CN202561089U

CN202561089U - Rectangular gate valve

Info

Publication number: CN202561089U
Application number: CN2012200265916U
Authority: CN
Inventors: 史旭
Original assignee: Nano Peak Vacuum Coating (shanghai) Co Ltd
Current assignee: Nano Peak Vacuum Coating (shanghai) Co Ltd
Priority date: 2012-01-20
Filing date: 2012-01-20
Publication date: 2012-11-28
Anticipated expiration: 2022-01-20

Abstract

The utility model discloses a rectangular gate valve, wherein the valve body has the shape of a rectangular flat plate, the valve core matches with the shape of the valve body; the left side and the right side of the valve core are respectively provided with guiding devices and fasteners; the valve core can be driven by an electric motor to move upward and downward along the valve body; when the valve core moves to a given position, the fasteners press the valve core after responding to an instruction given by a positioning sensor which is arranged at an upper end of the valve and the valve is sealed. The rectangular gate valve is advantaged in that a structure characterized by the large size sealing valve core and the large size fasteners is adopted due to a large opening of a vacuum chamber and a large area of a sealed caliber, and good sealing effects can be realized.

Description

The rectangle push-pull valve

Technical field

The utility model relates to a kind of vacuum coater, particularly a kind of rectangle push-pull valve that is used for each vacuum chamber of sealing of a plurality of vacuum chamber series connection continuous coatings.

Background technique

Common vacuum plating; Generally be to electroplate in the bin at one to carry out electroplating operations; If a plurality of plating bin joints are joined to get up, carry out continuous electroplating, then need each vacuum chamber be sealed respectively; This just needs a kind of device that can seal at any time and open each vacuum chamber, and will keep the degree of vacuum of electroplating chamber.

Summary of the invention

For solving the problem of aforementioned existence, the utility model provides a kind of rectangle push-pull valve, comprises valve body, spool and drive unit; Valve body is the rectangular flat shape, spool and valve body form fit, and guiding device and locking device respectively are equipped with in the left and right both sides of spool; Spool can be moved along valve body is upper and lower by motor drives; On spool, move on to specified position, the alignment sensor of upper end, valve place sends instruction and makes locking device roof pressure spool, sealed valve.

Said locking device comprises cylinder, swing arm, permeater and cam, and cylinder is fixed on the valve body through support, and cylinder links to each other with swing arm through connector, pin; Swing arm and cam through key respectively with permeater on axle link to each other; Cylinder is accepted the instruction back and is driven the swing arm swing, and the axle that drives on the permeater rotates, and drives cam rotation; Cam extruding spool, sealed valve.

The utility model has the advantages that because opening of vacuum chamber is big, the bore area that is sealed is big, and adopts large scale sealed valve core and locking device structure, accurate positioning, sealing is reliable, can reach good sealing effect.

Description of drawings

Accompanying drawing 1 is the plan view of the utility model;

Accompanying drawing 2 is locking device structural drawing;

Accompanying drawing 3 is side views of Fig. 2;

Embodiment

Please read shown in the accompanying drawing 1, the utility model provides a kind of rectangle push-pull valve, comprises valve body, spool and drive unit; Valve body 4 is the rectangular flat shape, spool 1 and valve body form fit, and guiding device and locking device 2 respectively are equipped with in spool 1 left and right both sides; Spool 2 is driven by motor 5 can be along valve body 4 upper and lower moving; On spool 1, move on to specified position, the alignment sensor of upper end, valve place sends instruction and makes locking device 2 roof pressure spools, sealed valve.

As shown in Figures 2 and 3, said locking device 2 comprises cylinder 23, swing arm 26, permeater 28 and cam 29, and cylinder 23 is fixed on the valve body 4 through

support

21,22; Cylinder 23 links to each other with swing arm 26 through connector 24, pin 25, swing arm 26 and cam 29 through key respectively with permeater 28 on axle 27 link to each other, drive swing arms 26 were swung after cylinder 23 was accepted instruction; The axle 27 that drives on the permeater 28 rotates; Drive cam 29 and rotate, cam 29 extruding spools 1, sealed valve.

Claims

1. a rectangle push-pull valve comprises valve body, spool and drive unit, it is characterized in that; Valve body is the rectangular flat shape, spool and valve body form fit, and guiding device and locking device respectively are equipped with in the left and right both sides of spool; Spool can be moved along valve body is upper and lower by motor drives; On spool, move on to specified position, the alignment sensor of upper end, valve place sends instruction and makes locking device roof pressure spool, sealed valve.

2. by the said rectangle push-pull valve of claim 1, it is characterized in that said locking device comprises cylinder, swing arm, permeater and cam; Cylinder is fixed on the valve body through support, and cylinder links to each other with swing arm through connector, pin, swing arm and cam through key respectively with permeater on spool link to each other; Cylinder is accepted the instruction back and is driven the swing arm swing, and the axle that drives on the permeater rotates, and drives cam rotation; Cam extruding spool, sealed valve.