CN202597713U - Vacuum air valve - Google Patents

Vacuum air valve Download PDF

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Publication number
CN202597713U
CN202597713U CN 201220127181 CN201220127181U CN202597713U CN 202597713 U CN202597713 U CN 202597713U CN 201220127181 CN201220127181 CN 201220127181 CN 201220127181 U CN201220127181 U CN 201220127181U CN 202597713 U CN202597713 U CN 202597713U
Authority
CN
China
Prior art keywords
valve
valve body
vacuum
valve gap
ram
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN 201220127181
Other languages
Chinese (zh)
Inventor
赵铭
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Guangdong Bao Bao Intelligent Equipment Technology Co., Ltd.
Original Assignee
GUANGDONG YOUTONG INDUSTRY Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by GUANGDONG YOUTONG INDUSTRY Co Ltd filed Critical GUANGDONG YOUTONG INDUSTRY Co Ltd
Priority to CN 201220127181 priority Critical patent/CN202597713U/en
Application granted granted Critical
Publication of CN202597713U publication Critical patent/CN202597713U/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

The utility model relates to the technical field of vacuum instruments, in particular to a vacuum air valve which is applicable to vacuum coating equipment. The vacuum air valve comprises a hollow valve body, wherein a valve cover capable of movably sealing an air inlet, which is communicated with a corresponding vacuum vessel, of the valve body is assembled in the valve body, and is driven by a power cylinder; and the power cylinder is a cylinder, and is fixedly connected with the valve body, and a telescopic shaft of the power cylinder is inserted into the valve body and is connected with the valve cover. The valve cover is opened and closed in a pneumatic mode; the vacuum air valve can actuate stably, is easy to operate and convenient to maintain, overhaul, install and use, can be well sealed, has a simple structure and a small size, is scientific and reasonable, and is low in investment cost; and the operation rate and operability of the air valve are greatly improved.

Description

A kind of vacuum air valve
Technical field
The utility model relates to vacuum apparatus technical field, especially relates to the vacuum air valve that is applicable to vacuum coating equipment.
Background technique
Traditional electroplating technology mainly is to be main with the water plating, and the water plating can produce waste liquid, waste gas and refuse, if handle badly, emit and can cause environmental pollution, and not environmental protection, and difficulty of governance is big, investment is also big, thereby this technology progressively is restricted.
Have the physical vapor deposition (PVD) technology subsequently; Mainly be under vacuum environment, to carry out surface treatment; Physical vapor deposition itself is divided into three kinds: vacuum vapor plating, vacuum sputtering plating and vacuum ion membrane plating; Develop quite soon over past ten years, become one of current state-of-the-art surface treatment mode.Physical gas phase deposition technology is had relatively high expectations to vacuum environment, thereby needs more rigorous, stable vacuum apparatus, like the vacuum air valve; Need have good sealing property and handling; Under this background, the applicant caters to the demand of market development, the spirit of adhering to the research innovation, keeping on improving; Utilize its professional eye and professional knowledge, work out a kind of vacuum air valve that is applicable to vacuum coating equipment.
Summary of the invention
It is a kind of simple in structure, scientific and reasonable that the purpose of the utility model is to provide, and is prone to make, and controls stable vacuum air valve.
For achieving the above object, the utility model adopts following technological scheme:
A kind of vacuum air valve includes hollow valve body, in valve body, is assembled with the valve gap of suction port of the corresponding vacuum vessel of connection of a movable sealed valve body, and valve gap is driven by a ram.
Said ram is a cylinder, and itself and valve body are fixed together, and the telescopic shaft of ram penetrates and connects valve gap in the valve body.
End towards the suction port of valve body of said valve gap is provided with sealing gasket, and valve gap with sealing gasket back to an end be provided with the telescopic shaft that the position of plugging into connects ram.
The position of plugging on the said valve gap is the end face form of grooves, and the telescopic shaft outer end of ram is designed to T shape, and it is fixing by semicircle pressure ring compacting that the back, position of plugging into of valve gap is inserted in the telescopic shaft outer end, and the winding of semicircle pressure ring is on valve gap.
The utility model adopts pneumatic mode to come the open and close valve gap, and action is stable, easy to operate, and good seal, and is simple in structure; Scientific and reasonable, cost of investment is low, and Maintenance and Repair are very convenient; The operation ratio and the operability of air valve have been improved greatly, advantages of small volume, installation, easy to use.
Description of drawings:
Accompanying drawing 1 is the preferred embodiment structural representation of the utility model.
Embodiment:
Below in conjunction with accompanying drawing the utility model is further specified:
Consult shown in Figure 1ly, the described a kind of vacuum air valve of the utility model includes hollow valve body 1, in valve body 1, is assembled with the valve gap 2 of suction port 11 of the corresponding vacuum vessel of connection of a movable sealed valve body 1, and valve gap 2 is driven by a ram 3; Ram 3 is a cylinder body, and itself and valve body 1 are fixed together, and the telescopic shaft 31 of ram 3 penetrates and connects valve gap 2 in the valve body 1.End towards the suction port 11 of valve body 1 of valve gap 2 is provided with sealing gasket 21, and valve gap 2 with sealing gasket 21 back to an end be provided with the telescopic shaft 31 that the position 22 of plugging into connects ram 3.
During work; Contract in the telescopic shaft 31 of ram 3 and then drive the suction port 11 of valve gap 2 motions away from valve body 1; The sealing gasket 21 of valve gap 2 leaves suction port 11, and at this moment air can get into vacuum vessel from the suction port 11 of valve body 1, and container reaches atmospheric conditions from vacuum state thus.When the telescopic shaft 31 overhanging suction ports 11 that then drive valve gap 2 motion butt joint valve bodies 1 of ram 3, the sealing gasket 21 of valve gap 2 is sealed into gas port 11, and at this moment air can not get into vacuum vessel from the suction port 11 of valve body 1, reaches sealing state, vacuumizes with Bedpan.
Shown in Figure 1; In the present embodiment, the position 22 of plugging on the said valve gap 2 is the end face form of grooves, and telescopic shaft 31 outer ends of ram 3 are designed to T shape; It is fixing by a semicircle pressure ring 4 compactings that 22 backs, position of plugging into of valve gap 2 are inserted in telescopic shaft 31 outer ends, and 4 windings of semicircle pressure ring are on valve gap 2.
The utility model is simple in structure, and is scientific and reasonable, and cost of investment is low, and Maintenance and Repair are very convenient, improved the operation ratio and the operability of air valve greatly, advantages of small volume, installation, easy to use; Utilize 2 work of ram 3 telescopic drive valve gaps, action is stable, easy to operate, and good seal, and is widely applicable, and Economy is high.

Claims (4)

1. vacuum air valve; Include hollow valve body (1); It is characterized in that: in valve body (1), be assembled with the valve gap (2) of suction port (11) of the corresponding vacuum vessel of connection of a movable sealed valve body (1), valve gap (2) is driven by a ram (3).
2. a kind of vacuum air valve according to claim 1 is characterized in that: said ram (3) is a cylinder, and itself and valve body (1) are fixed together, and the telescopic shaft (31) of ram (3) penetrates and connects valve gap (2) in the valve body (1).
3. a kind of vacuum air valve according to claim 1 and 2; It is characterized in that: an end of the suction port towards valve body (1) of said valve gap (2) (11) is provided with sealing gasket (21), and valve gap (2) with sealing gasket (21) back to an end be provided with the position (22) of plugging into and connect the telescopic shaft (31) of ram (3).
4. a kind of vacuum air valve according to claim 3; It is characterized in that: the position (22) of plugging on the said valve gap (2) is the end face form of grooves; Telescopic shaft (31) outer end of ram (3) is designed to T shape; It is fixing by a semicircle pressure ring (4) compacting that the back, position (22) of plugging into of valve gap (2) is inserted in telescopic shaft (31) outer end, and semicircle pressure ring (4) winding is on valve gap (2).
CN 201220127181 2012-03-30 2012-03-30 Vacuum air valve Expired - Fee Related CN202597713U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 201220127181 CN202597713U (en) 2012-03-30 2012-03-30 Vacuum air valve

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 201220127181 CN202597713U (en) 2012-03-30 2012-03-30 Vacuum air valve

Publications (1)

Publication Number Publication Date
CN202597713U true CN202597713U (en) 2012-12-12

Family

ID=47315252

Family Applications (1)

Application Number Title Priority Date Filing Date
CN 201220127181 Expired - Fee Related CN202597713U (en) 2012-03-30 2012-03-30 Vacuum air valve

Country Status (1)

Country Link
CN (1) CN202597713U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103964699A (en) * 2013-01-29 2014-08-06 上海北玻镀膜技术工业有限公司 Linear holding valve

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103964699A (en) * 2013-01-29 2014-08-06 上海北玻镀膜技术工业有限公司 Linear holding valve

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Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
TR01 Transfer of patent right

Effective date of registration: 20180510

Address after: 523000 fast track road in the eastern part of deep pit Industrial Zone, Dongguan, Guangdong.

Patentee after: Guangdong Bao Bao Intelligent Equipment Technology Co., Ltd.

Address before: 523000 fast track road in the eastern part of deep pit Industrial Zone, Dongguan, Guangdong.

Patentee before: Guangdong Youtong Industry Co., Ltd.

TR01 Transfer of patent right
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20121212

Termination date: 20200330

CF01 Termination of patent right due to non-payment of annual fee