CN103874550B - 超声波清洗装置及其功率控制方法 - Google Patents

超声波清洗装置及其功率控制方法 Download PDF

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Publication number
CN103874550B
CN103874550B CN201280039420.XA CN201280039420A CN103874550B CN 103874550 B CN103874550 B CN 103874550B CN 201280039420 A CN201280039420 A CN 201280039420A CN 103874550 B CN103874550 B CN 103874550B
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China
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corrected
value
power
power value
oscillator
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CN201280039420.XA
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English (en)
Chinese (zh)
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CN103874550A (zh
Inventor
杉山晋
市川康司
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Kaijo Corp
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Kaijo Corp
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0207—Driving circuits
    • B06B1/0223—Driving circuits for generating signals continuous in time
    • B06B1/0238—Driving circuits for generating signals continuous in time of a single frequency, e.g. a sine-wave
    • B06B1/0246—Driving circuits for generating signals continuous in time of a single frequency, e.g. a sine-wave with a feedback signal
    • B06B1/0253—Driving circuits for generating signals continuous in time of a single frequency, e.g. a sine-wave with a feedback signal taken directly from the generator circuit
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
    • B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B2201/00—Indexing scheme associated with B06B1/0207 for details covered by B06B1/0207 but not provided for in any of its subgroups
    • B06B2201/70—Specific application
    • B06B2201/71—Cleaning in a tank

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
CN201280039420.XA 2012-01-30 2012-12-13 超声波清洗装置及其功率控制方法 Active CN103874550B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2012016484A JP5226141B1 (ja) 2012-01-30 2012-01-30 超音波洗浄装置及びその電力制御方法
JP2012-016484 2012-01-30
PCT/JP2012/082337 WO2013114738A1 (ja) 2012-01-30 2012-12-13 超音波洗浄装置及びその電力制御方法

Publications (2)

Publication Number Publication Date
CN103874550A CN103874550A (zh) 2014-06-18
CN103874550B true CN103874550B (zh) 2015-10-14

Family

ID=48904797

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201280039420.XA Active CN103874550B (zh) 2012-01-30 2012-12-13 超声波清洗装置及其功率控制方法

Country Status (4)

Country Link
JP (1) JP5226141B1 (ja)
CN (1) CN103874550B (ja)
TW (1) TWI476054B (ja)
WO (1) WO2013114738A1 (ja)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1986086A (zh) * 2006-12-22 2007-06-27 上海集成电路研发中心有限公司 半导体硅片的清洗装置及清洗方法
CN201579230U (zh) * 2009-10-23 2010-09-15 河北先河环保科技股份有限公司 水下光学测量分析仪的微型超声波清洗装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4813961B1 (ja) * 1967-12-13 1973-05-02
JP2004113846A (ja) * 2002-09-24 2004-04-15 Honda Electronic Co Ltd 超音波洗浄装置用発振器
JP3998589B2 (ja) * 2003-02-21 2007-10-31 株式会社東芝 音圧測定装置及び圧測定方法
JP4813961B2 (ja) * 2006-04-26 2011-11-09 株式会社日立国際電気エンジニアリング 超音波音圧測定装置
WO2008035581A1 (en) * 2006-09-22 2008-03-27 Kaijo Corporation Ultrasonic cleaning apparatus
JP2008219420A (ja) * 2007-03-02 2008-09-18 Shimada Phys & Chem Ind Co Ltd 超音波発振器

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1986086A (zh) * 2006-12-22 2007-06-27 上海集成电路研发中心有限公司 半导体硅片的清洗装置及清洗方法
CN201579230U (zh) * 2009-10-23 2010-09-15 河北先河环保科技股份有限公司 水下光学测量分析仪的微型超声波清洗装置

Also Published As

Publication number Publication date
TWI476054B (zh) 2015-03-11
JP5226141B1 (ja) 2013-07-03
CN103874550A (zh) 2014-06-18
TW201341072A (zh) 2013-10-16
WO2013114738A1 (ja) 2013-08-08
JP2013154291A (ja) 2013-08-15

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