CN103956649B - Liquid refrigeration type semiconductor laser device with anti-corrosion structure - Google Patents
Liquid refrigeration type semiconductor laser device with anti-corrosion structure Download PDFInfo
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- CN103956649B CN103956649B CN201410204383.4A CN201410204383A CN103956649B CN 103956649 B CN103956649 B CN 103956649B CN 201410204383 A CN201410204383 A CN 201410204383A CN 103956649 B CN103956649 B CN 103956649B
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Abstract
The invention provides a liquid refrigeration type semiconductor laser device with an anti-corrosion structure. The liquid refrigeration type semiconductor laser device is provided with a liquid inlet pipe and a liquid outlet pipe so that liquid entering a liquid refrigerator can not easily make contact with a negative electrode connecting block or a positive electrode connecting block; in this way, the liquid can not easily corrode the electrode connecting blocks, it is ensured that metal ions can not enter a liquid passageway inside the liquid refrigerator, and reliability of the liquid refrigerator is improved; similarly, a liquid inlet cushion block and a liquid outlet cushion block are arranged, and therefore liquid can not make contact with the positive electrode connecting block or the negative electrode connecting block, the positive electrode connecting block can not be easily corroded, and reliability of the whole semiconductor laser device is improved.
Description
Technical field
The invention belongs to laser technology field, it is related to a kind of semiconductor laser, especially one kind has anti-corrosion structure
Semiconductor laser.
Background technology
High-power semiconductor laser has the advantages that small volume, lightweight, efficiency high, life-span length, is widely used in sharp
Light processing, laser medicine, laser display and field of scientific study, become that new century development is fast, achievement is many, Subject identity is wide, answer
With the big core devices of scope.
Semiconductor laser, dust very sensitive to environment, humidity, the condition such as temperature performance to laser instrument in application
There is extreme influence with service life, additionally, typical temperature is at less than 5 degree Celsius, body surface will condense, for partly leading
Body laser, condensation will lead to it easily short-circuit.Therefore, for playing the performance of semiconductor laser to greatest extent, in the urgent need to
A kind of semiconductor laser with anti-corrosion structure.
Chinese patent application publication No. cn 102055132 a, discloses a kind of vacuum sealing semiconductor laser, will be partly
Conductor laser is sealed in vacuum intracavity, vacuum-sealed cavity complex structure used, there is vacuum in addition in use and lets out
The risk of dew, if vacuum leak, is difficult to remove in the dust of vacuum intracavity, moisture is not easy to remove, and leads to semiconductor laser
Condensation.
Chinese patent application " outdoor semiconductor laser module " (cn 102237632 a) discloses the half of a kind of outdoor
Conductor laser, its structure is used in the semiconductor laser of wind-cooling heat dissipating, for liquid cooling type semiconductor laser not
It is suitable for, if having in this body structure steam, moisture to be difficult to derive simultaneously.
Content of the invention
It is an object of the invention to provide a kind of liquid refrigerating type semiconductor laser with anti-corrosion structure, have anti-
The advantage of corrosion.
Technical scheme is as follows:
A kind of liquid refrigerating type semiconductor laser with anticorrosion structure, including liquid chiller, semiconductor laser
Chip, positive pole contiguous block, negative pole contiguous block, liquid chiller upper surface is provided with semiconductor laser chip, in liquid chiller
Top arranges negative pole contiguous block, arranges positive pole contiguous block in the bottom of liquid chiller.
Liquid-entering hole, liquid outlet are had on described liquid chiller, passage aperture is 5 mm -5.5 mm.
Described liquid refrigerating type semiconductor laser also includes liquid-in pipe, drain pipe, enters fluid cushion block, goes out fluid cushion block.
Liquid-in pipe is arranged on positive pole contiguous block (or negative pole contiguous block) and is above connected with the liquid-entering hole of liquid chiller, drain pipe
It is arranged on that positive pole contiguous block (or negative pole contiguous block) is upper to be obtained liquid outlet with liquid chiller and be connected, enter fluid cushion block and be arranged on negative pole company
Connect block (or positive pole contiguous block) to be above used for being attached with liquid-entering hole top on liquid chiller；Go out fluid cushion block and be arranged on negative pole even
Connect that block (or positive pole contiguous block) is upper to be used for and be connected liquid outlet top on liquid chiller and be attached.
Additionally, a pair of connecting hole can be provided with positive pole contiguous block (or negative pole contiguous block), for place liquid-in pipe and
Drain pipe, described liquid-in pipe is arranged on a connecting hole of positive pole contiguous block (or negative pole contiguous block), for connecting liquid
Refrigerator liquid-entering hole；Described drain pipe is arranged on another connecting hole of positive pole contiguous block (or negative pole contiguous block), is used for
Connect liquid chiller liquid outlet.
In negative pole contiguous block (or positive pole contiguous block) a pair of cushion block deep gouge of upper setting, it is used for being placed into fluid cushion block and goes out fluid cushion
Block.
Enter fluid cushion block be arranged in the upper cushion block deep gouge of negative pole contiguous block (or positive pole contiguous block) be used for and liquid refrigerating
On device, liquid-entering hole top is attached；Go out fluid cushion block and be arranged on negative pole contiguous block (or positive pole contiguous block) another cushion block deep gouge upper
In, for be connected liquid outlet top on liquid chiller and be attached.
The present invention sets into fluid cushion block and goes out fluid cushion block, and liquid passes through the liquid liquid chiller after liquid-entering hole entrance
Flow out from liquid outlet after passage, in this process, liquid can contact negative pole contiguous block (positive pole contiguous block), to negative pole contiguous block
(positive pole contiguous block) carries out liquid and washes away, and sets into fluid cushion block and after going out fluid cushion block, and liquid washes away to entering fluid cushion block and go out fluid cushion
On block, it is difficult erosion electrode contiguous block
Present invention setting liquid-in pipe and drain pipe, when liquid is passed through, is passed through from liquid-in pipe, when liquid flows out, from going out liquid
Pipe flow goes out, and liquid will not directly be contacted with positive pole contiguous block (negative pole contiguous block), so that electrode contiguous block is difficult by liquid
Erosion.
The material selection corrosion-resistant material of liquid-in pipe and drain pipe, can select plastics, pottery etc..
Enter fluid cushion block and the material selection corrosion-resistant material going out fluid cushion block, plastics, pottery etc. can be selected.
Liquid chiller surface arranges diffusion barrier, arranges adhesion layer, semiconductor laser on diffusion barrier
Chip is welded on adhesion layer by solder, and diffusion barrier is to stop adhesive layer material from diffusing to liquid chiller body
Above form diffusion cavity or the fragile material layer of adhesion difference, ultimately result in semiconductor laser chip from heat sink material
Come off.
Liquid chiller selects metal material, can select metallic copper, metallic copper tungsten etc..
Diffusion blocking layer material selects metallic nickel, and thickness is 3 μm -6 μm.
Adhesive layer material is 0.5 μm -1 μm from gold, thickness.
Liquid chiller is internally provided with fluid passage, and passage aperture is 100 μm -300 μm.
In the present invention, another kind has the semiconductor laser laminated array of liquid refrigerating type of anticorrosion structure, and it is n weldering
The liquid chiller being connected to semiconductor laser chip is formed by stacking, and n is more than 1, and on top liquid chiller top, setting is negative
Pole contiguous block, arranges positive pole contiguous block in lowermost end liquid chiller bottom.
Liquid-entering hole and liquid outlet are provided with each liquid chiller, liquid chiller connects simultaneously liquid-entering hole and liquid outlet
In be provided with sealing ring, a diameter of 5.0mm -5.5mm of liquid-entering hole and liquid outlet.
Liquid-in pipe is set in lowermost end liquid chiller liquid-entering hole, drain pipe is set in liquid outlet；In top liquid
Refrigerator liquid-entering hole top is provided with and is used for connecting negative pole contiguous block into fluid cushion block, and liquid outlet top is provided with out fluid cushion block and is used for
Connect negative pole contiguous block.
Positive pole contiguous block (or negative pole contiguous block) is provided with a pair of connecting hole, for placing liquid-in pipe and drain pipe,
Described liquid-in pipe is arranged on a connecting hole of positive pole contiguous block (or negative pole contiguous block), enters for connecting liquid chiller
Fluid apertures；Described drain pipe is arranged on another connecting hole of positive pole contiguous block (or negative pole contiguous block), for connecting liquid
Refrigerator liquid outlet.
In negative pole contiguous block (or positive pole contiguous block) a pair of cushion block deep gouge of upper setting, it is used for being placed into fluid cushion block and goes out fluid cushion
Block.
Enter fluid cushion block be arranged in cushion block deep gouge of negative pole contiguous block (or positive pole contiguous block) be used for and liquid chiller
Upper liquid-entering hole top is attached；Go out fluid cushion block and be arranged on negative pole contiguous block (or positive pole contiguous block) another cushion block deep gouge upper
In, for be connected liquid outlet top on liquid chiller and be attached.
Described liquid-in pipe, drain pipe, enter fluid cushion block and go out the material that fluid cushion block of material selects non-metal anti-corrosion, from moulding
Material or pottery, also can be selected for fiber glass epoxy, organic toughened glass, epoxy phenol aldehyde glass steel, aluminium oxide ceramics.
The present invention sets into fluid cushion block and goes out fluid cushion block, and liquid passes through the liquid liquid chiller after liquid-entering hole entrance
Flow out from liquid outlet after passage, in this process, liquid can contact negative pole contiguous block (both positive and negative polarity contiguous block), to both positive and negative polarity even
Connect block and carry out liquid and wash away, after setting into fluid cushion block and going out fluid cushion block, liquid is difficult erosion electrode contiguous block.
Liquid refrigerating liquid chiller surface arranges diffusion barrier, arranges adhesion layer, partly lead on diffusion barrier
Body laser chip is welded on adhesion layer by solder.
Liquid chiller is internally provided with fluid passage, and passage aperture is 100 μm -300 μm.
Described electrode contiguous block selects high heat-conductivity conducting material, can be selected for silver, copper etc., and arranges diffusion blocking on its surface
Layer, arranges adhesion layer in diffusion barrier.
Diffusion barrier selects nickel, thickness to be 3 μm -6 μm.
Adhesion coating is 0.5 μm -1 μm from gold, thickness.
It is for shield electrode articulamentum non-corrosive and to be easy to weld that adhesion layer choosing has gold.
Generally for the semiconductor laser of liquid refrigerating, refrigerator and semiconductor laser electrode select metal material,
It is passed through water for the refrigeration of semiconductor laser, the electrode of liquid meeting noise spectra of semiconductor lasers is washed away, in punching in refrigerator
During brush, it may occur that galvanic interaction when metal is contacted with water, cause the electrochemical corrosion to metal, in one side water
Oxygen and metallic element there is oxidation reaction, even if the water on the other hand in liquid chiller is deionized water, contain in metal
There are the impurity such as carbon, in the environment having water, galvanic interaction can be formed and corrode.Oxygen is main caustic, two in water
There is dissolved gas, metal and salt type oxide, Yi Jiqi on extent of corrosion impact compared with flood in the content of carbonoxide and ph value
Its Organic substance, these numerous impurity make water have electric conductivity, and also metal is created with corrosivity effect, finally affect quasiconductor
The life and reliability of laser device.
At present, liquid refrigerating type semiconductor laser of the prior art, is not used alone liquid-in pipe, drain pipe, and only
It is to be used as liquid discharge by the liquid-entering hole on liquid chiller and liquid outlet to enter path, liquid passes through liquid after liquid-entering hole entrance
Flow out from liquid outlet after fluid passage in refrigerator, in this process, liquid can contact both positive and negative polarity contiguous block, to both positive and negative polarity
Contiguous block carries out liquid and washes away, on the one hand, its surface of the liquid corrosion contacting with electrode contiguous block, leads to electrode contiguous block surface
Layer comes off；On the other hand, liquid contact electrode contiguous block surface, there is electrochemical corrosion in electrode contiguous block surface, surface is by oxygen
After change, metal ion can enter in the fluid passage within liquid chiller, adsorption of metal ions impurity or carry out shape after complexation
Become larger particle, lead to the fluid passage within liquid chiller to block.
The present invention arrange liquid-in pipe, drain pipe make the liquid entering in liquid chiller be difficult with negative pole contiguous block (or
Positive pole contiguous block) contact, so will be difficult electrode contiguous block is corroded, thus ensure that metal ion will not enter liquid
In fluid passage within refrigerator, improve the reliability of liquid chiller；In the same manner, the present invention sets into fluid cushion block and goes out liquid
Cushion block so that liquid is not contacted with anode electrode contiguous block (or negative pole contiguous block), not perishable positive pole contiguous block, improve whole
The reliability of individual semiconductor laser device.
Brief description
Fig. 1 is the schematic diagram of the liquid refrigerating type semiconductor laser of the present invention.
Fig. 2 is the schematic diagram of the semiconductor laser laminated array of liquid refrigerating type of the present invention.
Fig. 3 is provided with the schematic diagram of the electrode contiguous block of cushion block deep gouge for the present invention.
Drawing reference numeral illustrates: 1 is liquid chiller；2 is semiconductor laser chip；3 is positive pole contiguous block；4 is negative pole
Contiguous block；5 is liquid-in pipe；6 is drain pipe；7 is into fluid cushion block；8 is fluid cushion block；9 is connecting hole；10 is cushion block deep gouge, 11
For liquid-entering hole, 12 is liquid outlet.
Specific embodiment
Fig. 1 is the schematic diagram of fluid present invention refrigeration mode semiconductor laser, a kind of liquid refrigerating with anticorrosion structure
Type semiconductor laser, including liquid chiller 1, semiconductor laser chip 2, positive pole contiguous block 3, negative pole contiguous block 4, liquid
Refrigerator 1 upper surface is provided with semiconductor laser chip 2, arranges positive pole contiguous block 3 in liquid chiller 1 bottom, in liquid
The top setting negative pole contiguous block 4 of refrigerator.
Described liquid refrigerating type semiconductor laser also includes liquid-in pipe 5, drain pipe 6, enters fluid cushion block 7, goes out fluid cushion block
8.
Liquid-entering hole 11, liquid outlet 12 are had on described liquid chiller, liquid chiller 1 surface arranges diffusion barrier,
Adhesion layer is set on diffusion barrier, and semiconductor laser chip 2 is welded on adhesion layer by solder, diffusion barrier
It is to form diffusion cavity or fragile material layer to stop adhesive layer material from diffusing on liquid chiller body, finally lead
Induced semiconductor chip of laser comes off from heat sink.
Liquid chiller 1 selects metal or metal-base composites, can select metallic copper, copper-tungsten, copper-diamond
Composite etc..
Diffusion blocking layer material selects metallic nickel, and thickness is 3 μm -6 μm.
Adhesive layer material is 0.5 μm -1 μm from gold, thickness.
Liquid chiller 1 is internally provided with fluid passage, and passage aperture is 100 μm -300 μm.
In positive pole contiguous block 3(or negative pole contiguous block 4) on be provided with a pair of connecting hole 9, for placing liquid-in pipe 5 and going out liquid
Pipe 6, described liquid-in pipe 5 is arranged on positive pole contiguous block 3(or negative pole contiguous block 4) a connecting hole on, for connecting liquid
Refrigerator 1 liquid-entering hole 11；Described drain pipe 6 is arranged on positive pole contiguous block 3(or negative pole contiguous block 4) another connecting hole
On, for connecting liquid chiller liquid outlet 12.
In negative pole contiguous block 4(or positive pole contiguous block 3) a pair of cushion block deep gouge 10 of upper setting, it is used for being placed into fluid cushion block 7 He
Go out fluid cushion block 8.
Enter fluid cushion block 7 and be arranged on negative pole contiguous block 4(or positive pole contiguous block 3) in a upper cushion block deep gouge 10 for and liquid
On refrigerator 1, liquid-entering hole 11 top is attached；Go out fluid cushion block 8 and be arranged on negative pole contiguous block 4(or positive pole contiguous block 3) upper another
In individual cushion block deep gouge 10, for be connected liquid outlet 12 top on liquid chiller 1 and be attached.
Fig. 2 is the schematic diagram of the semiconductor laser laminated array of liquid refrigerating type of the present invention, has the liquid of anticorrosion structure
The semiconductor laser laminated array of system cold mould, it is superimposed for multiple liquid chillers 1 being welded with semiconductor laser chip 2
Form, negative pole contiguous block 4(or positive pole contiguous block 3 be set on top liquid chiller 1 top), in lowermost end liquid chiller
1 bottom setting positive pole contiguous block 3(or negative pole contiguous block 4).
It is provided with sealing ring in the liquid-entering hole 11 of each liquid chiller 1 connection and liquid outlet 12.
Liquid-in pipe 5 is set in the liquid-entering hole 11 of lowermost end liquid chiller 1, drain pipe 6 is set in liquid outlet 12；?
Liquid-entering hole 11 top of top liquid chiller 1 is provided with and is used for connecting negative pole contiguous block 4(or positive pole contiguous block into fluid cushion block 7
3), liquid outlet 12 top is provided with out fluid cushion block 8 and is used for connecting negative pole contiguous block 4(or positive pole contiguous block 3).
In positive pole contiguous block 3(or negative pole contiguous block 4) on be provided with a pair of connecting hole 9, for placing liquid-in pipe 5 and going out liquid
Pipe 6, described liquid-in pipe 3 is arranged on positive pole contiguous block 3(or negative pole contiguous block 4) a connecting hole 8 on, for connecting liquid
The liquid-entering hole 11 of refrigerator 1；Described drain pipe 6 is arranged on positive pole contiguous block 3(or negative pole contiguous block 4) another connecting hole
On 9, for connecting liquid chiller 1 liquid outlet 12.
In negative pole contiguous block 4(or positive pole contiguous block 3) a pair of cushion block deep gouge 10 of upper setting, it is used for being placed into fluid cushion block 7 He
Go out fluid cushion block 8.
Enter fluid cushion block 7 and be arranged on negative pole contiguous block 4(or positive pole contiguous block 3) in a cushion block deep gouge 10 for and liquid system
Liquid-entering hole 11 top on cooler 1 is attached；Go out fluid cushion block 8 and be arranged on negative pole contiguous block 4(or positive pole contiguous block 3) upper another
In individual cushion block deep gouge 10, for be connected liquid outlet 12 top on liquid chiller 1 and be attached.
Liquid-entering hole 11, liquid outlet 12 are had on described liquid chiller 1, liquid chiller 1 surface arranges diffusion barrier,
Adhesion layer is set on diffusion barrier, and semiconductor laser chip 2 is welded on adhesion layer by solder.
Liquid chiller 1 is internally provided with fluid passage, and passage aperture is φ 5.0mm-φ 5.5mm.
Described liquid-in pipe 5, drain pipe 6, the material entering fluid cushion block 7 and going out fluid cushion block 8 material selection non-metal anti-corrosion, choosing
With plastics or pottery, also can be selected for fiber glass epoxy, organic toughened glass, epoxy phenol aldehyde glass steel, aluminium oxide ceramics
Described liquid chiller 1 selects high heat-conductivity conducting material, can be selected for silver, copper etc., and in the setting diffusion resistance of its surface
Hinder layer, adhesion layer is arranged on diffusion barrier, diffusion barrier selects nickel, thickness to be 3 μm -6 μm.
Adhesion coating is 0.5 μm -1 μm from gold, thickness.
It is for shield electrode articulamentum non-corrosive and to be easy to weld that adhesion layer choosing has gold.
At present, liquid refrigerating type semiconductor laser of the prior art, is not used alone liquid-in pipe, drain pipe, and only
It is to be used as liquid discharge by the liquid-entering hole on liquid chiller and liquid outlet to enter path, liquid passes through liquid after liquid-entering hole entrance
Flow out from liquid outlet after fluid passage in refrigerator, in this process, liquid can contact both positive and negative polarity contiguous block, to both positive and negative polarity
Contiguous block carries out liquid and washes away, on the one hand, its surface of the liquid corrosion contacting with electrode contiguous block, leads to electrode contiguous block surface
Layer comes off；On the other hand, liquid contact electrode contiguous block surface, there is electrochemical corrosion in electrode contiguous block surface, surface is by oxygen
After change, metal ion can enter in the fluid passage within liquid chiller, adsorption of metal ions impurity or carry out shape after complexation
Become larger particle, lead to the fluid passage within liquid chiller to block.
The present invention arranges liquid-in pipe, drain pipe makes the liquid entering in liquid chiller be difficult to connect with negative pole contiguous block
Touching, being so difficult negative pole contiguous block is corroded, thus ensure that metal ion will not enter within liquid chiller
In fluid passage, improve the reliability of liquid chiller；In the same manner, the present invention sets into fluid cushion block and goes out fluid cushion block so that liquid
Body is not contacted with anode electrode contiguous block, not perishable positive pole contiguous block, improves the reliability of whole semiconductor laser device.
Claims (8)
1. a kind of liquid refrigerating type semiconductor laser with anticorrosion structure, including liquid chiller, semiconductor laser core
Piece, positive pole contiguous block, negative pole contiguous block, liquid chiller upper surface is provided with semiconductor laser chip, in liquid chiller
Top arranges negative pole contiguous block, arranges positive pole contiguous block in the bottom of liquid chiller, liquid chiller is provided with liquid-entering hole
With liquid outlet it is characterised in that: also include liquid-in pipe, drain pipe, enter fluid cushion block, go out fluid cushion block, described liquid-in pipe is arranged on
It is connected with liquid-entering hole on positive pole contiguous block, drain pipe is arranged on and is connected with drain pipe on positive pole contiguous block, enter fluid cushion block and be arranged on
It is used on negative pole contiguous block being attached with liquid-entering hole top on liquid chiller；Go out fluid cushion block and be arranged on use on negative pole contiguous block
In be connected liquid outlet top on liquid chiller and be attached.
2. the liquid refrigerating type semiconductor laser with anticorrosion structure according to claim 1 it is characterised in that: described
A pair of connecting hole is provided with positive pole contiguous block, for placing liquid-in pipe and drain pipe, described liquid-in pipe is arranged on positive pole even
Connect on a connecting hole of block, for connecting liquid chiller liquid-entering hole；Described drain pipe is arranged on the another of positive pole contiguous block
On one connecting hole, for connecting liquid chiller liquid outlet.
3. the liquid refrigerating type semiconductor laser with anticorrosion structure according to claim 1 and 2 it is characterised in that:
Liquid-in pipe, drain pipe, enter fluid cushion block and the material selection corrosion-resistant material going out fluid cushion block, from plastics or pottery.
4. the liquid refrigerating type semiconductor laser with anticorrosion structure according to claim 1 it is characterised in that: liquid
Refrigerator surface arranges diffusion barrier, arranges adhesion layer on diffusion blocking layer surface, and semiconductor laser chip passes through
Solder is welded on adhesion layer, and diffusion blocking layer material is metallic nickel, and thickness is 3 μm -6 μm, and adhesive layer material is gold, thickness
For 0.5 μm -1 μm, liquid chiller is internally provided with fluid passage, and passage aperture is 100 μm -300 μm.
5. a kind of semiconductor laser laminated array of liquid refrigerating type with anticorrosion structure, it is that the individual quasiconductor that is welded with of n swashs
The liquid chiller of light device chip is formed by stacking, and n is more than 1, arranges negative pole contiguous block on top liquid chiller top,
Bottoms liquid refrigerator bottom arrange positive pole contiguous block, liquid chiller is provided with liquid-entering hole and liquid outlet it is characterised in that:
Also include liquid-in pipe, drain pipe, enter fluid cushion block, go out fluid cushion block, described liquid-in pipe be arranged on positive pole contiguous block with bottom liquid
Liquid-entering hole on chiller connects, described drain pipe be arranged on positive pole contiguous block with bottoms liquid refrigerator on go out liquid
Pipe connects, and the described fluid cushion block that enters is arranged on negative pole contiguous block for being carried out even with liquid-entering hole top on the liquid chiller of top
Connect；The described fluid cushion block that goes out is arranged on negative pole contiguous block for being attached with liquid-entering hole top on the liquid chiller of top.
6. the semiconductor laser laminated array of liquid refrigerating type with anticorrosion structure according to claim 5, it is n
The liquid chiller being welded with semiconductor laser chip is formed by stacking, and n is more than 1, in the setting of top liquid chiller top
Negative pole contiguous block, lowermost end liquid chiller bottom arrange positive pole contiguous block it is characterised in that: on described positive pole contiguous block
It is provided with a pair of connecting hole, described liquid-in pipe is arranged on a connecting hole of positive pole contiguous block, for connecting liquid refrigerating
Device liquid-entering hole；Described drain pipe is arranged on another connecting hole of positive pole contiguous block, goes out liquid for connecting liquid chiller
Hole；A pair of cushion block deep gouge is arranged on described negative pole contiguous block, the described fluid cushion block that enters is arranged on one cushion block of negative pole contiguous block
It is used in deep gouge being attached with liquid-entering hole top on liquid chiller；Go out fluid cushion block and be arranged on another pad on negative pole contiguous block
In block deep gouge, for be connected liquid outlet top on liquid chiller and be attached.
7. the semiconductor laser laminated array of liquid refrigerating type with anticorrosion structure according to claim 5 or 6, it is special
Levy and be: liquid-in pipe, drain pipe, enter fluid cushion block and go out fluid cushion block material be corrosion-resistant material, be plastics, pottery.
8. the semiconductor laser laminated array of liquid refrigerating type with anticorrosion structure according to claim 5, its feature
It is: described liquid chiller surface setting diffusion barrier, adhesion layer, semiconductor laser are set on diffusion barrier
Device chip is welded on adhesion layer by solder, and diffusion blocking layer material is metallic nickel, and thickness is 3 μm -6 μm, adhesion layer material
Expect for gold, thickness is 0.5 μm -1 μm, and liquid chiller is internally provided with fluid passage, passage aperture is 100 μm -300 μm.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201410204383.4A CN103956649B (en) | 2014-05-15 | 2014-05-15 | Liquid refrigeration type semiconductor laser device with anti-corrosion structure |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410204383.4A CN103956649B (en) | 2014-05-15 | 2014-05-15 | Liquid refrigeration type semiconductor laser device with anti-corrosion structure |
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| CN103956649A CN103956649A (en) | 2014-07-30 |
| CN103956649B true CN103956649B (en) | 2017-01-25 |
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| CN111342337B (en) * | 2020-03-16 | 2021-09-10 | 石家庄麦特达电子科技有限公司 | Microchannel semiconductor laser |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101640379A (en) * | 2009-08-31 | 2010-02-03 | 西安炬光科技有限公司 | Novel low-cost stack-up array liquid refrigeration semiconductor laser and manufacturing method thereof |
| CN201450226U (en) * | 2009-08-31 | 2010-05-05 | 西安炬光科技有限公司 | Novel horizontal-array liquid refrigeration semiconductor laser with low cost |
| CN202103311U (en) * | 2011-07-01 | 2012-01-04 | 中国电子科技集团公司第十三研究所 | Micro-channel heat sink for laser |
| CN204103246U (en) * | 2014-05-15 | 2015-01-14 | 西安炬光科技有限公司 | A kind of liquid refrigerating type semiconductor laser with anticorrosion structure |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3721717B2 (en) * | 1997-06-03 | 2005-11-30 | 株式会社明電舎 | Semiconductor element cooling structure |
| JP2003008273A (en) * | 2001-06-25 | 2003-01-10 | Fanuc Ltd | Cooler and light source apparatus |
| US8804781B2 (en) * | 2012-10-29 | 2014-08-12 | Coherent, Inc. | Macro channel water-cooled heat-sink for diode-laser bars |
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101640379A (en) * | 2009-08-31 | 2010-02-03 | 西安炬光科技有限公司 | Novel low-cost stack-up array liquid refrigeration semiconductor laser and manufacturing method thereof |
| CN201450226U (en) * | 2009-08-31 | 2010-05-05 | 西安炬光科技有限公司 | Novel horizontal-array liquid refrigeration semiconductor laser with low cost |
| CN202103311U (en) * | 2011-07-01 | 2012-01-04 | 中国电子科技集团公司第十三研究所 | Micro-channel heat sink for laser |
| CN204103246U (en) * | 2014-05-15 | 2015-01-14 | 西安炬光科技有限公司 | A kind of liquid refrigerating type semiconductor laser with anticorrosion structure |
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