CN103885123A - Chip allowing projection and separation to be performed on arbitrary-polarization-state qubits and manufacturing method thereof - Google Patents
Chip allowing projection and separation to be performed on arbitrary-polarization-state qubits and manufacturing method thereof Download PDFInfo
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Abstract
The invention provides a chip allowing projection and separation to be performed on arbitrary-polarization-state qubits and a manufacturing method of the chip. The chip comprises a specific-optical-axis birefringent waveguide and a birefringence waveguide directional coupler, wherein the specific-optical-axis birefringent waveguide is provided with an opening in one end face of an optical glass chip, the opening is used for receiving a polarization state to be projected and separated, and the other end of the waveguide is connected with the birefringence waveguide directional coupler. According to the chip and the manufacturing method of the chip, on the basis of the ultrafast laser direct writing type manufacturing technology, the method of laser beam tilted direct writing is adopted, and the chip allowing projection and separation to be performed on arbitrary-polarization-state qubits is composed of a polarization-state conversion element and a polarization-state separation element and is made of transparent hard materials. Moreover, miniaturization and integration of an optical wave plate and polarization beam splitter are achieved, the problems of connection errors, access loss, interface noise and the like in a macroscopic optical path are avoided, system stability and reliability are improved, manufacturing cost is greatly lowered, and manufacturing cycle is greatly shortened.
Description
Technical field
What the present invention relates to is element and the manufacture method thereof in a kind of quantum optics detection technique field, specifically a kind of based on birefringent waveguide, there is optical wave plate function and polarization beam splitting function, can carry out to random polarization state quantum bit quantum optics chip and the manufacture method thereof of projection separation.
Background technology
In traditional infotech, information is transmitted with binary form, all information is all by 0 and the 1 long or short character string forming, and wherein each 0 or 1 such unit is called bit (bit), and each bit can only be 0 or 1.The same with conventional information technology, quantum information technology is also encoded with transmission of information with scale-of-two, the minimum unit of coded message is called quantum bit (qubit, be the abbreviation of quantum bit), difference is quantum bit except being 0 or 1, can also be the superposition state of these two states.Owing to better controlling and modulation with the interaction of environment, and instrument and equipment development take photon as detection analysis object is comparatively ripe, so photon is conventionally by the information carrier as quantum information technology.Because carry out binary coding, so as long as find one group of twin-stage attribute of photon and by two-stage respectively assignment be 0 and 1.A characteristic the most significant of photon is exactly its polarizability, stable and distinctiveness is strong, so conventionally utilize the different polarization state of photon, as the linear polarization of pair of orthogonal, is used as the physics realization of quantum bit values 0 or 1, forms polarization state quantum bit.
Be mainly to change its polarization state (mainly referring to polarization direction for linearly polarized light) to the manipulation of polarization state quantum bit, make it be transformed into the photon of a certain specific polarization state.Macroscopic view optical field is mainly to adopt optical wave plate (opticalwaveplate), as half-wave plate (halfwaveplate), quarter-wave plate (quarterwaveplate) and combination thereof realize, principle is to change the polarized component of wave plate optical axis direction and the phasic difference between vertical polarized component with it.π is changed in the phasic difference that half-wave plate causes, and can change the polarization direction of linearly polarized light; And pi/2 is changed in the phasic difference that quarter-wave plate causes, linearly polarized light can be transformed into circularly polarized light (more general say elliptically polarized light) or do contrary operation.Therefore, wave plate can be used as Polarization Controller (polarization controller), is used for the change of the polarization state that compensated optical signal produces after Propagation.Such as in optical fiber, light signal may be because of the change of the factor generation polarization states such as how much position phase (if optical fiber is about the distortion of optical axis), birefringences, polarization mode dispersion, the loss relevant to polarization state, and this consequence for the quantum information system of use polarization state quantum bit is catastrophic.For in the time need to measuring the polarization state of polarization state quantum bit after optical fiber or other light path media, the polarization state of quantum bit is still pair of orthogonal polarization state, and the polarization state that must change it compensates.
Revert to after pair of orthogonal polarization state at quantum bit, just can quantum bit be separated and measured according to polarization characteristic.Because surveying instrument itself can not be differentiated the polarization state of photon, so need first the photon with different polarization state to be divided into two-way, place surveying instrument in terminal, realize the measurement to photon polarization with this, therefore this device that separates photon according to polarization state just seems very important.Macroscopic view optics uses polarization beam apparatus (Polarizing Beam Splitter is called for short PBS) to be used as the discrete device of polarization state quantum bit conventionally.
Ultrafast laser write-through manufacturing technology: ultrafast laser is the pulse laser that is less than 1 psec the duration of pulse, under the so short duration of pulse, the rheology of instantaneous energy obtains very huge, and many nonlinear optical phenomenas are occurred.The energy of photon is only relevant with its wavelength.In low light level situation, want to make material molecule to absorb photon and the change of physical property occurs, photon energy just must be higher than the threshold value of absorption; But in the situation that light intensity is extremely strong, although the energy of single photon cannot reach threshold value, because there are extremely many photons in light field, the Probability maximum that material molecule runs into two or more photons simultaneously increases, and its gross energy meets or exceeds absorption threshold value, this makes to absorb becomes possibility.The condition of the non-linear absorption of material to photon is very harsh, conventionally need to focus on ultrafast laser, just has the enough strong light fields that meet non-linear absorption at the focus place of laser.But the requirement of this harshness unique advantage of this manufacturing process based on nonlinear optical phenomena just.In the time focusing on long wavelength laser, on the path focusing on, because light intensity is too small, material can not absorb photon generation physical property to be changed, and only reaches the region that can make non-linear absorption occur in focus place light intensity, and the absorption of material to photon could occur.This can optionally modify this manufacturing process in the situation that not damaging material surface to material internal, manufacture the three-dimensional structure of arbitrary shape.On the other hand, need light intensity to reach certain threshold value because there is non-linear absorption, the isocandela face of this threshold value is an ellipsoid, on ellipsoid and inner, non-linear absorption can occur, so we can focus on by adjusting before the light intensity of laser change the size in this ellipsoid region, even can allow it be less than diffraction limit by reducing light intensity, this is again for the write-through processing of ultrafast laser has brought high machining precision.Ultrafast laser is exactly that the micro-point of ellipsoid that physical property is changed through exposure is piled up the objective thing that formation will obtain gradually to the processing of three-dimensional body.This process is the principle of infinitesimal analysis just, become the set of the set of point of exposure area size or thickness and such big or small similar line of point by three-dimensional body " differential ", by allowing focus carry out the exposure of pointwise by line in this dot matrix or linear array, the unit progressively physical property being changed " integration " becomes to expect the three-dimensional body (as Fig. 1) obtaining.
Summary of the invention
The polarization state of photon is extremely important and the most conventional quantum bit coding means during quantum calculation and quantum information are processed.Adopt the quantum information processing optical devices that main dependence is made up of macroscopical optical element (as optical fiber, beam splitter, wave plate, polarization beam apparatus) at present of these means to realize.Although the manufacturing technology maturation of macroscopical optical element itself, dependable performance, because needs interconnect, inevitably there are the various factors that affect resistance to overturning, reliability such as connecting error, insertion loss and interface noise in device; Also there is system complex, heaviness simultaneously, be difficult to miniaturization, portability and large-scale integrated, the shortcomings such as cost is high, the cycle of building is long, unfavorable experimental study and practical application.Carrying out one-shot forming ground manufacturing integration with ultrafast laser direct writing technology, to have the quantum optics chip of photonics element be the solution to above technical disadvantages.On the other hand, in quantum calculation and quantum information processing, only need two kinds of basic linear logic doors just can implement any operation to quantum bit, realize general quantum calculation, they be respectively two quantum bit doors (as controlled not-gate controlled NOT ?gate) and single quantum bit revolving door.Quantum information at the sub-bit of photon formation volume of encoding with polarization state is processed in optical circuit, and the operation of quantum bit is normally realized by wave plate combined, is integrated on quantum optics chip but wave plate is more difficult.Equally, for the common polarization beam apparatus separating as orthogonal polarisation state also cannot effective integration in quantum optics chip.
The present invention is directed to the deficiency that prior art exists, a kind of random polarization state quantum bit projection separating chips and manufacture method thereof are proposed, on the basis of ultrafast laser write-through manufacturing technology, the way that adopts laser beam to tilt directly to write, in rigid transparent material, manufacture the random polarization state quantum bit projection separating chips being formed by polarization conversion element and polarization state resolution element, this is not only perfect polarization encoder quantum optics chip technology, make it have the photonics element corresponding with wave plate in macroscopical optics and polarization beam apparatus function, and realize the microminiaturization of optical wave plate, integrability, avoid its connection error in macroscopical light path, the problems such as insertion loss and interface noise, improve the stability of system, reliability, and manufacturing cost and cycle are reduced greatly.
The present invention adopts ultrafast laser write-through manufacturing technology, directly writes the method for angle manufacture the polarization state quantum bit projection separating chips being made up of birefringent waveguide by changing laser beam.Have small birefringence with the produced waveguide of ultrafast laser direct writing technology, this makes them support the conduction of two kinds of orthogonal polarization state light waves with different propagation constants.Can change polarization direction by the birefringent optical axis orientation of choosing birefringent waveguide, birefringent waveguide has just had wave plate function like this.And because birefringent optical axis always with the optical axis coincidence of directly writing laser, so can directly write by changing the angle manufacture of laser and have the waveguide (as shown in Figure 2) of specific birefringence optical axis.The read-in angle that changes laser has at least three kinds of modes: one, by spatial light wave modulator (Spatial Light Modulator, be called for short SLM) position to laser before incident mutually and amplitude modulate, thereby focusing on the Inbound of writing that changes light beam in focus; Two,, by wide seam shield portions laser, allow remaining light beam be incident on the off-centered position of focusing objective len entrance pupil, thereby change the direction of propagation after focusing on; Three, change the incoming position of light beam by long-focus lens, before focusing objective len, place an optical axis parallel but have the long-focal length lens of certain deviation distance with the axis of symmetry of light beam and object lens, laser beam is incident on object lens entrance pupil from axle, after being focused on by object lens, by producing a branch of and objective lens optical axis light beam at an angle, can control this angle by the offset distance that regulates long-focus lens.
Except the orientation of birefringent optical axis, the realization of wave plate function is also relevant with the phasic difference that it can be introduced, and having in the birefringent waveguide of wave plate function, and it is that length with waveguide is relevant that the dominant bit accumulating between polarized component differs.Figure 3 shows that phasic difference between orthogonal polarization components and the simulative relation curve (waveguide material is take pyrex as example) of birefringent waveguide length here.Their relation is linear as shown in the figure, and in the time that the length of birefringent waveguide is 9 millimeters, phasic difference is pi/2, and now this waveguide has the character of macroscopical optics quarter-wave plate; In the time that waveguide length is 18 millimeters, the phasic difference of pairwise orthogonal component is π, and now waveguide has the character of half-wave plate.Like this, this optical element based on birefringent waveguide has just possessed two regulatable fundamentals---direction of optic axis, the polarized component phasic difference of optical wave plate completely, and what become in chip light path alternative macroscopical optical wave plate can integrated class wave plate element.In addition, macroscopic view optical wave plate conventionally only have quarter-wave plate and half-wave plate available, wanting that random polarization state is transformed into certain orthogonal polarization state need to arrange in pairs or groups and use a quarter-wave plate and a half-wave plate, and class wave plate of the present invention waveguide can be selected arbitrarily orientation and the bit phase delay value of birefringent optical axis during fabrication, thereby the conversion that need to could be realized by several wave plate combined can be realized with a direction of optic axis and the specific birefringent waveguide of phasic difference.
The present invention adopts the guide directional coupler with birefringence that ultrafast laser directly writes out to realize the separation to different polarization states quantum bit.Birefringent waveguide directional coupler forms (as Fig. 4) by two birefringent waveguides, and light beam enters from one end, enters another waveguide or propagate along former waveguide when through coupling regime.The ratio that the light that enters another waveguide accounts for whole light is called transmissivity.Transmissivity is relevant with coupling length with the distance between two waveguides.Concerning common guide directional coupler, when distance one timing, transmissivity presents a kind of concussion relation of sinusoidal curve formula with coupling length; And in the time that the waveguide itself that participates in being coupled has birefringence, this concussion curve can become two because polarization state is different, if Fig. 5 is that (waveguide material is take pyrex as example here to the relation curve simulation drawing of coupling length for birefringent waveguide directional coupler transmissivity, article two, waveguide character is just the same, and its spacing between coupled zone is made as 7 microns).As can be seen from Figure 5, in the time that coupling length is 0, the transmissivity of two kinds of polarization states is all 0, article one, in waveguide, the light of which kind of polarization state can not be coupled in another waveguide, along with the increase of coupling length, the separation of two kinds of polarization state concussion curves is more and more significant, in the time that coupling length reaches 13.36 millimeters (as Fig. 5 dotted line position), the crest (transmissivity is close to 100%) of horizontal polarization state concussion curve is almost just in time positioned at the wave trough position (transmissivity is 0) of polarization and vertical polarization concussion curve, the light of the horizontal polarization direction of now transmitting in a waveguide can almost be coupled into another waveguide completely, and vertically the light of polarization direction can not be coupled completely.Like this, birefringent waveguide directional coupler has in fact just formed a kind of polarization beam apparatus, different from the block polarization beam apparatus in common macroscopical optics, and it can be integrated in quantum optics chip and be integrated and create together when other optical module of neutralization.
The present invention is achieved by the following technical solutions:
The present invention relates to a kind of random polarization state quantum bit projection separating chips, be specially the optical glass chip of rectangle flake structure, comprise: a specific birefringent waveguide of optical axis and a birefringent waveguide directional coupler, wherein: the specific birefringent waveguide of optical axis is provided with opening at an end face of described optical glass chip, for receiving the polarization state for the treatment of that projection separates, its other end is connected with birefringent waveguide directional coupler.
The birefringent optical axis of the described specific birefringent waveguide of optical axis overlaps or favours chip normal, random polarization state can be converted to the linear polarization in a pair of certain orthogonal direction.
The specific birefringent waveguide of described optical axis is preferably wave plate and realizes.
The birefringent optical axis of the described specific birefringent waveguide of optical axis favours chip normal at a certain angle according to the polarization state that will change; The length of waveguide is the polarization state depending on changing also.
Described birefringent waveguide directional coupler is realized polarization beam splitting, formed by two waveguides that intercouple with birefringence, wherein: the first and second coupled waveguides are equipped with opening on the end face that is positioned at described optical glass chip, the other end of the first coupled waveguide is connected with the specific birefringent waveguide of optical axis, and the other end of the second coupled waveguide is cecum (as shown in Figure 6).
The first and second described coupled waveguides are parallel to each other in coupling regime, start to separate gradually at coupling regime end, when apart from several millimeters of chip end faces, recover parallel, and occurrence needs depending on application.
Be converted to linear polarization in a pair of certain orthogonal direction through birefringent waveguide after coupling regime, enter the second coupled waveguide propagation or continue to propagate finally from corresponding outlet outgoing along the first coupled waveguide according to its polarization direction, be that the linear polarization of a direction and the linear polarization of its orthogonal directions separate, so far this chip completes the function that the projection of random polarization state quantum bit separates.
The present invention relates to the manufacture method of said chip, adopt ultrafast laser write-through manufacturing technology, manufacture as chip functions unit by changing laser read-in angle and length, the specific birefringent waveguide of optical axis, concrete steps are as follows:
1) measure the phasic difference δ between ratio r=A1/A2 and the polarized component of the polarized component amplitude A 1 of polarization state to be converted in pair of orthogonal direction, A2.
2) according to the wavelength X of polarization state to be converted, birefraction b, and formula
、
, calculate angle θ (0≤θ≤90 °) between optical axis and the chip normal of laser while directly writing birefringent waveguide and the length L of birefringent waveguide.Coupling space d 1 ?select in 20 microns, too small meeting exceeds the working ability of manufacturing technology, excessive coupling efficiency is too low, coupling regime is oversize.Calculate coupling regime length l that can be corresponding with coupling space d by commercialization optical computing software.The length of coupling regime is got transmissivity corresponding length while reaching maximum value for the first time.
Step 2) in, calculate coupling regime length l desired parameters by commercialization optical computing software (as Rsoft, OptiWave etc.) and specifically comprise following known parameters: waveguide material substrate refractive index n, two kinds of crossed polarized lights are at the refractive index n of waveguide core layer
oand n
e, the optical wavelength λ of beam splitting to be coupled, and coupling space d.After being calculated, above parameter Input Software can obtain coupling regime length l.
Step 2) in, cause for preventing that laser spot shape when the chip end face from changing the waveguide openings distortion that writes, the reserved Δ L of length of birefringent waveguide exposes waveguide for grinding off after machining, therefore the actual length that writes of birefringent waveguide is L '=L+ Δ L, Δ L is extremely several millimeters of hundreds of microns, and occurrence needs depending on application.
Step 2) in, the first and second coupled waveguides grind off length in again parallel region be extremely several millimeters of hundreds of microns, occurrence needs depending on application, but should not exceed the length of above-mentioned parallel zone again, to guarantee that waveguide vertical openings is in chip end face.
3) according to step 2) θ, L ', d, the l parameter obtaining generate the cad model of described optical glass chip, and according to Model Selection chip size; Then cad model is converted to and can directly writes the line segment aggregate file of scanning for ultrafast laser, and set machined parameters; Finally start job sequence, laser spot is started along line-segment sweep.
4) after having scanned, grind off chip two ends Δ L length, make waveguide openings in chip end face.
5) after having ground, chip is led to optical tests, whether detection chip reaches functional requirement and loss whether below permissible value.That chip manufacturing completes; Otherwise adjust machined parameters and re-start scanning.
Described machined parameters includes but not limited to laser single-pulse energy, pulse repetition rate, sweep velocity, directly writes the angle of light beam and chip normal etc.; Laser beam after focusing and chip normal angulation regulate by methods such as spatial light wave modulator (SLM) or object lens supplementary lens or wide seams.
Technique effect
Compared with prior art, technological merit of the present invention comprises:
1) said chip has realized the microminiaturization of polarization state quantum bit projection tripping device, and the device light path that need to build on the optical table of laboratory is integrated on chip piece, takes up room and reduces multiple orders of magnitude with weight; Save device simultaneously and built equipment, reduced device manufacturing cost.
2) said chip manufacturing process is based upon on ultrafast laser write-through manufacturing technology basis, utilize ultrafast laser in glass material, directly to write the birefringent phenomenon bringing, the employing of novelty the laser beam mode that tilts directly to write manufacture the regulatable waveguide of birefringent optical axis, solved the problem that macroscopical optical wave plate is difficult to chip; Allow " wave plate " of chip to there is high design freedom simultaneously, simplified polarization conversion device.In addition, the directional coupler of utilization based on birefringent waveguide solved the problem of macroscopie polariation beam splitter chip.
Accompanying drawing explanation
Fig. 1 is ultrafast laser write-through manufacturing technology schematic diagram.
Fig. 2 directly writes schematic cross-section for writing Inbound vertical (left side) with the waveguide on tilt (right side).
Fig. 3 birefringent waveguide length and quadrature component phasic difference relation curve schematic diagram;
In figure: length when phasic difference is pi/2 and π is respectively 9 millimeters and 18 millimeters, corresponding to the function of quarter-wave plate and half-wave plate.
Fig. 4 is birefringent waveguide directional coupler schematic diagram.
Fig. 5 is the coupling concussion curve synoptic diagram of horizontal polarization and vertical polarization;
In figure: level and first maximum value place of vertical polarization transmissivity difference are positioned at 13.36 millimeters of places.
Fig. 6 is structural representation of the present invention.
Fig. 7 is ultrafast laser write-through manufacturing flow chart of the present invention.
Embodiment
Below embodiments of the invention are elaborated, the present embodiment is implemented under take technical solution of the present invention as prerequisite, provided detailed embodiment and concrete operating process, but protection scope of the present invention is not limited to following embodiment.
Embodiment 1
The operating environment of the present embodiment is: ultrafast laser write-through system of processing, and the chip material of employing is borosilicate glass, the photon wavelength of polarization state quantum bit to be converted is 810 nanometers.
As shown in Figure 6, the optical glass chip 1 of the rectangle flake structure relating to for the present embodiment, comprise: a specific birefringent waveguide 2 of optical axis and a birefringent waveguide directional coupler 3, wherein: the specific birefringent waveguide 2 of optical axis is provided with opening 4 at an end face of described optical glass chip 1, for receiving the polarization state for the treatment of that projection separates, its other end is connected with birefringent waveguide directional coupler 3.
The length L of the specific birefringent waveguide 2 of described optical axis is 7.825 millimeters.
Described birefringent waveguide directional coupler 3 is made up of two waveguides that intercouple 6,7 with birefringence, wherein: the first and second coupled waveguides 6,7 are equipped with opening 8 on the end face that is positioned at described optical glass chip, the other end of the first coupled waveguide 6 is connected with the specific birefringent waveguide 2 of optical axis, and the other end of the second coupled waveguide 7 is cecum 5.
Described the first coupled waveguide 6 and the second coupled waveguide 7 are 7 microns at the spacing d of coupling regime, and coupling regime length l is 13.36 millimeters.
The manufacture of passing through following operation steps and realize said chip of the present embodiment:
1) use oscillograph to record the amplitude ratio r=AV/AH=4/7 of polarization state quantum bit to be converted in the polarized component of vertical and horizontal direction, the phasic difference between two components is π/5, δ=2
2) basis
Formula and
Formula, and birefraction b=2.22 × 10 of the birefringent waveguide of laser direct-writing in known chip material (this example adopts borosilicate glass)
?5with wavelength X=810 nanometer of polarization state, while obtaining processing the specific birefringent waveguide of optical axis laser beam and chip normal angulation θ=40 ° (getting less value), birefringent waveguide write length L=7.825 millimeter.The first and second coupled waveguides are chosen as 7 microns at the spacing d of coupling regime, utilize commercialization optical computing software to calculate coupling regime length l=13.36 millimeter corresponding with coupling space.The reserved size Δ L=0.5 millimeter that grinds off of optical axis specific birefringence waveguide, historical facts or anecdotes border writes size L '=L+ Δ L=8.325 millimeter
3) make cad model according to θ, L ', d, l.According to model and consider chip soundness, selecting chip size wide × long × thick is 10 × 30 × 1 millimeter.
4) said chip cad model being used software be converted to can be for the line segment aggregate file of directly writing laser spot scanning.
5) ultrafast laser is directly write job sequence and is read above-mentioned line segment aggregate file.
6) set machined parameters: establish laser single-pulse energy and be 210 and receive Jiao, pulse repetition rate is that 1 megahertz, sweep velocity are that 20 mm/second, the angle of directly writing light beam and chip normal are 40 °.
The present embodiment adopts spatial light wave modulator (SLM) to change the angle writing between laser beam and chip normal.Laser beam is first incident on SLM surface entering before object lens, and when reflection, phase place is modulated by SLM, thereby light beam is autofocusing at object lens, entrance pupil departs from center, and after being focused on by object lens, light beam and chip normal just have special angle like this.
7) start job sequence, laser spot starts along line-segment sweep.
8) scanned, utilized chip grinder coring sheet two ends length-specific, made waveguide openings in chip end face.
9) chip is led to optical tests, whether detection chip reaches functional requirement and loss whether below permissible value.
10) if detect defectively, adjust machined parameters, return to the 7th step.
11) if detect qualifiedly, chip manufacturing completes.
The product obtaining after the present embodiment operation is: polarization state quantum bit projection separating chips.
Claims (10)
1. a random polarization state quantum bit projection separating chips, it is characterized in that, described element is the optical glass chip of rectangle flake structure, comprise: a specific birefringent waveguide of optical axis and a birefringent waveguide directional coupler, wherein: the specific birefringent waveguide of optical axis is provided with opening at an end face of described optical glass chip, for receiving the polarization state for the treatment of that projection separates, its other end is connected with birefringent waveguide directional coupler.
2. random polarization state quantum bit projection separating chips according to claim 1, is characterized in that, the specific birefringent optical axis of described optical axis overlaps or favours chip normal, and random polarization state is converted to the linear polarization in a pair of certain orthogonal direction.
3. random polarization state quantum bit projection separating chips according to claim 2, is characterized in that, the specific birefringent waveguide of described optical axis realizes by wave plate.
4. random polarization state quantum bit projection separating chips according to claim 1, it is characterized in that, described birefringent waveguide directional coupler is realized polarization beam splitting, formed by two coupled waveguides with birefringence, wherein: the first and second coupled waveguides are equipped with opening on the end face that is positioned at described optical glass chip, the other end of the first coupled waveguide is connected with the specific birefringent waveguide of optical axis, and the other end of the second coupled waveguide is cecum.
5. random polarization state quantum bit projection separating chips according to claim 4, is characterized in that, the first and second described coupled waveguides are parallel to each other in coupling regime, start to separate gradually at coupling regime end, in the time approaching chip end face, recover parallel.
6. random polarization state quantum bit projection separating chips according to claim 4, it is characterized in that, described polarization beam splitting refers to: be converted to linear polarization in a pair of certain orthogonal direction through birefringent waveguide after coupling regime, enter the second coupled waveguide according to its polarization direction and propagate or continue and propagate finally from corresponding outlet outgoing along the first coupled waveguide, complete the linear polarization of a direction and the linear polarization of its orthogonal directions separates.
7. according to a manufacture method for the random polarization state quantum bit projection separating chips described in above-mentioned arbitrary claim, it is characterized in that, comprise the following steps:
1) measure the polarized component amplitude A of polarization state to be converted in pair of orthogonal direction
1, A
2ratio r=A
1/ A
2and phasic difference δ between polarized component;
2) according to the wavelength X of polarization state to be converted, birefraction b, and formula
the wavelength of polarization state to be converted, calculate angle θ (0≤θ≤90 °) between optical axis and the chip normal of laser while directly writing birefringent waveguide and the length L of birefringent waveguide, the reserved Δ L of length of birefringent waveguide is for grinding off to expose waveguide after machining, so the actual length that writes of birefringent waveguide is L '=L+ Δ L, coupling space d 1 ?select in 20 microns, by calculating the coupling regime length l corresponding with coupling space d, the length of coupling regime is got transmissivity corresponding length while reaching maximum value for the first time;
3) according to step 2) θ, L ', d, the l parameter obtaining generate the cad model of described optical glass chip, and according to Model Selection chip size; Then cad model is converted to and can directly writes the line segment aggregate file of scanning for ultrafast laser, and set machined parameters; Finally start job sequence, laser spot is started along line-segment sweep;
4) after having scanned, grind off chip two ends Δ L length, make waveguide openings in chip end face;
5) after having ground, chip is led to optical tests, whether detection chip reaches functional requirement and loss whether below permissible value, is that chip manufacturing completes; Otherwise adjust machined parameters and re-start scanning.
8. method according to claim 7, is characterized in that step 2) in, coupling regime length l is calculated desired parameters and is comprised: waveguide material substrate refractive index n, two kinds of crossed polarized lights are at the refractive index n of waveguide core layer
oand n
e, the optical wavelength λ of beam splitting to be coupled, and coupling space d.
9. method according to claim 7, it is characterized in that, step 2) in, cause waveguide openings distortion for preventing that laser spot shape when the chip end face from changing, the reserved Δ L of length of birefringent waveguide is for grinding off to expose waveguide after machining, therefore the actual length that writes of birefringent waveguide is L '=L+ Δ L.
10. method according to claim 9, is characterized in that step 2) in, the length of reserved Δ L is no more than the length in the parallel region of described recovery, to guarantee that waveguide vertical openings is in chip end face.
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108599869A (en) * | 2018-06-19 | 2018-09-28 | 上海交通大学 | Polarization Coding quantum communications terminal chip and its application |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030002127A1 (en) * | 2000-10-28 | 2003-01-02 | George David Simon | Polarisation beam splitters/combiners |
| CN102156328A (en) * | 2011-04-11 | 2011-08-17 | 中国计量学院 | Y-shaped porous hollowed slab terahertz wave polarizing beam splitter |
| CN102928926A (en) * | 2012-10-12 | 2013-02-13 | 中国计量学院 | Slotted branch type terahertz wave polarization beam splitter |
| CN203799050U (en) * | 2014-04-16 | 2014-08-27 | 上海交通大学 | Random polarization state quantum bit projection separating chip |
-
2014
- 2014-04-16 CN CN201410151643.6A patent/CN103885123B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030002127A1 (en) * | 2000-10-28 | 2003-01-02 | George David Simon | Polarisation beam splitters/combiners |
| CN102156328A (en) * | 2011-04-11 | 2011-08-17 | 中国计量学院 | Y-shaped porous hollowed slab terahertz wave polarizing beam splitter |
| CN102928926A (en) * | 2012-10-12 | 2013-02-13 | 中国计量学院 | Slotted branch type terahertz wave polarization beam splitter |
| CN203799050U (en) * | 2014-04-16 | 2014-08-27 | 上海交通大学 | Random polarization state quantum bit projection separating chip |
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| CN108599869A (en) * | 2018-06-19 | 2018-09-28 | 上海交通大学 | Polarization Coding quantum communications terminal chip and its application |
| CN108663750B (en) * | 2018-06-19 | 2019-08-02 | 上海交通大学 | The Waveguide polarization beam splitter of any angle rectangular projection can be achieved |
| CN109376866A (en) * | 2018-09-17 | 2019-02-22 | 合肥本源量子计算科技有限责任公司 | The operation method and device of the recording method of metadata and device, quantum program |
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| CN112823301B (en) * | 2018-10-17 | 2023-03-17 | 罗伯特·博世有限公司 | Apparatus and method for providing a projector with a polychromatic light beam, projector and manufacturing method |
| CN109683239B (en) * | 2019-01-23 | 2023-09-12 | 上海交大知识产权管理有限公司 | Vector vortex beam radiator in photon integrated chip and application thereof |
| WO2020151352A1 (en) * | 2019-01-23 | 2020-07-30 | 上海交通大学 | Vector vortex beam radiator in photonic integrated chip and application thereof |
| CN109683239A (en) * | 2019-01-23 | 2019-04-26 | 上海交通大学 | Vector vortex beams radiator and its application in photon integrated chip |
| CN110376753A (en) * | 2019-07-04 | 2019-10-25 | 浙江大学 | A kind of high-performance polarization beam apparatus and its design method |
| CN114460683A (en) * | 2020-11-10 | 2022-05-10 | 中国科学院半导体研究所 | Microwave photon on-chip system based on optical core particles |
| CN113960893A (en) * | 2021-10-28 | 2022-01-21 | 之江实验室 | Method for directly writing 'photon-like lattice waveguide' in glass material by femtosecond laser |
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