CN108784691A - A kind of high-precision antioxidant accuracy electrode - Google Patents

A kind of high-precision antioxidant accuracy electrode Download PDF

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Publication number
CN108784691A
CN108784691A CN201810531559.5A CN201810531559A CN108784691A CN 108784691 A CN108784691 A CN 108784691A CN 201810531559 A CN201810531559 A CN 201810531559A CN 108784691 A CN108784691 A CN 108784691A
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electrode
fixedly connected
valve
precision
antioxidant
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CN108784691B (en
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胡斌
赵庆林
彭宏
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Lanzhou University
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Lanzhou University
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    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00Measuring for diagnostic purposes; Identification of persons
    • A61B5/24Detecting, measuring or recording bioelectric or biomagnetic signals of the body or parts thereof
    • A61B5/25Bioelectric electrodes therefor
    • A61B5/279Bioelectric electrodes therefor specially adapted for particular uses
    • A61B5/291Bioelectric electrodes therefor specially adapted for particular uses for electroencephalography [EEG]

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  • Health & Medical Sciences (AREA)
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  • Biomedical Technology (AREA)
  • Heart & Thoracic Surgery (AREA)
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  • General Health & Medical Sciences (AREA)
  • Public Health (AREA)
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  • Measurement And Recording Of Electrical Phenomena And Electrical Characteristics Of The Living Body (AREA)

Abstract

The invention discloses a kind of high-precision antioxidant accuracy electrodes, belong to high-precision electrode field.A kind of high-precision antioxidant accuracy electrode, substrate material are aluminium, and surface is coated with golden material coating, and this processing mode not only can ensure that the electric conductivity of electrode body, but also can enhance its inoxidizability, enable to be used for a long time.Its outside of electrode body is useful for fixed chassis, stable pedestal can be formed at the cavity of Correspondence lead on brain electricity cap, it can not only firmly fix in this way, but also allow that reduction lead number etc. is being needed in special circumstances to unload electrode section, realize modularization, specialization.

Description

A kind of high-precision antioxidant accuracy electrode
Technical field
The present invention relates to high-precision electrode fields, more specifically to a kind of high-precision antioxidant accuracy electrode.
Background technology
Electrode for encephalograms is used to the contact terminal of acquisition EEG signals, it will usually be contacted with scalp, in the auxiliary of conductive paste It helps down, the EEG signals in the areas You Fa can be passed to collecting device by electrode for encephalograms, and then make further dividing to EEG signals Analysis is possibly realized.Its basic demand has:Material itself to have preferable electric signal conductibility, can with brain electricity cap corresponding hole site compared with Combine well, anti-oxidant and price cannot prohibitively expensive, operation will conveniently, time saving, wearing want easy comfortable etc..
Two kinds of electrodes of dry and wet can be used according to different situations in the acquisition of EEG signals, dry electrode is main at this stage It can be used for Wu Faqu, it is the easiest with patch type at present, it can guarantee its signal matter acquired again while easy to use Amount.But in the areas You Fa at present still based on wet electrode, the present invention is a kind of universal Wet-dry electrode scheme of more science.
Since people further go deep into the research and application of EEG signals in recent years, EEG measuring equipment is proposed more High more detailed requirement.EEG signals voltage magnitude is often minimum, and poor contact or shaking all can greatly influence signal matter Amount, therefore new electrode is answered more stable, more accurate, while meeting the additional conditions such as easy, comfortable.It can be with different type brain electricity Cap successfully combines and stably measured EEG signals, while also wanting easy to use, easy to operate time saving, cheap.
Invention content
1. technical problems to be solved
It is special for the dry electrode existing in the prior art used in the areas You Fa and existing mushroom tip electrode comfort level or contact Property is not good enough;Conductive paste is required supplementation in use in the wet electrode that the areas You Fa use, and needs to raise when injecting conductive paste or pull-up Electrode can influence other leads contact situation and increase inconvenience in this way;The electrode material inoxidizability of some electrodes is not good enough, in length Its electric conductivity can be influenced after phase use, introduce unnecessary noise;Some electrodes cannot effectively contact at positions such as hindbrains;Portion The contact finishing coat of sub-electrode is using the methods of plating film forming, and film surface is coarse, the bad problem with base material adhesiveness.
2. technical solution
To solve the above problems, the present invention adopts the following technical scheme that.
A kind of high-precision antioxidant accuracy electrode, including electrode body, inside the electrode body under screw rod knob End is threadedly coupled, and is threadedly coupled with chassis outside the motor body, and lower end is connect with fixed disk activity outside the chassis;
The electrode body is internally provided with cylindrical cavity, and electrode external screw thread, the electricity are provided with outside the electrode body Pole lower body is provided with electrode tip, and middle part is provided with conductive paste extrusion cavities, the cylindrical empty bottom of chamber inside the electrode tip Portion is fixedly connected with electrode tip upper surface;
The screw rod knob includes knob cap and screw rod, is fixedly connected with screw rod upper end in the middle part of the knob cap lower surface, described Screw rod outer surface is provided with external thread of screw, and the screw rod lower end is provided with compressive plane;
The chassis includes upper column casing, pedestal and lower column casing, and the upper column casing lower end is fixedly connected with base upper surface, the bottom Seat lower surface is fixedly connected with lower column casing upper end, and the base lower surface is additionally provided with pedestal stationary plane, inside the upper column casing Both sides are provided with opposite inboard track, and base upper surface edge side is provided with bonding wire disk, the lower column casing outer surface Both sides are provided with the tooth A that is relatively fixed, and the inboard track matches with electrode external screw thread;
The fixed disk inner wall both sides are provided be relatively fixed tooth B, the fixed tooth A and match with fixed tooth B.
Preferably, be threadedly coupled with sealing block outside the screw rod, the compressive plane upper surface left and right sides all with stretching Spring is fixedly connected, and is fixedly connected at left and right sides of the extension spring other end and electrode body inside upper surface, the extruding It is fixedly connected with fixed link upper end on the right side of the lower surface of face, the fixed link internal activity is socketed with stabiliser bar, the stabiliser bar bottom End is fixedly connected with rotating bar right end, is fixedly connected with fixed spring upper end on the downside of the rotating bar right end, the fixed spring Lower end is fixedly connected with electrode body bottom inner surface, and the rotating bar left end is fixedly connected with control valve upper end, the control Valve matches with conductive paste extrusion cavities.
Preferably, the fixed link internal activity is socketed with stabiliser bar, and the left and right sides is provided with cunning inside the fixed link Rail, the sliding rail upper and lower ends are provided with fixing groove, spring, the spring or so are installed with inside the stabiliser bar upper end Both ends are fixedly connected with bayonet lock one end, and the bayonet lock matches with fixing groove.
Preferably, the electrode external screw thread is deep using 1mm, 2mm wide, and cross section is the customization size of rectangular channel, described to lead The pore size of electric cream extrusion cavities is set as 1mm diameters.
Preferably, the electrode tip lower surface is provided with one layer of Gold plated Layer, and the Gold plated Layer is made of magnetron sputtering method.
Preferably, the magnetron sputtering method includes the following steps:
Three S1, switch power supply case air switches, are from left to right followed successively by cycle water dispenser, and magnetron sputtering is each to tap being spaced apart for socket; Compressed air pump is started to work at this time, has set the air pressure upper limit 0.8MPa, 0.4MPa to be evacuated to, each operated pneumatic valve work Lowest pressure, you can open cycle water dispenser then opens the master switch of magnetron sputtering apparatus electrical power control cabinet;Target and substrate install Afterwards, with general-purpose table look-up target and shielding case, chip bench and chamber whether short circuit, start to vacuumize;
S2, pre- pumping:Mechanical pump is opened, fore pump is first taken out in molecular pump pipeline to pressure<5Pa-8Pa;
S3, pumping chamber:Step valve before closing, opens bypass valve, and charge valve takes out reaction chamber to pressure<5Pa-8Pa;Before pass bypass valve is opened Step valve and main valve open molecular pump and cavity are evacuated to the E-4Pa orders of magnitude, open heater heating, vacuum degree can rise when heating, be evacuated to E-4Pa;
S4, ionization gauge is closed, closes throttle valve, lead to argon gas, valve control centre position will be reached on the right of gas flowmeter, first carry out target cleaning 5min-8min, then carry out substrate with bipolar pulse power supply or radio-frequency power supply and clean, cleans 15min-20min, open target baffle and Substrate baffle plate start-up operation work;
S5, plated film terminate:Stop argon gas, throttle opening continues pumping chamber, waits for cooling;Take substrate:80 or less are cooled to, master is closed Valve closes molecular pump, and molecular pump drops to 0 by 450, waits for 2min, step valve before closing, and open air valve, which is slowly deflated, makes chamber reach extraneous Atmospheric pressure;
S6, chamber is extracted into 10Pa or less, to protect chamber interior device.Close mechanical pump and switch board master switch.Cooling water is closed, Three are spaced apart and is all turned off.
3. advantageous effect
Compared with the prior art, the advantage of the invention is that:
(1)The present invention devises a kind of novel electrode for encephalograms suitable for the areas You Fa, and substrate material is aluminium, and surface is coated with gold Material coating, this processing mode not only can ensure that the electric conductivity of electrode body, but also can enhance its inoxidizability, and it is permanent to enable It uses.Its outside of electrode body is useful for fixed chassis, can form stable base at the cavity of Correspondence lead on brain electricity cap Seat, can not only firmly fix in this way, but also allow that reduction lead number etc. is being needed in special circumstances to unload electrode section, realize Modularization, specialization;The dentalation for having threadingly direction processing on fixed disk, allows user can be by rotating come coordination electrode Go deep into degree, it is ensured that the electrode depth degree of different location all reaches desired value on brain electricity cap.Cylindrical cavity interior energy stores A certain amount of conductive paste, inner wall still use Design of Screw Thread, in this way permission operating personnel with finger gently mobile screw knob and it is smart The really amount of control injection conductive paste.Electrode tip uses wider spherical design to increase comfort level and ensure to contact effect, this connects Contacting surface is processed on the basis of aluminium material using craft of gilding, and gold coatings use magnetically controlled sputter method, and film-forming process is more preferably. So that electrode dismounting is more convenient, use is also easy to control in the process, also ensures the inoxidizability of electrode material for the above design And electric conductivity.The operating process of mobile screw knob injection conductive paste is more easy under the premise of not influencing other leads to be saved When, radius tip can to wear more comfortable.Above several aspects ensure the performance of this money brain electricity cap electrode so that adopt The EEG signals better quality collected, more conducively subsequent analysis and processing.
(2)In the present invention electrode material be electric conductivity preferably and the aluminium material of lighter weight, outer layer is gold-plated, anti-to enhance Oxidisability.Mobile screw knob, that is, extrudable conductive paste during use keeps Correspondence lead contact more preferable.The ball of electrode tip bottom Face is contacted with scalp, be can guarantee and good is not caused the discomforts such as pain in the case that contacting.1mm is straight at conductive paste extrusion cavities center Conductive paste of the aperture of diameter for cylindrical empty intracavitary flows out under the pressure of screw rod knob, and the conductive paste of extrusion can be attached to skin The position of surface Correspondence lead reduces contact impedance.The above design is so that the process for squeezing out conductive paste can be in not traveling electrode sheet It body or even completes in the case of dropping brain electricity cap, easy to operate and time saving, the person of being conveniently operated and the burden for mitigating subject personnel.Electricity Pole external screw thread is customization size:1mm is deep, and 2mm wide, cross section is rectangular channel, mainly facilitates electrode body on the pedestal of chassis It is fixed.In addition, electrode can achieve the effect that push aside hair and flexible by rotation, electrode table can be ensured to a greater extent Face touches scalp, and the mode of rotation is conducive to control operating position, and convenient for needing the when of reducing lead number to remove easily;
(3)For the present invention for convenience of being connected with brain electricity cap, electrode also has chassis portion, chassis in addition to motor body and screw rod knob Partial tubular structure convenient for electrode body positioning with it is flexible, pedestal stationary plane outside tubular structure for connecting wire, with Signal is transmitted, chassis lower end can pass through the hole position of brain electricity cap Correspondence lead, in combination by another torsion disk and fixed, this mode Electrode chassis can be simply and effectively fixed, and then ensures electrode body accurate positioning, stabilization;
(4)Cylindrical cavity of the present invention can theoretically store 0.84ml conductive pastes, persistently make for a period of time for each lead With and its cruising ability is sustainable tests for several times, avoids experiment every time and will expend more time cleaning brain electricity cap and beat and leads The process of electric cream.The given amounts of conductive paste can be controlled artificially in each lead in single experiment, easy to use.Conducting wire is connected to On pedestal stationary plane, it can ensure that low noise and accurately transmit EEG signals.
Description of the drawings
Fig. 1 is the dimensional structure diagram of the present invention;
Fig. 2 is the schematic cross-sectional view of the present invention;
Fig. 3 is the part enlarged structure schematic diagram of the present invention;
Fig. 4 is the partial top structural schematic diagram of the present invention;
Fig. 5 is regarded for the base side of the present invention and dimensional structure diagram;
Fig. 6 is the pedestal vertical view and present invention looks up structural representation of the present invention;
Fig. 7 is electrode impedance-frequency curve chart of the present invention;
Fig. 8 is electrode impedance-frequency curve gradual change figure of the present invention;
Fig. 9 is the contact impedance kilo-ohm rank figure of the common dry-type electrode of the present invention;
Different electrodes collected EEG signals figures of the Figure 10 for the present invention.
Figure label explanation:
1 knob cap, 2 screw rods, 3 external thread of screw, 4 compressive planes, 5 electrode bodies, 6 electrode external screw threads, 7 conductive paste extrusion cavities, 8 bottoms Seat, 9 fix tooth A, 10 play column casings, 11 inboard tracks, 12 bonding wire disks, 13 fix tooth B, 14 fixation disks, column casing, 16 electrodes on 15 Head, 17 electrode internal threads, 18 cylindrical cavities, 19 chassis, 20 screw rod knobs, 21 pedestal stationary planes, 22 sealing blocks, 23 stretch bullet Spring, 24 rotating bars, 25 stabiliser bars, 26 fixing grooves, 27 sliding rails, 28 bayonet locks, 29 springs, 30 control valves, 31 fixed springs.
Specific implementation mode
Following will be combined with the drawings in the embodiments of the present invention;Technical solution in the embodiment of the present invention carries out clear, complete Site preparation describes;Obviously;Described embodiments are only a part of the embodiments of the present invention;Instead of all the embodiments.It is based on Embodiment in the present invention;It is obtained by those of ordinary skill in the art without making creative efforts every other Embodiment;It shall fall within the protection scope of the present invention.
Embodiment 1:
Please refer to Fig.1-10, a kind of high-precision antioxidant accuracy electrode, including electrode body 5,5 inside of electrode body and screw rod 20 lower thread of knob connects, and 5 outside of motor body is threadedly coupled with chassis 19,19 outside lower end of chassis and 14 activity of fixed disk Connection;
Electrode body 5 is internally provided with cylindrical cavity 18, and electrode external screw thread 6, electrode body 5 are provided with outside electrode body 5 Lower end is provided with electrode tip 16, and 16 inside middle part of electrode tip is provided with conductive paste extrusion cavities 7,18 bottom of cylindrical cavity and electrode First 16 upper surface is fixedly connected;
Screw rod knob 20 includes knob cap 1 and screw rod 2, is fixedly connected with 2 upper end of screw rod in the middle part of 1 lower surface of knob cap, outside screw rod 2 Surface is provided with external thread of screw 3, and 2 lower end of screw rod is provided with compressive plane 4;
Chassis 19 includes upper column casing 15, pedestal 8 and lower column casing 10, and 15 lower end of upper column casing is fixedly connected with 8 upper surface of pedestal, pedestal 8 lower surfaces are fixedly connected with lower 10 upper end of column casing, and 8 lower surface of pedestal is additionally provided with pedestal stationary plane 21,15 inside two of upper column casing Side is provided with opposite inboard track 11, and 8 top surface edge side of pedestal is provided with bonding wire disk 12,10 outer surface both sides of lower column casing It is provided with the tooth A9 that is relatively fixed, inboard track 11 matches with electrode external screw thread 6;
14 inner wall both sides of fixed disk are provided with the tooth B13 that is relatively fixed, and fixed tooth A9 matches with fixed tooth B13.
2 outside of screw rod is threadedly coupled with sealing block 22, is all fixed and is connected with extension spring 23 at left and right sides of 4 upper surface of compressive plane Connect, be fixedly connected at left and right sides of 23 other end of extension spring and electrode body 5 inside upper surface, on the right side of 4 lower surface of compressive plane with 17 upper end of fixed link is fixedly connected, and 17 internal activity of fixed link is socketed with stabiliser bar 25, and 25 bottom end of stabiliser bar is right with rotating bar 24 End is fixedly connected, and is fixedly connected with 31 upper end of fixed spring on the downside of 24 right end of rotating bar, 31 lower end of fixed spring and electrode body 5 Bottom inner surface is fixedly connected, and 24 left end of rotating bar is fixedly connected with 30 upper end of control valve, control valve 30 and conductive paste extrusion cavities 7 Match.
17 internal activity of fixed link is socketed with stabiliser bar 25, and the 17 inside left and right sides of fixed link is provided with sliding rail 27, sliding rail 27 upper and lower ends are provided with fixing groove 26, and spring 29,29 left and right ends of spring and card are installed with inside 25 upper end of stabiliser bar 28 one end of pin is fixedly connected, and bayonet lock 28 matches with fixing groove 26.
Electrode external screw thread 6 is deep using 1mm, 2mm wide, and cross section is the customization size of rectangular channel, the hole of conductive paste extrusion cavities 7 Diameter is dimensioned to 1mm diameters.
16 lower surface of electrode tip is provided with one layer of Gold plated Layer, and Gold plated Layer is made of magnetron sputtering method.
Magnetron sputtering method includes the following steps:
Three S1, switch power supply case air switches, are from left to right followed successively by cycle water dispenser, and magnetron sputtering is each to tap being spaced apart for socket; Compressed air pump is started to work at this time, has set the air pressure upper limit 0.8MPa, 0.4MPa to be evacuated to, each operated pneumatic valve work Lowest pressure, you can open cycle water dispenser then opens the master switch of magnetron sputtering apparatus electrical power control cabinet;Target and substrate install Afterwards, with general-purpose table look-up target and shielding case, chip bench and chamber whether short circuit, start to vacuumize;
S2, pre- pumping:Mechanical pump is opened, fore pump is first taken out in molecular pump pipeline to pressure<5Pa-8Pa;
S3, pumping chamber:Step valve before closing, opens bypass valve, and charge valve takes out reaction chamber to pressure<5Pa-8Pa;Before pass bypass valve is opened Step valve and main valve open molecular pump and cavity are evacuated to the E-4Pa orders of magnitude, open heater heating, vacuum degree can rise when heating, be evacuated to E-4Pa;
S4, ionization gauge is closed, closes throttle valve, lead to argon gas, valve control centre position will be reached on the right of gas flowmeter, first carry out target cleaning 5min-8min, then carry out substrate with bipolar pulse power supply or radio-frequency power supply and clean, cleans 15min-20min, open target baffle and Substrate baffle plate start-up operation work;
S5, plated film terminate:Stop argon gas, throttle opening continues pumping chamber, waits for cooling;Take substrate:80 or less are cooled to, master is closed Valve closes molecular pump, and molecular pump drops to 0 by 450, waits for 2min, step valve before closing, and open air valve, which is slowly deflated, makes chamber reach extraneous Atmospheric pressure;
S6, chamber is extracted into 10Pa or less, to protect chamber interior device.Close mechanical pump and switch board master switch.Cooling water is closed, Three are spaced apart and is all turned off.
Embodiment 2:
The present invention is aluminium devising a kind of novel electrode for encephalograms suitable for the areas You Fa, substrate material, and surface is coated with gold Material coating, this processing mode not only can ensure that the electric conductivity of electrode body 5, but also can enhance its inoxidizability, enable to grow It uses long.Its outside of electrode body 5 is useful for fixed chassis 19, can be formed and be stablized at the cavity of Correspondence lead on brain electricity cap Pedestal, can not only firmly fix in this way, but also allow in special circumstances to unload electrode section needing to reduce lead number etc., Realize modularization, specialization;The dentalation for having threadingly direction processing on fixed disk 14, user can be controlled by rotating Electrode processed gos deep into degree, it is ensured that the electrode depth degree of different location all reaches desired value on brain electricity cap.Cylindrical cavity 18 Interior energy stores a certain amount of conductive paste, and inner wall still uses Design of Screw Thread, in this way permission operating personnel finger gently mobile screw Knob 20 and accurately control injection conductive paste amount.Electrode tip 16 uses wider spherical design to increase comfort level and ensure to connect Effect is touched, which is processed on the basis of aluminium material using craft of gilding, and gold coatings use magnetically controlled sputter method, at Membrane process is more preferably.So that electrode dismounting is more convenient, use is also easy to control in the process, also ensures electrode material for the above design Inoxidizability and electric conductivity.Mobile screw knob 20 injects the operating process of conductive paste under the premise of not influencing other leads More easy to be time saving, radius tip 16 can be so that wear more comfortable.Above several aspects ensure this money brain electricity cap electrode Performance so that collected EEG signals better quality, more conducively subsequent analysis with processing;
In the present invention electrode material be electric conductivity preferably and lighter weight aluminium material, outer layer is gold-plated, to enhance inoxidizability. Mobile screw knob 19 is extrudable conductive paste during use, keeps Correspondence lead contact more preferable.The spherical surface of 16 bottom of electrode tip It is contacted with scalp, can guarantee and good do not cause the discomforts such as pain in the case that contacting.1mm is straight at 7 center of conductive paste extrusion cavities Conductive paste of the aperture of diameter in cylindrical cavity 18 flows out under the pressure of screw rod knob 19, and the conductive paste of extrusion can be attached to The position of skin surface Correspondence lead reduces contact impedance.The above design can not move electricity so that squeezing out the process of conductive paste It pole itself or even completes in the case of dropping brain electricity cap, it is easy to operate and time saving, the person of being conveniently operated and mitigate the negative of subject personnel Load.Electrode external screw thread 6 is customization size:1mm is deep, and 2mm wide, cross section is rectangular channel, mainly facilitates electrode body 5 on chassis 19 Fixation on pedestal.In addition, electrode can achieve the effect that push aside hair and flexible by rotation, it can to a greater extent really It protects electrode surface and touches scalp, the mode of rotation is conducive to control operating position, and is convenient for when needing to reduce lead number easily It removes;
For convenience of being connected with brain electricity cap, electrode also has 19 part of chassis, 19, chassis in addition to motor body 5 and screw rod knob 20 Point tubular structure convenient for electrode body 5 positioning with it is flexible, pedestal stationary plane 21 outside tubular structure for connecting wire, with Signal is transmitted, 19 lower end of chassis can pass through the hole position of brain electricity cap Correspondence lead, in combination by another torsion disk and fixed, this side Formula can simply and effectively fix electrode chassis, and then ensure electrode body accurate positioning, stabilization;
Cylindrical cavity 18 can theoretically store 0.84ml conductive pastes, for each lead in a period of time lasting use, and its Cruising ability is sustainable to be tested for several times, and more time cleaning brain electricity cap will be expended and beat the mistake of conductive paste by avoiding experiment every time Journey.The given amounts of conductive paste can be controlled artificially in each lead in single experiment, easy to use.Conducting wire is connected to pedestal and fixes On face 21, it can ensure that low noise and accurately transmit EEG signals.
Embodiment 3:
It is reference that the present invention, which is directed to the performance test of electrode with disposable measuring electrode standard, can be measured via electrochemical workstation The impedance-frequency curve of designed electrode, is illustrated in fig. 8 shown below, other advanced products of part can be accomplished to change several with frequency Gradual change such as Fig. 9 between ten Dao several kilo-ohms, and the contact impedance of common dry-type electrode is kilo-ohm rank such as Figure 10.It can from figure Go out, in low-frequency range, electrode contact impedance is about 1k Ω, and impedance can reduce as frequency increases, stable and reliable for performance;
This money electrode can be completed the production with lower price in the present invention, and the cambered surface design of electrode head can guarantee comfort, Avoid discomfort.Its impedance is low, can preferably ensure the EEG signals quality of acquisition, in electrode performance test, by the utility model Electrode, it is common paste type patch electrode and novel sponge electrode is placed in Fp1 side by side, it is electric to obtain the collected brain of Different electrodes institute Signal is as shown in Figure 10, is followed successively by this electrode from top to bottom and corresponds to waveform, patch electrode corresponds to waveform, and sponge electrode corresponds to wave Shape.Its signal degree of correlation is higher, illustrates that the novel electrode performance is better than common patch electrode, has reached preferable measurement effect.
It is described above;It is merely preferred embodiments of the present invention;But scope of protection of the present invention is not limited thereto; Any one skilled in the art is in the technical scope disclosed by the present invention;According to the technique and scheme of the present invention and its It improves design and is subject to equivalent substitution or change;Should all it cover within the scope of the present invention.

Claims (6)

1. a kind of high-precision antioxidant accuracy electrode, including electrode body(5), it is characterised in that:The electrode body(5)It is interior Portion and screw rod knob(20)Lower thread connects, the motor body(5)External and chassis(19)It is threadedly coupled, the chassis (19)External lower end and fixed disk(14)Flexible connection;
The electrode body(5)It is internally provided with cylindrical cavity(18), the electrode body(5)Outside is provided with the outer spiral shell of electrode Line(6), the electrode body(5)Lower end is provided with electrode tip(16), the electrode tip(16)Internal middle part is provided with conductive paste Extrusion cavities(7), the cylindrical cavity(18)Bottom and electrode tip(16)Upper surface is fixedly connected;
The screw rod knob(20)Including knob cap(1)And screw rod(2), the knob cap(1)Lower surface middle part and screw rod(2)On End is fixedly connected, the screw rod(2)Outer surface is provided with external thread of screw(3), the screw rod(2)Lower end is provided with compressive plane (4);
The chassis(19)Including upper column casing(15), pedestal(8)With lower column casing(10), the upper column casing(15)Lower end and pedestal (8)Upper surface is fixedly connected, the pedestal(8)Lower surface and lower column casing(10)Upper end is fixedly connected, the pedestal(8)Lower surface It is additionally provided with pedestal stationary plane(21), the upper column casing(15)Internal both sides are provided with opposite inboard track(11), the bottom Seat(8)Top surface edge side is provided with bonding wire disk(12), the lower column casing(10)Outer surface both sides, which are provided with, to be relatively fixed Tooth A(9), the inboard track(11)With electrode external screw thread(6)Match;
The fixed disk(14)Inner wall both sides are provided with the tooth B that is relatively fixed(13), the fixed tooth A(9)With fixed tooth B(13) Match.
2. a kind of high-precision antioxidant accuracy electrode according to claim 1, it is characterised in that:The screw rod(2)Outside Portion and sealing block(22)It is threadedly coupled, the compressive plane(4)At left and right sides of upper surface all with extension spring(23)It is fixedly connected, institute State extension spring(23)The other end and electrode body(5)It is fixedly connected at left and right sides of inside upper surface, the compressive plane(4)Following table Right side of face and fixed link(17)Upper end is fixedly connected, the fixed link(17)Internal activity is socketed with stabiliser bar(25), described steady Fixed pole(25)Bottom end and rotating bar(24)Right end is fixedly connected, the rotating bar(24)Right end downside and fixed spring(31)Upper end It is fixedly connected, the fixed spring(31)Lower end and electrode body(5)Bottom inner surface is fixedly connected, the rotating bar(24)It is left End and control valve(30)Upper end is fixedly connected, the control valve(30)With conductive paste extrusion cavities(7)Match.
3. a kind of high-precision antioxidant accuracy electrode according to claim 1, it is characterised in that:The fixed link(17) Internal activity is socketed with stabiliser bar(25), the fixed link(17)The internal left and right sides is provided with sliding rail(27), the sliding rail (27)Upper and lower ends are provided with fixing groove(26), the stabiliser bar(25)Spring is installed with inside upper end(29), the bullet Spring(29)Left and right ends and bayonet lock(28)One end is fixedly connected, the bayonet lock(28)With fixing groove(26)Match.
4. a kind of high-precision antioxidant accuracy electrode according to claim 1, it is characterised in that:The electrode external screw thread (6)Using 1mm depths, 2mm wide, cross section is the customization size of rectangular channel, the conductive paste extrusion cavities(7)Pore size setting For 1mm diameters.
5. a kind of high-precision antioxidant accuracy electrode according to claim 1, it is characterised in that:The electrode tip(16) Lower surface is provided with one layer of Gold plated Layer, and the Gold plated Layer is made of magnetron sputtering method.
6. a kind of high-precision antioxidant accuracy electrode according to claim 5, it is characterised in that:The magnetron sputtering method Include the following steps:
Three S1, switch power supply case air switches, are from left to right followed successively by cycle water dispenser, and magnetron sputtering is each to tap being spaced apart for socket; Compressed air pump is started to work at this time, has set the air pressure upper limit 0.8MPa, 0.4MPa to be evacuated to, each operated pneumatic valve work Lowest pressure, you can open cycle water dispenser then opens the master switch of magnetron sputtering apparatus electrical power control cabinet;Target and substrate install Afterwards, with general-purpose table look-up target and shielding case, chip bench and chamber whether short circuit, start to vacuumize;
S2, pre- pumping:Mechanical pump is opened, fore pump is first taken out in molecular pump pipeline to pressure<5Pa-8Pa;
S3, pumping chamber:Step valve before closing, opens bypass valve, and charge valve takes out reaction chamber to pressure<5Pa-8Pa;Before pass bypass valve is opened Step valve and main valve open molecular pump and cavity are evacuated to the E-4Pa orders of magnitude, open heater heating, vacuum degree can rise when heating, be evacuated to E-4Pa;
S4, ionization gauge is closed, closes throttle valve, lead to argon gas, valve control centre position will be reached on the right of gas flowmeter, first carry out target cleaning 5min-8min, then carry out substrate with bipolar pulse power supply or radio-frequency power supply and clean, cleans 15min-20min, open target baffle and Substrate baffle plate start-up operation work;
S5, plated film terminate:Stop argon gas, throttle opening continues pumping chamber, waits for cooling;Take substrate:80 or less are cooled to, master is closed Valve closes molecular pump, and molecular pump drops to 0 by 450, waits for 2min, step valve before closing, and open air valve, which is slowly deflated, makes chamber reach extraneous Atmospheric pressure;
S6, chamber is extracted into 10Pa hereinafter, to protect chamber interior device, closes mechanical pump and switch board master switch, close cooling water, Three are spaced apart and is all turned off.
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