the fixed and movable problem of pushing ram, further include set up a plurality of through-holes that are used for supplying the pushing ram to pass on the fixed bolster, through-hole and pushing ram one-to-one, the pushing ram is located its through-hole that corresponds, and the design of through-hole is convenient for produce and process, and the through-hole can play the guide effect.
The utility model has the advantages that: the utility model provides a pair of accurate burst device of movable experiment, through the fixation clamp at support plate and support plate top surface, can play the fixed effect in location to experiment basket of flowers and burst basket of flowers, through arranging of fixed bolster and pushing ram, the experimenter releases and shifts the silicon chip through promoting the pushing ram, semi-automatization operation has been realized to improve burst efficiency, and stopped finger print, fish tail, piece, hidden harmfulness such as splitting at burst in-process, the experiment rate of accuracy has been improved.
Drawings
The present invention will be further explained with reference to the drawings and examples.
Fig. 1 is a schematic top view of the present invention;
fig. 2 is a front view structure diagram of the present invention.
In the figure: 1. support plate, 2, fixation clamp, 3, experiment basket of flowers, 4, burst basket of flowers, 5, fixed bolster, 51, through-hole, 6, pushing ram.
Detailed Description
The present invention will now be described in further detail with reference to the accompanying drawings. These drawings are simplified schematic drawings and illustrate the basic structure of the present invention only in a schematic manner, and thus show only the components related to the present invention.
As shown in figure 1, the utility model is a schematic structural diagram, a movable accurate slicing device for a silicon chip of a flower basket, comprising a support plate 1 and two fixing clamps 2 arranged on the top surface of the support plate 1, a fixing bracket 5, an experimental flower basket 3 with a clamping groove and a slicing flower basket 4 are arranged between the two fixing clamps 2, the experimental flower basket 3 is positioned on the left side of the slicing flower basket 4, the clamping groove notch of the experimental flower basket 3 and the clamping groove notch of the slicing flower basket 4 are oppositely arranged, the fixing bracket 5 is positioned on the right side of the slicing flower basket 4, a plurality of pushing rods 6 for pushing the silicon chip are movably arranged on the fixing bracket 5, the pushing rods 6 and the clamping grooves of the slicing flower basket 4 are in one-to-one correspondence, the experimental flower basket 3 and the slicing flower basket 4 can be positioned and fixed by the fixing clamps 2 on the top surfaces of the support plate 1 and the support plate 1, and the arrangement of the fixing bracket 5 and the pushing rods 6, the experimenter pushes out and transfers the silicon chip by pushing the push rod 6, so that semi-automatic operation is realized, the slicing efficiency is improved, the defects of fingerprints, scratches, fragments, hidden cracks and the like are avoided in the slicing process, and the experiment accuracy is improved.
As shown in fig. 2, a plurality of through holes 51 for the pushing rods 6 to pass through are formed in the fixing support 5, the through holes 51 correspond to the pushing rods 6 one by one, the pushing rods 6 are located in the corresponding through holes 51, and the diameter of the pushing rods 6 is smaller than the width of the clamping grooves of the sliced flower basket 4.
Example (b): during the use, experimental basket of flowers 3 and burst basket of flowers 4 that will have the draw-in groove are placed between two fixation clamps 2 at support plate 1 top surface, interval between two fixation clamps 2 and the length phase-match of burst basket of flowers 4, and make the draw-in groove notch of experimental basket of flowers 3 and the draw-in groove notch mutual disposition of burst basket of flowers 4, the experimenter is through promoting the pushing ram 6 that the silicon chip corresponds in the burst basket of flowers 4, silicon chip in the burst basket of flowers 4 pushes away to experimental basket of flowers 3 in, the semi-automatization of silicon chip has been accomplished and has been shifted, the burst shifts fast, and is efficient.
In light of the foregoing, it will be apparent to those skilled in the art from this disclosure that various changes and modifications can be made without departing from the spirit and scope of the invention. The technical scope of the present invention is not limited to the content of the specification, and must be determined according to the scope of the claims.

Claims (2)

1. The utility model provides a basket of flowers silicon chip is with movable accurate burst device, characterized by, include support plate (1) and install two fixation clamp (2) at support plate (1) top surface, two install fixed bolster (5) and experiment basket of flowers (3) and burst basket of flowers (4) that have the draw-in groove between fixation clamp (2), experiment basket of flowers (3) are located burst basket of flowers (4) left side, fixed bolster (5) are located burst basket of flowers (4) right side, just the draw-in groove notch of experiment basket of flowers (3) and the draw-in groove notch mutual disposition of burst basket of flowers (4), movable mounting has a plurality of pushing rods (6) that are used for promoting the silicon chip on fixed bolster (5), the draw-in groove one-to-one of pushing rods (6) and burst basket of flowers (4).
2. The movable precision slicing apparatus for the silicon chips of the flower basket according to claim 1, wherein: a plurality of through holes (51) used for the pushing rods (6) to penetrate are formed in the fixing support (5), the through holes (51) correspond to the pushing rods (6) one by one, and the pushing rods (6) are located in the corresponding through holes (51).
CN202121371824.1U 2021-06-18 2021-06-18 Movable accurate slicing device for flower basket silicon wafer Active CN214624991U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202121371824.1U CN214624991U (en) 2021-06-18 2021-06-18 Movable accurate slicing device for flower basket silicon wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202121371824.1U CN214624991U (en) 2021-06-18 2021-06-18 Movable accurate slicing device for flower basket silicon wafer

Publications (1)

Publication Number Publication Date
CN214624991U true CN214624991U (en) 2021-11-05

Family

ID=78411477

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202121371824.1U Active CN214624991U (en) 2021-06-18 2021-06-18 Movable accurate slicing device for flower basket silicon wafer

Country Status (1)

Country Link
CN (1) CN214624991U (en)

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