CN108823548A - A kind of bronze-colored coating process of PVD - Google Patents
A kind of bronze-colored coating process of PVD Download PDFInfo
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- CN108823548A CN108823548A CN201810730712.7A CN201810730712A CN108823548A CN 108823548 A CN108823548 A CN 108823548A CN 201810730712 A CN201810730712 A CN 201810730712A CN 108823548 A CN108823548 A CN 108823548A
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- finished product
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- bronze
- film
- coating process
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0605—Carbon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
Abstract
The present invention provides a kind of bronze-colored coating process of PVD, and step is followed successively by：Sample is placed in vacuum environment in single coating chamber and plates the first semi-finished product of deep golden yellow TiN film formation using more target position continuous magnetron sputtering modes：Vacuum environment vacuum degree is 3.0 × 10‑1Pa~5.0 × 10‑1Pa, total gas pressure are 0.30Pa~0.50Pa, and temperature range is 20 DEG C~150 DEG C, and argon flow is 200Sccm~220Sccm, and nitrogen flow is 200Sccm~220Sccm；Oxycarbide film is plated on the first semi-finished product in same vacuum environment and forms the second semi-finished product；Rough grinding is carried out to the second semi-finished product and cleaning forms third semi-finished product；Smart polishing is carried out to third semi-finished product and paint processing forms the finished product that one layer of hardness is 2300HV；Resistance to 48 hours artificial perspirations test carried out to finished product, the present invention magnetron sputtering can disposably plate TiN+C and be simplified last handling process in vacuum environment.
Description
Technical field
The present invention relates to PVD coating technique fields, and in particular to a kind of bronze-colored coating process of PVD.
Background technique
PVD (Physical Vapor Deposition) --- physical vapour deposition (PVD)：Refer to and realizes substance using physical process
Transfer, process atom or molecule being transferred to by source on substrate surface.Its effect is can to make certain have specific characteristics can be (strong
Degree height, wearability, thermal diffusivity, rotproofness etc.) particle be sprayed on the lower parent of performance so that parent is with better property
Energy.PVD basic skills：It is evaporated in vacuo, sputtering, ion plating (hallow cathode deposition, HCD, hot cathode ion plating, arc ion plating, work
Property reactive ion plating, RF ion plating, direct-current discharge ion plating).
The film of PVD technique preparation has high rigidity, low friction factor, good wear resistance and chemical stability etc. excellent
Point.Compared with CVD technique, PVD process treatment temperature is low, at 600 DEG C or less on the bending strength of cutter material without influence；It is thin
The internal stress state of film is compression, is more suitable for the coating to hard alloy precision complex cutting tool；PVD technique to environment without
Adverse effect meets the developing direction of Modern Green manufacture.
PVD magnetron sputtering：Under the collective effect in vacuum environment and magnetic field, the inert gas ion being ionized is to target
It is bombarded, target is caused to be ejected and be deposited on matrix and form film with ion, atom or molecule idol reading form.According to making
The difference of power supply is ionized, conductor and non-conductive material can be used as target and be sputtered.
Prior art some is only with nitriding titanium-nitride (TiN) film, although the subsequent also progress carburizing plating oxidation of coal having
Object (C) film, but cannot disposably plate (TiN+C), cause to post-process it is considerably complicated, and when continuous production finished product quality of colour
It is unstable, thus it is to be improved.
Summary of the invention
In order to solve the above technical problems, the purpose of the present invention is to provide a kind of bronze-colored coating process of PVD, it can be in vacuum
Magnetron sputtering, which has disposably plated TiN+C, in environment is simplified last handling process.
To achieve the above object, the bronze-colored coating process of a kind of PVD of the present invention, including following processing step：
1) sample is placed in vacuum environment in single coating chamber and plates deep gold using more target position continuous magnetron sputtering modes
Yellow TiN film forms the first semi-finished product：Vacuum environment vacuum degree is 3.0 × 10-1Pa~5.0 × 10-1Pa, total gas pressure are
0.30Pa~0.50Pa, temperature range are 20 DEG C~150 DEG C, and argon flow is 200Sccm~220Sccm, and nitrogen flow is
200Sccm~220Sccm；
2) oxycarbide film is plated on the first semi-finished product in same vacuum environment and forms the second semi-finished product；
3) rough grinding is carried out to the second semi-finished product and cleaning forms third semi-finished product；
4) smart polishing is carried out to third semi-finished product and paint processing forms the finished product that one layer of hardness is 2300HV；
5) resistance to 48 hours artificial perspirations are carried out to finished product to test.
Preferably, put it into normal-temperature water in the step 3) when being cleaned to the second semi-finished product, embathe 60s~
90s。
Preferably, when carrying out magnetron sputtering in the step 1)：Target current range is 15A~30A.
Preferably, when carrying out magnetron sputtering in the step 1)：Magnetic field strength is 120Gs~900Gs.
Preferably, in the step 4) finished films with a thickness of 2.5 μm.
Preferably, the coefficient of friction of finished films and steel is 0.35 in the step 4).
Preferably, the resistance to oxidation temperature of finished films is 600 DEG C in the step 4).
Preferably, the structure of finished films is nano-multilayer film in the step 4).
Compared with prior art, the present invention the beneficial effect is that：
The present invention, and can be with continuous production with respect to having the uniform advantage of color for drum machine plated film；Relative vacuum is steamed
It is stronger with the binding force of substrate for hair plated film, it is not easy to fall film；Particle is smaller for opposite multi-arc ion plating film, it is not easy to send out
It is dim；And continuous magnetron sputtering mode plated film is used, magnetron sputtering it can disposably plate TiN+C in vacuum environment and make to post-process
Process is simplified, and when advantageously ensuring that continuous production finished product quality of colour；Using the more target position plated films of single coating chamber, have
Conducive to the film for forming densification, and surface smoothness is higher；Obtained bronze-colored finished films performance is fine：Hardness reaches
2300HV, the coefficient of friction with steel are 0.35, and resistance to oxidation temperature is up to 600 DEG C.
Specific embodiment
By the technology contents that the present invention will be described in detail, construction feature, reached purpose and efficacy, hereby enumerates embodiment below
It is explained in detail.
The present invention provides a kind of bronze-colored coating process of PVD, including following processing step：
1) sample is placed in vacuum environment in single coating chamber and plates deep gold using more target position continuous magnetron sputtering modes
Yellow TiN film forms the first semi-finished product：Vacuum environment vacuum degree is 3.0 × 10-1Pa~5.0 × 10-1Pa, total gas pressure are
0.30Pa~0.50Pa, temperature range are 20 DEG C~150 DEG C, and argon flow is 200Sccm~220Sccm, and nitrogen flow is
200Sccm~220Sccm；
2) oxycarbide film is plated on the first semi-finished product in same vacuum environment and forms the second semi-finished product；
3) rough grinding is carried out to the second semi-finished product and cleaning forms third semi-finished product；
4) smart polishing is carried out to third semi-finished product and paint processing forms the finished product that one layer of hardness is 2300HV；
5) resistance to 48 hours artificial perspirations are carried out to finished product to test.
By using above-mentioned technical proposal, the present invention, and can with respect to having the uniform advantage of color for drum machine plated film
With continuous production；It is stronger with the binding force of substrate for relative vacuum evaporation coating, it is not easy to fall film；Opposite multi-arc ion plating film
For particle it is smaller, it is not easy to send out dim；And use continuous magnetron sputtering mode plated film, can in vacuum environment magnetron sputtering it is primary
Property, which has plated TiN+C, is simplified last handling process, and when advantageously ensuring that continuous production finished product quality of colour；Using single
The more target position plated films of coating chamber advantageously form fine and close film, and surface smoothness is higher；Obtained bronze-colored finished films are
Nano-scale multilayer film and performance is fine：Hardness reaches 2300HV, and the coefficient of friction with steel is 0.35, and resistance to oxidation temperature is up to 600 DEG C；
And the stringent test of resistance to 48 hours artificial perspirations is carried out to finished product, it is ensured that final product quality.
Preferably, put it into normal-temperature water in the step 3) when being cleaned to the second semi-finished product, embathe 60s~
90s。
By using above-mentioned technical proposal, 60s~90s is embathed in normal-temperature water, can preferably be removed remained on surface
Impurity and mixture substantially increase the smoothness of the second surface of semi-finished, are conducive to improve surface and metal object phase deposition film
The binding force of layer.
Preferably, when carrying out magnetron sputtering in the step 1)：Target current range is 15A~30A.
By using above-mentioned technical proposal, it is advantageously ensured that the fine and smooth texture of film, is conducive to control coating materials reaction particles
Size, thus realize film layer compact texture and better corrosion resistant performance.
Preferably, when carrying out magnetron sputtering in the step 1)：Magnetic field strength is 120Gs~900Gs.
By using above-mentioned technical proposal, is conducive to the compactness for improving film plating layer, improves the binding force of plated film, guarantee to splash
The quality of forming film of film is penetrated, to realize wear-resistant, anticorrosion, insulation or conduction, improve the various demands such as demolding performace.
Preferably, in the step 4) finished films with a thickness of 2.5 μm.
Preferably, the coefficient of friction of finished films and steel is 0.35 in the step 4).
Preferably, the resistance to oxidation temperature of finished films is 600 DEG C in the step 4).
Preferably, the structure of finished films is nano-multilayer film in the step 4).
The fine and smooth texture of film is realized, really by parameters such as strict control film thicknesses by using above-mentioned technical proposal
Protect binding force, the compact texture of film layer and the better corrosion resistant performance of plated film.
In conclusion only the preferred embodiments of the invention, is not limited the scope of protection of the present invention with this, it is all according to the present invention
Equivalent changes and modifications made by the scope of the patents and description are all within the scope of the invention patent covers.
Claims (8)
1. a kind of bronze-colored coating process of PVD, it is characterised in that：Including following processing step：
1) sample is placed in vacuum environment in single coating chamber and plates deep golden yellow using more target position continuous magnetron sputtering modes
TiN film forms the first semi-finished product：Vacuum environment vacuum degree is 3.0 × 10-1Pa~5.0 × 10-1Pa, total gas pressure be 0.30Pa~
0.50Pa, temperature range be 20 DEG C~150 DEG C, argon flow be 200Sccm~220Sccm, nitrogen flow be 200Sccm~
220Sccm；
2) oxycarbide film is plated on the first semi-finished product in same vacuum environment and forms the second semi-finished product；
3) rough grinding is carried out to the second semi-finished product and cleaning forms third semi-finished product；
4) smart polishing is carried out to third semi-finished product and paint processing forms the finished product that one layer of hardness is 2300HV；
5) resistance to 48 hours artificial perspirations are carried out to finished product to test.
2. the bronze-colored coating process of a kind of PVD according to claim 1, it is characterised in that：To in the step 3)
Two semi-finished product are put it into normal-temperature water when being cleaned, and embathe 60s~90s.
3. the bronze-colored coating process of a kind of PVD according to claim 2, it is characterised in that：Magnetic is carried out in the step 1)
When control sputtering：Target current range is 15A~30A.
4. the bronze-colored coating process of a kind of PVD according to claim 3, it is characterised in that：Magnetic is carried out in the step 1)
When control sputtering：Magnetic field strength is 120Gs~900Gs.
5. the bronze-colored coating process of a kind of PVD according to claim 4, it is characterised in that：Finished product is thin in the step 4)
Film thickness is 2.5 μm.
6. the bronze-colored coating process of a kind of PVD according to claim 5, it is characterised in that：Finished product is thin in the step 4)
The coefficient of friction of film and steel is 0.35.
7. the bronze-colored coating process of a kind of PVD according to claim 6, it is characterised in that：Finished product is thin in the step 4)
The resistance to oxidation temperature of film is 600 DEG C.
8. the bronze-colored coating process of a kind of PVD according to claim 7, it is characterised in that：Finished product is thin in the step 4)
The structure of film is nano-multilayer film.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810730712.7A CN108823548A (en) | 2018-07-05 | 2018-07-05 | A kind of bronze-colored coating process of PVD |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201810730712.7A CN108823548A (en) | 2018-07-05 | 2018-07-05 | A kind of bronze-colored coating process of PVD |
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Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20060137971A1 (en) * | 2002-07-01 | 2006-06-29 | Larry Buchtmann | Method for coating cutting implements |
| CN102146556A (en) * | 2011-04-25 | 2011-08-10 | 天津师范大学 | Method for preparing colorful TiN film by utilizing direct current magnetron sputtering |
| CN103132014A (en) * | 2011-12-01 | 2013-06-05 | 深圳富泰宏精密工业有限公司 | Coated part and preparation method thereof |
| CN103876737A (en) * | 2014-04-08 | 2014-06-25 | 青岛柏恩鸿泰电子科技有限公司 | Dry soft electrode based on direct-current magnetron sputtering technology and manufacturing process thereof |
| CN107177824A (en) * | 2017-05-16 | 2017-09-19 | 福建新越金属材料科技有限公司 | The decorative coating prepared based on the common sputtering technology of magnetic control on stainless steel substrate |
| CN107217231A (en) * | 2017-05-16 | 2017-09-29 | 福建新越金属材料科技有限公司 | The decorative coating prepared on aluminum substrates based on the common sputtering technology of magnetic control |
| CN108179393A (en) * | 2018-01-18 | 2018-06-19 | 合肥永信等离子技术有限公司 | A kind of CrAlSiCON nano-composite coatings and preparation method thereof |
| CN108239745A (en) * | 2016-12-26 | 2018-07-03 | 比亚迪股份有限公司 | A kind of method for forming double-colored double texture PVD film layers on metal base and thus obtained metal base |
-
2018
- 2018-07-05 CN CN201810730712.7A patent/CN108823548A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20060137971A1 (en) * | 2002-07-01 | 2006-06-29 | Larry Buchtmann | Method for coating cutting implements |
| CN102146556A (en) * | 2011-04-25 | 2011-08-10 | 天津师范大学 | Method for preparing colorful TiN film by utilizing direct current magnetron sputtering |
| CN103132014A (en) * | 2011-12-01 | 2013-06-05 | 深圳富泰宏精密工业有限公司 | Coated part and preparation method thereof |
| CN103876737A (en) * | 2014-04-08 | 2014-06-25 | 青岛柏恩鸿泰电子科技有限公司 | Dry soft electrode based on direct-current magnetron sputtering technology and manufacturing process thereof |
| CN108239745A (en) * | 2016-12-26 | 2018-07-03 | 比亚迪股份有限公司 | A kind of method for forming double-colored double texture PVD film layers on metal base and thus obtained metal base |
| CN107177824A (en) * | 2017-05-16 | 2017-09-19 | 福建新越金属材料科技有限公司 | The decorative coating prepared based on the common sputtering technology of magnetic control on stainless steel substrate |
| CN107217231A (en) * | 2017-05-16 | 2017-09-29 | 福建新越金属材料科技有限公司 | The decorative coating prepared on aluminum substrates based on the common sputtering technology of magnetic control |
| CN108179393A (en) * | 2018-01-18 | 2018-06-19 | 合肥永信等离子技术有限公司 | A kind of CrAlSiCON nano-composite coatings and preparation method thereof |
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Application publication date: 20181116 |