CN103964699A - Linear holding valve - Google Patents
Linear holding valve Download PDFInfo
- Publication number
- CN103964699A CN103964699A CN201310034356.2A CN201310034356A CN103964699A CN 103964699 A CN103964699 A CN 103964699A CN 201310034356 A CN201310034356 A CN 201310034356A CN 103964699 A CN103964699 A CN 103964699A
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- CN
- China
- Prior art keywords
- door
- plate
- housing
- lifting mechanism
- linear locking
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004544 sputter deposition Methods 0.000 claims abstract description 26
- 230000007246 mechanism Effects 0.000 claims abstract description 21
- 239000011521 glass Substances 0.000 claims abstract description 9
- 230000005540 biological transmission Effects 0.000 claims description 9
- 238000002955 isolation Methods 0.000 claims description 8
- 238000007789 sealing Methods 0.000 claims description 7
- 230000008520 organization Effects 0.000 claims description 6
- 238000007747 plating Methods 0.000 claims description 6
- 230000007423 decrease Effects 0.000 claims description 4
- 230000000630 rising effect Effects 0.000 claims description 3
- 230000008439 repair process Effects 0.000 abstract description 5
- 238000001771 vacuum deposition Methods 0.000 abstract 2
- 238000012423 maintenance Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 230000000740 bleeding effect Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
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- Power-Operated Mechanisms For Wings (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses a linear holding valve, and belongs to the technical field of glass vacuum coating. The linear holding valve is used for sputtering chambers for glass vacuum coating, and comprises a shell, a lifting mechanism and door plates. The door plates are in the shell, and are connected with the lifting mechanism outside the shell, an ultrathin cylinder is arranged between the two door plates, the lifting mechanism can drive the door plates to move, the ultrathin cylinder can push the door plates to abut the inner wall of the shell, so as to isolate the two sputtering chambers from the interface. According to the invention, the lifting mechanism drives the door plates, and the ultrathin cylinder between the door plates pushes the door to abut the inner wall of the shell, so as to isolate the sputtering chambers and ensure that not all the sputtering chambers need air for repair. The linear holding valve is convenient for repair and has improved efficiency.
Description
Technical field
The present invention relates to glass evacuated coating technique field, particularly a kind of linear locking-valve for glass plating vacuum diaphragm production line.
Background technology
Between glass plating vacuum diaphragm production line sputtering chamber, be generally communicated with, there is no isolation mechanism.In the time of one of them chamber of maintenance, all chambers all together pass into air.All like this sputtering chambers all will be bled before reworking, and need to spend the longer time to bleed.
Summary of the invention
Be communicated with in order to solve between current glass plating vacuum diaphragm production line sputtering chamber, isolation, does not cause keeping in repair inconvenient problem, and a kind of linear locking-valve is now provided.Concrete technical scheme is as follows:
A kind of linear locking-valve, for glass plating vacuum diaphragm sputtering chamber, comprise housing, lifting mechanism and door-plate, described door-plate is arranged in described housing, and be connected with the lifting mechanism outside described housing, between described two door-plates, super-thin air cylinder be installed, described lifting mechanism can drive described door-plate to move, described super-thin air cylinder can promote described door-plate near described inner walls, by described sputtering chamber isolation.
Preferably, described housing comprises upper housing and lower housing; Described lifting mechanism comprises braking motor and screw, and described braking motor drives described screw rotate rising and decline, and described screw connects described door-plate by suspended axle.
Preferably, on described two door-plates, the return spring for described door-plate return is installed.
Preferably, described door-plate is provided with vacuum-sealing bar.
Preferably, between described braking motor and described screw, carry out transferring power by bevel gear pair and transmission shaft, described transmission shaft connects described bevel gear pair.
Preferably, also comprise controlling organization, described controlling organization comprises proximity transducer, controls limit switch and the pneumavalve group of described braking motor, described lifting mechanism is provided with upper and lower proximity transducer and bound bit switch, in housing, be preset with upper and lower stop, and corresponding with described upper and lower proximity transducer, described bound bit switch arranges the outside of point of application at described upper and lower proximity transducer point of application, described pneumavalve group connects the ventilating pit arranging in screw by pneumatic pipeline, described ventilating pit and described super-thin air cylinder are communicated with.The filling pressurized air or vacuumize of described pneumavalve group control cylinder.
Preferably, described screw is provided with corrugated tube outward, and described corrugated tube connects described housing.
Preferably, described pneumavalve group is two-bit triplet reversing valve.
Compared with prior art, the linear locking-valve that technique scheme provides has the following advantages: drive door-plate by lifting mechanism, and there is the super-thin air cylinder between door-plate to promote door-plate near inner walls, sputtering chamber is isolated, while having ensured sputtering chamber maintenance, need not all pass into air, convenient for maintaining, has improved efficiency.
Brief description of the drawings
In order to be illustrated more clearly in the technical scheme in the embodiment of the present invention, below the accompanying drawing of required use during embodiment is described is briefly described, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skill in the art, do not paying under the prerequisite of creative work, can also obtain according to these accompanying drawings other accompanying drawing.
Fig. 1 is the linear locking-valve sectional structure chart providing in the embodiment of the present invention;
Fig. 2 is the door-plate working state schematic representation providing in the embodiment of the present invention;
Fig. 3 is the door panel structure schematic diagram providing in the embodiment of the present invention.
In accompanying drawing, the component list of each label representative is as follows:
1 bevel gear pair, 2 helical screws, 3 transmission shafts, 4 electromagnetic braking motor, 5 center bevel gears, 6 welding bellows, 7 upper housings, 8 lower housings, 9 two-position three-way valve groups, 10 pneumatic pipelines, 11 proximity transducers, 12 limit switches, 13 suspended axles, 14 super-thin air cylinders, 15 door-plates.
Embodiment
For making the object, technical solutions and advantages of the present invention clearer, below in conjunction with accompanying drawing, embodiment of the present invention is described further in detail.
As depicted in figs. 1 and 2, the embodiment of the present invention provides a kind of linear locking-valve, for glass evacuated film plating sputtering chamber, comprise housing, lifting mechanism and door-plate 15, door-plate 15 is arranged in housing, and is connected with the lifting mechanism outside housing, between two door-plates 15, super-thin air cylinder 14 is installed, lifting mechanism can drive door-plate 15 to move, and super-thin air cylinder 14 can promote door-plate 15 near inner walls, and sputtering chamber is isolated.Wherein, housing comprises upper housing 7 and lower housing 8; Lifting mechanism comprises braking motor 4 and screw 2, and braking motor 4 drives screw 2 rotate rising and decline, and screw 2 connects door-plate 15 by suspended axle 13.On two door-plates 15, the return spring for door-plate 15 returns is installed.Door-plate 15 is provided with vacuum-sealing bar.Between braking motor 4 and screw 2, carry out transferring power by bevel gear pair 1 and transmission shaft 3, transmission shaft 3 connects bevel gear pair 1.
Linear locking-valve also comprises controlling organization, controlling organization comprises proximity transducer 11, controls limit switch 12 and the pneumavalve group 9 of braking motor, lifting mechanism is provided with upper and lower proximity transducer 11 and bound bit switch 12, in housing, be preset with upper and lower stop, and corresponding with upper and lower proximity transducer 11, bound bit switch 12 point of application are separately positioned on upper and lower proximity transducer 11 point of application outsides, pneumavalve group 9 connects the ventilating pit arranging in screw 2 by pneumatic pipeline 10, ventilating pit and super-thin air cylinder 14 are communicated with.The filling pressurized air or vacuumize of pneumavalve group control cylinder.Screw 2 is outer is provided with corrugated tube 6, and corrugated tube 6 connects housing.Pneumavalve group 9 is two-bit triplet reversing valve.
The working process of the embodiment of the present invention is simply described below.
In the time that two sputtering chambers have isolation to need: start electromagnetic braking motor 4, motor 4 drives the cone gear 5 at center to rotate.Center bevel gear 5 by transmission shaft 3 by transmission of power to screw 2.Helical screw 2 rotates, and helical screw 2 lower ends are connecting door-plate system 15 by suspended axle 13.Screw 2 declines, and drives door-plate system 15 together to decline.Drop to lower dead center, proximity transducer 11 works (provide protection that 12 proximity transducers of limit switch go to do the used time), and motor 4 is stopped the rotation.No matter moving and quiet.Seal bellows 6 and housing play sealing function.Lower dead center is the position presetting.In this position, door-plate 15 is pushed open.Can be effectively by two sputtering chamber isolation.Door-plate 15 is pushed process open.Two-position three-way valve 9 reversing valve groups are connected pressurized air.The ventilating pit of opening in the compressed airline of pressurized air, screw mandrel 2, enters the super-thin air cylinder 14 between door-plate 15.Super-thin air cylinder 14 struts two door-plates 15 under compressed-air actuated promotion to both sides.Door-plate 15 is withstood on valve interior wall, and the sealing-ring on door-plate 15 plays effective sealing function, and two sputtering chambers are thoroughly kept apart.Linear locking-valve inside passes into atmosphere simultaneously.Normal atmosphere plays a part to strengthen isolation.In the time that the sputtering chamber maintenance of a side finishes, this sputtering chamber sealing, start to vacuumize, linear locking-valve inside vacuumizes simultaneously simultaneously, when linear locking-valve is inner and maintenance after sputtering chamber, when the sputtering chamber pressure of just having isolated identical with ining addition, two-position three-way valve 9 commutations will be led to pressurized air and be unloaded, door-plate 15 has left valve interior wall, between sputtering chamber, is communicated with.Then make two-position three-way valve 9 super-thin air cylinder 14 inside of commutating vacuumize.Object is that the pressure in pressure and the valve body making in super-thin air cylinder 14 approaches.Now, return spring works, and allows door-plate 15 reset.After door-plate 15 resets, start electromagnetic braking motor 4, drive screw 2 to rise, in the time that door-plate rises to top dead center, proximity transducer 11 works.Motor 4 is stopped operating.
The embodiment of the present invention, by isolating and sealing two adjacent vacuum sputtering chambers, to allow wherein one or two can put into atmosphere, is opened and is keeped in repair.Isolation another part sputtering chamber energy short-term or keep for a long time vacuum state.Before the sputtering chamber work of having keeped in repair, only need to bleed separately.The time of bleeding like this shortens greatly, and the time of original all chamber evacuations is few over half.Not only can improve the operational use time of equipment, and reduce the power of vacuum pump group, reach the object of saving social resources.
The foregoing is only preferred embodiment of the present invention, in order to limit the present invention, within the spirit and principles in the present invention not all, any amendment of doing, be equal to replacement, improvement etc., within all should being included in protection scope of the present invention.
Claims (8)
1. a linear locking-valve, for glass plating vacuum diaphragm sputtering chamber, it is characterized in that, comprise housing, lifting mechanism and door-plate, described door-plate is arranged in described housing, and is connected with the lifting mechanism outside described housing, between described two door-plates, super-thin air cylinder is installed, described lifting mechanism can drive described door-plate to move, and described super-thin air cylinder can promote described door-plate near described inner walls, by described sputtering chamber isolation.
2. linear locking-valve according to claim 1, is characterized in that, described housing comprises upper housing and lower housing; Described lifting mechanism comprises braking motor and screw, and described braking motor drives described screw rotate rising and decline, and described screw connects described door-plate by suspended axle.
3. linear locking-valve according to claim 1, is characterized in that, on described two door-plates, the return spring for described door-plate return is installed.
4. linear locking-valve according to claim 1, is characterized in that, described door-plate is provided with vacuum-sealing bar.
5. linear locking-valve according to claim 2, is characterized in that, between described braking motor and described screw, carrys out transferring power by bevel gear pair and transmission shaft, and described transmission shaft connects described bevel gear pair.
6. linear locking-valve according to claim 2, it is characterized in that, also comprise controlling organization, described controlling organization comprises proximity transducer, limit switch and pneumavalve group, described lifting mechanism is provided with upper and lower proximity transducer and bound bit switch, in housing, be preset with upper and lower stop, and corresponding with described upper and lower proximity transducer, described bound bit switch point of application is separately positioned on described upper and lower proximity transducer point of application outside, described pneumavalve group connects the ventilating pit arranging in screw by pneumatic pipeline, described ventilating pit and described super-thin air cylinder are communicated with, the filling pressurized air or vacuumize of described pneumavalve group control cylinder.
7. linear locking-valve according to claim 2, is characterized in that, described screw is provided with corrugated tube outward, and described corrugated tube connects described housing.
8. linear locking-valve according to claim 6, is characterized in that, described pneumavalve group is two-bit triplet reversing valve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310034356.2A CN103964699B (en) | 2013-01-29 | 2013-01-29 | A kind of linear locking-valve |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310034356.2A CN103964699B (en) | 2013-01-29 | 2013-01-29 | A kind of linear locking-valve |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103964699A true CN103964699A (en) | 2014-08-06 |
| CN103964699B CN103964699B (en) | 2016-06-15 |
Family
ID=51234765
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310034356.2A Active CN103964699B (en) | 2013-01-29 | 2013-01-29 | A kind of linear locking-valve |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103964699B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108662273A (en) * | 2017-03-27 | 2018-10-16 | 苑玉坤 | Ultra-wide double-flashboard gate valve |
| CN112360837A (en) * | 2020-10-12 | 2021-02-12 | 欧霓博(上海)机械自动化有限公司 | Multifunctional air cylinder |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2521225Y (en) * | 2001-12-29 | 2002-11-20 | 沈宗麟 | Sealing device of vacuum chamber |
| CN2908529Y (en) * | 2006-04-05 | 2007-06-06 | 建铯科技股份有限公司 | Vacuum film coating machine with anti-leakage device |
| CN1995783A (en) * | 2006-12-26 | 2007-07-11 | 陈长清 | Sealing device for gate type continuous vacuum/pressurized charging and discharging treatment |
| CN101517702A (en) * | 2006-09-27 | 2009-08-26 | Ats工程股份有限公司 | Gate valve |
| CN202561089U (en) * | 2012-01-20 | 2012-11-28 | 纳峰真空镀膜（上海）有限公司 | Rectangular gate valve |
| CN202597713U (en) * | 2012-03-30 | 2012-12-12 | 广东友通工业有限公司 | Vacuum air valve |
-
2013
- 2013-01-29 CN CN201310034356.2A patent/CN103964699B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2521225Y (en) * | 2001-12-29 | 2002-11-20 | 沈宗麟 | Sealing device of vacuum chamber |
| CN2908529Y (en) * | 2006-04-05 | 2007-06-06 | 建铯科技股份有限公司 | Vacuum film coating machine with anti-leakage device |
| CN101517702A (en) * | 2006-09-27 | 2009-08-26 | Ats工程股份有限公司 | Gate valve |
| CN1995783A (en) * | 2006-12-26 | 2007-07-11 | 陈长清 | Sealing device for gate type continuous vacuum/pressurized charging and discharging treatment |
| CN202561089U (en) * | 2012-01-20 | 2012-11-28 | 纳峰真空镀膜（上海）有限公司 | Rectangular gate valve |
| CN202597713U (en) * | 2012-03-30 | 2012-12-12 | 广东友通工业有限公司 | Vacuum air valve |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108662273A (en) * | 2017-03-27 | 2018-10-16 | 苑玉坤 | Ultra-wide double-flashboard gate valve |
| CN112360837A (en) * | 2020-10-12 | 2021-02-12 | 欧霓博(上海)机械自动化有限公司 | Multifunctional air cylinder |
| CN112360837B (en) * | 2020-10-12 | 2023-03-24 | 欧霓博(上海)机械自动化有限公司 | Multifunctional air cylinder |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103964699B (en) | 2016-06-15 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20170421 Address after: 201600 Songjiang science and Technology Park, Guanghua Road, Shanghai, No. 3, layer 328 Patentee after: SHANGHAI NORTHGLASS COATING TECHNOLOGY INDUSTRIAL Co.,Ltd. Address before: 201614 Shanghai City Guanghua Road, Songjiang District science and Technology Park No. 328 Co-patentee before: SHANGHAI NORTHGLASS TECHNOLOGY INDUSTRIAL Co.,Ltd. Patentee before: SHANGHAI NORTHGLASS COATING TECHNOLOGY INDUSTRIAL Co.,Ltd. Co-patentee before: LUOYANG NORTHGLASS TECHNOLOGY Co.,Ltd. |
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| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20240105 Address after: Zone C, 4th Floor, Building 1, No. 328 Guanghua Road, Xiaokunshan Town, Songjiang District, Shanghai, 200000 Patentee after: Shanghai Beibo Vacuum Coating Technology Co.,Ltd. Address before: Floor 3, No. 328 Guanghua Road, Songjiang Science and Technology Park, Shanghai, 201600 Patentee before: SHANGHAI NORTHGLASS COATING TECHNOLOGY INDUSTRIAL Co.,Ltd. |