CN209345038U - A kind of twin crystal series parallel type clamped beam piezoelectric energy collector - Google Patents
A kind of twin crystal series parallel type clamped beam piezoelectric energy collector Download PDFInfo
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- CN209345038U CN209345038U CN201920356483.7U CN201920356483U CN209345038U CN 209345038 U CN209345038 U CN 209345038U CN 201920356483 U CN201920356483 U CN 201920356483U CN 209345038 U CN209345038 U CN 209345038U
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Abstract
A kind of twin crystal series parallel type clamped beam piezoelectric energy collector minimizes energy harvester by MEMS technology, is integrated, while hybrid connected structure can improve output voltage and electric current simultaneously on its beam.The utility model uses fixed beam structure, and stability with higher is easy the advantages that realizing by microfabrication, and clamped beam two sides are equipped with piezoelectric material, as twin crystal configuration, structure novel；The series connection for realizing the piezoelectric material of clamped beam two sides by sharing plate electrode, and the parallel connection between their treatments is realized using external circuit, output voltage and output electric current can be increased substantially simultaneously；By integrating on beam, simplify the design of external circuit.In addition, the utility model is the principal advantages based on MEMS technology, with MEMS, it is such as small in size, light-weight, low in energy consumption, convenient for integrated etc., this series of advantages is that traditional microwave power detector is incomparable, therefore it has research and application value well.
Description
Technical field
The present invention relates to technical field of microelectronic mechanical systems, and in particular to a kind of twin crystal series parallel type clamped beam piezoelectric energy
Collector.
Background technique
Energy harvester realizes energy conversion according to piezoelectric effect, converts electric energy for outside energy excitation, then to low function
It consumes equipment and sensor etc. and steady and sustained electric energy is provided.There are many kinds of the principles of energy conversion, wherein more common mechanical
Can --- electric energy transform mode is to be designed to various efficient energy harvesters using piezoelectric material according to piezoelectric effect.In recent years
Carry out the rapid development with MEMS technology and special material, have in-depth study to MEMS fixed beam structure, so that MEMS is solid
Strutbeam technology is applied to piezoelectric type energy collector and is possibly realized, and what piezoelectric type energy collector was collected is AC signal, low
The normal work of power consuming device needs direct current signal as power supply, therefore needs that rectification is added in energy harvester late-class circuit
Electric current, general rectification circuit need to use diode, and signal can generate certain pressure drop by diode, if piezoelectric energy is collected
The output voltage of device is less than the forward conduction voltage of diode, then rectification circuit will not exported.
Summary of the invention
The utility model aim is to provide a kind of twin crystal series parallel type clamped beam piezoelectric energy collector.Pass through MEMS technology
Energy harvester is set to minimize, is integrated, while hybrid connected structure can improve output voltage and electric current simultaneously on its beam.
A kind of twin crystal series parallel type clamped beam piezoelectric energy collector, including clamped beam, dielectric layer, piezoelectric layer and mass block；
Top is provided with piezoelectric layer P1 and piezoelectric layer P2 on the left of the clamped beam, and lower section is equipped with piezoelectric layer P4 and piezoelectric layer
P3；Corresponding, top is provided with piezoelectric layer P1 ' and piezoelectric layer P2 ' on the right side of the clamped beam, and lower section is equipped with piezoelectric layer P4 ' and pressure
Electric layer P3 '；
Dielectric layer is filled between each piezoelectric layer and clamped beam；
By plate electrode, i.e., upper bottom crown, and intermediate piezoelectric material are made the piezoelectric layer；
The bottom crown of piezoelectric layer P1 is connected with the bottom crown of piezoelectric layer P2 on the left of the clamped beam, i.e. piezoelectric layer P1 and piezoelectricity
Layer P2 shares bottom crown；The top crown of piezoelectric layer P3 is connected with the top crown of piezoelectric layer P4, i.e. piezoelectric layer P3 and piezoelectric layer P4 are total
Use top crown；
The bottom crown of piezoelectric layer P1 ' is connected with the bottom crown of piezoelectric layer P2 ' on the right side of the clamped beam, i.e. piezoelectric layer P1 ' and
Piezoelectric layer P2 ' shares bottom crown；The top crown of piezoelectric layer P3 ' is connected with the top crown of piezoelectric layer P4 ', i.e. piezoelectric layer P3 ' and pressure
Electric layer P4 ' shares top crown；
The bottom end of clamped beam is arranged in the mass block.
Further, the polarization direction of each piezoelectric layer is consistent, and upper bottom crown is used to collect the charge of piezoelectric effect generation.
Further, when the clamped beam is by upward active force, left side piezoelectric layer relative potentials are as follows: P1 top crown
For high potential, P1 bottom crown electrode is low potential；P2 top crown electrode is low potential, and P2 bottom crown electrode is high potential；On P3
Pole plate is low potential, and bottom crown is high potential；P4 top crown is high potential, and bottom crown is low potential, the electricity of the piezoelectric layer on right side
Gesture is symmetrical with left side.
Further, the dielectric layer is ZrO2, SiO2, Si3N4 or mica.
Further, the piezoelectric layer is using ZnO, PZT-5 series or the piezoelectric material of AlN.
Further, the clamped beam is copper, clamped beam made of aluminium or titanium.
Further, the mass block is made of nickel, cobalt, aluminium or copper.
The utility model has the advantages that
1, a kind of twin crystal series parallel type clamped beam piezoelectric energy collector uses fixed beam structure, stabilization with higher
Property, it is easy the advantages that realizing by microfabrication, and clamped beam two sides are equipped with piezoelectric material, as twin crystal configuration, structure
It is novel.
2, a kind of twin crystal series parallel type clamped beam piezoelectric energy collector realizes clamped beam two by sharing plate electrode
The series connection of the piezoelectric material of side, and the parallel connection between their treatments is realized using external circuit, it can increase substantially simultaneously
Output voltage and output electric current.
3, a kind of twin crystal series parallel type clamped beam piezoelectric energy collector simplifies setting for external circuit by integrating on beam
Meter.
In addition, the utility model is the principal advantages based on MEMS technology, with MEMS, such as small in size, light-weight, power consumption
Low, convenient for integrated etc., this series of advantages is that traditional microwave power detector is incomparable, therefore it has and grinds well
Study carefully and application value.
Detailed description of the invention
Fig. 1 is a kind of side view of twin crystal series parallel type clamped beam piezoelectric energy collector of the present invention.
Fig. 2 is the circuit diagram that twin crystal series parallel type clamped beam piezoelectric energy collector of the present invention receives periodic vibration.
In figure, 1- clamped beam；2- dielectric layer；3- plate electrode；4- mass block；P1 ~ P4, P1 ' ~ P4 '-piezoelectric layer.
Specific embodiment
Technical solution of the present invention is described in further detail with reference to the accompanying drawings of the specification.
A kind of twin crystal series parallel type clamped beam piezoelectric energy collector, including clamped beam 1, dielectric layer 2, piezoelectric layer and mass block
4。
The 1 left side top of clamped beam is provided with piezoelectric layer P1 and piezoelectric layer P2, and lower section is equipped with piezoelectric layer P4 and piezoelectric layer
P3；Corresponding, the 1 right side top of clamped beam is provided with piezoelectric layer P1 ' and piezoelectric layer P2 ', and lower section is equipped with piezoelectric layer P4 ' and pressure
Electric layer P3 '.
It is filled with dielectric layer 2 between each piezoelectric layer and clamped beam 1, the charge that piezoelectric layer can be stopped to generate is let out
Leakage.
By plate electrode 3, i.e., upper bottom crown, and intermediate piezoelectric material are made the piezoelectric layer.
The bottom crown of the 1 left side piezoelectric layer P1 of clamped beam is connected with the bottom crown of piezoelectric layer P2, i.e. piezoelectric layer P1 and pressure
Electric layer P2 shares bottom crown；The top crown of piezoelectric layer P3 is connected with the top crown of piezoelectric layer P4, i.e. piezoelectric layer P3 and piezoelectric layer P4
Share top crown.
The bottom crown of the 1 right side piezoelectric layer P1 ' of clamped beam is connected with the bottom crown of piezoelectric layer P2 ', i.e. piezoelectric layer P1 ' and
Piezoelectric layer P2 ' shares bottom crown；The top crown of piezoelectric layer P3 ' is connected with the top crown of piezoelectric layer P4 ', i.e. piezoelectric layer P3 ' and pressure
Electric layer P4 ' shares top crown.
The bottom end of clamped beam 1 is arranged in the mass block 4, for reducing resonance frequency, increases clamped Liang Sicheng.
The polarization direction of each piezoelectric layer is consistent, and upper bottom crown is used to collect the charge of piezoelectric effect generation.
When the clamped beam is by upward active force, left side piezoelectric layer relative potentials are as follows: P1 top crown is high potential,
P1 bottom crown electrode is low potential；P2 top crown electrode is low potential, and P2 bottom crown electrode is high potential；P3 top crown is low
Potential, bottom crown are high potential；P4 top crown is high potential, and bottom crown is low potential, the potential of the piezoelectric layer on right side and left side
Symmetrically.
The dielectric layer 2 is ZrO2, SiO2, Si3N4 or mica.
The piezoelectric layer is using ZnO, PZT-5 series or the piezoelectric material of AlN.
The clamped beam 1 is copper, clamped beam made of aluminium or titanium.
The mass block 4 is made of nickel, cobalt, aluminium or copper.
The foregoing is merely better embodiment of the invention, protection scope of the present invention is not with above embodiment
Limit, as long as those of ordinary skill in the art's equivalent modification or variation made by disclosure according to the present invention, should all be included in power
In the protection scope recorded in sharp claim.
Claims (7)
1. a kind of twin crystal series parallel type clamped beam piezoelectric energy collector, including clamped beam, dielectric layer, piezoelectric layer and mass block,
It is characterized in that:
Top is provided with piezoelectric layer P1 and piezoelectric layer P2 on the left of the clamped beam, and lower section is equipped with piezoelectric layer P4 and piezoelectric layer P3；It is right
It answers, top is provided with piezoelectric layer P1 ' and piezoelectric layer P2 ' on the right side of the clamped beam, and lower section is equipped with piezoelectric layer P4 ' and piezoelectric layer
P3'；
Dielectric layer is filled between each piezoelectric layer and clamped beam；
By plate electrode, i.e., upper bottom crown, and intermediate piezoelectric material are made the piezoelectric layer；
The bottom crown of piezoelectric layer P1 is connected with the bottom crown of piezoelectric layer P2 on the left of the clamped beam, i.e. piezoelectric layer P1 and piezoelectric layer P2
Share bottom crown；The top crown of piezoelectric layer P3 is connected with the top crown of piezoelectric layer P4, i.e. piezoelectric layer P3 and piezoelectric layer P4 are shared
Pole plate；
The bottom crown of piezoelectric layer P1 ' is connected with the bottom crown of piezoelectric layer P2 ' on the right side of the clamped beam, i.e. piezoelectric layer P1 ' and piezoelectricity
Layer P2 ' shares bottom crown；The top crown of piezoelectric layer P3 ' is connected with the top crown of piezoelectric layer P4 ', i.e. piezoelectric layer P3 ' and piezoelectric layer
P4 ' shares top crown；
The bottom end of clamped beam is arranged in the mass block.
2. a kind of twin crystal series parallel type clamped beam piezoelectric energy collector according to claim 1, it is characterised in that: each pressure
The polarization direction of electric layer is consistent, and upper bottom crown is used to collect the charge of piezoelectric effect generation.
3. a kind of twin crystal series parallel type clamped beam piezoelectric energy collector according to claim 1, it is characterised in that: described
When clamped beam is by upward active force, left side piezoelectric layer relative potentials are as follows: P1 top crown is high potential, and P1 bottom crown electrode is
Low potential；P2 top crown electrode is low potential, and P2 bottom crown electrode is high potential；P3 top crown is low potential, and bottom crown is height
Potential；P4 top crown is high potential, and bottom crown is low potential, and the potential of the piezoelectric layer on right side and left side are symmetrical.
4. a kind of twin crystal series parallel type clamped beam piezoelectric energy collector according to claim 1, it is characterised in that: described
Dielectric layer is ZrO2, SiO2, Si3N4 or mica.
5. a kind of twin crystal series parallel type clamped beam piezoelectric energy collector according to claim 1, it is characterised in that: the pressure
Electric layer is using ZnO, PZT-5 series or the piezoelectric material of AlN.
6. a kind of twin crystal series parallel type clamped beam piezoelectric energy collector according to claim 1, it is characterised in that: described
Clamped beam is copper, clamped beam made of aluminium or titanium.
7. a kind of twin crystal series parallel type clamped beam piezoelectric energy collector according to claim 1, it is characterised in that: described
Mass block is made of nickel, cobalt, aluminium or copper.
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| CN201920356483.7U CN209345038U (en) | 2019-03-20 | 2019-03-20 | A kind of twin crystal series parallel type clamped beam piezoelectric energy collector |
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| CN201920356483.7U CN209345038U (en) | 2019-03-20 | 2019-03-20 | A kind of twin crystal series parallel type clamped beam piezoelectric energy collector |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114222231A (en) * | 2021-12-10 | 2022-03-22 | 武汉大学 | Bimorph piezoelectric type MEMS microphone based on clamped beam structure |
-
2019
- 2019-03-20 CN CN201920356483.7U patent/CN209345038U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114222231A (en) * | 2021-12-10 | 2022-03-22 | 武汉大学 | Bimorph piezoelectric type MEMS microphone based on clamped beam structure |
| CN114222231B (en) * | 2021-12-10 | 2023-12-29 | 武汉敏声新技术有限公司 | Bimorph piezoelectric MEMS microphone based on clamped beam structure |
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Effective date of registration: 20191209 Address after: Room 107, floor 1, No. 30-06, GuangYue Road, Qixia street, Nanjing Economic and Technological Development Zone, Nanjing, Jiangsu Province Patentee after: Nanjing Erxin Electronic Co., Ltd Address before: 210003, No. 66, new exemplary Road, Nanjing, Jiangsu Patentee before: Nanjing Post & Telecommunication Univ. |