CN209198537U - A kind of moving seesaw-type microwave power detector of dilatation - Google Patents
A kind of moving seesaw-type microwave power detector of dilatation Download PDFInfo
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- CN209198537U CN209198537U CN201822039529.0U CN201822039529U CN209198537U CN 209198537 U CN209198537 U CN 209198537U CN 201822039529 U CN201822039529 U CN 201822039529U CN 209198537 U CN209198537 U CN 209198537U
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Abstract
The utility model discloses a kind of moving seesaw-type microwave power detectors of dilatation, including a substrate, coplanar waveguide transmission line, the first sensing electrode and the second sensing electrode and moving seesaw-type both-end cantilever beam, coplanar waveguide transmission line, the first sensing electrode and the second sensing electrode are sequentially fixed at upper surface of substrate, and moving seesaw-type both-end cantilever beam is set to right above coplanar waveguide transmission line, the first sensing electrode and the second sensing electrode；And first sensing electrode and the second sensing electrode connected by gold thread, two free ends of moving seesaw-type both-end cantilever beam are located at the surface of the first sensing electrode and the second sensing electrode, two inductance capacitances in parallel of formation；Coplanar waveguide transmission line includes that the center signal line of centre of surface position on substrate is arranged and is placed equidistant with two ground wires in center signal line two sides, and is provided with the bridge pier for fixing moving seesaw-type both-end cantilever beam on two ground wires；The utility model overall structure is simple, is easily integrated, and has good reliability and high sensitivity.
Description
Technical field
The utility model belongs to electronic mechanical system technical field, and in particular to a kind of moving seesaw-type microwave power biography of dilatation
Sensor.
Background technique
In the microwave study of microelectromechanical systems, microwave power is an important parameter for characterizing microwave signal.?
In generation, transmission and the research of reception links of microwave signal, the detection of microwave power is essential.In recent years,
A kind of moving seesaw-type intelligent measurement microwave power detector (patent No.: 201310185123.2) is proposed, is stuck up using SOC circuit measuring
Induced electricity capacitance between one end and sensing electrode of board-like both-end cantilever beam, to carry out the measurement of microwave power, and passes through
Apply the balance that balanced voltage keeps moving seesaw-type both-end cantilever beam.This structure is capable of the reduction device architecture of high degree to reflection
The influence of coefficient, however the structural system sensitivity is smaller, the reliability of cantilever beam is lower.
Utility model content
The utility model aim be for existing microwave power detector among the above sensitivity is small and reliability compared with
Low problem, provides a kind of moving seesaw-type microwave power detector of dilatation, and the microwave power detector is outstanding using moving seesaw-type both-end
Arm beam, by measuring the both-end of moving seesaw-type both-end cantilever beam beam is in parallel with two capacitors that induction electrode is formed, thus
Achieve the effect that dilatation, specific technical solution is as follows:
A kind of moving seesaw-type microwave power detector of dilatation, the sensor include a substrate, coplanar waveguide transmission line, the
One sensing electrode and the second sensing electrode and moving seesaw-type both-end cantilever beam, the coplanar waveguide transmission line, the first sensing electrode
It is fixed on the upper surface of substrate by assigned direction sequence with the second sensing electrode, the moving seesaw-type both-end cantilever beam is set to institute
It states right above coplanar waveguide transmission line, the first sensing electrode and the second sensing electrode；And first sensing electrode and second passes
Sense electrode is connected by gold thread, and two free ends of the moving seesaw-type both-end cantilever beam are located at first sensing electrode and second and pass
The surface of sense electrode forms two simultaneously with first sensing electrode and the second sensing electrode respectively by two free ends
The inductance capacitance of connection；Wherein, the coplanar waveguide transmission line includes the center letter that centre of surface position over the substrate is arranged
Number line and two ground wires in center signal line two sides are placed equidistant with, and is provided on two ground wires for fixing
State the bridge pier of moving seesaw-type both-end cantilever beam.
Further, the moving seesaw-type both-end cantilever beam is formed by gold preparation.
Further, first sensing electrode and the second sensing electrode are formed by gold preparation.
Compared with prior art, the beneficial effect of the moving seesaw-type microwave power detector of the dilatation of the utility model embodies
Are as follows: compared to the cantilever beam structure of single-ended fixation, the utility model has higher stability by the bridge pier fixation at both ends and can
By property；Compared to single-ended cantilever beam structure, the both-end of the moving seesaw-type both-end cantilever beam of the utility model simultaneously with sensing electrode shape
At inductance capacitance, the measurement of power is carried out, and the first sensing electrode and the second sensing electrode are connected by gold thread, to realize two
The parallel connection of capacitor has biggish test scope and higher sensitivity, and test circuit is arranged in periphery, reduces survey
Try the influence to system microwave property；It is directly connected to the ground wire of two sides by the bridge pier being fixed on ground wire, does not need additional
Circuit connection ground wire reduces the area of sensor integrated circuit, improves integrated level；Meanwhile the microwave function of the utility model
Rate sensor can be realized on-line measurement, and microwave signal makes to pull down in the middle part of moving seesaw-type both-end cantilever beam when signal wire transmits, and two
End upwarps, so that the inductance capacitance that both ends are formed changes；This sensor extracts and measures while carrying out, and does not completely consume
Microwave power is available microwave signal incoming terminal also, convenient for integrated with the on piece of other microwave systems；In addition, this reality
Electronic mechanical system technology is used with novel, it is small in size, light-weight, low in energy consumption with electronic mechanical system technology, convenient for collection
At etc. principal advantages, incomparable compared to traditional microwave power detector, the sensor of the utility model has fine
Research and application value.
Detailed description of the invention
Fig. 1 is the three-dimensional structure figure of the moving seesaw-type microwave power detector of dilatation described in the utility model embodiment
Signal；
Fig. 2 is the top view signal of the moving seesaw-type microwave power detector of dilatation described in the utility model embodiment；
Vertical view diagram when Fig. 3 is the moving seesaw-type microwave power detector work of dilatation described in the utility model embodiment
Meaning.
Identifier declaration: 1- substrate, 2- center signal line, 3- ground wire, 4- bridge pier, 5- moving seesaw-type both-end cantilever beam, 6- first
Sensing electrode, the second sensing electrode of 7-, 8- gold thread.
Specific embodiment
In order to make those skilled in the art better understand the scheme of the utility model, below in conjunction with the utility model reality
The attached drawing in example is applied, the technical scheme in the utility model embodiment is clearly and completely described.
Refering to fig. 1 and Fig. 2 provides a kind of moving seesaw-type microwave power sensing of dilatation in the utility model embodiment
Device, the sensor include a substrate 1, coplanar waveguide transmission line, the first sensing electrode 6 and the second sensing electrode 7 and wraping plate
Formula both-end cantilever beam 5, coplanar waveguide transmission line, the first sensing electrode 6 and the second sensing electrode 7 are fixed on by assigned direction sequence
1 upper surface of substrate, such as Fig. 1, the center signal line 2 for being followed successively by the first sensing electrode 6 from left to right, constituting coplanar waveguide transmission line
And it is equidistantly positioned the ground wire 3 in center signal line two sides, certainly, this is the case for this embodiment, in the utility model
Other embodiments in, can be designed as the case may be, as long as guaranteeing that the first sensing electrode 6 and the second sensing electrode 7 exist
The two sides of substrate 1；Moving seesaw-type both-end cantilever beam 5 is set to coplanar waveguide transmission line, the first sensing electrode 6 and the second sensing
It is fixed by the way that bridge pier 4 is arranged on ground wire 3 right above electrode 7；And first sensing electrode 6 and the second sensing electrode 7 pass through gold thread
8 connections, can be evident that come from Fig. 1, and two free ends of moving seesaw-type both-end cantilever beam 5 are located at first in the utility model
The surface of sensing electrode 6 and the second sensing electrode 7, it is electric with the first sensing electrode 6 and the second sensing respectively by two free ends
Pole 7 forms two inductance capacitances connected by gold thread 8 in parallel.
Preferably, in the utility model embodiment, moving seesaw-type both-end cantilever beam 5, the first sensing electrode 6 and the second sensing electricity
Pole 7 is formed by gold preparation；There is good electric conductivity based on fitting, moving seesaw-type both-end cantilever beam is prepared by golden material to play
5 and first the inductance capacitance that is formed of sensing electrode 6 and the second sensing electrode 7 there is higher induced electricity capacitance.
Refering to Fig. 3, when being worked using the moving seesaw-type microwave power detector of the utility model, when microwave signal is coplanar
When transmitting on waveguide transmission line, the moving seesaw-type both-end cantilever beam 5 above center signal line 2 generates electrostatic force, and moving seesaw-type is double
End cantilever beam 5 generates deformation under the action of electrostatic force, specifically sees Fig. 3, and dotted portion indicates moving seesaw-type both-end cantilever beam 5
The change in shape after microwave signal is inputted on coplanar waveguide transmission line, it can be seen that, the middle part of moving seesaw-type both-end cantilever beam 5
Position is to lower recess, and both ends are upturned, due to 5 liang of free ends of moving seesaw-type both-end cantilever beam and the first sensing electrode 6 and second
The distance between sensing electrode 7 produces variation, so the first sensing electrode 6 and the second sensing electrode 7 and moving seesaw-type both-end are outstanding
The capacitance for the inductance capacitance that 5 liang of free ends of arm beam are formed changes, specifically, the utility model passes through one AD7747 of setting
Circuit is tested to detect the variation of capacitance；Certainly, for the detection of capacitance, measurement method the utility model and without limit
It makes and fixed, this is only a preferred embodiment of the utility model, can be selected according to the actual situation in actual operation
Suitable capacitance detection, measurement method.And the capacitance due to two concatenated inductance capacitances is directly proportional to microwave power, because
This can obtain being input to the power of the microwave signal on coplanar waveguide transmission line by measuring the capacitance of obtained variation.
Further, since by the first sensing electrode 5 and the second sensing electrode 6 and moving seesaw-type both-end cantilever beam in the utility model
5 inductance capacitances constituted form two inductance capacitances being connected in parallel after being connected to by gold thread 8, and entire microwave power can be enhanced
The induced electricity capacitance of sensor, based on the above-mentioned proportionate relationship about capacitance and microwave power, so as to further reach
The sensitivity calculated to hoisting power.
Compared with prior art, the beneficial effect of the moving seesaw-type microwave power detector of the dilatation of the utility model embodies
Are as follows: compared to the cantilever beam structure of single-ended fixation, the utility model has higher stability by the bridge pier fixation at both ends and can
By property；Compared to single-ended cantilever beam structure, the both-end of the moving seesaw-type both-end cantilever beam of the utility model simultaneously with sensing electrode shape
At inductance capacitance, the measurement of power is carried out, and the first sensing electrode and the second sensing electrode are connected by gold thread, to realize two
The parallel connection of capacitor has biggish test scope and higher sensitivity, and test circuit is arranged in periphery, reduces survey
Try the influence to system microwave property；It is directly connected to the ground wire of two sides by the bridge pier being fixed on ground wire, does not need additional
Circuit connection ground wire reduces the area of sensor integrated circuit, improves integrated level；Meanwhile the microwave function of the utility model
Rate sensor can be realized on-line measurement, and microwave signal makes to pull down in the middle part of moving seesaw-type both-end cantilever beam when signal wire transmits, and two
End upwarps, so that the inductance capacitance that both ends are formed changes；This sensor extracts and measures while carrying out, and does not completely consume
Microwave power is available microwave signal incoming terminal also, convenient for integrated with the on piece of other microwave systems；In addition, this reality
Electronic mechanical system technology is used with novel, it is small in size, light-weight, low in energy consumption with electronic mechanical system technology, convenient for collection
At etc. principal advantages, incomparable compared to traditional microwave power detector, the sensor of the utility model has fine
Research and application value.
The above is only the preferred embodiments of the utility model, are not intended to limit the scope of the patents of the utility model, although ginseng
The utility model is described in detail according to previous embodiment, for coming for those skilled in the art, still may be used
To modify to technical solution documented by aforementioned each specific embodiment, or part of technical characteristic is carried out equivalent
Replacement.All equivalent structures done using the utility model specification and accompanying drawing content, are directly or indirectly used in other phases
The technical field of pass, similarly within the utility model patent protection scope.
Claims (3)
1. a kind of moving seesaw-type microwave power detector of dilatation, which is characterized in that the sensor includes a substrate, co-planar waveguide
Transmission line, the first sensing electrode and the second sensing electrode and moving seesaw-type both-end cantilever beam, the coplanar waveguide transmission line, first
Sensing electrode and the second sensing electrode are fixed on the upper surface of substrate, the moving seesaw-type both-end cantilever beam by assigned direction sequence
It is set to right above the coplanar waveguide transmission line, the first sensing electrode and the second sensing electrode；And first sensing electrode
It is connected with the second sensing electrode by gold thread, two free ends of the moving seesaw-type both-end cantilever beam are located at first sensing electrode
With the surface of the second sensing electrode, by two free ends respectively with first sensing electrode and the second sensing electrode shape
At two inductance capacitances in parallel；Wherein, the coplanar waveguide transmission line includes setting centre of surface position over the substrate
Center signal line and be placed equidistant with two ground wires in center signal line two sides, and be arranged on two ground wires useful
In the bridge pier of the fixation moving seesaw-type both-end cantilever beam.
2. the moving seesaw-type microwave power detector of dilatation as described in claim 1, which is characterized in that the moving seesaw-type both-end is outstanding
Arm beam is formed by gold preparation.
3. the moving seesaw-type microwave power detector of dilatation as described in claim 1, which is characterized in that first sensing electrode
It is formed with the second sensing electrode by gold preparation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822039529.0U CN209198537U (en) | 2018-12-06 | 2018-12-06 | A kind of moving seesaw-type microwave power detector of dilatation |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822039529.0U CN209198537U (en) | 2018-12-06 | 2018-12-06 | A kind of moving seesaw-type microwave power detector of dilatation |
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| CN209198537U true CN209198537U (en) | 2019-08-02 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109270340A (en) * | 2018-12-06 | 2019-01-25 | 南京邮电大学 | A kind of moving seesaw-type microwave power detector of dilatation |
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2018
- 2018-12-06 CN CN201822039529.0U patent/CN209198537U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109270340A (en) * | 2018-12-06 | 2019-01-25 | 南京邮电大学 | A kind of moving seesaw-type microwave power detector of dilatation |
| CN109270340B (en) * | 2018-12-06 | 2023-09-15 | 南京邮电大学 | Capacity-expanded seesaw type microwave power sensor |
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Effective date of registration: 20221222 Address after: Room 1284, Block D, Tengfei Building, No. 88, Jiangmiao Road, Yanchuangyuan, Nanjing District, China (Jiangsu) Pilot Free Trade Zone, 211800, Jiangsu Province Patentee after: Nanjing Erxin Electronic Co.,Ltd. Address before: 210033 No.30 GuangYue Road, Qixia street, Qixia District, Nanjing City, Jiangsu Province Patentee before: NANJING University OF POSTS AND TELECOMMUNICATIONS |