CN103876737B - Based on dry type soft electrode and the preparation technology thereof of magnetically controlled DC sputtering technology - Google Patents
Based on dry type soft electrode and the preparation technology thereof of magnetically controlled DC sputtering technology Download PDFInfo
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- CN103876737B CN103876737B CN201410138138.8A CN201410138138A CN103876737B CN 103876737 B CN103876737 B CN 103876737B CN 201410138138 A CN201410138138 A CN 201410138138A CN 103876737 B CN103876737 B CN 103876737B
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Abstract
The present invention relates to medical instruments field, a kind of dry type soft electrode based on magnetically controlled DC sputtering technology specifically, it comprises substrate, substrate comprises base and is positioned at the some electrode needle above base, and base bottom is provided with conducting strip, and conducting strip is provided with conductor wire, and by die sleeve, conducting strip is closely connected with substrate base, die sleeve is provided with the hole passed through for conductor wire, and wherein, substrate surface is coated with conductive layer.The present invention also provides a kind of preparation method of the dry type soft electrode based on magnetically controlled DC sputtering technology.Beneficial effect of the present invention is: the reliability 1, gathering brain signal, sensitivity.2, layer electrodes strong adhesion, evenly, thickness is controlled, color controllable in attachment.3, electrode is soft, and comfortableness is good.4, structural design cleverly.
Description
Technical field
The present invention relates to medical instruments field, specifically a kind of dry type soft electrode based on magnetically controlled DC sputtering technology and preparation technology thereof.
Background technology
There are company's research and development such as EGI, g.tech, Cognionics, NeuroSky, ANT, EasyCap in the world and the dry electrode of production and sales and Related product thereof.The invention of dry electrode makes acquiring brain waves technology have a huge progress.Classical dry-type electrode makes needle-like array, to be pressed into or micro-intrusion skin method reduction Skin Resistance.Electrode material is proof gold, fine silver or sintering silver/silver chloride Ag/AgCl.
But it has following two remarkable shortcoming (1) structural disadvantages, and hard, sharp-pointed needle-like array thrusts scalp horny layer, bring certain sensation of pricking to patient or experimenter and easily cause infection.(2) material shortcoming, gold, silver are heavy metals, are adapted at scalp surface and use, thrust horny layer and easily make heavy metal enter skin and blood, cause heavy metal poisoning.Especially sintering silver/silver chloride Ag/Agcl is that the mixture of Powdered argentum powder and chlorination argentum powder is easy to enter skin and blood.
Summary of the invention
According to above-mentioned weak point, the object of this invention is to provide a kind of dry type soft electrode based on magnetically controlled DC sputtering technology and preparation technology thereof of signal stabilization.
For achieving the above object, technical scheme of the present invention is: a kind of dry type soft electrode based on magnetically controlled DC sputtering technology, it comprises substrate, substrate comprises base and is positioned at the some electrode needle above base, and base bottom is provided with conducting strip, and conducting strip is provided with conductor wire, and by die sleeve, conducting strip is closely connected with substrate base, die sleeve is provided with the hole passed through for conductor wire, and wherein, substrate surface is coated with conductive layer.
Preferably: described substrate base is circular.
Preferably: described substrate is silica gel, rubber or polyurethanes.
Preferably: hole is arranged on die sleeve side or bottom surface.
Preferably: described electrode needle is evenly arranged on base.
Preferably: described electrode needle is the shape that syringe needle fine needle tail is thick.
Preferably: described electrode needle syringe needle is circular or arc.
Preferably: described conductive layer is titanium nitride.
The present invention also provides a kind of preparation method of the dry type soft electrode based on magnetically controlled DC sputtering technology, and its preparation process is as follows:
(1) making of substrate: injection molded elastomer or polyurethane material in a mold, molding;
(2) base coated film;
(3) die sleeve is installed: conducting strip and substrate base are close to, the hole of the conductor wire of conducting strip through die sleeve side, and with die sleeve, conducting strip and substrate base is fixed;
Wherein, base coated film has again following step: 1. substrate cleaning, and the ratio of acetone, ethanol and deionized water of employing is that the ratio of 8:2:1 cleans 10min in ultrasound wave; 2. substrate be placed in the vacuum chamber of multi-target magnetic control sputtering coater, evacuation, vacuum degree control is at more than 1*10-3Pa, and heating-up temperature is 150-200 DEG C; 3. pre-sputtering, passes into argon to sputtering chamber separately, and pressure is about 1.0Pa, carries out pre-sputtering 15min after glow discharge to titanium target surface; 4. sputter, control argon and nitrogen flow ratio are 3:1, and sputtering time is 20-40min; 5. anneal, the thermal creep stress of annealing is below 400 DEG C.
Beneficial effect of the present invention is:
1, the reliability of brain signal is gathered, sensitivity.Titanium nitride is good conductor, and impedance is extremely low, and resistivity is 22*10
-6Ω/cm
2.Under room temperature, titanium nitride has good chemical stability and biocompatibility.Susceptiveness, the accuracy of the EEG signals of the performance guarantee that titanium nitride dry type soft electrode is good Real-time Collection.
2, layer electrodes strong adhesion, evenly, thickness is controlled, color controllable in attachment.On software silica gel, rubber or polyurethane material, adopt magnetron sputtering technique plated film, different according to the time of sputtering, the thickness of plated film can be controlled.Different according to the ratio of nitrogen, argon, can coating color be controlled.
3, electrode is soft, and comfortableness is good.Formula soft electrode is rubber or polyurethane material, this material softness, patient or subject wears comfortable, without constriction.
4, structural design cleverly.Needle electrode structural design, is more conducive to the contact of electrode and scalp.Especially the long patient of hair or experimenter is applicable to.
Accompanying drawing explanation
Fig. 1 is structural representation one of the present invention.
Fig. 2 is structural representation two of the present invention.
Fig. 3 is top view of the present invention.
Fig. 4 is the change curve of settling rate with operating pressure of plated film.
Fig. 5 figure is the change curve of plated film settling rate with sputtering power.
In figure, 1-substrate; 2-base; 3-electrode needle; 4-conducting strip; 5-die sleeve; 6-hole; 7-conductor wire.
Detailed description of the invention
Below in conjunction with specific embodiment, the present invention will be further described.
As Figure 1-3: a kind of dry type soft electrode based on magnetically controlled DC sputtering technology, it comprises substrate 1, some electrode needle 3 that substrate 1 comprises base 2 and is positioned at above base 2.Substrate 1 base 2 is circular, and electrode needle 3 is evenly arranged on base 2.Each electrode needle 3 can be closely adjacent, also can there is certain gap between electrode needle 3.Electrode needle 3 syringe needle is circular or arc.Electrode needle 3 is the shape that syringe needle fine needle tail is thick.Silica gel, rubber or polyurethanes are selected in substrate 1, material softness.Be provided with conducting strip bottom base 2, conducting strip 4 is provided with conductor wire 7, and the material of conductor wire 7 can be multiple material as materials such as red copper, copper tin plated materials, copper are silver-plated, native silver silks.And by die sleeve 5, conducting strip 4 is closely connected with substrate 1 base 2, die sleeve 5 is provided with the hole 6 passed through for conductor wire 7, and hole 6 is arranged on die sleeve 5 side (as Fig. 1) or bottom surface (as Fig. 2).Wherein, substrate 1 surface is coated with conductive layer.Wherein, conductive layer is titanium nitride.
The present invention also provides a kind of preparation method of the dry type soft electrode based on magnetically controlled DC sputtering technology, and its preparation process is as follows:
(1) making of substrate 1: injection moulding silica gel, rubber or polyurethane material in a mold, molding;
(2) substrate 1 plated film;
(3) die sleeve 5 is installed: conducting strip 4 and substrate 1 base 2 are close to, the hole 6 of the conductor wire 7 of conducting strip 4 through die sleeve 5 side, and with die sleeve 5, conducting strip 4 and substrate 1 base 2 is fixed;
Wherein, base coated film has again following step: 1. substrate 1 is cleaned, and the ratio of acetone, ethanol and deionized water of employing is that the ratio of 8:2:1 cleans 10min in ultrasound wave, and the main purpose of cleaning removes surface contaminants and chemical dirt; 2. substrate 1 be placed in the vacuum chamber of multi-target magnetic control sputtering coater, evacuation, for reducing the residual volume in vacuum cavity, ensure the clarity of thin film, vacuum degree control is at 1*10
-3more than Pa, in order to substrate surface removes moisture, improve film-Ji adhesion, improve the concentration class of peplomer, need heating, heating-up temperature is 150-200 DEG C; 3. pre-sputtering, passes into argon to sputtering chamber separately, and pressure is about 1.0Pa, carries out pre-sputtering 15min after glow discharge to titanium target surface, and object removes the impurity such as the oxide on Ti target surface; 4. sputter, control argon and nitrogen flow ratio are 3:1, and sputtering time is 20-40min; 5. anneal, target material is different from the coefficient of expansion of base material, can affect the adhesion of thin film and substrate, and the thermal creep stress of annealing is below 400 DEG C.
Target is the Titanium of purity 99.99%.Purity of argon is 99.99%, and nitrogen gas purity is 99.99%.By regulating the ratio of argon, nitrogen, film forming color can be regulated.Film forming color by silvery white-shallow golden yellow-golden yellow-reddish yellow-brown.Along with the progressively increase of nitrogen partial pressure, film forming color by silvery white-shallow golden yellow-golden yellow-reddish yellow-brown.Also there is respective change in the composition of coating, by 2Ti-Ti
2n-TiN.The change of Coating composition also has influence on the hardness of rete because with regard to hardness Ti
2n>TiN>2Ti.Therefore when 2Ti disappears, Ti is formed
2n, when just there is TiN, hardness is best, later along with the increase hardness of TiN has decline again.Because 2Ti is silvery white, Ti
2n is light golden yellow, and TiN is golden yellow.Pre-sputtering power determines according to sputtering power, generally a little more than sputtering power.
The operation principle of magnetron sputtering refers to that electronics is under the effect of electric field E, collides flying in substrate process, make it ionize and produce Ar cation and new electronics with ar atmo; New electronics flies to substrate, and Ar ion accelerates to fly to cathode target under electric field action, and with high-energy bombardment target surface, target is sputtered.There is through magnetron sputtering method plated film the advantages such as coating is even, strong adhesion.
The principle of reaction magnetocontrol sputtering precipitation TiAlN thin film is:
In N2 → N2++e(gas phase)
N2++e → 2N (in substrate)
Ti+N → TiN (in substrate).
Claims (8)
1. the dry type soft electrode based on magnetically controlled DC sputtering technology, it comprises substrate (1), substrate (1) comprises base (2) and is positioned at some electrode needle (3) of base (2) top, base (2) bottom is provided with conducting strip (4), conducting strip (4) is provided with conductor wire (7), and by die sleeve (5), conducting strip (4) is closely connected with substrate (1) base (2), die sleeve (5) is provided with the hole (6) passed through for conductor wire (7), wherein, substrate (1) surface is coated with conductive layer, it is characterized in that: the preparation process of described dry type soft electrode is as follows:
(1) making of substrate: injection molded elastomer or polyurethane material in a mold, molding;
(2) base coated film;
(3) die sleeve is installed: conducting strip and substrate base are close to, the hole of the conductor wire of conducting strip through die sleeve side, and with die sleeve, conducting strip and substrate base is fixed;
Wherein, base coated film has again following step: 1. substrate cleaning, and the ratio of acetone, ethanol and deionized water of employing is that the ratio of 8:2:1 cleans 10min in ultrasound wave; 2. substrate be placed in the vacuum chamber of multi-target magnetic control sputtering coater, evacuation, vacuum degree control is at 1*10
-3more than Pa, heating-up temperature is 150-200 DEG C; 3. pre-sputtering, passes into argon to sputtering chamber separately, and pressure is about 1.0Pa, carries out pre-sputtering 15min after glow discharge to titanium target surface; 4. sputter, control argon and nitrogen flow ratio are 3:1, and sputtering time is 20-40min, and the titanium nitride film thickness of deposition is about 5um; 5. anneal, the thermal creep stress of annealing is below 400 DEG C.
2. according to dry type soft electrode according to claim 1, it is characterized in that: described substrate (1) base (2) is for circular.
3. according to the dry type soft electrode described in claim 1 or 2, it is characterized in that: described substrate (1) is silica gel, rubber or polyurethanes.
4. according to dry type soft electrode according to claim 1, it is characterized in that: described hole (6) is arranged on die sleeve (5) side or bottom surface.
5. according to dry type soft electrode according to claim 1, it is characterized in that: described electrode needle (3) is evenly arranged on base (2).
6. according to the dry type soft electrode described in claim 1 or 5, it is characterized in that: described electrode needle (3) is the thick shape of syringe needle fine needle tail.
7. according to dry type soft electrode according to claim 6, it is characterized in that: described electrode needle (3) syringe needle is circular or arc.
8. according to dry type soft electrode according to claim 1, it is characterized in that: described conductive layer is titanium nitride.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN105769182B (en) * | 2016-02-22 | 2018-08-17 | 武汉智普天创科技有限公司 | EEG signals wireless acquisition system |
| CN106859637B (en) * | 2016-12-28 | 2022-05-03 | 电子科技大学 | Flexible conductive rubber electrocardio dry electrode with holes |
| CN109288519A (en) * | 2018-05-29 | 2019-02-01 | 兰州大学 | A kind of high durable high-precision comfort type electrode for encephalograms of miniaturization |
| CN108784691B (en) * | 2018-05-29 | 2024-04-05 | 兰州大学 | High-precision antioxidation accurate electrode |
| CN108823548A (en) * | 2018-07-05 | 2018-11-16 | 江苏伟创真空镀膜科技有限公司 | A kind of bronze-colored coating process of PVD |
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| CN101021442A (en) * | 2007-03-14 | 2007-08-22 | 哈尔滨理工大学 | Inserting electrode lead-out method for micro platinum thermal resistance temperature sensor |
| CN101933802A (en) * | 2010-09-15 | 2011-01-05 | 海思康利(北京)新技术有限公司 | Electrocardiograph dry electrode with amplifier |
| CN102579041A (en) * | 2012-02-09 | 2012-07-18 | 上海交通大学 | Arrayed flexible electroencephalogram dry electrode capable of overcoming obstacle of hair and preparation method thereof |
| US8594763B1 (en) * | 2010-05-25 | 2013-11-26 | Neurowave Systems Inc. | Physiological electrode assembly for fast application |
| CN203828929U (en) * | 2014-04-08 | 2014-09-17 | 青岛柏恩鸿泰电子科技有限公司 | Dry soft electrode based on direct-current magnetron sputtering technique |
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Patent Citations (5)
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| CN101021442A (en) * | 2007-03-14 | 2007-08-22 | 哈尔滨理工大学 | Inserting electrode lead-out method for micro platinum thermal resistance temperature sensor |
| US8594763B1 (en) * | 2010-05-25 | 2013-11-26 | Neurowave Systems Inc. | Physiological electrode assembly for fast application |
| CN101933802A (en) * | 2010-09-15 | 2011-01-05 | 海思康利(北京)新技术有限公司 | Electrocardiograph dry electrode with amplifier |
| CN102579041A (en) * | 2012-02-09 | 2012-07-18 | 上海交通大学 | Arrayed flexible electroencephalogram dry electrode capable of overcoming obstacle of hair and preparation method thereof |
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