CN2908529Y - Vacuum film coating machine with anti-leakage device - Google Patents

Vacuum film coating machine with anti-leakage device Download PDF

Info

Publication number
CN2908529Y
CN2908529Y CN 200620004666 CN200620004666U CN2908529Y CN 2908529 Y CN2908529 Y CN 2908529Y CN 200620004666 CN200620004666 CN 200620004666 CN 200620004666 U CN200620004666 U CN 200620004666U CN 2908529 Y CN2908529 Y CN 2908529Y
Authority
CN
China
Prior art keywords
type ring
separators
vacuum
dividing plate
vacuum chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN 200620004666
Other languages
Chinese (zh)
Inventor
刘镒诚
Original Assignee
SPUTTERING PRECISION MACHINE CO Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SPUTTERING PRECISION MACHINE CO Ltd filed Critical SPUTTERING PRECISION MACHINE CO Ltd
Priority to CN 200620004666 priority Critical patent/CN2908529Y/en
Application granted granted Critical
Publication of CN2908529Y publication Critical patent/CN2908529Y/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Abstract

The utility model relates to a vacuum membrane plate machine, including one vacuum cavity, membrane area in the inner chamber of the vacuum cavity. The membrane area is divided into several membrane rooms by a plurality of separators; one transceiver mechanism, which is on the sliding rail of the vacuum membrane plate machine. Sliding blocks for guiding the transceiver mechanism during sliding is at the upper part of the vacuum cavity. The transceiver mechanism is provided with compartment sealing group. The separators of the compartment sealing group is set corresponding to the vacuum cavity separators. A plurality of compartments is formed by separators when the transceiver mechanism enters the inner chamber of the vacuum cavity. Plates higher than the separators are on both sides of the separators of the compartment sealing group. Caulking grooves are between the separators. O-shaped rings are in the caulking grooves. The O-shaped rings are three-dimensional and within interpenetrating inflation space. Outside air charging inlets connect the inflation space. Vacuum cavity separators are set in the caulking grooves. The O-shaped rings are charged and expanded to seal the gap between two separators. Each compartment is separated and sealed. The utility model has good leak preventing and sealing effects.

Description

A kind of vacuum plating unit that is provided with leak-proof device
Technical field
The utility model relates to vacuum plating unit, be meant that especially a kind of set leak-proof device is the O type ring that is the sealed against leakage of three-dimensional pattern, and O type ring is the inflatable vacuum plating unit that is provided with leak-proof device of hollow.
Background technology
General mechanism is on assembled configuration, produce the slit because of member material and working accuracy relation unavoidably, but its slit can produce situations such as leakage, this situation sometimes is not allowed to, for example on the pipeline of delivering gas or liquid as have the slit, then its slit can allow gas or leak of liquid come out.And the use of against vacuum coating equipment requires the vacuum plating unit multiple when separately operating between combination member, still will reach the target that leak-proof device does not leak, and also can't reach this target yet commonly use device.
The leakproof O type ring of commonly using mainly is located between mechanism and the mechanism, makes solid and has certain elasticity, with in inter-agency locking, urges and makes it distortion when commonly using O type ring, and reach the purpose of sealing.But be difficult to behind the O type annular strain of commonly using reply.
In addition, still there is following shortcoming in above-mentioned known O type ring:
1, is solid and has certain elasticity because of the O type ring of commonly using, deformable seal effectiveness so that compression seal to be provided, but because solid O type ring is under the state of pressure distortion for a long time, still can make its typing and can't reply, if be used in normal need separately, in the mechanism of combination the time, the O type ring of its distortion can't effectively seal and leakage easily arranged.
2, the O type ring of commonly using is made generally in solid round O type ring, the user mode of solid round O type ring be subject to can only compression set leakproof.
In addition, commonly use the leak free design of vacuum plating unit, but mainly be to utilize the panel beating technology can manufacturing of contact surface to be arrived the degree of driving fit, driving fit action by the course of processing, make panel beating embed dividing plate and cause driving fit, form the secret room space and vacuumize, but it still has following shortcoming:
1, reach the degree of driving fit by precision sizing, must promote its working accuracy, the cost that is spent is also more, but still can't reach the benefit of certain leakproof.
In any case 2, the metallic substance precision sizing all can't reach the effect of certain driving fit, the equipment of commonly using adopts metallic substance as the driving fit material, the congenital shortcoming that existed, and machinery repeatedly deciliter after, also can have influence on the adaptation effect, cause driving fit incomplete.
In sum, though known O type ring can provide the leak preventing effect of compression set, be unfavorable for often needing mechanism's intercropping leakproof of separation, assembling to use, and also generally make round in shape.And the leakproof form of using on vacuum plating Mo machine adopts the panel beating precision sizing usually, and is not good as the leakproof benefit of leak-proof device, increased the cost expenditure again.Therefore, how to develop a kind of innovative device that has more desirable practicality, be the human consumer ardent hope, also be relevant dealer will make great efforts to research and develop the target and the direction of breakthrough.
Summary of the invention
At the problems referred to above, main purpose of the present utility model is to provide a kind of vacuum plating unit that is provided with leak-proof device, and the purpose that it both can reach leakproof and sealing is beneficial to the inter-agency use that separates, makes up normal again, satisfies the effect of leakproof.
For achieving the above object, a kind of vacuum plating unit that is provided with leak-proof device provided by the utility model is characterized in that including: a vacuum chamber, and the inner room of described vacuum chamber is formed with the plated film district, and described plated film district is separated out a plurality of plated films space by some baffle region; One transmitting-receiving material mechanism, be located on the slide rail of described vacuum plating unit, the slide rail of correcting when the top of described vacuum chamber inner room is provided with for the slippage of transmitting-receiving material mechanism, described transmitting-receiving material mechanism is provided with the separation seal group, the corresponding described vacuum chamber dividing plate of the dividing plate of described separation seal group is provided with, when described transmitting-receiving material mechanism was fed through described vacuum chamber inner room, described baffle region was every forming some separations; Described separation seal group dividing plate two side faces is installed with the plate that exceeds dividing plate, form caulking groove therebetween, group is provided with O type ring in the described caulking groove, described O type ring is the three-dimensional and inner plenum space of perforation of establishing, periphery is provided with charging connector and is communicated to described plenum space, also embeds described vacuum chamber dividing plate in the described caulking groove, described O type ring inflation, seal the slit between described two dividing plates, allow the certain parting seal of described each separation.
In the above-mentioned the technical solution of the utility model, described O type ring is three-dimensional pattern, and it has ring segment and vertical bar section therebetween, and described ring segment and described vertical bar intersegmental part are set as hollow and connect mutually, and described O type ring is provided with more than one charging connector.
In the above the technical solution of the utility model, the setting of the ring segment of described O type ring for interrupting, the biend of interruption position forms sealing.
In the above the technical solution of the utility model, it is two that the best of described charging connector is provided with quantity, and is located at the front and back ends of described O type ring respectively.
Adopt technique scheme, the utlity model has following advantage: 1, because the forward and backward charging connector that is equipped with of the utility model O type ring, O type ring inside is set as hollow, to be mounted on vacuum plating unit inter-agency when O type ring, and inflate when making O type ring dilatational strain riddle in the inter-agency slit, just can reach the purpose of leakproof and sealing, and can be in inter-agency separation after losing heart, reach three-dimensional pattern O type ring, inflatable seal with leakproof and often be beneficial to the inter-agency leakproof effect of separating, making up.2, O type ring of the present utility model is hollow and is the sealing means of inflation, inequality with the sealing means of commonly using O type ring extrusion distortion, O type ring of the present utility model can be used as the inter-agency leak-proof device of normal separation, combination, commonly use O type ring and then be unfavorable under this kind form, using, therefore the utlity model has the effect of enhancement.3, the vacuum tightness difference of each separation of the utility model, manufacturing processed are also different, the effective seal area by O type ring every, each separation can not polluted mutually each other, do not have different separations interactional problem of gas in different manufacturing processedes yet.
Description of drawings
Fig. 1 is the schematic perspective view of the utility model one preferred embodiment;
Fig. 2 is that cut-away view is amplified in the part of the utility model one product example;
Fig. 3 is the schematic perspective view of the utility model separation seal group;
Fig. 4 is that the side of vacuum plating unit of the present utility model is cutd open and shown sketch;
Fig. 5 is the stereographic map of the utility model O type ring;
Fig. 6 is that driving fit concerns the partial cutaway diagrammatic sketch between dividing plate after vacuum chamber inner room group of the present utility model is gone into transmitting-receiving material mechanism.
Embodiment
In order to describe structure of the present utility model, characteristics and effect in detail, existing following preferred embodiment of act and conjunction with figs. are described as follows.
As shown in Figure 1, schematic perspective view for the utility model one preferred embodiment, the vacuum plating unit that is provided with leak-proof device is generally the machine that is used to make nesa coating (ITO Film), flexible copper foil substrate (FCCL), anti-reflective film (AR coating) or the like, all is by one deck plastic plate (PC Film) 50 plating layer of silicon dioxide (SIO basically as nesa coating (ITO Film) (as shown in Figure 2) 2) 51, plate indium oxide layer tin (ITO) 52 or the like again, plate multilayer material, making nesa coating (ITO Film), and its coating process need vacuumize and pour into needed gas in the different manufacturing processedes, so can not pollute mutually, or influences each other.
A kind of vacuum plating unit that is provided with leak-proof device provided by the utility model, it consists predominantly of:
The vacuum chamber 10 of one vacuum plating unit 1, the inner room of vacuum chamber 10 is formed with plated film district 12, and plated film district 12 separates out a plurality of plated films space 131 by some dividing plates 13.
The transmitting-receiving material mechanism 20 of one vacuum plating unit 1 is located on the slide rail 2 of vacuum plating unit 1, and above vacuum chamber 10 inner rooms slide rail 14 is set also, so that correcting during slippage above transmitting-receiving material mechanism 20.Transmitting-receiving material mechanism 20 is provided with separation seal group 21 (as shown in Figure 3), the dividing plate 13 of the dividing plate 211 corresponding vacuum chambers 11 of separation seal group 21 is provided with, when transmitting-receiving material mechanism 20 was fed through vacuum chamber 10 inner rooms, separating of dividing plate 13,211 just formed some separations 30,31,32,33,34,35,36 (as shown in Figure 4).
Via said structure, after vacuum chamber inside vacuumized, separation 30~36 can make the vacuum tightness of each separation 30~36 adjust for independent by the air pump adjustment vacuum tightness of bleeding in the vacuum chamber, and can not cause other separation vacuum tightness to adjust, the vacuum tightness that reaches each separation 30~36 is different.
As Fig. 3, Fig. 5, shown in Figure 6, separation seal group 21 is according to the position of corresponding vacuum chamber 11 (as shown in Figure 1) inner room 15 dividing plates 13, also be provided with dividing plate 211, the two side faces of each dividing plate 211 also is provided with the plate 212,213 that exceeds dividing plate 211, make 212,213 of two plates form a caulking groove 214, group is provided with O type ring 40 in the caulking groove 214, and also can embed dividing plate 13 in the caulking groove 214, makes dividing plate 13,211 and two plates 212,213 constitute one and separates the space.When O type ring 40 inflations, a limited field can be arranged, and the inflation of O type ring seal diaphragm 13,211 and 212,213 any slits that might leak of two plates really, allow each separation 30~36 (as shown in Figure 4) sealing really.
Above-mentioned O type ring 40 inside are provided with the plenum space 42 (as shown in Figure 6) of mutual perforation, and O type ring 40 outsides are provided with charging connector 41 and are communicated to inner inflatable space 42.
As shown in Figure 5, the O type ring 40 of one three-dimensional pattern, its include all flanges around ring segment 43 and a plurality of vertical bar sections 44 therebetween, ring segment 43 is set as plenum space 42 with vertical bar section 44 inside and connects with each other, O type ring 40 is provided with two charging connectors 41,411, gas can be charged into O type ring 40 by its charging connector 41,411, and make O type ring 40 inflations, expansible O type ring 40 just can riddle between the dividing plate of vacuum plating unit separation in the slit, reaches the purpose of sealed against leakage.
Above-mentioned ring segment 43 also can be the setting of interrupting, and the biend 431 of interruption position also forms sealing.
As shown in Figure 3, be separation seal group schematic perspective view of the present utility model, the 21 ring weeks of separation seal group of its vacuum plating unit 1 are formed with some dividing plates 211, two sides of dividing plate 211 also are installed with two plates 212,213 that exceed dividing plate 211, to form caulking groove 214, make in O type ring 40 (as shown in Figure 6) Rong Zuqi, caulking groove 214 also can embed for dividing plate 13 (as shown in Figure 1), makes its O type ring 40 can effectively bring into play the effect of sealing thus when inflation.
The effect enhancement part that the utility model obtained is as follows:
1, the utility model provides a kind of device kenel of innovation, for a kind of vacuum plating unit that is suitable for often separates the leak-proof device that uses under the combination form, break through the use form of the habitual in the past solid O type of cast ring, the O type ring of its three-dimensional pattern can be made into hollow, and be provided with charging connector at two ends, by the charging connector inflation O type ring is expanded and reach sealing and leakproof, this kind form of implementation is different from commonly uses O type ring, makes the utility model tool novelty.
2, the utility model is by utilizing the O type ring of three-dimensional pattern on vacuum plating unit, and make O type ring realize sealed against leakage with the form of inflation, and O type ring is inflatable, lose heart, the inter-agency leakproof that often separates under the combination situations that is beneficial to vacuum plating unit is used, and makes to the utlity model has practicality with creative.
3, the vacuum tightness difference of each separation of the utility model, manufacturing processed are also different, the effective seal area by O type ring every, each separation can not polluted mutually each other, do not have different separations interactional problem of gas in different manufacturing processedes yet.
From the above, the utility model has solved the problem that vacuum plating unit often separates the inter-agency leakage of combination, has industry applications preferably.
The above; only preferred embodiment for technical characterictic of the present utility model is specifically described; all personages who is familiar with this technology; all can be according to specification sheets of the present utility model, claims and accompanying drawing; the utility model is changed and revises not breaking away under spirit of the present utility model and the principle; these changes and modification all should be encompassed in the protection domain of the present utility model.

Claims (4)

1, a kind of vacuum plating unit that is provided with leak-proof device is characterized in that including:
One vacuum chamber, the inner room of described vacuum chamber is formed with the plated film district, and described plated film district is separated out a plurality of plated films space by some baffle region;
One transmitting-receiving material mechanism, be located on the slide rail of described vacuum plating unit, the slide rail of correcting when the top of described vacuum chamber inner room is provided with for the slippage of transmitting-receiving material mechanism, described transmitting-receiving material mechanism is provided with the separation seal group, the corresponding described vacuum chamber dividing plate of the dividing plate of described separation seal group is provided with, when described transmitting-receiving material mechanism was fed through described vacuum chamber inner room, described baffle region was every forming some separations;
Described separation seal group dividing plate two side faces is installed with the plate that exceeds dividing plate, form caulking groove therebetween, group is provided with O type ring in the described caulking groove, described O type ring is the three-dimensional and inner plenum space of perforation of establishing, periphery is provided with charging connector and is communicated to described plenum space, also embeds described vacuum chamber dividing plate in the described caulking groove, described O type ring inflation, seal the slit between described two dividing plates, allow the certain parting seal of described each separation.
2, a kind of vacuum plating unit that is provided with leak-proof device as claimed in claim 1, it is characterized in that: described O type ring is three-dimensional pattern, it has ring segment and vertical bar section therebetween, described ring segment and described vertical bar intersegmental part are set as hollow and connect mutually, and described O type ring is provided with more than one charging connector.
3, a kind of vacuum plating unit that is provided with leak-proof device as claimed in claim 1 is characterized in that: the setting of the ring segment of described O type ring for interrupting, the biend of interruption position forms sealing.
4, a kind of vacuum plating unit that is provided with leak-proof device as claimed in claim 1, it is characterized in that: it is two that the best of described charging connector is provided with quantity, and is located at the front and back ends of described O type ring respectively.
CN 200620004666 2006-04-05 2006-04-05 Vacuum film coating machine with anti-leakage device Expired - Fee Related CN2908529Y (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 200620004666 CN2908529Y (en) 2006-04-05 2006-04-05 Vacuum film coating machine with anti-leakage device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 200620004666 CN2908529Y (en) 2006-04-05 2006-04-05 Vacuum film coating machine with anti-leakage device

Publications (1)

Publication Number Publication Date
CN2908529Y true CN2908529Y (en) 2007-06-06

Family

ID=38127739

Family Applications (1)

Application Number Title Priority Date Filing Date
CN 200620004666 Expired - Fee Related CN2908529Y (en) 2006-04-05 2006-04-05 Vacuum film coating machine with anti-leakage device

Country Status (1)

Country Link
CN (1) CN2908529Y (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103964699A (en) * 2013-01-29 2014-08-06 上海北玻镀膜技术工业有限公司 Linear holding valve

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103964699A (en) * 2013-01-29 2014-08-06 上海北玻镀膜技术工业有限公司 Linear holding valve

Similar Documents

Publication Publication Date Title
CA1128003A (en) Gasket means for electrolytic cell assembly
WO2006113340A3 (en) Stacked pieyoelectric diaphragm members
WO2007122072A3 (en) Multipart household appliance
CN103201543A (en) Gasket and method for producing same
US20090033111A1 (en) Lifting Device for a Vacuum Transfer System
WO2007007612A1 (en) Gasket
WO2005045965A3 (en) Electrolyte sheet with protruding features having undercut angles and method of separating such sheet from its carrier
EP1795953A4 (en) Image display medium and method for producing image display medium
WO2006116698A3 (en) Sealing component defining first, second, and third seals
US10017305B2 (en) Vacuum system and seal
CN2908529Y (en) Vacuum film coating machine with anti-leakage device
WO2006024632A3 (en) Glazing panel
CN1675485A (en) Gasket
CA2648758A1 (en) Fuel cell and separator for the same
MXPA06008429A (en) Compression unit, for pipe penetrations etc. adaptable to different frames.
CN105280933B (en) Fuel cell rubber packing
CN100406731C (en) Vacuum pump capable of block
CN203009820U (en) Sealing ring
CN2660175Y (en) Multi-stage vacuum pump
JP2003157866A (en) Gasket for fuel cell
CN2837554Y (en) Vacuum pump capable of preventing jam
CN201661455U (en) Improved diaphragm of dual-diaphragm pump
JP5293949B2 (en) gasket
CN203439706U (en) Vacuum suctioning disc
CN211398567U (en) Sealing device for vacuum cavity of magnetron sputtering equipment

Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
ASS Succession or assignment of patent right

Owner name: HUANG NENGJIE

Free format text: FORMER OWNER: JIANSE SCIENCE + TECHNOLOGY CO., LTD.

Effective date: 20110715

C41 Transfer of patent application or patent right or utility model
COR Change of bibliographic data

Free format text: CORRECT: ADDRESS; FROM: TAIWAN, CHINA TO: 104 NO. 88, LANE 85, LINSEN NORTH ROAD, NEIGHBORHOOD 6, ZHENGYILI, JHONGSHAN DISTRICT, TAIPEI CITY, TAIWAN, CHINA

TR01 Transfer of patent right

Effective date of registration: 20110715

Address after: 1 04 Chinese Taiwan Taipei District of Zhongshan city in 6 justice No. 88 Lane 85 North Road adjacent Tomlinson

Patentee after: Huang Nengjie

Address before: Taiwan, China

Patentee before: Sputtering Precision Machine Co., Ltd.

C17 Cessation of patent right
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20070606

Termination date: 20120405