CN103901284A - Resonance type piezoelectric driving ground electric field sensor - Google Patents
Resonance type piezoelectric driving ground electric field sensor Download PDFInfo
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- CN103901284A CN103901284A CN201210580187.8A CN201210580187A CN103901284A CN 103901284 A CN103901284 A CN 103901284A CN 201210580187 A CN201210580187 A CN 201210580187A CN 103901284 A CN103901284 A CN 103901284A
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Abstract
The invention discloses a resonance type piezoelectric driving ground electric field sensor. The resonance type piezoelectric driving ground electric field sensor comprises: a piezoelectric driving sheet is provided with multiple holes; each metal induction electrode is provided with multiple fixation connection holes; multiple connection holes are symmetrically arranged on a metal fixation plate; the bottom end of each insulation column is fixedly connected within one connection hole in the metal fixation plate; the upper end portion of each insulation column is respectively fixedly connected within one fixation connection hole in each metal induction electrode; the lower end of each metal column is fixedly connected within one connection hole in the metal fixation plate; the top end of each metal column is fixedly connected within one hole in the piezoelectric driving sheet; the multiple metal columns are disposed between each pair of insulation columns; the piezoelectric driving sheet is disposed in a space composed of the multiple insulation columns, the metal fixation plate and the multiple metal induction electrodes; the piezoelectric driving sheet, the metal fixation plate and the multiple metal induction electrodes are parallel to each other; the piezoelectric driving sheet is connected with the metal fixation plate through the multiple metal columns; and the multiple metal induction electrodes are connected with the metal fixation plate respectively through each insulation column.
Description
Technical field
The present invention relates to sensor, particularly mode of resonance driving type piezoelectric actuator ground electric field sensor.
Background technology
Ground electric field sensor is the visual plant that ground electric field is surveyed, and ground electric field is surveyed significant for thunder and lightning weather warning.Very large with the atmospheric electric field difference of Thunderstorm Weather in sunny weather, survey this variation of finding in time atmospheric electric field by ground electric field, and researched and analysed, just can play Lightning Warning effect.Existing ground electric field sensor is mainly mill formula electric-field sensor and the electric-field sensor based on silicon micromachining technology, and appear obtaining morning time in its midfield mill formula electric-field sensor, and technology is relatively ripe, in ground electric field is surveyed, is widely used.Electric-field sensor based on silicon micromachining technology is a kind of micro field sensor occurring in recent years, this micro field sensor is conventionally take silicon chip as main material, by common integrated circuit processing technique, silicon materials are processed, have advantages of size little (being generally less than 1 centimetre), lightweight, low in energy consumption, be easy to mass.But this micro field sensor is because volume is small, all more responsive to airborne water droplet, dust, easily damage, therefore need to encapsulate, and encapsulation micro field sensor is a more difficult problem, and can increase lead time and the cost of sensor, and therefore this micro field sensor is also in the research and probe stage, and distance is practical also has some distances.
Summary of the invention
The technical matters existing in order to solve prior art scheme, the object of this invention is to provide a kind of mode of resonance driving type piezoelectric actuator ground electric field sensor.
For achieving the above object, the technical scheme of mode of resonance driving type piezoelectric actuator ground electric field sensor provided by the invention comprises: a piezoelectric driving plate, multiple metal induction electrode, a metal fixed head, and multiple insulated columns and multiple metal column, wherein:
On piezoelectric driving plate, be provided with multiple holes;
On each metal induction electrode, be provided with multiple coupling holes;
On metal fixed head, symmetry is laid with multiple connecting holes;
The bottom of each insulated column is fixed in a connecting hole on metal fixed head;
The upper end of each insulated column is fixed in respectively in a coupling hole on each metal induction electrode;
The lower end of each metal column is fixed in a connecting hole on metal fixed head;
The top of each metal column is fixed in a hole of piezoelectric driving plate;
Multiple metal columns are between every pair of insulated column; Piezoelectric driving plate is arranged in the space being made up of multiple insulated columns, metal fixed head and multiple metal induction electrode, and piezoelectric driving plate, metal fixed head and multiple metal induction electrode are parallel to each other, piezoelectric driving plate is connected with metal fixed head by multiple metal columns, and multiple metal induction electrodes are connected with metal fixed head by each insulated column respectively.
Preferred embodiment, described piezoelectric driving plate contains and is square or circular copper sheet and piezoelectric ceramics, and the upper surface of copper sheet and piezoelectric ceramics lower surface are bonded to one, and the upper surface of piezoelectric ceramics has one deck silver electrode.
Preferred embodiment is laid with two symmetrical holes on described copper sheet.
Preferred embodiment, described metal induction electrode is to use pair of metal induction electrode, each metal induction electrode is square.
Preferred embodiment, described metal fixed head is square, and is respectively provided with a connecting hole at metal fixed head four jiaos, and four connecting holes are respectively used to fix four insulated columns.
Preferred embodiment, is laid with respectively two symmetrical two symmetrical connections of connecting hole for fixing two metal columns in the centre position of metal fixed head two edges.
Beneficial effect of the present invention:
This mode of resonance driving type piezoelectric actuator ground electric field sensor of this patent invention adopts traditional Machining Technology to make, but volume competiting place mill formula electric-field sensor is little, and power consumption is also lower.Compared with micro field sensor based on silicon micromachining technology, although this new sensor volume is larger, but its structure is relatively simple, shorten the lead time of sensor, and this new sensor can directly be exposed among air, the encapsulation problem of having avoided considering transducer sensitive structure, is applicable to the detection of ground electric field under inclement weather.In addition, this electric-field sensor utilizes the mode of oscillation of piezoelectric driving plate under certain resonance frequency, has realized difference current output, is conducive to improve transducer sensitivity and suppresses environmental interference.
Accompanying drawing explanation
Fig. 1 a is the electric-field sensor structural representation that the present invention adopts square piezoelectric driving plate;
Fig. 1 b is the square piezoelectric driving plate front schematic view of Fig. 1 a;
Fig. 2 a is the structural representation of mode of resonance of the present invention, circular piezoelectric driving chip ground electric field sensor;
Fig. 2 b is the circular piezoelectric driving chip front schematic view of Fig. 2 a;
Fig. 3 is mode of resonance driving type piezoelectric actuator ground electric field sensor basic functional principle schematic diagram of the present invention of the present invention.
Embodiment
For making the object, technical solutions and advantages of the present invention clearer, below in conjunction with specific embodiment, and with reference to accompanying drawing, the present invention is described in more detail.
Mode of resonance driving type piezoelectric actuator ground electric field sensor of the present invention, piezoelectric driving plate 1 and multiple metal induction electrode, metal fixed head 4, multiple insulated columns 5 and multiple metal column 6, wherein: on piezoelectric driving plate 1, be provided with multiple holes; On each metal induction electrode, be provided with multiple coupling holes; On metal fixed head 4, symmetry is laid with multiple connecting holes; The bottom of each insulated column 5 is fixed in a connecting hole on metal fixed head 4; The upper end of each insulated column 5 is fixed in respectively in a coupling hole on each metal induction electrode; The lower end of each metal column 6 is fixed in a connecting hole on metal fixed head 4; The top of each metal column 6 is fixed in a hole of piezoelectric driving plate 1; Multiple metal columns 6 are between every pair of insulated column 5; Piezoelectric driving plate 1 is arranged in the space being made up of multiple insulated columns 5, metal fixed head 4 and multiple metal induction electrode, and piezoelectric driving plate 1, metal fixed head 4 and multiple metal induction electrode are parallel to each other, piezoelectric driving plate 1 is connected with metal fixed head 4 by multiple metal columns 6, and multiple metal induction electrodes 2 are connected with metal fixed head 4 by each insulated column 5 respectively with 3.
As Fig. 1 a and Fig. 1 b illustrate the embodiment 1 of the electric-field sensor structure that adopts square piezoelectric driving plate, use a piezoelectric driving plate 1, a pair of identical metal induction electrode, metal fixed head 4, four insulated columns 5 and two metal columns 6 to form.A pair of identical metal induction electrode is left induction electrode 2 and right induction electrode 3.
Described multiple metal induction electrode is use pair of metal induction electrode 2 and 3 and be square, and with multiple coupling holes, is connected and fixed by insulated column 5 and metal fixed head 4, and each metal induction electrode is connected with a pair of insulated column 5.
As Fig. 1 a and Fig. 1 b illustrate that piezoelectric driving plate 1 is square, or illustrate that piezoelectric driving plate 1 is rounded as Fig. 2 a and Fig. 2 b, described piezoelectric driving plate 1 contains and is square or circular copper sheet 12 and piezoelectric ceramics 11, the upper surface of copper sheet 12 and piezoelectric ceramics 11 lower surfaces are bonded to one, and the upper surface of piezoelectric ceramics 11 has one deck silver electrode 13.Piezoelectric ceramics 11 bondings less by the larger copper sheet of area 12 and area form, and there is one deck silver electrode 13 in the outside of piezoelectric ceramics 11, in the time of mode of resonance driving type piezoelectric actuator ground electric field working sensor, can apply AC drive voltage.
As Fig. 3 is illustrated in external electric field E, when mode of resonance driving type piezoelectric actuator ground electric field working sensor, need add AC drive voltage in a side of the silver electrode of piezoelectric ceramics 11 13, and copper sheet 12 parts of piezoelectric ceramics 11 are by metal column 6 and metal fixed head 4 common grounds, 1 of piezoelectric driving plate produces periodic vibration, wherein copper sheet 12 can play the effect of modulation external electric field E, makes the induced charge that on induction electrode 2 and 3, the generation cycle changes.When AC drive voltage is during in certain frequency, piezoelectric driving plate 1 can be in resonant condition, form the mode of oscillation of similar " seesaw " formula, be that one end of piezoelectric driving plate 1 is away from induction electrode, one end is near induction electrode, like this, under this mode of oscillation, on left induction electrode 2 and right induction electrode 3, the variation tendency of induced charge amount is contrary, thereby a pair of differential current signal i+ and i-are formed, utilize follow-up differential signal detection system to detect this to differential current signal, and by mode of resonance driving type piezoelectric actuator ground electric field sensor is demarcated, just can realize the detection to external electric field.The advantage of this Differential Detection is to improve the sensitivity of sensor and suppresses environmental interference.
It should be noted that, select " seesaw " mode of oscillation, because this mode of oscillation is fairly simple, the Axisymmetrical Vibration mode of some other resonance frequency of its tangible piezoelectric driving plate, as long as can guarantee left induction electrode 2, the contrary induced charge of formation and modification trend on right induction electrode 3, all can realize the differential signal output of mode of resonance driving type piezoelectric actuator ground electric field sensor, that is to say, mode of resonance driving type piezoelectric actuator ground electric field sensor is in real work, may there is more resonance frequency working point to select, but comparatively speaking, " seesaw " mode is the simplest, the most easily realize.
In addition, the full-size of square piezoelectric driving plate and circular piezoelectric driving chip is generally not more than 1 decimeter, and therefore this mode of resonance driving type piezoelectric actuator ground electric field sensor has advantages of small volume.
Described multiple metal induction electrode, is not limited to a pair of identical metal induction electrode 2 and 3, can also use two pairs or more multipair identical metal induction electrode.
Described multiple insulated column 5, is not limited to four insulated columns 5, can also use six, eight insulated columns 5 according to the size of metal fixed head 4.
Described multiple metal column 6, is not limited to two metal columns 6, can also use four, six, eight metal columns 5 according to the size of piezoelectric driving plate 1.
The above; be only the embodiment in the present invention, but protection scope of the present invention is not limited to this, any people who is familiar with this technology is in the disclosed technical scope of the present invention; can understand conversion or the replacement expected, all should be encompassed in of the present invention comprise scope within.
Claims (6)
1. a mode of resonance driving type piezoelectric actuator ground electric field sensor, is characterized in that comprising: a piezoelectric driving plate, multiple metal induction electrode, a metal fixed head, and multiple insulated columns and multiple metal column, wherein: on piezoelectric driving plate, be provided with multiple holes;
On each metal induction electrode, be provided with multiple coupling holes;
On metal fixed head, symmetry is laid with multiple connecting holes;
The bottom of each insulated column is fixed in a connecting hole on metal fixed head;
The upper end of each insulated column is fixed in respectively in a coupling hole on each metal induction electrode;
The lower end of each metal column is fixed in a connecting hole on metal fixed head;
The top of each metal column is fixed in a hole of piezoelectric driving plate;
Multiple metal columns are between every pair of insulated column; Piezoelectric driving plate is arranged in the space being made up of multiple insulated columns, metal fixed head and multiple metal induction electrode, and piezoelectric driving plate, metal fixed head and multiple metal induction electrode are parallel to each other, piezoelectric driving plate is connected with metal fixed head by multiple metal columns, and multiple metal induction electrodes are connected with metal fixed head by each insulated column respectively.
2. by mode of resonance driving type piezoelectric actuator ground electric field sensor claimed in claim 1, it is characterized in that, described piezoelectric driving plate contains and is square or circular copper sheet and piezoelectric ceramics, and the upper surface of copper sheet and piezoelectric ceramics lower surface are bonded to one, and the upper surface of piezoelectric ceramics has one deck silver electrode.
3. by mode of resonance driving type piezoelectric actuator ground electric field sensor claimed in claim 2, it is characterized in that, on described copper sheet, be laid with two symmetrical holes.
4. by mode of resonance driving type piezoelectric actuator ground electric field sensor claimed in claim 1, it is characterized in that, described metal induction electrode is to use pair of metal induction electrode, and each metal induction electrode is square.
5. by mode of resonance driving type piezoelectric actuator ground electric field sensor claimed in claim 1, it is characterized in that, described metal fixed head is square, and is respectively provided with a connecting hole at metal fixed head four jiaos, and four connecting holes are respectively used to fix four insulated columns.
6. by mode of resonance driving type piezoelectric actuator ground electric field sensor claimed in claim 5, it is characterized in that, be laid with respectively two symmetrical two symmetrical connections of connecting hole in the centre position of metal fixed head two edges for fixing two metal columns.
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| CN201210580187.8A CN103901284B (en) | 2012-12-27 | 2012-12-27 | Mode of resonance driving type piezoelectric actuator ground electric field sensor |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114384335A (en) * | 2021-12-03 | 2022-04-22 | 深圳市中明科技股份有限公司 | Electrostatic field detection sensor |
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2012
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| JPH01178887A (en) * | 1988-01-10 | 1989-07-17 | Giichiro Kato | All-weather duplex-type rotary field-strength meter |
| CN1492235A (en) * | 2002-10-23 | 2004-04-28 | 中国科学院电子学研究所 | Vibrative micro electric field sensor |
| CN1831545A (en) * | 2005-03-07 | 2006-09-13 | 中国科学院电子学研究所 | Static broach exciting difference detection type miniature electric field sensor |
| US20060279271A1 (en) * | 2005-06-09 | 2006-12-14 | Shanhong Xia | Electric field sensor with electrode interleaving vibration |
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| CN114384335A (en) * | 2021-12-03 | 2022-04-22 | 深圳市中明科技股份有限公司 | Electrostatic field detection sensor |
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