CN108663750A - The Waveguide polarization beam splitter of any angle rectangular projection can be achieved - Google Patents
The Waveguide polarization beam splitter of any angle rectangular projection can be achieved Download PDFInfo
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- CN108663750A CN108663750A CN201810632389.XA CN201810632389A CN108663750A CN 108663750 A CN108663750 A CN 108663750A CN 201810632389 A CN201810632389 A CN 201810632389A CN 108663750 A CN108663750 A CN 108663750A
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- waveguide
- polarization beam
- angle
- beam splitter
- optical axis
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- 230000010287 polarization Effects 0.000 title claims abstract description 25
- 230000003287 optical effect Effects 0.000 claims abstract description 22
- 230000008878 coupling Effects 0.000 claims abstract description 14
- 238000010168 coupling process Methods 0.000 claims abstract description 14
- 238000005859 coupling reaction Methods 0.000 claims abstract description 14
- 230000000295 complement effect Effects 0.000 claims abstract description 4
- 230000033228 biological regulation Effects 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000005452 bending Methods 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/125—Bends, branchings or intersections
Abstract
A kind of Waveguide polarization beam splitter of achievable any angle rectangular projection, including：The directional coupler of the inclined waveguide composition of two birefringent optical axis, the parallel coupling region of the directional coupler is in a clinoplain identical or complementary as whole inclined light shaft angle.The present invention with minute angle by the way of repeatedly deviating direct write neighbour's waveguide, optical axis direction caused by fine adjustment stress birfringence, to realize the arbitrary regulation and control of waveguide entirety optical axis, arbitrary orthogonal basic vector projection operation can be directly carried out, and realize higher contrast.
Description
Technical field
The present invention relates to a kind of technologies of femtosecond laser manufacture field, and in particular to a kind of achievable any angle is just
It trades the Waveguide polarization beam splitter of shadow.
Background technology
Photon polarization degree of freedom is the information carrier on basis in optical information field, and polarization beam splitter part is that optical information field is non-
Often important base components, are widely used in numerous areas such as optic communication, quantum communications, quantum calculations.However existing collect
At waveguide type beam splitting device carry out coupling beam splitting when can only polarize to the light of orthogonal basic vector (orthogonal bases)
Projection, since birefringence caused by the factors such as the asymmetry of waveguide sections or stress can cause to not like-polarized mode distributions
With the difference of the coefficient of coup, therefore can not polarization projection directly be carried out to the light of diagonal basic vector (diagonal bases).However,
The devices such as half-wave plate are added and carry out additional manipulation, on the one hand will increase the overall size and layout dimension of integrated optical wave guide device,
On the other hand, since the imperfection of device is readily incorporated the error for being difficult to measure, whole drop shadow effect is had an impact.
Invention content
The present invention has filled up the vacancy of existing polarization projection beam splitting device, proposes a kind of achievable any angle rectangular projection
Waveguide polarization beam splitter, using repeatedly with minute angle deviate direct write neighbour's waveguide by the way of, fine adjustment stress birfringence
Caused optical axis direction can directly carry out arbitrary orthogonal basic vector projection operation to realize the arbitrary regulation and control of waveguide entirety optical axis,
And realize higher contrast.
The present invention is achieved by the following technical solutions：
The present invention relates to a kind of Waveguide polarization beam splitters of achievable any angle rectangular projection, including：Two waveguide groups
At the inclined directional coupler of birefringent optical axis, the coupling regime of the directional coupler is orthogonal with optical axis direction at one
Plane in.
With output arm perpendicular to the direct write direction of laser, the coupling regime exists the input arm of the directional coupler
One clinoplain identical or complementary with inclined light shaft angle, coupling length areWherein：CVIt is vertical
In the coefficient of coup of optical axis polarization direction, CHTo be parallel to the coefficient of coup of optical axis polarization direction.
Two waveguides are parallel to each other in coupling regime, detached in coupling regime end, wherein between waveguide gradually
The bending part of separation uses S types structure to realize low-loss.
Any angle rectangular projection, i.e., to the polarization beam splitting of different orthogonal basic vector, in particular to：From two waveguides
It is corresponding outlet be emitted mutually orthogonal single polarization linearly polarized light respectively.
The waveguide is realized by femtosecond laser direct write, specifically by repeatedly with minute angle, distance, direct write work(
The femtosecond laser of the offset of rate and/or direct write speed generates the not commensurate energy-flux density at laser focusing and realizes.
Technique effect
Compared with prior art, the direct writing means of tilted optical axis of the present invention can not only be on the basis for not changing direct write light path
It is upper to prepare optical axis at any angle, and the waveguide single mode throughput height mode manufactured is good, and the present invention high can compare in addition
Degree directly carries out orthogonal basic vector to the inclined light of any angle and projects beam splitting, is suitble to integrated large-scale application.
Description of the drawings
Fig. 1 is 1 schematic diagram of the embodiment of the present invention；
In figure：A is vertical view, and b is A to schematic diagram, and c is B to schematic diagram, and d is stereoscopic schematic diagram；
Fig. 2 is S type warp architecture schematic diagrames；
Fig. 3 is tilted optical axis direct writing means schematic diagram；
In figure：A is that waveguide optical axis is vertical, b is 22.5 degree of waveguide inclined light shaft, the citing that c is 45 degree of waveguide inclined light shaft
Explanation；
Fig. 4 is the angle and waveguide physical location angle correspondence figure of waveguide entirety inclined light shaft；
In figure：Coupling regime 1, separated region 2, first wave guide 101, second waveguide 102.
Specific implementation mode
Embodiment 1
As shown in Figure 1, the present embodiment includes：First and second waveguides 101,102, wherein：First wave guide 101 and the second wave
Symmetrical structure centered on leading 102.
First and second waveguides 101,102 be by repeatedly have minute angle, distance, direct write power and/
Or the single mode waveguide of inclined light shaft that the femtosecond laser direct write of the offset of direct write speed goes out, and the direct write parameter phase of two waveguides
Together.
The first wave guide 101 and second waveguide 102 in input and output all in same level, but closely
Evanescent wave coupling regime is in an inclined plane.
As shown in Fig. 2, for the S type structural schematic diagrams that beam is closed in waveguide with bending uses when beam splitting.
As shown in Figure 3a, it is the schematic cross-section of femtosecond laser direct write waveguide conventional machining process, is write according to such method
The waveguide optical axis gone out be vertically with horizontal (the parallel and vertical direction (fast and slow axis) with direct write light beam).
Fig. 3 b, Fig. 3 c are the schematic cross-section of direct-write methods, and it is inclined which can obtain optical axis any angle
Waveguide, wherein as shown in Fig. 3 b, Fig. 3 c, the waveguide is realized by femtosecond laser direct write, i.e. the wave in original single direct write
It leads (such as by Fig. 3 b O1, Fig. 3 c O1), distance away with angle with identical or slightly different parameter direct write one again
Waveguide (such as Fig. 3 b O2, Fig. 3 c O2), to realize the effect of the waveguide entirety inclined light shaft formed, wherein：Multiple direct write number
It is not limited to 2 times, spacing is not limited to 0.1~6 micron.
The present embodiment can realize performance indicator/signal input and output of the Waveguide polarization beam splitter of any angle rectangular projection
Processing feature is：Beam splitting contrast is 20:1 or more.
It is illustrated in figure 4 the physical location angle of the 2 microns of direct write waveguides twice in interval and is formed by waveguide entirety optical axis
The correspondence figure at angle of inclination.(knot as shown in Figure 1 can be coupled by the evanescent wave of certain distance by the inclined waveguide
Structure) realize any angle rectangular projection Waveguide polarization beam splitting.
Above-mentioned specific implementation can by those skilled in the art under the premise of without departing substantially from the principle of the invention and objective with difference
Mode carry out local directed complete set to it, protection scope of the present invention is subject to claims and not by above-mentioned specific implementation institute
Limit, each implementation within its scope is by the constraint of the present invention.
Claims (5)
1. a kind of Waveguide polarization beam splitter of achievable any angle rectangular projection, which is characterized in that including：Two birefringent lights
The directional coupler of the inclined waveguide composition of axis, the parallel coupling region of the directional coupler is in one and whole optical axis tilt angle
It spends in identical or complementary clinoplain.
2. Waveguide polarization beam splitter according to claim 1, characterized in that the polarization beam splitter is using improved fixed
To coupler structure, the input arm and output arm of the directional coupler are perpendicular to the direct write direction of laser, the composition
Two waveguides of directional coupler are parallel to each other in coupling regime, are gradually disengaged with S type warp architectures in coupling regime end.
3. Waveguide polarization beam splitter according to claim 1, it is characterized in that the parallel coupling region one with it is whole
The identical or complementary clinoplain of body inclined light shaft angle, the form coupled using evanescent wave, coupling length areWherein：CVFor perpendicular to the coefficient of coup of the polarization direction of optical axis, CHTo be parallel to the polarization direction of optical axis
The coefficient of coup.
4. Waveguide polarization beam splitter according to claim 1, characterized in that any angle rectangular projection, i.e., pair
The polarization beam splitting of different orthogonal basic vector, in particular to：It is emitted mutually orthogonal single polarization line from the corresponding outlet of two waveguides
Polarised light.
5. the beam splitting device according to claim 1 for the projection of orthogonal basic vector, characterized in that the waveguide is by flying
Second laser direct-writing is realized, specifically by the offset repeatedly with minute angle, distance, direct write power and/or direct write speed
Femtosecond laser generates the not commensurate energy-flux density at laser focusing and realizes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810632389.XA CN108663750B (en) | 2018-06-19 | 2018-06-19 | The Waveguide polarization beam splitter of any angle rectangular projection can be achieved |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810632389.XA CN108663750B (en) | 2018-06-19 | 2018-06-19 | The Waveguide polarization beam splitter of any angle rectangular projection can be achieved |
Publications (2)
| Publication Number | Publication Date |
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| CN108663750A true CN108663750A (en) | 2018-10-16 |
| CN108663750B CN108663750B (en) | 2019-08-02 |
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| CN201810632389.XA Active CN108663750B (en) | 2018-06-19 | 2018-06-19 | The Waveguide polarization beam splitter of any angle rectangular projection can be achieved |
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Citations (9)
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|---|---|---|---|---|
| US20030118279A1 (en) * | 2001-12-20 | 2003-06-26 | Lynx Photonic Networks Inc | High-tolerance broadband-optical switch in planar lightwave circuits |
| US20050058386A1 (en) * | 2003-09-15 | 2005-03-17 | Little Brent Everett | Integrated optics polarization beam splitter using form birefringence |
| CN102736174A (en) * | 2012-06-12 | 2012-10-17 | 中国科学院半导体研究所 | Photonic crystal directional-coupling waveguide beam splitter |
| CN102928926A (en) * | 2012-10-12 | 2013-02-13 | 中国计量学院 | Slotted branch type terahertz wave polarization beam splitter |
| CN103339540A (en) * | 2011-01-26 | 2013-10-02 | 日本电信电话株式会社 | Waveguide-type polarization beam splitter |
| CN103765265A (en) * | 2011-09-27 | 2014-04-30 | 日本电信电话株式会社 | Light merging/branching device, bidirectional light propagation device, and light transmission/reception system |
| CN103885123A (en) * | 2014-04-16 | 2014-06-25 | 上海交通大学 | Chip allowing projection and separation to be performed on arbitrary-polarization-state qubits and manufacturing method thereof |
| US8948555B1 (en) * | 2013-05-21 | 2015-02-03 | Aurrion, Inc. | Skew waveguide directional coupler |
| CN107003533A (en) * | 2014-11-06 | 2017-08-01 | 华为技术有限公司 | Waveguide polarization circulator and its building method |
-
2018
- 2018-06-19 CN CN201810632389.XA patent/CN108663750B/en active Active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030118279A1 (en) * | 2001-12-20 | 2003-06-26 | Lynx Photonic Networks Inc | High-tolerance broadband-optical switch in planar lightwave circuits |
| US20050058386A1 (en) * | 2003-09-15 | 2005-03-17 | Little Brent Everett | Integrated optics polarization beam splitter using form birefringence |
| CN103339540A (en) * | 2011-01-26 | 2013-10-02 | 日本电信电话株式会社 | Waveguide-type polarization beam splitter |
| CN103765265A (en) * | 2011-09-27 | 2014-04-30 | 日本电信电话株式会社 | Light merging/branching device, bidirectional light propagation device, and light transmission/reception system |
| CN102736174A (en) * | 2012-06-12 | 2012-10-17 | 中国科学院半导体研究所 | Photonic crystal directional-coupling waveguide beam splitter |
| CN102928926A (en) * | 2012-10-12 | 2013-02-13 | 中国计量学院 | Slotted branch type terahertz wave polarization beam splitter |
| US8948555B1 (en) * | 2013-05-21 | 2015-02-03 | Aurrion, Inc. | Skew waveguide directional coupler |
| CN103885123A (en) * | 2014-04-16 | 2014-06-25 | 上海交通大学 | Chip allowing projection and separation to be performed on arbitrary-polarization-state qubits and manufacturing method thereof |
| CN107003533A (en) * | 2014-11-06 | 2017-08-01 | 华为技术有限公司 | Waveguide polarization circulator and its building method |
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| CN108663750B (en) | 2019-08-02 |
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