CN103876737A - Dry soft electrode based on direct-current magnetron sputtering technology and manufacturing process thereof - Google Patents
Dry soft electrode based on direct-current magnetron sputtering technology and manufacturing process thereof Download PDFInfo
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- CN103876737A CN103876737A CN201410138138.8A CN201410138138A CN103876737A CN 103876737 A CN103876737 A CN 103876737A CN 201410138138 A CN201410138138 A CN 201410138138A CN 103876737 A CN103876737 A CN 103876737A
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Abstract
The invention relates to the field of medical instruments, in particular to a dry soft electrode based on a direct-current magnetron sputtering technology. The dry soft electrode comprises a substrate, the substrate comprises a base and a plurality of needle electrodes arranged on the base, a conducting plate is arranged at the bottom of the base, the conducting plate is provided with a conducting line, the conducting plate and the base of the substrate are closely connected through a die sleeve, and the die sleeve is provided with a hole allowing the conducting line to pass through. The surface of the base is plated with a conducting layer. The invention further provides a manufacturing method of the dry soft electrode based on the direct-current magnetron sputtering technology. The dry soft electrode and the manufacturing method have the advantages that the reliability and sensitivity of brain signal collection are good; the coating of the electrode is high in adhesive force, even in attachment, and controllable in thickness and color; the electrode is soft, and good in comfort; ingenious structural design is achieved.
Description
Technical field
The present invention relates to medical instruments field, specifically a kind of dry type soft electrode and preparation technology thereof based on magnetically controlled DC sputtering technology.
Background technology
There are in the world company's research and development the dry electrode of production and sales and the Related products thereof such as EGI, g.tech, Cognionics, NeuroSky, ANT, EasyCap.The invention of dry electrode makes acquiring brain waves technology have a huge progress.Classical dry-type electrode is made needle-like array, to be pressed into or micro-intrusion skin method reduction Skin Resistance.Electrode material is proof gold, fine silver or sintering silver/silver chloride Ag/AgCl.
But it has following two remarkable shortcomings (1) structural disadvantages, and hard, sharp-pointed needle-like array thrusts scalp horny layer, bring certain sensation of pricking to patient or experimenter and easily cause infection.(2) material shortcoming, gold, silver are heavy metals, are adapted at scalp surface and use, and thrust horny layer and easily make heavy metal enter skin and blood, cause heavy metal poisoning.Especially sintering silver/silver chloride Ag/Agcl is that the mixture of Powdered argentum powder and chlorination argentum powder is easy to enter skin and blood.
Summary of the invention
According to above-mentioned weak point, the object of this invention is to provide a kind of dry type soft electrode and preparation technology thereof based on magnetically controlled DC sputtering technology of signal stabilization.
For achieving the above object, technical scheme of the present invention is: a kind of dry type soft electrode based on magnetically controlled DC sputtering technology, it comprises substrate, substrate comprises base and the some electrode needle that are positioned at base top, and base bottom is provided with conducting strip, and conducting strip is provided with conductor wire, and by die sleeve, conducting strip is closely connected with substrate base, die sleeve is provided with the hole of passing through for conductor wire, and wherein, substrate surface is coated with conductive layer.
Preferably: described substrate base is circular.
Preferably: described substrate is silica gel, rubber or polyurethanes.
Preferably: hole is arranged on die sleeve side or bottom surface.
Preferably: described electrode needle is evenly arranged on base.
Preferably: described electrode needle is the thick shape of syringe needle fine needle tail.
Preferably: described electrode needle syringe needle is circle or arc.
Preferably: described conductive layer is titanium nitride.
The present invention also provides a kind of preparation method of the dry type soft electrode based on magnetically controlled DC sputtering technology, and its preparation process is as follows:
(1) making of substrate: injection molded elastomer or polyurethane material in mould, molding;
(2) base coated film;
(3) die sleeve is installed: conducting strip and substrate base are close to, the conductor wire of conducting strip is passed to the hole of die sleeve side, and conducting strip and substrate base are fixed with die sleeve;
Wherein, base coated film has again following step: 1. substrate is cleaned, and the ratio that the ratio that adopts acetone, ethanol and deionized water is 8:2:1 is cleaned 10min in ultrasound wave; 2. substrate is placed in the vacuum chamber of multi-target magnetic control sputtering coater, evacuation, vacuum degree control is more than 1*10-3Pa, and heating-up temperature is 150-200 DEG C; 3. pre-sputtering, passes into argon to sputtering chamber separately, and pressure is about 1.0Pa, after glow discharge, pre-sputtering 15min is carried out in titanium target surface; 4. sputter, controlling argon and nitrogen flow ratio is 3:1, sputtering time is 20-40min; 5. annealing, the temperature of annealing is chosen in below 400 DEG C.
Beneficial effect of the present invention is:
1, gather the reliability of brain signal, sensitivity.Titanium nitride is good conductor, and impedance is extremely low, and resistivity is 22*10
-6Ω/cm
2.Under room temperature, titanium nitride has good chemical stability and biocompatibility.The performance guarantee that titanium nitride dry type soft electrode is good susceptiveness, the accuracy of EEG signals of Real-time Collection.
2, layer electrodes strong adhesion, adheres to evenly, and thickness is controlled, and color is controlled.On software silica gel, rubber or polyurethane material, adopt magnetron sputtering technique plated film, according to the asynchronism(-nization) of sputter, can control the thickness of plated film.According to the ratio difference of nitrogen, argon, can control coating color.
3, electrode softness, comfortableness is good.Formula soft electrode is rubber or polyurethane material, this material softness, and patient or experimenter's comfortable wearing, without constriction.
4, structural design cleverly.Needle electrode structural design, is more conducive to contacting of electrode and scalp.Especially be applicable to hair long patient or experimenter.
Brief description of the drawings
Fig. 1 is structural representation one of the present invention.
Fig. 2 is structural representation two of the present invention.
Fig. 3 is top view of the present invention.
Fig. 4 is that the settling rate of plated film is with the change curve of operating pressure.
Fig. 5 figure is the change curve of plated film settling rate with sputtering power.
In figure, 1-substrate; 2-base; 3-electrode needle; 4-conducting strip; 5-die sleeve; 6-hole; 7-conductor wire.
Detailed description of the invention
Below in conjunction with specific embodiment, the present invention will be further described.
As Figure 1-3: a kind of dry type soft electrode based on magnetically controlled DC sputtering technology, it comprises substrate 1, substrate 1 comprises base 2 and is positioned at some electrode needle 3 of base 2 tops.Substrate 1 base 2 is circular, and electrode needle 3 is evenly arranged on base 2.Each electrode needle 3 can be closely adjacent, also can have certain gap between electrode needle 3.Electrode needle 3 syringe needles are circle or arc.Electrode needle 3 is the thick shape of syringe needle fine needle tail.Silica gel, rubber or polyurethanes, material softness are selected in substrate 1.Base 2 bottoms are provided with conducting strip, and conducting strip 4 is provided with conductor wire 7, the material such as that the material of conductor wire 7 can be multiple material is as silver-plated in: red copper, copper tin plated materials, copper, native silver silk.And by die sleeve 5, conducting strip 4 is closely connected with substrate 1 base 2, die sleeve 5 is provided with the hole 6 of passing through for conductor wire 7, and hole 6 is arranged on die sleeve 5 sides (as Fig. 1) or bottom surface (as Fig. 2).Wherein, substrate 1 surface is coated with conductive layer.Wherein, conductive layer is titanium nitride.
The present invention also provides a kind of preparation method of the dry type soft electrode based on magnetically controlled DC sputtering technology, and its preparation process is as follows:
(1) making of substrate 1: injection moulding silica gel, rubber or polyurethane material in mould, molding;
(2) substrate 1 plated film;
(3) die sleeve 5 is installed: conducting strip 4 and substrate 1 base 2 are close to, the hole 6 the conductor wire 7 of conducting strip 4 through die sleeve 5 sides, and with die sleeve 5, conducting strip 4 is fixing with substrate 1 base 2;
Wherein, base coated film has again following step: 1. substrate 1 is cleaned, and the ratio that the ratio that adopts acetone, ethanol and deionized water is 8:2:1 is cleaned 10min in ultrasound wave, and the main purpose of cleaning is to remove surface contaminants and chemical dirt; 2. substrate 1 is placed in the vacuum chamber of multi-target magnetic control sputtering coater, evacuation, for reducing the residual volume in vacuum cavity, ensures the clarity of thin film, and vacuum degree control is at 1*10
-3more than Pa, remove moisture for substrate surface, improve film-Ji adhesion, improve the concentration class of peplomer, need heating, heating-up temperature is 150-200 DEG C; 3. pre-sputtering, passes into argon to sputtering chamber separately, and pressure is about 1.0Pa, after glow discharge, pre-sputtering 15min is carried out in titanium target surface, and object is removed the impurity such as the oxide on Ti target surface; 4. sputter, controlling argon and nitrogen flow ratio is 3:1, sputtering time is 20-40min; 5. annealing, target material is different from the coefficient of expansion of base material, can affect the adhesion of thin film and substrate, and the temperature of annealing is chosen in below 400 DEG C.
Target is the Titanium of purity 99.99%.Purity of argon is 99.99%, and nitrogen gas purity is 99.99%.By regulating the ratio of argon, nitrogen, can regulate film forming color.Film forming color by silvery white-shallow golden yellow-golden yellow-reddish yellow-brown.Along with the progressively increase of nitrogen partial pressure, film forming color by silvery white-shallow golden yellow-golden yellow-reddish yellow-brown.Also there is respective change in the composition of coating, by 2Ti-Ti
2n-TiN.The variation of Coating composition also has influence on the hardness of rete because with regard to hardness Ti
2n>TiN>2Ti.Therefore when 2Ti disappears, form Ti
2n, while just there is TiN, hardness is best, later along with the increase hardness of TiN has again decline.Because 2Ti is silvery white, Ti
2n is light golden yellow, and TiN is golden yellow.Pre-sputtering power determines according to sputtering power, generally a little more than sputtering power.
The operation principle of magnetron sputtering refers to that electronics is under the effect of electric field E, bumps flying in substrate process with ar atmo, makes its ionization produce Ar cation and new electronics; New electronics flies to substrate, and Ar ion accelerates to fly to cathode target under electric field action, and with high-energy bombardment target surface, makes target generation sputter.There is the advantages such as coating is even, strong adhesion through magnetron sputtering method plated film.
The principle of reaction magnetocontrol sputtering precipitation TiN thin film is:
In N2 → N2++e(gas phase)
N2++e → 2N (in substrate)
Ti+N → TiN (in substrate).
Claims (9)
1. the dry type soft electrode based on magnetically controlled DC sputtering technology, it is characterized in that: it comprises substrate (1), substrate (1) comprises base (2) and is positioned at some electrode needle (3) of base (2) top, base (2) bottom is provided with conducting strip (4), conducting strip (4) is provided with conductor wire (7), and by die sleeve (5), conducting strip (4) is closely connected with substrate (1) base (2), die sleeve (5) is provided with the hole (6) of passing through for conductor wire (7), wherein, substrate (1) surface is coated with conductive layer.
2. according to dry type soft electrode claimed in claim 1, it is characterized in that: described substrate (1) base (2) is for circular.
3. according to the dry type soft electrode described in claim 1 or 2, it is characterized in that: described substrate (1) is silica gel, rubber or polyurethanes.
4. according to dry type soft electrode claimed in claim 1, it is characterized in that: described hole (6) is arranged on die sleeve (5) side or bottom surface.
5. according to dry type soft electrode claimed in claim 1, it is characterized in that: described electrode needle (3) is evenly arranged on base (2).
6. according to the dry type soft electrode described in claim 1 or 5, it is characterized in that: described electrode needle (3) is the thick shape of syringe needle fine needle tail.
7. according to dry type soft electrode claimed in claim 6, it is characterized in that: described electrode needle (3) syringe needle is circle or arc.
8. according to dry type soft electrode claimed in claim 1, it is characterized in that: described conductive layer is titanium nitride.
9. according to the preparation method of dry type soft electrode claimed in claim 1, it is characterized in that: its preparation process is as follows:
(1) making of substrate: injection molded elastomer or polyurethane material in mould, molding;
(2) base coated film;
(3) die sleeve is installed: conducting strip and substrate base are close to, the conductor wire of conducting strip is passed to the hole of die sleeve side, and conducting strip and substrate base are fixed with die sleeve;
Wherein, base coated film has again following step: 1. substrate is cleaned, and the ratio that the ratio that adopts acetone, ethanol and deionized water is 8:2:1 is cleaned 10min in ultrasound wave; 2. substrate is placed in the vacuum chamber of multi-target magnetic control sputtering coater, evacuation, vacuum degree control is at 1*10
-3more than Pa, heating-up temperature is 150-200 DEG C; 3. pre-sputtering, passes into argon to sputtering chamber separately, and pressure is about 1.0Pa, after glow discharge, pre-sputtering 15min is carried out in titanium target surface; 4. sputter, controlling argon and nitrogen flow ratio is 3:1, and sputtering time is 20-40min, and the titanium nitride film thickness of deposition is about 5um; 5. annealing, the temperature of annealing is chosen in below 400 DEG C.
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105769182A (en) * | 2016-02-22 | 2016-07-20 | 武汉智普天创科技有限公司 | Electroencephalogram signal wireless collecting system |
| CN106859637A (en) * | 2016-12-28 | 2017-06-20 | 电子科技大学 | Flexible conductive rubber electrocardiograph dry electrode with holes |
| CN108784691A (en) * | 2018-05-29 | 2018-11-13 | 兰州大学 | A kind of high-precision antioxidant accuracy electrode |
| CN108823548A (en) * | 2018-07-05 | 2018-11-16 | 江苏伟创真空镀膜科技有限公司 | A kind of bronze-colored coating process of PVD |
| CN109288519A (en) * | 2018-05-29 | 2019-02-01 | 兰州大学 | A kind of high durable high-precision comfort type electrode for encephalograms of miniaturization |
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| US8594763B1 (en) * | 2010-05-25 | 2013-11-26 | Neurowave Systems Inc. | Physiological electrode assembly for fast application |
| CN203828929U (en) * | 2014-04-08 | 2014-09-17 | 青岛柏恩鸿泰电子科技有限公司 | Dry soft electrode based on direct-current magnetron sputtering technique |
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| CN101021442A (en) * | 2007-03-14 | 2007-08-22 | 哈尔滨理工大学 | Inserting electrode lead-out method for micro platinum thermal resistance temperature sensor |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN105769182A (en) * | 2016-02-22 | 2016-07-20 | 武汉智普天创科技有限公司 | Electroencephalogram signal wireless collecting system |
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| CN106859637A (en) * | 2016-12-28 | 2017-06-20 | 电子科技大学 | Flexible conductive rubber electrocardiograph dry electrode with holes |
| CN108784691A (en) * | 2018-05-29 | 2018-11-13 | 兰州大学 | A kind of high-precision antioxidant accuracy electrode |
| CN109288519A (en) * | 2018-05-29 | 2019-02-01 | 兰州大学 | A kind of high durable high-precision comfort type electrode for encephalograms of miniaturization |
| CN108784691B (en) * | 2018-05-29 | 2024-04-05 | 兰州大学 | High-precision antioxidation accurate electrode |
| CN108823548A (en) * | 2018-07-05 | 2018-11-16 | 江苏伟创真空镀膜科技有限公司 | A kind of bronze-colored coating process of PVD |
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| CN103876737B (en) | 2016-03-02 |
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