CN108663750B - The Waveguide polarization beam splitter of any angle rectangular projection can be achieved - Google Patents
The Waveguide polarization beam splitter of any angle rectangular projection can be achieved Download PDFInfo
- Publication number
- CN108663750B CN108663750B CN201810632389.XA CN201810632389A CN108663750B CN 108663750 B CN108663750 B CN 108663750B CN 201810632389 A CN201810632389 A CN 201810632389A CN 108663750 B CN108663750 B CN 108663750B
- Authority
- CN
- China
- Prior art keywords
- waveguide
- angle
- polarization beam
- optical axis
- beam splitter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000010287 polarization Effects 0.000 title claims abstract description 24
- 230000003287 optical effect Effects 0.000 claims abstract description 23
- 230000008878 coupling Effects 0.000 claims abstract description 15
- 238000010168 coupling process Methods 0.000 claims abstract description 15
- 238000005859 coupling reaction Methods 0.000 claims abstract description 15
- 230000000295 complement effect Effects 0.000 claims abstract description 4
- 230000033228 biological regulation Effects 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000005452 bending Methods 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/125—Bends, branchings or intersections
Abstract
A kind of Waveguide polarization beam splitter of achievable any angle rectangular projection, it include: the directional coupler of the inclined waveguide composition of two birefringent optical axis, the parallel coupling region of the directional coupler is in a clinoplain identical or complementary as whole inclined light shaft angle.The present invention with minute angle by the way of repeatedly deviating direct write neighbour waveguide, optical axis direction caused by fine adjustment stress birfringence, to realize any regulation of waveguide entirety optical axis, any orthogonal basic vector projection operation can be directly carried out, and realize higher contrast.
Description
Technical field
The present invention relates to a kind of technologies of femtosecond laser manufacture field, and in particular to a kind of achievable any angle is just
It trades the Waveguide polarization beam splitter of shadow.
Background technique
Photon polarization freedom degree is the information carrier on basis in optical information field, and polarization beam splitter part is that optical information field is non-
Often important base components, are widely used in numerous areas such as optic communication, quantum communications, quantum calculations.However existing collect
At waveguide type beam splitting device carry out coupling beam splitting when can only polarize to the light of orthogonal basic vector (orthogonal bases)
Projection, it is birefringent as caused by the factors such as the asymmetry of waveguide sections or stress to will lead to not like-polarized mode distributions
With the difference of the coefficient of coup, therefore can not the light directly to diagonal basic vector (diagonal bases) carry out polarization projection.However,
The devices such as half-wave plate are added and carry out additional manipulation, on the one hand will increase the overall size and layout dimension of integrated optical wave guide device,
On the other hand, since the imperfection of device is readily incorporated the error for being difficult to measure, whole drop shadow effect is had an impact.
Summary of the invention
The present invention has filled up the vacancy of existing polarization projection beam splitting device, proposes a kind of achievable any angle rectangular projection
Waveguide polarization beam splitter, using repeatedly with minute angle deviate direct write neighbour waveguide by the way of, fine adjustment stress birfringence
Caused optical axis direction can directly carry out any orthogonal basic vector projection operation to realize any regulation of waveguide entirety optical axis,
And realize higher contrast.
The present invention is achieved by the following technical solutions:
The present invention relates to a kind of Waveguide polarization beam splitters of achievable any angle rectangular projection, comprising: two waveguide groups
At the inclined directional coupler of birefringent optical axis, the coupling regime of the directional coupler is orthogonal with optical axis direction at one
Plane in.
Perpendicular to the direct write direction of laser, the coupling regime exists for the input arm of the directional coupler and output arm
One clinoplain identical or complementary with inclined light shaft angle, coupling length areWherein: CVIt is vertical
In the coefficient of coup of optical axis polarization direction, CHFor the coefficient of coup for being parallel to optical axis polarization direction.
Two waveguides are parallel to each other in coupling regime, separate in coupling regime end, wherein between waveguide gradually
Isolated bending part uses S type structure to realize low-loss.
Any angle rectangular projection, i.e., to the polarization beam splitting of different orthogonal basic vector, in particular to: from two waveguides
It is corresponding outlet be emitted mutually orthogonal single polarization linearly polarized light respectively.
The waveguide is realized by femtosecond laser direct write, specifically by repeatedly with minute angle, distance, direct write function
The femtosecond laser of the offset of rate and/or direct write speed generates the not commensurate energy-flux density at laser focusing and realizes.
Technical effect
Compared with prior art, the direct writing means of tilted optical axis of the present invention can not only be on the basis for not changing direct write optical path
It is upper to prepare optical axis at any angle, and the waveguide single mode throughput height mode manufactured is good, and furthermore the present invention high can compare
Degree directly carries out orthogonal basic vector to the inclined light of any angle and projects beam splitting, is suitble to integrated large-scale application.
Detailed description of the invention
Fig. 1 is 1 schematic diagram of the embodiment of the present invention；
In figure: a is top view, and b is A to schematic diagram, and c is B to schematic diagram, and d is stereoscopic schematic diagram；
Fig. 2 is S type warp architecture schematic diagram；
Fig. 3 is tilted optical axis direct writing means schematic diagram；
In figure: a is that waveguide optical axis is vertical, b is 22.5 degree of waveguide inclined light shaft, the citing that c is 45 degree of waveguide inclined light shaft
Explanation；
Fig. 4 is the angle and waveguide physical location angle corresponding relationship of waveguide entirety inclined light shaft；
In figure: coupling regime 1, separated region 2, first wave guide 101, second waveguide 102.
Specific embodiment
Embodiment 1
As shown in Figure 1, the present embodiment includes: the first and second waveguides 101,102, in which: first wave guide 101 and the second wave
102 are led as center symmetrical structure.
First and second waveguides 101,102 be by repeatedly have minute angle, distance, direct write power and/
Or the single mode waveguide of the inclined light shaft of the femtosecond laser direct write of the offset of direct write speed out, and the direct write parameter phase of two waveguides
Together.
The first wave guide 101 and second waveguide 102 in input and output all in same level, but closely
Evanescent wave coupling regime is in an inclined plane.
As shown in Fig. 2, the S type structural schematic diagram that bending uses when closing beam and beam splitting for waveguide.
As shown in Figure 3a, it is the schematic cross-section of femtosecond laser direct write waveguide conventional machining process, is write according to such method
Waveguide optical axis out be vertically with horizontal (the parallel and vertical direction (fast and slow axis) with direct write light beam).
Fig. 3 b, Fig. 3 c are the schematic cross-section of direct-write methods, and it is inclined which can obtain optical axis any angle
Waveguide, wherein the waveguide is realized by femtosecond laser direct write as shown in Fig. 3 b, Fig. 3 c, i.e. the wave in original single direct write
It leads (such as by Fig. 3 b O1, Fig. 3 c O1), distance away with angle with identical or slightly different parameter direct write one again
Waveguide (such as Fig. 3 b O2, Fig. 3 c O2), to realize the effect of the waveguide entirety inclined light shaft formed, in which: multiple direct write number
It is not limited to 2 times, spacing is not limited to 0.1~6 micron.
The present embodiment can realize performance indicator/signal input and output of the Waveguide polarization beam splitter of any angle rectangular projection
Processing feature are as follows: beam splitting contrast is in 20:1 or more.
It is illustrated in figure 4 the physical location angle of the 2 microns of direct write waveguides twice in interval and is formed by waveguide entirety optical axis
The corresponding relationship of tilt angle.(knot as shown in Figure 1 can be coupled by the evanescent wave of certain distance by the inclined waveguide
Structure) realize any angle rectangular projection Waveguide polarization beam splitting.
Above-mentioned specific implementation can by those skilled in the art under the premise of without departing substantially from the principle of the invention and objective with difference
Mode carry out local directed complete set to it, protection scope of the present invention is subject to claims and not by above-mentioned specific implementation institute
Limit, each implementation within its scope is by the constraint of the present invention.
Claims (3)
1. a kind of Waveguide polarization beam splitter of achievable any angle rectangular projection characterized by comprising two birefringent lights
The directional coupler of the inclined waveguide composition of axis, the parallel coupling region of the directional coupler is in one and whole optical axis tilt angle
It spends in identical or complementary clinoplain；
Any angle rectangular projection, i.e., to the polarization beam splitting of different orthogonal basic vector, in particular to: the phase of Cong Lianggen waveguide
It should export and be emitted mutually orthogonal single polarization linearly polarized light；
The parallel coupling region is in a clinoplain identical or complementary as whole inclined light shaft angle, using evanescent wave
The form of coupling, coupling length areWherein: CVFor the coefficient of coup of the polarization direction perpendicular to optical axis, CH
For be parallel to optical axis polarization direction the coefficient of coup；
Two waveguides of the composition directional coupler are parallel to each other in coupling regime, in parallel coupling area distal with S
Type warp architecture is gradually disengaged.
2. Waveguide polarization beam splitter according to claim 1, characterized in that the polarization beam splitter is using improved fixed
To coupler structure, the direct write direction of the input arm of the directional coupler and output arm perpendicular to laser.
3. Waveguide polarization beam splitter according to claim 1, characterized in that the waveguide is real by femtosecond laser direct write
It is existing, specifically by the femtosecond laser of the offset repeatedly with minute angle, distance, direct write power and/or direct write speed, generate
Not commensurate energy-flux density at laser focusing is realized.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810632389.XA CN108663750B (en) | 2018-06-19 | 2018-06-19 | The Waveguide polarization beam splitter of any angle rectangular projection can be achieved |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810632389.XA CN108663750B (en) | 2018-06-19 | 2018-06-19 | The Waveguide polarization beam splitter of any angle rectangular projection can be achieved |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108663750A CN108663750A (en) | 2018-10-16 |
| CN108663750B true CN108663750B (en) | 2019-08-02 |
Family
ID=63776053
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810632389.XA Active CN108663750B (en) | 2018-06-19 | 2018-06-19 | The Waveguide polarization beam splitter of any angle rectangular projection can be achieved |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108663750B (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102736174A (en) * | 2012-06-12 | 2012-10-17 | 中国科学院半导体研究所 | Photonic crystal directional-coupling waveguide beam splitter |
| CN102928926A (en) * | 2012-10-12 | 2013-02-13 | 中国计量学院 | Slotted branch type terahertz wave polarization beam splitter |
| CN103339540A (en) * | 2011-01-26 | 2013-10-02 | 日本电信电话株式会社 | Waveguide-type polarization beam splitter |
| CN103765265A (en) * | 2011-09-27 | 2014-04-30 | 日本电信电话株式会社 | Light merging/branching device, bidirectional light propagation device, and light transmission/reception system |
| CN103885123A (en) * | 2014-04-16 | 2014-06-25 | 上海交通大学 | Chip allowing projection and separation to be performed on arbitrary-polarization-state qubits and manufacturing method thereof |
| US8948555B1 (en) * | 2013-05-21 | 2015-02-03 | Aurrion, Inc. | Skew waveguide directional coupler |
| CN107003533A (en) * | 2014-11-06 | 2017-08-01 | 华为技术有限公司 | Waveguide polarization circulator and its building method |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030118279A1 (en) * | 2001-12-20 | 2003-06-26 | Lynx Photonic Networks Inc | High-tolerance broadband-optical switch in planar lightwave circuits |
| US7035491B2 (en) * | 2003-09-15 | 2006-04-25 | Little Optics, Inc. | Integrated optics polarization beam splitter using form birefringence |
-
2018
- 2018-06-19 CN CN201810632389.XA patent/CN108663750B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103339540A (en) * | 2011-01-26 | 2013-10-02 | 日本电信电话株式会社 | Waveguide-type polarization beam splitter |
| CN103765265A (en) * | 2011-09-27 | 2014-04-30 | 日本电信电话株式会社 | Light merging/branching device, bidirectional light propagation device, and light transmission/reception system |
| CN102736174A (en) * | 2012-06-12 | 2012-10-17 | 中国科学院半导体研究所 | Photonic crystal directional-coupling waveguide beam splitter |
| CN102928926A (en) * | 2012-10-12 | 2013-02-13 | 中国计量学院 | Slotted branch type terahertz wave polarization beam splitter |
| US8948555B1 (en) * | 2013-05-21 | 2015-02-03 | Aurrion, Inc. | Skew waveguide directional coupler |
| CN103885123A (en) * | 2014-04-16 | 2014-06-25 | 上海交通大学 | Chip allowing projection and separation to be performed on arbitrary-polarization-state qubits and manufacturing method thereof |
| CN107003533A (en) * | 2014-11-06 | 2017-08-01 | 华为技术有限公司 | Waveguide polarization circulator and its building method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN108663750A (en) | 2018-10-16 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Spuhler et al. | A very short planar silica spot-size converter using a nonperiodic segmented waveguide | |
| US7228015B2 (en) | Integrated optic polarization converter based on structural chirality | |
| US9696486B2 (en) | Surface-normal coupler for silicon-on-insulator platforms | |
| CN108027476A (en) | A kind of waveguide intersects | |
| CN103885123B (en) | Random polarization state quantum bit projection separating chips and manufacture method thereof | |
| CN105308495A (en) | Polarization control device and polarization control method | |
| CN106959485B (en) | Directional coupling type TM polarizer and beam splitter based on sub-wavelength grating | |
| US10191214B2 (en) | Photonic integrated circuit having a relative polarization-rotating splitter/combiner | |
| KR101900630B1 (en) | Cross waveguide | |
| US20160245999A1 (en) | Low Loss Optical Crossing and Method of Making Same | |
| EP4111246A1 (en) | Optical coupler comprising a molded optical interposer together with a pic and 2 polarization selective elements enabling isolation and/or polarization management | |
| Dumais et al. | Three-mode synthesis of slab Gaussian beam in ultra-low-loss in-plane nanophotonic silicon waveguide crossing | |
| CN109164536A (en) | Intelligent optical power distribution devices based on super surfacing | |
| Gao et al. | Low-loss millimeter-length waveguides and grating couplers in single-crystal diamond | |
| CN108663750B (en) | The Waveguide polarization beam splitter of any angle rectangular projection can be achieved | |
| CN103777283A (en) | Multi-mode interference optical switch with controlled input position and preparation method of multi-mode interference optical switch | |
| Hsu et al. | Compact Y-branch power splitter based on simplified coherent coupling | |
| Miao et al. | A high-efficiency in-plane splitting coupler for planar photonic crystal self-collimation devices | |
| CN103901559B (en) | Optical coupling device | |
| Veldhuis et al. | Design and characterization of a mode-splitting/spl Psi/-junction | |
| Koos et al. | Photonic wire bonding: connecting nanophotonic circuits across chip boundaries | |
| CN112329209A (en) | Design method of on-chip photonic device based on appearance profile control | |
| Goodwill | Technology for ultra-large silicon photonic optical switches | |
| Jia et al. | Design and fabrication of high efficiency power coupler between different photonic crystal waveguides | |
| WO2017012586A1 (en) | Polarization beam splitter |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20221101 Address after: 201100 Room 110 and 111, Building 3, No. 600, Jianchuan Road, Minhang District, Shanghai Patentee after: Shanghai Jiaotong University Intellectual Property Management Co.,Ltd. Address before: 200240 No. 800, Dongchuan Road, Shanghai, Minhang District Patentee before: SHANGHAI JIAO TONG University |
|
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20231109 Address after: 201210 3rd floor, building 1, No.400, Fangchun Road, China (Shanghai) pilot Free Trade Zone, Pudong New Area, Shanghai Patentee after: Shanghai Turing intelligent computing Quantum Technology Co.,Ltd. Address before: 201100 Room 110 and 111, Building 3, No. 600, Jianchuan Road, Minhang District, Shanghai Patentee before: Shanghai Jiaotong University Intellectual Property Management Co.,Ltd. |