CN103855049B - A kind of intelligent probe card pin pressure control system and control method - Google Patents
A kind of intelligent probe card pin pressure control system and control method Download PDFInfo
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- CN103855049B CN103855049B CN201410118188.XA CN201410118188A CN103855049B CN 103855049 B CN103855049 B CN 103855049B CN 201410118188 A CN201410118188 A CN 201410118188A CN 103855049 B CN103855049 B CN 103855049B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/14—Measuring as part of the manufacturing process for electrical parameters, e.g. resistance, deep-levels, CV, diffusions by electrical means
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67282—Marking devices
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- General Physics & Mathematics (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
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Abstract
A kind of intelligent probe card pin pressure control system and control method, before the method is included in startup test program performance element, data are extracted submodule and are extracted respectively and currently need to carry out the pin pressure value that the test program of test program arranges unit and pin pressure detection arranges in unit；Judging that submodule judges that test program arranges unit the most identical with the pin pressure value that pin pressure detection arranges in unit, if identical, notice test program performance element can start test program；If it is different, the pin pressure value that the pin pressure value that pin presses detection to arrange unit is set to arrange unit with test program by process submodule is identical.Therefore, the present invention is controlling in board test process, and the pin pressure that can detect probe card arranges parameter, it is to avoid cause the exception of data due to artificial bug patch.
Description
Technical field
The present invention relates to microelectronic testing technical field, more particularly, it relates to a kind of intelligent probe card pin
Pressure control system and control method.
Background technology
Semiconductor process technique is advanced by leaps and bounds in recent years, and advanced Moore's Law estimates rule several years, existing rank
Section is drive on boldly below 32 nanometers.Product is stressed compact at present, integrated circuit (Integrated
Circuit is called for short IC) volume is more and more less, function is increasingly stronger, and number of pins gets more and more, in order to
Reducing area shared by chip package and improve IC usefulness, present stage flip-chip (Flip Chip) mode is sealed
Dress is generally applied to drawing chip, chipset, memorizer and central processing unit (Central Processing
Unit is called for short CPU) etc..Above-mentioned high-order packaged type unit price is high, if core can be carried out before packaging
Built-in testing, is found to have defective products, is i.e. marked, until before back segment packaging technology by these labellings not
Non-defective unit is given up, and can save unnecessary packaging cost.Thus, the probe test of chip i.e. preliminary survey on silicon chip
Become an important operation in ic manufacturing process.
During probe test, its process of measurement plays extremely important role.Because the knot of preliminary survey
Fruit serves the effect formed a connecting link, preliminary survey result and pulse code modulation (Pulse Code
Modulation, is called for short PCM) measurement result can to silicon wafer production line feed back rich for stable and
Improve conforming product rate and the most valuable information of product quality.Meanwhile, preliminary survey data are for controlling
Conforming product rate, control of product quality QC level and the control whole production cost of product are at one rationally
Level, have the effect do not replaced.
Probe card is a kind of test interface, mainly tests naked core, will probe in probe card straight
Connect and directly contact with the weld pad on chip or projection, draw chip signal, then coordinate peripheral test instrument with
Software controls to reach the purpose of automatic measurement.
Refer to the structural representation that Fig. 1, Fig. 1 are prior art middle probe card pin pressure control system.As
Shown in figure, in conventional testing procedures, board internal control module (FWK) controls test program respectively
Module is set, pin pressure detection arranges module and other program arranges the parameter of module etc. and process conditions set
Put, and send the information of control command.Owing to locator (prober pressed by the pin in current board
Recipe) internal pin pressure (Over Driver the is called for short OD) parameter arranged and test program (test
Recipe) the internal pin pressure parameter arranged inputs respectively, and particularly pin pressure locator is internal is arranged
Pin pressure parameter be variable, can change with artificial setting, therefore, if inside pin pressure locator
The pin pressure parameter arranged is not mated with the internal pin pressure parameter arranged of test program, and test data there will be different
Often；OD is excessive, then probe card acupuncture treatment scope can exceed scope of can having an acupuncture treatment, if pin pressure OD is too small,
Then can cause the result that acupuncture treatment test is unstable.
Such as, sensitive small resistor test result is being carried out, if two OD values differ, then from a certain
After the time period, the data exception of test becomes big, after inquiry OD (pin pressure), just finds that pin pressure is visited
Survey the OD value arranged in unit and made into 30 microns by original 45 microns, owing to this tests one section
Time, have impact on multiple batch (lot) product and be not found, had a strong impact on board production capacity and test
The time spent.
Summary of the invention
The main mesh of the present invention is to provide a kind of intelligent probe card pin pressure control system, can be intelligentized
Control in board test process, control OD and change in the case of unknowable, i.e. guarantee probe card OD
The correctness that (pin pressure) is arranged, does not causes, with artificial bug patch, the exception that data are unnecessary.
For achieving the above object, technical scheme is as follows:
A kind of intelligent probe card pin pressure control system, is arranged including board internal control unit, test program
The pressure detection of unit, test program performance element, pin arranges unit and pin pressure detection performance element；Described machine
Platform internal control unit also includes that parameter adaptation module between program, described adaptation module include that data extract son
Module, judge submodule and process submodule；Data are extracted submodule and currently need to be carried out for extracting respectively
The described test program of test program arranges unit and pin pressure detects the OD value arranging in unit；Judge son
Module is for the OD value whether phase judging described test program and arranging unit and pin pressure detection arranges in unit
With, obtain judged result；The pressure detection of described pin, according to described judged result, is arranged list by process submodule
The OD value that the OD value of unit is set to arrange unit with described test program is identical.
Preferably, described control system also includes alarm unit, and described board internal control unit is according to sentencing
What disconnected submodule drew differs result, controls described alarm unit and reports to the police.
Preferably, described board internal control unit and test program arrange unit by host computer+slave computer
Framework is constituted；Wherein, slave computer is Programmable Logic Controller.
For achieving the above object, present invention additionally comprises another technical scheme as follows:
A kind of control method using above-mentioned intelligent probe card pin pressure control system, it comprises the steps:
Step S1: before starting described test program performance element, described data are extracted submodule and are divided
Take indescribably and currently need to carry out the described test program of test program unit is set and pin pressure detection is arranged in unit
OD value；
Step S2: judge that submodule judges that described test program arranges unit and pin pressure detection arranges list
OD value in unit is the most identical, if identical, notifies that described test program performance element can start institute
State test program；If it is different, perform step S3；
Step S3: the OD value that the pressure detection of described pin arranges unit is set to by described process submodule
The OD value arranging unit with described test program is identical.
Preferably, described step S3 specifically includes following steps:
Step S31: described process submodule starts alert program；
Step S32: the OD value that the pressure detection of described pin arranges unit is set to and described test program
The OD value arranging unit is identical；
Step S33: notify that described test program performance element can start described test program.
From technique scheme it can be seen that the present invention is by parameter adaptation module (OD between increase program
Constrain function), it is achieved that the accuracy of board test execution unit acquired results data.
Accompanying drawing explanation
Fig. 1 show the structural representation of prior art middle probe card pin pressure control system
Fig. 2 show the structural representation of intelligent probe card pin pressure control system in the embodiment of the present invention
Fig. 3 show the schematic flow sheet of intelligent probe card pin pressure control method in the embodiment of the present invention
Detailed description of the invention
Below in conjunction with the accompanying drawings, the detailed description of the invention of the present invention is described in further detail.
Refer to Fig. 2, Fig. 2 and show the knot of intelligent probe card pin pressure control system in the embodiment of the present invention
Structure schematic diagram.As it can be seen, in embodiments of the present invention, same as the prior art, this intelligence is visited
Pin card pin pressure control system, arranges unit, test program including board internal control unit, test program
The pressure detection of performance element, pin arranges unit and pin pressure detection performance element.
Unlike the prior art, this board internal control unit can also include parameter adaptation between program
Module, this adaptation module includes that data are extracted submodule, judged submodule and process submodule；Data carry
Take submodule and unit and pin pressure detection are set for extracting the test program that currently need to carry out test program respectively
OD value in unit is set；Judge that submodule is used for judging that test program arranges unit and pin pressure detection sets
Put the OD value in unit the most identical, obtain judged result；This process submodule can be according to judging knot
Really, the OD value that the OD value that pin presses detection to arrange unit is set to arrange with test program unit is identical.
In further embodiments, this board internal control unit can be according to judging that what submodule drew differs
Output control alarm unit report to the police, i.e. notify this board of engineer cannot proper testing, need engineer true
Recognize；The pressure detection of engineer inspection's pin arranges the OD value of unit and test program arranges the OD value of unit and is
No identical；If really different, pin pressure detection is arranged the OD value of unit by this board internal control unit
The OD value being arranged to arrange unit with test program is identical.
Confirm pin pressure detection arrange the OD value of unit arrange with test program the OD value of unit identical after,
Can notify that test program performance element starts ensuing test program, so can guarantee that test result
Accuracy.
It should be noted that the probe card pin pressure control system that the present invention proposes, can set up at current machine
Some control systems that platform uses are as exploitation basis.Such as, board internal control unit and test program
Arrange unit to be made up of host computer+slave computer framework；Wherein, slave computer is Programmable Logic Controller.
In embodiments of the present invention, between program, parameter adaptation module can call the fwk literary composition of inside at board
In part, increasing OD parameter adaptation (OD constrain) function, in test process, board is permissible
The fwk file directly invoking inside is tested.Wherein, test program is divided into pin pressure detection performance element
With the test program performance element of board, only in said two units arrange OD value identical time,
Board just can enter proper testing, otherwise there will be alarm signal, needs to stop test, and engineer needs
Check concrete reason, thus do not result in the exception of data.
Refer to Fig. 3, Fig. 3 and show the stream of intelligent probe card pin pressure control method in the embodiment of the present invention
Journey schematic diagram.As it can be seen, the method specifically includes following steps:
Step S1: before starting test program performance element or during performing test program,
Data are extracted submodule and are extracted respectively and currently need to carry out the test program of test program and arrange unit and pin pressure is visited
Survey and the OD value in unit is set.Generally, test program arranges unit and pin pressure detection is arranged in unit
OD value is to be safeguarded by different engineers, is particularly easy to differ.
Step S2: judge that submodule judges that test program arranges unit and pin pressure detection is arranged in unit
OD value is the most identical, if identical, notice test program performance element can start test program；As
Fruit is different, performs step S3；
Step S3: the OD value that the pressure detection of described pin arranges unit is set to by described process submodule
The OD value arranging unit with described test program is identical.
In an embodiment of the present invention, step S3 can specifically include following steps:
Step S31: described process submodule starts alert program；
Step S32: the OD value that the pressure detection of described pin arranges unit is set to and described test program
The OD value arranging unit is identical；
Step 33: notify that described test program performance element can start described test program.
It should be noted that by ensureing that test program is normally carried out increased OD parameter adaptation (OD
Constrain) function, it is preferred that be to complete before starting test program performance element；Or, holding
During row test program, it is also possible to the pressure detection of periodic detection pin arranges OD value and the test program of unit
The OD value arranging unit is the most identical, with get rid of pin pressure detection arrange in unit OD value unknowable
In the case of change, board cannot the situation of proper testing.
The above-described the preferred embodiments of the present invention that are only, described embodiment also is not used to limit the present invention
Scope of patent protection, the equivalent structure that the description of the most every utilization present invention and accompanying drawing content are made
Change, in like manner should be included in protection scope of the present invention.
Claims (5)
1. an intelligent probe card pin pressure control system, including: board internal control unit, test
Program arranges unit, test program performance element, pin pressure detection arranges unit and pin pressure detects performance element；
It is characterized in that, described board internal control unit also includes parameter adaptation module between program, described adaptation
Module includes:
Data extract submodule, set for extracting the described test program that currently need to carry out test program respectively
Put unit and pin pressure detects the OD value arranging in unit；
Judge submodule, it is judged that described test program arranges unit and pin pressure detects the OD arranging in unit
It is worth the most identical, obtains judged result；
Process submodule, according to described judged result, the OD value that the pressure detection of described pin arranges unit is set
The OD value being set to arrange unit with described test program is identical.
2. intelligent probe card pin pressure control system as claimed in claim 1, it is characterised in that also wrap
Including alarm unit, described board internal control unit differs result according to what described judgement submodule drew,
Control described alarm unit to report to the police.
3. intelligent probe card pin pressure control system as claimed in claim 1, it is characterised in that described
Board internal control unit and test program arrange unit and are made up of host computer+slave computer framework；Wherein,
Slave computer is Programmable Logic Controller.
4. use a control method for intelligent probe card pin pressure control system described in claim 1, its
It is characterised by, comprises the steps:
Step S1: before starting described test program performance element, described data extract submodule respectively
Extract and currently need to carry out the described test program of test program unit is set and pin pressure detection is arranged in unit
OD value；
Step S2: judge submodule, it is judged that described test program arranges unit and pin pressure detection arranges list
OD value in unit is the most identical, if identical, notifies that described test program performance element can start institute
State test program；If it is different, perform step S3；
Step S3: described process submodule the pressure detection of described pin is arranged the OD value of unit be set to and
The OD value that described test program arranges unit is identical.
5. control method as claimed in claim 4, it is characterised in that described step S3 specifically includes
Following steps:
Step S31: described process submodule starts alert program；
Step S32: be set to set with described test program by the OD value that the pressure detection of described pin arranges unit
The OD value putting unit is identical；
Step S33: notify that described test program performance element can start described test program.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410118188.XA CN103855049B (en) | 2014-03-27 | 2014-03-27 | A kind of intelligent probe card pin pressure control system and control method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410118188.XA CN103855049B (en) | 2014-03-27 | 2014-03-27 | A kind of intelligent probe card pin pressure control system and control method |
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| CN103855049A CN103855049A (en) | 2014-06-11 |
| CN103855049B true CN103855049B (en) | 2016-08-17 |
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Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN105699834A (en) * | 2016-01-15 | 2016-06-22 | 上海华虹宏力半导体制造有限公司 | Probe card detection method |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6198273B1 (en) * | 1996-11-12 | 2001-03-06 | Advantest Corporation | IC tester simultaneously testing plural ICS |
| CN101069277A (en) * | 2004-12-24 | 2007-11-07 | 飞而康公司 | A probe card manufacturing method including sensing probe and the probe card, probe card inspection system |
| CN103135022A (en) * | 2011-11-23 | 2013-06-05 | 上海华虹Nec电子有限公司 | Method for automatically detecting contact characteristic of probe card in test program |
| CN103207293A (en) * | 2012-01-12 | 2013-07-17 | 旺矽科技股份有限公司 | Probe needle pressure correction method and correction equipment thereof |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6917102B2 (en) * | 2002-10-10 | 2005-07-12 | Advantest Corp. | Contact structure and production method thereof and probe contact assembly using same |
-
2014
- 2014-03-27 CN CN201410118188.XA patent/CN103855049B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6198273B1 (en) * | 1996-11-12 | 2001-03-06 | Advantest Corporation | IC tester simultaneously testing plural ICS |
| CN101069277A (en) * | 2004-12-24 | 2007-11-07 | 飞而康公司 | A probe card manufacturing method including sensing probe and the probe card, probe card inspection system |
| CN103135022A (en) * | 2011-11-23 | 2013-06-05 | 上海华虹Nec电子有限公司 | Method for automatically detecting contact characteristic of probe card in test program |
| CN103207293A (en) * | 2012-01-12 | 2013-07-17 | 旺矽科技股份有限公司 | Probe needle pressure correction method and correction equipment thereof |
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| CN103855049A (en) | 2014-06-11 |
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