CN103890633B - 显微镜装置 - Google Patents

显微镜装置 Download PDF

Info

Publication number
CN103890633B
CN103890633B CN201280047584.7A CN201280047584A CN103890633B CN 103890633 B CN103890633 B CN 103890633B CN 201280047584 A CN201280047584 A CN 201280047584A CN 103890633 B CN103890633 B CN 103890633B
Authority
CN
China
Prior art keywords
sample
pattern
lighting pattern
microscopie
picture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201280047584.7A
Other languages
English (en)
Chinese (zh)
Other versions
CN103890633A (zh
Inventor
R.乌尔
M.施罗普
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Meitianshi Biotechnology Co Ltd
Life Technologies Corp
Original Assignee
Eddie Tyre Co Ltd
FEI Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Eddie Tyre Co Ltd, FEI Co filed Critical Eddie Tyre Co Ltd
Publication of CN103890633A publication Critical patent/CN103890633A/zh
Application granted granted Critical
Publication of CN103890633B publication Critical patent/CN103890633B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/06—Means for illuminating specimens
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/06—Means for illuminating specimens
    • G02B21/08—Condensers
    • G02B21/14—Condensers affording illumination for phase-contrast observation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0032—Optical details of illumination, e.g. light-sources, pinholes, beam splitters, slits, fibers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/36—Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
    • G02B21/365—Control or image processing arrangements for digital or video microscopes
    • G02B21/367—Control or image processing arrangements for digital or video microscopes providing an output produced by processing a plurality of individual source images, e.g. image tiling, montage, composite images, depth sectioning, image comparison
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/58—Optics for apodization or superresolution; Optical synthetic aperture systems
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/645—Specially adapted constructive features of fluorimeters
    • G01N21/6456—Spatial resolved fluorescence measurements; Imaging
    • G01N21/6458—Fluorescence microscopy

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Microscoopes, Condenser (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
CN201280047584.7A 2011-09-29 2012-09-28 显微镜装置 Active CN103890633B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102011114500.5 2011-09-29
DE102011114500.5A DE102011114500B4 (de) 2011-09-29 2011-09-29 Mikroskopvorrichtung
PCT/US2012/058027 WO2013049646A1 (en) 2011-09-29 2012-09-28 Microscope device

Publications (2)

Publication Number Publication Date
CN103890633A CN103890633A (zh) 2014-06-25
CN103890633B true CN103890633B (zh) 2016-10-26

Family

ID=47878605

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201280047584.7A Active CN103890633B (zh) 2011-09-29 2012-09-28 显微镜装置

Country Status (6)

Country Link
US (1) US9606345B2 (enExample)
EP (2) EP4354118A3 (enExample)
JP (1) JP6224595B2 (enExample)
CN (1) CN103890633B (enExample)
DE (1) DE102011114500B4 (enExample)
WO (1) WO2013049646A1 (enExample)

Families Citing this family (43)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102012009836A1 (de) * 2012-05-16 2013-11-21 Carl Zeiss Microscopy Gmbh Lichtmikroskop und Verfahren zur Bildaufnahme mit einem Lichtmikroskop
DE102012018303A1 (de) * 2012-09-14 2014-03-20 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Messgerät zur Lumineszenzmessung
CN103207449B (zh) * 2013-04-17 2015-04-29 华中科技大学 一种结构光快速扫描显微成像方法
US9350921B2 (en) * 2013-06-06 2016-05-24 Mitutoyo Corporation Structured illumination projection with enhanced exposure control
WO2015052936A1 (ja) * 2013-10-09 2015-04-16 株式会社ニコン 構造化照明顕微鏡装置
DE102013017124A1 (de) * 2013-10-15 2015-04-16 Carl Zeiss Microscopy Gmbh Scanmikroskop und Verfahren zum Betreiben eines Scanmikroskops
JP6270615B2 (ja) * 2014-05-02 2018-01-31 オリンパス株式会社 標本像データ生成装置、及び、標本像データ生成方法
US10746980B2 (en) 2014-08-26 2020-08-18 General Electric Company Calibration of microscopy systems
US9797767B2 (en) 2014-08-26 2017-10-24 General Electric Company Calibration of microscopy systems
US11300773B2 (en) 2014-09-29 2022-04-12 Agilent Technologies, Inc. Mid-infrared scanning system
DE102014017001A1 (de) * 2014-11-12 2016-05-12 Carl Zeiss Ag Mikroskop mit geringem Verzeichnungsfehler
US9953428B2 (en) 2015-03-03 2018-04-24 Microsoft Technology Licensing, Llc Digital camera unit with simultaneous structured and unstructured illumination
JP6905932B2 (ja) * 2015-03-19 2021-07-21 コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． デジタル病理学スキャンにおける照明
DE102015209758A1 (de) * 2015-05-28 2016-12-01 Carl Zeiss Microscopy Gmbh Anordnung und Verfahren zur Strahlformung und zur Lichtblattmikroskopie
CN107667310B (zh) * 2015-06-02 2021-01-01 生命技术公司 荧光成像系统
DE102015109645B3 (de) 2015-06-17 2016-09-08 Carl Zeiss Microscopy Gmbh Verfahren zur Multiliniendetektion
CN105158224B (zh) * 2015-09-09 2017-10-20 深圳大学 一种提高多光子成像信号强度的方法及系统
DE102015116598B4 (de) 2015-09-30 2024-10-24 Carl Zeiss Microscopy Gmbh Verfahren und Mikroskop zur hochauflösenden Abbildung mittels SIM
JPWO2017060954A1 (ja) 2015-10-05 2018-07-19 オリンパス株式会社 撮像装置
ITUB20154591A1 (it) * 2015-10-12 2017-04-12 Crestoptics S R L Apparato di microscopia confocale e relativo procedimento di acquisizione ed elaborazione di immagini
US10845759B2 (en) * 2016-05-06 2020-11-24 Uwm Research Foundation, Inc. Snapshot optical tomography system and method of acquiring an image with the system
DE102016007839A1 (de) 2016-06-28 2017-12-28 Horst Wochnowski Hochauflösendes Verfahren zur Mikroskopie und Nanostrukturierung von Substratoberflächen basierend auf dem SIM-Verfahren (Structured Illumination Microscopy)
FR3054321B1 (fr) * 2016-07-25 2018-10-05 Centre National De La Recherche Scientifique - Cnrs - Systeme et procede de mesure d'un parametre physique d'un milieu
US10908072B2 (en) 2016-12-15 2021-02-02 The Board Of Regents Of The University Of Texas System Total internal reflection and transmission illumination fluorescence microscopy imaging system with improved background suppression
CN107101982A (zh) * 2017-03-09 2017-08-29 深圳先进技术研究院 荧光显微装置
US10502944B2 (en) 2017-10-02 2019-12-10 Nanotronics Imaging, Inc. Apparatus and method to reduce vignetting in microscopic imaging
TWI791046B (zh) * 2017-10-02 2023-02-01 美商奈米創尼克影像公司 減少顯微鏡成像中之暈影的設備及方法
KR102058780B1 (ko) * 2017-11-29 2019-12-23 (주)로고스바이오시스템스 라인 스캐닝 방식의 공초점 현미경에서의 자동초점조절 방법 및 장치
NL2020621B1 (en) * 2018-01-08 2019-07-15 Illumina Inc Multiplexing of an active sensor detector using structured illumination
EP3749171A1 (en) * 2018-02-09 2020-12-16 Alcon Inc. System inverting controller for laser scanning systems
EP3614190A1 (en) 2018-08-20 2020-02-26 Till GmbH Microscope device with virtual objective
DE102018124984A1 (de) * 2018-10-10 2020-04-16 Friedrich-Schiller-Universität Jena Verfahren und Vorrichtung zur hochaufgelösten Fluoreszenzmikroskopie
CN111122568B (zh) * 2018-11-01 2022-04-22 华中科技大学苏州脑空间信息研究院 一种高通量光学层析成像方法及成像系统
US11347040B2 (en) 2019-02-14 2022-05-31 Double Helix Optics Inc. 3D target for optical system characterization
JP7261903B2 (ja) * 2019-05-06 2023-04-20 エーエスエムエル ネザーランズ ビー．ブイ． 暗視野顕微鏡
DE102019129932B4 (de) * 2019-11-06 2023-12-21 Technische Universität Braunschweig Optische Detektionseinrichtung und Verfahren zum Betreiben einer optischen Detektionseinrichtung
DE102020123669A1 (de) * 2020-09-10 2022-03-10 Carl Zeiss Microscopy Gmbh Verfahren zur SIM-Mikroskopie
DE102020123668A1 (de) 2020-09-10 2022-03-10 Carl Zeiss Microscopy Gmbh Verfahren zur Bildauswertung für die SIM-Mikroskopie und SIM-Mikroskopieverfahren
CN113219643B (zh) * 2021-05-11 2022-07-12 浙江大学 一种基于非相干成像边缘模糊的光学显微镜对焦稳定方法及系统
US12169920B2 (en) 2022-01-05 2024-12-17 Honeywell Federal Manufacturing & Technologies, Llc Telecentric detection of lattice breakdown
CN115937080A (zh) * 2022-09-30 2023-04-07 浙大宁波理工学院 一种六边形晶格照明的超分辨显微系统及图像重构方法
DE102023102991B3 (de) 2023-02-08 2024-02-01 Till I.D. Gmbh Verfahren zur Generierung mikroskopischer Schichtaufnahmen 3-dimensionaler fluoreszierender Objekte sowie Vorrichtung, Computerprogramm und computerlesbares Speichermedium
US20240385421A1 (en) 2023-05-16 2024-11-21 Miltenyi Biotec B.V. & Co Kg Method and apparatus for high resolution microscopy

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0507599A2 (en) * 1991-04-03 1992-10-07 Sharp Kabushiki Kaisha Apparatus for assembling an optical device
WO1998045745A1 (en) * 1997-04-04 1998-10-15 Isis Innovation Limited Microscopy imaging apparatus and method
US20020191178A1 (en) * 2000-09-12 2002-12-19 Cory Watkins Confocal 3D inspection system and process
JP2004506234A (ja) * 2000-08-08 2004-02-26 カール　ツァイス　イエナ　ゲゼルシャフト　ミット　ベシュレンクテル　ハフツング 光学的結像システムの濃淡弁別力を増大させるための配置
DE102006031177A1 (de) * 2006-07-06 2008-01-10 Carl Zeiss Microimaging Gmbh Verfahren und Vorrichtung zur Erzeugung eines Bildes einer dünnen Schicht eines Objekts
WO2008080032A2 (en) * 2006-12-21 2008-07-03 Howard Hughes Medical Institute Systems and methods for 3-dimensional interferometric microscopy
WO2008152605A1 (en) * 2007-06-15 2008-12-18 Koninklijke Philips Electronics N.V. Multi-spot scanning optical device for imaging of a sample
US20090268280A1 (en) * 2005-10-13 2009-10-29 Nikon Corporation Microscope
CN101779155A (zh) * 2007-08-16 2010-07-14 皇家飞利浦电子股份有限公司 对样本成像的方法

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5078482A (en) * 1989-07-28 1992-01-07 At&T Bell Laboratories Resolution confocal microscope, and device fabrication method using same
GB9102903D0 (en) 1991-02-12 1991-03-27 Oxford Sensor Tech An optical sensor
US5381224A (en) * 1993-08-30 1995-01-10 A. E. Dixon Scanning laser imaging system
DE19510102C1 (de) * 1995-03-20 1996-10-02 Rainer Dr Uhl Konfokales Fluoreszenzmikroskop
US6248988B1 (en) * 1998-05-05 2001-06-19 Kla-Tencor Corporation Conventional and confocal multi-spot scanning optical microscope
DE10050529B4 (de) * 2000-10-11 2016-06-09 Leica Microsystems Cms Gmbh Verfahren zur Strahlsteuerung in einem Scanmikroskop, Anordnung zur Strahlsteuerung in einem Scanmikroskop und Scanmikroskop
DE10118463A1 (de) 2001-04-07 2002-10-10 Zeiss Carl Jena Gmbh Verfahren und Anordnung zur tiefenaufgelösten optischen Erfassung einer Probe
DE10155002A1 (de) 2001-11-08 2003-05-22 Zeiss Carl Jena Gmbh Verfahren und Anordnung zur tiefenaufgelösten optischen Erfassung einer Probe
DE10330716A1 (de) 2003-07-03 2005-02-17 Carl Zeiss Jena Gmbh Verfahren und Anordnung zur Eliminierung von Falschlicht
US20050225849A1 (en) * 2004-04-05 2005-10-13 Fujifilm Electronic Imaging Ltd. Slit confocal microscope and method
WO2006008637A1 (en) * 2004-07-23 2006-01-26 Ge Healthcare Niagara, Inc. Method and apparatus for fluorescent confocal microscopy
WO2008010182A2 (de) * 2006-07-17 2008-01-24 Max Wiki Analytisches system mit einer anordnung zur zeitlich veränderbaren räumlichen lichtmodulation und damit ausführbares nachweisverfahren
US7834980B2 (en) * 2006-12-21 2010-11-16 Asml Netherlands B. V. Lithographic apparatus and method
DE102007009550B4 (de) 2007-02-27 2008-12-18 Ludwig-Maximilian-Universität Verfahren und Mikroskopvorrichtung zur Beobachtung einer bewegten Probe
DE102007047468A1 (de) 2007-09-28 2009-04-02 Carl Zeiss Microimaging Gmbh Verfahren und Anordnung zur optischen Erfassung einer beleuchteten Probe
DE102007047465A1 (de) 2007-09-28 2009-04-02 Carl Zeiss Microimaging Gmbh Verfahren und Anordnung zur optischen Erfassung einer beleuchteten Probe
DE102007047466A1 (de) 2007-09-28 2009-04-02 Carl Zeiss Microimaging Gmbh Verfahren und Anordnung zur optischen Erfassung einer beleuchteten Probe
EP2260345A1 (en) * 2008-03-20 2010-12-15 Koninklijke Philips Electronics N.V. Two-dimensional array of radiation spots for an optical scanning device
JP5393406B2 (ja) * 2009-11-06 2014-01-22 オリンパス株式会社 パターン投影装置、走査型共焦点顕微鏡、及びパターン照射方法

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0507599A2 (en) * 1991-04-03 1992-10-07 Sharp Kabushiki Kaisha Apparatus for assembling an optical device
WO1998045745A1 (en) * 1997-04-04 1998-10-15 Isis Innovation Limited Microscopy imaging apparatus and method
JP2004506234A (ja) * 2000-08-08 2004-02-26 カール　ツァイス　イエナ　ゲゼルシャフト　ミット　ベシュレンクテル　ハフツング 光学的結像システムの濃淡弁別力を増大させるための配置
US20020191178A1 (en) * 2000-09-12 2002-12-19 Cory Watkins Confocal 3D inspection system and process
US20090268280A1 (en) * 2005-10-13 2009-10-29 Nikon Corporation Microscope
DE102006031177A1 (de) * 2006-07-06 2008-01-10 Carl Zeiss Microimaging Gmbh Verfahren und Vorrichtung zur Erzeugung eines Bildes einer dünnen Schicht eines Objekts
WO2008080032A2 (en) * 2006-12-21 2008-07-03 Howard Hughes Medical Institute Systems and methods for 3-dimensional interferometric microscopy
WO2008152605A1 (en) * 2007-06-15 2008-12-18 Koninklijke Philips Electronics N.V. Multi-spot scanning optical device for imaging of a sample
CN101779155A (zh) * 2007-08-16 2010-07-14 皇家飞利浦电子股份有限公司 对样本成像的方法

Also Published As

Publication number Publication date
CN103890633A (zh) 2014-06-25
US9606345B2 (en) 2017-03-28
EP2761356A1 (en) 2014-08-06
WO2013049646A1 (en) 2013-04-04
EP4354118A2 (en) 2024-04-17
EP2761356B1 (en) 2023-11-08
EP4354118A3 (en) 2024-06-26
EP2761356A4 (en) 2015-02-25
DE102011114500A1 (de) 2013-04-04
JP2014532197A (ja) 2014-12-04
DE102011114500B4 (de) 2022-05-05
JP6224595B2 (ja) 2017-11-01
US20140313576A1 (en) 2014-10-23

Similar Documents

Publication Publication Date Title
CN103890633B (zh) 显微镜装置
US8649024B2 (en) Non-contact surface characterization using modulated illumination
US8019136B2 (en) Optical sectioning microscopy
JP4747243B2 (ja) 試料の光学的深部分解による光学的把握のための方法および装置
JP5888416B2 (ja) 構造化照明顕微鏡装置
JP7628502B2 (ja) パラメータ推定を提供する装置及び方法
JP2009223348A (ja) 解像深度が強化された３次元顕微鏡法のための方法及び装置
KR102604960B1 (ko) 홀로그래픽 간섭법의 방법 및 시스템
KR20050101335A (ko) 가로 미분 간섭계 공초점 현미경
CN112648926A (zh) 一种线聚焦彩色共焦三维表面高度测量装置及方法
WO2015052936A1 (ja) 構造化照明顕微鏡装置
JP2015505039A (ja) 変調光を使用した非接触表面形状評価
CN109620102A (zh) 基于单根多模光纤的内窥成像系统及方法
US12204086B2 (en) Apparatus and method of estimating values from images
JP2004191240A (ja) ３次元形状測定装置
JP7370326B2 (ja) 大視野３ｄ分光顕微鏡法
WO2018151599A1 (en) Structured illumination scanning microscopy
KR102883558B1 (ko) 다수의 영상 정보를 획득하는 입체형상 측정장치
CA2210801C (en) Method and apparatus for three-dimensional microscopy with enhanced depth resolution
JP3921432B2 (ja) モアレ光学系を用いた形状測定装置及び形状測定方法
RU2825348C1 (ru) Устройство и способ оценки значений по изображениям
WO2022080189A1 (ja) 生体試料検出システム、顕微鏡システム、蛍光顕微鏡システム、生体試料検出方法及びプログラム
Krzewina Structured light for three-dimensional microscopy
KR20190106055A (ko) 위상천이 간섭 이미징 장치

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C41 Transfer of patent application or patent right or utility model
TA01 Transfer of patent application right

Effective date of registration: 20160308

Address after: Oregon, USA

Applicant after: FEI Co.

Applicant after: Till I D GmbH

Address before: Oregon, USA

Applicant before: FEI Co.

C14 Grant of patent or utility model
GR01 Patent grant
TR01 Transfer of patent right
TR01 Transfer of patent right

Effective date of registration: 20251110

Address after: California, USA

Patentee after: LIFE TECHNOLOGIES Corp.

Country or region after: U.S.A.

Patentee after: Meitianshi Biotechnology Co., Ltd.

Country or region after: Germany

Address before: oregon

Patentee before: FEI Co.

Country or region before: U.S.A.

Patentee before: Till I D GmbH

Country or region before: Germany