CN103846815A - Dedusting draught cupboard - Google Patents
Dedusting draught cupboard Download PDFInfo
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- CN103846815A CN103846815A CN201310502758.0A CN201310502758A CN103846815A CN 103846815 A CN103846815 A CN 103846815A CN 201310502758 A CN201310502758 A CN 201310502758A CN 103846815 A CN103846815 A CN 103846815A
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- silicon chip
- conveyer belt
- dedusting wind
- wind cupboard
- cupboard
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Abstract
The invention relates to a dedusting draught cupboard for manufacturing a gettering source on the back side of a silicon wafer through dry-process sand blasting to eliminate oxidized mist on a silicon polished surface. The dedusting draught cupboard is a closed draught cupboard, is arranged above a silicon wafer conveyer belt and downwards extends to the upper surface of the silicon wafer conveyer belt from the upside of the silicon wafer conveyer belt, and a silicon carbide nozzle is arranged in the dedusting draught cupboard. The dedusting draught cupboard is arranged outside the silicon carbide nozzle to enable the dedusting draught cupboard to extend to the upper surface of the silicon wafer conveyer belt from the upside of the silicon carbide nozzle, dust generated by sand blasting can be effectively controlled, and dust flying is avoided.
Description
Technical field
The present invention relates to IC grade silicon polished silicon wafer technical field, particularly relate to and a kind ofly manufacture gettering source to eliminate the dedusting wind cupboard of silicon polishing surface oxidation mist for silicon chip back side dry abrasive blasting.
Background technology
IC grade silicon polished silicon wafer is to manufacture the core material of extensive and super large-scale integration, is mainly used in the high-tech area such as high-speed computer, Aero-Space.The microdefect " oxidation fog " of silicon single-crystal polishing plate is perplexing the quality of high reliability device silicon single-crystal polishing plate always.For a long time, people adopt several different methods to eliminate the oxidation fog on silicon polished surface.The method adopting is mainly the mode by gettering, has two kinds of intrinsic gettering and outer getterings.Intrinsic gettering is mainly to utilize the oxygen precipitation in silicon chip to produce the oxidation fog on elimination silicon polishing surface, gettering district, and because of its apparatus expensive, complex process, requires the interior oxygen precipitation profile of silicon chip even, wayward, and poor repeatability, therefore applies less at home and abroad.Outer gettering is mainly to utilize external means to form damage or stress at silicon chip back side, concrete mode has at the damage of silicon chip back side grinder belt, damage from laser or LPCVD growing polycrystalline silicon layer etc., or adopts the methods such as irradiation, heating pretreatment, the soft damage of silicon chip back side to eliminate the oxidation fog of silicon chip.
Adopting dry abrasive blasting to manufacture the oxidation fog of eliminating silicon polishing surface in gettering source to the back side of silicon chip is emergingly in recent years a kind ofly can effectively eliminate the oxidation fog on silicon polished surface, while technique advantages of simple again, invest little, workable, easy to implement outer impurity absorption method.It is to damage gettering principle according to the back of the body, at silicon chip back side dry abrasive blasting, produce lattice damage or distortion, manufacture gettering source, by control and modulation to sand size, blasting pressure, an operation pitch of fins, time course, at the uniform stacking fault density of silicon chip back side manufacture, produce 6-38 × 104/cm at silicon chip back side
2damage fault, induce heap diamicton mistake, make silicon chip there is extrinsic gettering ability.At high temperature, the impurity of silicon chip can be shifted, and transfer to the non-critical position at silicon chip the inside and the back side, in the making integrated circuit region on polished silicon wafer surface, form the clean area of the several um of thickness, thereby the high-quality that obtains nothing " oxidation fog " is silicon polished, guarantees that IC product circuit characteristic is unaffected.
In the prior art, adopt dry abrasive blasting to manufacture gettering source to eliminate the oxidation fog on silicon polishing surface to the back side of silicon chip, normally by above transporting the conveyer belt of silicon chip, diamond dust nozzle being set, spray diamond dust by diamond dust nozzle to the silicon chip on conveyer belt 2 and realize.One fan housing 1 wherein can be set on diamond dust nozzle, and for exhausting-dusting, the dust flying upward during to sandblast is removed, and as shown in Figure 1, Fig. 1 prior art arranges the schematic diagram of fan housing above conveyer belt.Although set up fan housing 1 above diamond dust nozzle, can play certain dust removing effects, but owing to existing larger unlimited space between fan housing 1 and conveyer belt 2, a large amount of dust that produce in the time that diamond dust sprays still have partly and fly upward and enter atmosphere, cause environmental pollution.
Summary of the invention
The object of the invention is to, overcome the defect that prior art exists, and provide a kind of dedusting wind cupboard of new structure, technical problem to be solved is to make it by dedusting wind cupboard is set at diamond dust nozzle outward, make dedusting wind cupboard be extended to the upper surface of silicon chip conveyer belt by the top of diamond dust nozzle, the dust producing can be to sandblast time control effectively, and avoids dust from flying, is very suitable for practicality.
The object of the invention to solve the technical problems realizes by the following technical solutions.A kind of dedusting wind cupboard proposing according to the present invention, manufacture gettering source to eliminate silicon polishing surface oxidation mist for silicon chip back side dry abrasive blasting, wherein said dedusting wind cupboard is closed wind cupboard, be arranged at the top of silicon chip conveyer belt, and extended downward the upper surface of described silicon chip conveyer belt by the top of described silicon chip conveyer belt; In described dedusting wind cupboard, be provided with diamond dust nozzle.
The object of the invention to solve the technical problems also can be applied to the following technical measures to achieve further.
Aforesaid dedusting wind cupboard, is wherein provided with through hole at the top of described dedusting wind cupboard, and described dedusting wind cupboard passes through pipeline communication by described through hole and dust collecting.
Aforesaid dedusting wind cupboard, is wherein provided with observable silicon chip back side diamond dust on just to the one side of described diamond dust nozzle at described dedusting wind cupboard and sprays the organic glass door of hacking situation.
The present invention compared with prior art has obvious advantage and beneficial effect.By technique scheme, a kind of dedusting wind of the present invention cupboard at least has following advantages and beneficial effect: the present invention is by arranging dedusting wind cupboard outward at diamond dust nozzle, make dedusting wind cupboard be extended to the upper surface of silicon chip conveyer belt by the top of diamond dust nozzle, the dust producing can be to sandblast time control effectively, and avoids dust from flying.
Above-mentioned explanation is only the general introduction of technical solution of the present invention, in order to better understand technological means of the present invention, and can be implemented according to the content of description, and for above and other object of the present invention, feature and advantage can be become apparent, below especially exemplified by preferred embodiment, and coordinate accompanying drawing, be described in detail as follows.
Brief description of the drawings
Fig. 1 prior art arranges the schematic diagram of fan housing above conveyer belt.
Fig. 2 is the schematic diagram that the present invention arranges dedusting wind cupboard on conveyer belt.
Detailed description of the invention
Technological means and effect of taking for reaching predetermined goal of the invention for further setting forth the present invention, below in conjunction with accompanying drawing and preferred embodiment, to a kind of its detailed description of the invention of dedusting wind cupboard, structure, feature and effect thereof of proposing according to the present invention, be described in detail as follows.
Relevant aforementioned and other technology contents of the present invention, Characteristic can be known and present in the following detailed description coordinating with reference to graphic preferred embodiment.By the explanation of detailed description of the invention, should obtain one more deeply and concrete understanding for technological means and effect of reaching predetermined object and taking to the present invention, but appended graphic be only to provide with reference to the use of explanation, be not used for the present invention to be limited.
Referring to shown in Fig. 2, is the schematic diagram that the present invention arranges dedusting wind cupboard on conveyer belt.Dedusting wind cupboard 3 of the present invention is closed wind cupboard, manufactures gettering source to eliminate silicon polishing surface oxidation mist for silicon chip back side dry abrasive blasting.Wherein dedusting wind cupboard 3 is arranged at the top of silicon chip conveyer belt 4, and is extended downward the upper surface of silicon chip conveyer belt 4 by the top of silicon chip conveyer belt 4, is provided with diamond dust nozzle (not shown) in dedusting wind cupboard 3.
As shown in Figure 2, be provided with through hole 5 at the top of dedusting wind cupboard 3, dedusting wind cupboard 3 can pass through pipeline communication with dust collecting (not shown) by through hole 5.Can be provided with observable silicon chip back side diamond dust on just to the one side of diamond dust nozzle 1 at dedusting wind cupboard 3 and spray the organic glass door 6 of hacking situation.
The present invention is by arranging dedusting wind cupboard 3 outward at diamond dust nozzle, with respect to diamond dust nozzle is set above silicon chip conveyer belt, or above diamond dust nozzle, add the mode of a fan housing, the dust producing can make diamond dust spray time is effectively controlled, and avoids dust from flying again.
The above, it is only preferred embodiment of the present invention, not the present invention is done to any pro forma restriction, although the present invention discloses as above with preferred embodiment, but not in order to limit the present invention, any those skilled in the art, do not departing within the scope of technical solution of the present invention, when can utilizing the technology contents of above-mentioned announcement to make a little change or being modified to the equivalent embodiment of equivalent variations, in every case be not depart from technical solution of the present invention content, any simple modification of above embodiment being done according to technical spirit of the present invention, equivalent variations and modification, all still belong in the scope of technical solution of the present invention.
Claims (3)
1. a dedusting wind cupboard, manufacture gettering source to eliminate silicon polishing surface oxidation mist for silicon chip back side dry abrasive blasting, it is characterized in that: described dedusting wind cupboard is closed wind cupboard, be arranged at the top of silicon chip conveyer belt, and extended downward the upper surface of described silicon chip conveyer belt by the top of described silicon chip conveyer belt; In described dedusting wind cupboard, be provided with diamond dust nozzle.
2. dedusting wind cupboard according to claim 1, is characterized in that being wherein provided with through hole at the top of described dedusting wind cupboard, and described dedusting wind cupboard passes through pipeline communication by described through hole and dust collecting.
3. dedusting wind cupboard according to claim 2, is characterized in that being wherein provided with observable silicon chip back side diamond dust at described dedusting wind cupboard on just to the one side of described diamond dust nozzle sprays the organic glass door of hacking situation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310502758.0A CN103846815A (en) | 2013-10-23 | 2013-10-23 | Dedusting draught cupboard |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310502758.0A CN103846815A (en) | 2013-10-23 | 2013-10-23 | Dedusting draught cupboard |
Publications (1)
| Publication Number | Publication Date |
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| CN103846815A true CN103846815A (en) | 2014-06-11 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310502758.0A Pending CN103846815A (en) | 2013-10-23 | 2013-10-23 | Dedusting draught cupboard |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09323263A (en) * | 1996-06-03 | 1997-12-16 | Fuji Seisakusho:Kk | Blasting machine |
| CN201046550Y (en) * | 2007-06-28 | 2008-04-16 | 上海奇谋能源技术开发有限公司 | Sandblasting retracting device for reclaiming waste and old circuit board copper |
| CN102216032A (en) * | 2009-09-11 | 2011-10-12 | 新东工业株式会社 | Apparatus for recovering abrasives, apparatus for blasting process comprising the apparatus for recovering abrasives and method of blasting process |
| CN202448048U (en) * | 2011-12-28 | 2012-09-26 | 赵斌 | Fully-automatic multi-station sand-blasting flow line |
| CN202591020U (en) * | 2012-05-31 | 2012-12-12 | 天津尚达表面处理有限公司 | Full-automatic coating production line |
| CN203592408U (en) * | 2013-10-23 | 2014-05-14 | 洛阳市鼎晶电子材料有限公司 | Dust removing wind hood |
-
2013
- 2013-10-23 CN CN201310502758.0A patent/CN103846815A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09323263A (en) * | 1996-06-03 | 1997-12-16 | Fuji Seisakusho:Kk | Blasting machine |
| CN201046550Y (en) * | 2007-06-28 | 2008-04-16 | 上海奇谋能源技术开发有限公司 | Sandblasting retracting device for reclaiming waste and old circuit board copper |
| CN102216032A (en) * | 2009-09-11 | 2011-10-12 | 新东工业株式会社 | Apparatus for recovering abrasives, apparatus for blasting process comprising the apparatus for recovering abrasives and method of blasting process |
| CN202448048U (en) * | 2011-12-28 | 2012-09-26 | 赵斌 | Fully-automatic multi-station sand-blasting flow line |
| CN202591020U (en) * | 2012-05-31 | 2012-12-12 | 天津尚达表面处理有限公司 | Full-automatic coating production line |
| CN203592408U (en) * | 2013-10-23 | 2014-05-14 | 洛阳市鼎晶电子材料有限公司 | Dust removing wind hood |
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Application publication date: 20140611 |