CN103813702B - Double-layer staggered orthogonal tangent circle ring and the sub- circle ring array electromagnetic shielding optical window of inscribe - Google Patents
Double-layer staggered orthogonal tangent circle ring and the sub- circle ring array electromagnetic shielding optical window of inscribe Download PDFInfo
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- CN103813702B CN103813702B CN201410052268.XA CN201410052268A CN103813702B CN 103813702 B CN103813702 B CN 103813702B CN 201410052268 A CN201410052268 A CN 201410052268A CN 103813702 B CN103813702 B CN 103813702B
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Abstract
Double-layer staggered orthogonal tangent circle ring and the sub- circle ring array electromagnetic shielding optical window of inscribe belong to electromangnetic spectrum field, electromagnetic shielding optical window is staggered by the rotation of double layer of metal grid and loads on optical window both sides and constitute, every layer of metallic mesh is constituted by the metal ring of the circumscribed connection of same diameter by orthogonal arrangement distribution contiguity arrangement, has the sub- annulus connected with the annulus inscribe in each annulus；Adjacent annulus junction and basic annulus substantially connect sub- annulus junction with its inscribe, the metal reliably electrically connected between overlapping or setting guarantee metal ring tangent point by lines, it is ensured that all annulus are interconnected conductive.By the selection of double-deck grid alternate angle, metallic mesh structure of the invention can significantly reduce the inhomogeneities of grid Advanced Diffraction light distribution, and the spuious light distribution for causing diffraction is more uniform, smaller to Imaging；Suitable substrate thickness is chosen, good electromagnetic shielding efficiency can be obtained.
Description
Technical field
The invention belongs to optical clear part electromagnetic shielding field, more particularly to a kind of double-layer staggered orthogonal tangent circle ring and interior
Cut sub- circle ring array electromagnetic shielding optical window.
Background technology
With the increase of the broadening and intensity of electromagnetic wave application frequency spectrum, to space flight and aviation equipment, advanced optical instrument, communication
The requirement more and more higher of the electromagnetic shielding optical window of the fields such as equipment, medical diagnostic equipment and secured facilities application, mainly requires
While optical window has superpower broadband electromagnetic shielding capability, also with high light transmittance, to optical imagery, observation, visit
The influence of survey is the smaller the better.Such as, in space flight and aviation equipment field aircraft optical window, it is necessary to high-quality is realized inside and outside cabin
Electromagnetic signal is isolated, on the one hand shielding external electromagnetic interference and harmful electromagnetic signal, in order to avoid cause cabin inner electronic equipment to fail, one
Electromagnetic signal appears optical window and causes electromagnetic leakage when aspect prevents cabin inner electronic equipment from working, but the translucency of optical window is that it is indispensable
Function, electromagnetic shielding is carried out to optical window should as far as possible reduce influence to its transparency, not influence as far as possible particularly
Optical detection or optical imagery function；Similar, the optical window of advanced optical instrument will also have light transmittance as high as possible and use up
Image quality that may be low influences, to realize the detection and measurement of high-quality, while to prevent electromagnetic interference to instrument internal light
The influence of electric explorer part；For Party and government offices, military commanding place, important R＆D institution secrecy Architectural Equipment, it is necessary to right
The glass pane in its house carries out design of Electromagnetic Shielding, to prevent the electronic equipment work such as indoor electric brain while daylighting is ensured
Important information causes to divulge a secret in electromagnetic radiation form to propagation outside window when making；Medical electric Magnetic isolation room optical window will ensure interior
The electromagnetic wave overwhelming majority is shielded and prevents field operation personnel from being damaged health, etc. by electromagenetic wave radiation for a long time.At present this
The electromagnetic shielding of class optical window is mainly using transparent conductive film, metal inducement transmission-type multi-layer film structure, the frequency selection of band resistance type
Surface and the metallic mesh with the millimeter submillimeter cycle etc..
Transparent conductive film is a kind of transparent metal oxide film with tin indium oxide as main material, and being commonly applied to can
See the transparent occasion of optical band, transmission region wider can not be taken into account, though with micro-wave screening wave band wider but shielding
It is indifferent.Metal inducement transmission-type multi-layer film structure is realized to electromagnetism using multilayer thin metal film and deielectric-coating composite construction
The shielding of ripple, stronger to low frequency microwave screening ability, transmission region is mainly visible ray and ultraviolet light, but light transmittance is not high.Frequently
Rate selection surface band logical or bandstop filter function are realized using periodicity resonant element structure, due to its metal coverage rate compared with
Height, interference electromagnetic wave that can well beyond reflective operation frequency band, but optics light transmittance is relatively low, reduces optical detection
Image quality, difficulty is brought to optical image security, pattern-recognition, target search and tracking.In sum, while meeting light
The broadband high transmission rate and wide-band of window are electromagnetically shielded two requirements, and above-mentioned each technical scheme exists substantially not enough.Compare
For, the metallic mesh with the millimeter submillimeter cycle, because its period ratio interference electromagnetic wavelength is much smaller, it is possible to achieve stronger
Low frequency broadband electromagnetic shielding；And the metallic mesh cycle is much larger than optical wavelength, it is ensured that the light transmittance of optical region.
Therefore, the metallic mesh in millimeter submillimeter cycle has good electrically conducting transparent performance, can meet optical window to high transmission rate and width
The requirement of frequency range electromagnetic shielding, is widely used in optical window electromangnetic spectrum field：
1. patent 03135313.5 " a kind of electromagnetic shielding observation window " substance or multi-metal silk screen and based semiconductor
Quantum well structure is combined into electromagnetic armouring structure, the shield effectiveness within achievable 10GHz more than 50dB, and the structure is in visible ray
The light transmittance in highly transmissive region reaches more than 50%.
2. patent 93242068.0 " electromagnetic shielding glass " presss from both sides conductive metal mesh between layer glass, is used in glass outer side
Conductive transparent film is allowed to be bonded in constitute electromagnetic armouring structure on window frame of metal, and the structure has certain daylighting.
3. patent 94231862.5 " without Moire fringe electromagnetic shielding observation window " is using by the different wire netting of two number of layers
It is placed in parallel, and their warps or parallel have certain angle, and Moire fringe phenomenon is overcome to reach, and realize apparent regarding
It is wild.
4. patent 02157954.7 " high shielding effect Tempest glass " respectively has a strata carbonic ether in woven wire both sides
Film, film outside respectively attaches one layer of glass, and last hot pressing forms electromagnetic armouring structure, and the structure reaches 60% in light transmittance
In the case of, with stronger shield effectiveness.
5. patent 200610084149.8 " electromagnetic shielded film and its manufacture method " describes one kind by photoetching process
The high transparency electromagnetic wave shield film with metal mesh pattern for being formed, the main purpose of the invention is to reduce metal consumption
And overcome the environmental pollution caused using solidification glue between metal level and film substrate.
6. United States Patent (USP) US4871220 " Short wavelength pass filter having a metal mesh
On a semiconducting substrate " describe a kind of metallic mesh with square structure, for realizing optical window
Electromagnetism interference performance.
7. patent 201010239355.8 " a kind of electromagnetic shielding conformal optical window with longitude and latitude shape grid structure " description
It is a kind of by metallic mesh technology and conformal optics window setting technique realize it is a kind of with the conformal of longitude and latitude shape metallic mesh structure
Electromagnetic shielding optical window, mainly solves the Structure Designing Problem of conformal optics window metallic mesh, improves the electromagnetism of conformal optics window
Shielding properties.
8. patent 200610010066.4 " having the electromagnetic shielding optical window of annulus metallic mesh structure " describes one kind
Metallic mesh unit with annulus profile, the electro-magnetic screen function for realizing optical window；Compared to individual layer grid metallic mesh,
Light transmittance and screening ability are improved, and the veiling glare that level diffraction high is caused also has obtained certain homogenizing.
9. patent 200810063988.0 " a kind of electromagnetic shielding optical window with double-layer pane metallic mesh structure " is retouched
One kind is stated and optical window or transparent substrates both sides has been placed in parallel in by structural parameters identical grid metallic mesh or woven wire
The electromagnetic shielding optical window of composition, while light transmittance is not reduced, is greatly improved electromagnetic shielding efficiency.
10. patent 200810063987.6 " a kind of electromagnetic shielding optical window with double-layer circular ring metallic mesh structure " is retouched
Stated it is a kind of load on the electromagnetic shielding optical window that optical window both sides are constituted by two-layer annulus metallic mesh, solve high transmission rate and
The problem that forceful electric power magnetic shield efficiency can not be taken into account simultaneously.
Hub-the spoke based on annulus unit of 11. Battelle research institutes of U.S. Jennifer I.Halman et al. exploitation
Perceptual metallic mesh (Jennifer I.Halman etc., " Predicted and of type structure and many annulus overlapping configurations
Measured transmission and diffraction by a metallic mesh coating " .Proc.SPIE,
2009,7302：73020Y-1-73020Y-8), and think that the structure may be such that grid level Diffraction fringe distribution high homogenizing, realize low
Secondary lobe, it is favourable to being imaged.
The Ian B.Murray of 12. Exotic Electro-Optics companies of the U.S., Arizona, USA university
Victor Densmore and Vaibhav Bora et al. is reported to hub-spoke type arrangement and many annulus overlapping configurations jointly
Perceptual grid introduces influence (the Ian B.Murray, Victor to diffraction characteristic after stochastic parameter distribution is designed
Densmore, Vaibhav Bora et al., " Numerical comparision ofgrid pattern diffraction
Effects through measurement and modeling with OptiScan software ", Proc.SPIE,
2011,8016：80160U-1-80160U-15), it is indicated that each annulus spacing and diameter random value within the specific limits, be conducive to
Improve the uniformity of level Diffraction fringe distribution high.
Above-mentioned each scheme is due to using metallic mesh (or woven wire) as the core devices of shielding, it is possible to achieve preferably
Effectiveness and certain light transmittance.But using metallic mesh (or woven wire) as electromagnetic armouring structure, just not
It is evitable to be influenceed in optical region diffraction by grid.Because the cycle of metallic mesh is in millimeter to submillimeter magnitude, it is
Light transmittance higher is realized, its metal wire width is general in micron to sub-micrometer scale, and such structural parameters are in optics ripple
Section has very strong diffraction effect.Incident light overwhelming majority energy is transmitted by metallic mesh, and transmissive portion includes Zero-order diffractive
Light and level diffraction light high, generally, zero level time diffraction light is the useful information for being imaged and observing, level diffraction light high then structure
Into veiling glare, interference is produced to being imaged and detecting.Therefore, the proportion shared by zero level time diffraction light should be as far as possible improved, meanwhile,
On the premise of level diffraction light high unavoidably occurs, level diffraction light high distribution is made as far as possible than more uniform, what it was formed
Veiling glare turns into than more uniform background or noise.
Current metallic mesh is mainly traditional grid grid structure, such as the structure (patent that above-mentioned patent 1-6 is mainly used
7 structure, due to processing on curved surface, is a species grid structure), grid grid structure transmittancy is deposited with screening ability
In intrinsic contradiction, it is difficult to while taking into account the level diffraction high of high transmission rate and forceful electric power magnetic shield efficiency, particularly grid grid
Energy is concentrated mainly on mutually perpendicular two axle, and image quality is had a certain impact, or even in high imaging quality requirement
Occasion is difficult to apply.Change grid diffraction characteristic is generally required and changes its architectural feature, " the tool of above-mentioned patent 200610010066.4
Having the electromagnetic shielding optical window of annulus metallic mesh structure " proposition metal ring is built into annulus metallic mesh, the side of improving
The shortcoming of lattice metallic mesh level diffraction energy integrated distribution high, it is possible to alleviate the contradiction of its transmittancy and screening ability.
In above-mentioned document 11 and 12, Jennifer I.Halman et al. and Ian B.Murray et al. are also proposed based on annulus list
The metallic mesh structure of unit improves the uniformity of level Diffraction fringe distribution high, but Jennifer I.Halman et al. research
It is monocycle circle arrangement structure, and orientation determines, its effect and patent to senior diffraction of regulation
200610010066.4 structures for proposing quite, although and the research of Ian B.Murray et al. further, propose random friendship
Folded circular ring structure, makes circle diameter and spacing random distribution value within the specific limits, and realization further improves level diffraction high
Distributing homogeneity, but the random distribution of circle diameter and spacing changes the uniformity that mesh is distributed, will infringement electromagnetic shielding effect
Rate.
With the increasingly complexity of electromagnetic environment, exist to being electromagnetically shielded the requirement of transmittancy and electromagnetic shielding capability of optical window
Improve constantly, especially equip field and advanced optical instrument field in Aero-Space, itd is required that optical window reaches 95% even
While light transmittance higher, also influenceed with extremely low image quality, 30dB is realized in the microwave frequency range less than 20GHz
Shield effectiveness above, this causes that existing technology is difficult to.Patent 200810063988.0 and patent
200810063987.6 employ the both sides composition that double-level-metal grid is placed in parallel in optical window transparent substrate or substrate, two-layer
Metallic mesh has identical unit profile and structural parameters, and by optimizing the spacing of two-layer grid, realization does not reduce light transmittance
While, electromagnetic shielding efficiency is greatly improved.But this double-deck grid structure spuious light distribution of level diffraction high still with
Light transmittance identical individual layer grid quite, not exclusively meet the fields such as following Aero-Space equipment and advanced optical instrument to it is low into
As the requirement of quality influence.
The content of the invention
It is an object of the invention to overcome the shortcomings of above-mentioned existing optical window electromangnetic spectrum scheme, especially for existing
With the presence of the veiling glare that individual layer grid metallic mesh, individual layer annulus grid, double-layer pane and annulus grid level diffraction high are caused
The problem of Relatively centralized, a kind of double-layer staggered orthogonal tangent circle ring of research and development and the sub- circle ring array electromagnetic shielding optical window of inscribe are distributed,
The purpose for realizing that the depth homogenizing and extremely low image quality of level diffraction high influence is reached, while also having preferable electromagnetic screen
Cover efficiency.
The technical solution adopted by the present invention is：Using the double-layer staggered orthogonal tangent circle ring of one kind and the sub- circle ring array electricity of inscribe
Magnetic screen optical window, double layer of metal grid is placed in parallel in the both sides of optical window transparent substrate or substrate, and double layer of metal grid has phase
Same unit profile and structural parameters, every layer of metallic mesh are pressing two dimension just by the metal ring of same diameter as basic annulus
Contiguity arranged evenly arrangement is handed over to constitute and load on optical window transparent substrate or substrate surface, and the adjacent circumscribed connection of basic annulus；
It is characterized in that：The rotation of double layer of metal grid is staggered, and is provided with it in each basic annulus in single-layer metal grid
The sub- annulus of connection, metal is cut, the sub- annulus that described basic annulus is connected with its inscribe collectively constitutes two-dimentional grid structure
Elementary cell；A diameter of millimeter of the sub- annulus that described basic annulus is connected with its inscribe is to submillimeter magnitude, described base
The metal wire width of the sub- annulus that this annulus is connected with its inscribe is micron to sub-micrometer scale；Described rotation is staggered
Refer to：Have when the metallic mesh of transparent substrate or substrate both sides presses asymmetric placement, between double layer of metal grid and rotate against,
Relative rotation angle is alternate angle；Described circumscribed connection includes：1. two annulus are circumscribed and circumscribed point of contact at set two annulus
The connection metal of connection, 2. two annulus are in seamless overlapping configuration in junction lines, and 3. two annulus are in seamless in junction lines
While overlapping configuration, the connection metal that two annulus are connected is set at overlapping place；Described inscribe connection includes：1. two annulus
The connection metal that two annulus are connected is set at inscribe and inscribe point of contact, and 2. two annulus are in seamless overlapping knot in junction lines
Structure, 3. two annulus are while junction lines are in seamless overlapping configuration, and the connection for connecting two annulus in overlapping place's setting is golden
Category.
The sub- circle ring array electromagnetic shielding optical window of double-layer staggered orthogonal tangent circle ring and inscribe stated, each described is substantially single
Sub- annulus number is more than or equal to 2 in first, and diameter is identical or different, and the center of circle of adjacent sub- annulus and the basic annulus center of circle connect
The angle that line is constituted is arbitrarily angled, and the sub- annulus in different elementary cells is equal diameter or non-equal diameter annulus, number phase
It is same or different.
Above-mentioned double-layer staggered orthogonal tangent circle ring and the sub- circle ring array electromagnetic shielding optical window of inscribe, described elementary cell
Interior adjacent sub- annulus circumscribed connection or intersecting.
As a kind of preferred frame mode, above-mentioned double-layer staggered orthogonal tangent circle ring and the sub- circle ring array electromagnetism of inscribe
Shielding optical window, the diameter of described elementary cell neutron annulus is identical, the center of circle of adjacent sub- annulus and basic annulus circle center line connecting
The angle for being constituted is equal.Sub- annulus number in different elementary cells is identical, equal diameters.
As a kind of preferred frame mode, above-mentioned double-layer staggered orthogonal tangent circle ring and the sub- circle ring array electromagnetism of inscribe
Shielding optical window, the sub- annulus relative position in described different elementary cells is identical, and by pressing two after an elementary cell duplication
Orthogonal dimension contiguity arrangement arranged evenly constitutes individual layer two-dimensional metallic grid.
As a kind of preferred frame mode, above-mentioned double-layer staggered orthogonal tangent circle ring and the sub- circle ring array electromagnetism of inscribe
Shielding optical window, described in individual layer two-dimensional metallic grid, the sub- annulus relative position in neighboring unit cells is different, and by one
Individual elementary cell is pressed two-dimensional quadrature contiguity arrangement arranged evenly and constitutes two-dimensional metallic grid after replicating, wherein any one is substantially single
Unit rotates to an angle in two dimensional surface relative to its neighboring unit cells around itself basic annulus center of circle.
As a kind of preferred frame mode, above-mentioned double-layer staggered orthogonal tangent circle ring and the sub- circle ring array electromagnetism of inscribe
Shielding optical window, any elementary cell in described same a line rotates according to identical successively relative to previous neighboring unit cells
The angle that direction rotates is identical.
Above-mentioned double-layer staggered orthogonal tangent circle ring and the sub- circle ring array electromagnetic shielding optical window of inscribe, described basic annulus
Constituted by the good alloy of electric conductivity with sub- annulus, and alloy thickness is more than 100nm.
Above-mentioned double-layer staggered orthogonal tangent circle ring and the sub- circle ring array electromagnetic shielding optical window of inscribe, described metallic mesh
Adhesive linkage with chromium or titanium material composition between optical window transparent substrate or backing material is Nian Jie.
Above-mentioned double-layer staggered orthogonal tangent circle ring and the sub- circle ring array electromagnetic shielding optical window of inscribe, described double-level-metal
The stagger angle selection range of grid is at 1 °~25 °, 27 °~35 °, 37 °~52 °, 54 °~88 °.
Above-mentioned double-layer staggered orthogonal tangent circle ring and the sub- circle ring array electromagnetic shielding optical window of inscribe, it is characterised in that：It is attached
The transparent substrate or substrate thickness for having double-level-metal grid are less than 5mm.
Novelty of the invention and good result are：
Double layer of metal grid is placed in parallel in the both sides of optical window transparent substrate or substrate, double layer of metal grid has identical
Unit profile and structural parameters, every layer of metallic mesh is by the metal ring of same diameter as basic annulus by two-dimensional quadrature point
Cloth arrangement contiguity arrangement is constituted and loads on optical window transparent substrate or substrate surface, and the adjacent circumscribed connection of basic annulus；This hair
Bright novelty is：Double layer of metal grid rotation be staggered, be provided with each basic annulus in single-layer metal grid with
The connection of its inscribe, the sub- annulus of metal, the sub- annulus that described basic annulus is connected with its inscribe collectively constitute two-dimentional grid knot
The elementary cell of structure；A diameter of millimeter of the sub- annulus that described basic annulus is connected with its inscribe is described to submillimeter magnitude
The metal wire width of sub- annulus that is connected with its inscribe of basic annulus be micron to sub-micrometer scale；Described rotation interlocks
Arrangement refers to：Have when the metallic mesh of transparent substrate or substrate both sides presses asymmetric placement, between double layer of metal grid relative
Rotation, relative rotation angle is alternate angle；Described circumscribed connection includes：1. two annulus are circumscribed and circumscribed point of contact at set two
The connection metal of annulus connection, 2. two annulus are in seamless overlapping configuration in junction lines, and 3. two annulus are in junction lines
While seamless overlapping configuration, the connection metal that two annulus are connected is set at overlapping place；Described inscribe connection includes：1. two
The connection metal that two annulus are connected is set at annulus inscribe and inscribe point of contact, and 2. two annulus are overlapped in junction lines in seamless
Structure, 3. two annulus the connection for connecting two annulus is set at overlapping place while junction lines are in seamless overlapping configuration
Metal.The good result that novelty of the invention is produced focuses primarily upon the level diffraction energy high distribution of homogenizing metallic mesh,
There is electromagnetic shielding efficiency higher simultaneously, it is specific as follows：
For single-layer metal grid, basic annulus is distributed as basic arrangement mode and overcomes tradition well using two-dimensional quadrature
The shortcoming of the level diffraction energy integrated distribution high that grid metallic mesh is present, with good homogenizing level diffraction energy high point
The characteristic of cloth；Sub- annulus composition elementary cell is added in basic annulus, because sub- annulus number in each elementary cell,
The difference of diameter and position relationship, makes its short texture, arranges spuious, therefore level diffraction energy high is relatively low, and level high
Diffraction fringe distribution is more uniform, it is to avoid the situation of the level diffraction energy integrated distribution high existed as traditional grid metallic mesh occur；
Meanwhile, when ensureing that light transmittance is identical, it is necessary to increase the diameter of basic annulus compared with the structure of only basic circle ring array,
The level diffraction energy high of each array is reduced on the whole；Again because the level diffraction high and base of the generation of sub- circle ring array structure
The probability that the level diffraction high of this circle ring array structure is superimposed is very low, especially optimize structure and parameter after their energy compared with
Level diffraction high high is not superimposed, so as to be homogenized level diffraction energy distribution high, this is the equal of metallic mesh of the present invention
One of change the reason for level diffraction energy high is distributed；
Each elementary cell can be rotated to an angle centered on the center of circle of its basic annulus, not change metallic mesh
Aperture ratio enter without influence light transmittance, but level order of diffraction Energy distribution high can be further modulated, can be preferably
Level diffraction energy distribution high is homogenized, this is the two of the reason for metallic mesh homogenizing of the present invention level diffraction energy high is distributed.
When being used to build the double-level-metal grid with alternate angle by above-mentioned metallic mesh, because between double-level-metal grid
Substrate on light transmission influence it is very low, and ensure build double-level-metal grid total light transmittance with build before single-layer metal
, it is necessary to increase the diameter of each annulus of single-layer metal grid for building double-level-metal grid when the light transmittance of grid is identical, this
Causing the level order of diffraction Energy distribution high of the double layer of metal grid of double-level-metal grid substantially reduces, when such double layer of metal
During grid composition bilayer grid, due to being staggered by rotation, two-layer grid energy level each high higher is efficiently avoid
The superposition of diffraction time, has been homogenized level order of diffraction Energy distribution high on the whole, and this is that metallic mesh homogenizing of the present invention is senior
The three of the reason for secondary diffraction energy is distributed.
To sum up, metallic mesh structure of the invention can realize the depth homogenizing of grid level diffraction energy distribution high, and this is
Most prominent effect of the invention.In addition, for single-layer metal grid structure, sub- annulus is added in basic circular ring structure effectively
The uniformity of metal ring grid structure is improved, and elementary cell is rotated to an angle centered on the center of circle of its basic annulus
When, will not also change the uniformity of metallic mesh structure, while effectively being modulated to level order of diffraction Energy distribution high,
Effectiveness is had substantially no effect on, or even effectiveness can be improved in some preferred schemes.Particularly, when with list
During layer metallic mesh composition double-level-metal grid, the electromagnetic coupled between double-level-metal grid is very strong, is remarkably improved electromagnetic screen
Cover efficiency.
Brief description of the drawings
Fig. 1 is that a kind of preferred structure of double-layer staggered orthogonal tangent circle ring and inscribe sub- circle ring array electromagnetic shielding optical window is cutd open
Face schematic diagram.
Fig. 2 is that the basic annulus distribution of double-layer staggered orthogonal tangent circle ring and inscribe sub- circle ring array electromagnetic shielding optical window is shown
It is intended to.
Fig. 3 is to contain 2,3,4,5 elementary cell schematic diagrames of the circumscribed sub- annulus of connection of same diameter respectively.
Fig. 4 is the elementary cell schematic diagram for containing the intersecting connexon annulus of 3,4,5,6 same diameters respectively.
Fig. 5 is the circumscribed mode of communicating schematic diagram of two annulus.
Fig. 6 is two annulus inscribe mode of communicating schematic diagrames.
Fig. 7 is elementary cell of the invention with respect to a kind of rotation mode schematic diagram of neighboring unit cells.
Fig. 8 is existing grid grid structural representation.
Fig. 9 is senior diffraction of existing grid grid and its relative intensity distribution schematic diagram.
Figure 10 is existing annulus grid structural representation.
Figure 11 is senior diffraction of existing annulus grid and its relative intensity distribution schematic diagram.
Figure 12 is a kind of preferred single layer metallic mesh A structural representations in the present invention.
Figure 13 is the level diffraction high and its relative intensity distribution schematic diagram of preferred single layer metallic mesh A in the present invention.
Figure 14 is Double-layer symmetrical arrangement metallic mesh structural representation in the present invention.
Figure 15 is Double-layer symmetrical arrangement metallic mesh level diffraction high and its relative intensity distribution schematic diagram in the present invention.
Figure 16 is double-layer staggered arrangement metallic mesh structural representation in the present invention.
Figure 17 is double-layer staggered arrangement metallic mesh level diffraction high and its relative intensity distribution schematic diagram in the present invention.
Figure 18 is five kinds of grid structure level diffraction maximum relative intensity comparison diagrams high.
Piece number explanation in figure：1. the transparent substrate 6. of 2. protective layer of anti-reflection film, 3. metallic mesh, 4. adhesive linkage 5. is bonded
10. 11. sub- annulus of basic annulus of layer 7. metallic mesh, 8. protective layer, 9. anti-reflection film 12. connects metal
Specific embodiment
With reference to the accompanying drawings with preferred embodiment to further description of the present invention：
Double-layer staggered orthogonal tangent circle ring and the sub- circle ring array electromagnetic shielding optical window of inscribe, in optical window transparent substrate or substrate
Both sides be placed in parallel double layer of metal grid 3 and 7, double layer of metal grid 3 and 7 has identical unit profile and structural parameters,
Every layer of metallic mesh presses two-dimensional quadrature contiguity arrangement structure arranged evenly by the metal ring of same diameter as basic annulus 10
Into and load on optical window transparent substrate or substrate surface, and the circumscribed connection of adjacent basic annulus 10；Double layer of metal grid 3 and 7 is pressed
Rotation staggered arrangement, be provided with each basic annulus 10 in single-layer metal grid connect with its inscribe, the son of metal is justified
Ring 11, the sub- annulus 11 that described basic annulus 10 is connected with its inscribe collectively constitutes the elementary cell of two-dimentional grid structure；Institute
A diameter of millimeter of the sub- annulus 11 that the basic annulus 10 stated is connected with its inscribe is to submillimeter magnitude, described basic annulus 10
The metal wire width of the sub- annulus 11 connected with its inscribe is micron to sub-micrometer scale；Described rotation is staggered and is
Refer to：Have when the metallic mesh of transparent substrate or substrate both sides presses asymmetric placement, between double layer of metal grid and rotate against, phase
It is alternate angle to the anglec of rotation；Described circumscribed connection includes：1. two annulus are circumscribed and circumscribed point of contact at set and connect two annulus
Logical connection metal 12,2. two annulus are in seamless overlapping configuration in junction lines, and 3. two annulus are in seamless in junction lines
While overlapping configuration, the connection metal 12 that two annulus are connected is set at overlapping place；Described inscribe connection includes：1. two justify
The connection metal 12 that two annulus are connected is set at ring inscribe and inscribe point of contact, and 2. two annulus are overlapped in junction lines in seamless
Structure, 3. two annulus the connection for connecting two annulus is set at overlapping place while junction lines are in seamless overlapping configuration
Metal 12.Fig. 1 is that a kind of preferred structure of double-layer staggered orthogonal tangent circle ring and inscribe sub- circle ring array electromagnetic shielding optical window is cutd open
Face schematic diagram, described transparent substrate 5 can be any transparent material, as long as it can be used as meeting the transparent of use occasion requirement
Light window material, while metallic mesh 3 and 7 can be processed thereon by certain technological process；According to technological process, wire netting
Grid 3 are connected with transparent substrate 5 by adhesive linkage 4, and metallic mesh 7 is connected with transparent substrate 5 by adhesive linkage 6；Individual layer is more
Layer anti-reflection film 1 and 9 strengthens the protective layer 2 and 8 of the transmittancy of optical window, individual layer or multilayer, it is therefore an objective to prevent metal part long
Phase causes to corrode and aoxidizes in air, screening ability is reduced, while be also prevented from metallic mesh 3 and 7 being scratched.It is actual to answer
In, transparent substrate 5 can also be transparent substrates, for double layer of metal grid to be machined in into its both sides, transparent substrate or substrate,
Double layer of metal grid 3 and 7 is the indispensable key element of the present invention, adhesive linkage 4 and 6, anti-reflection according to technique and practical application
Film 1 and 9, protective layer 2 and 8 can be with or without.
Double-layer staggered orthogonal tangent circle ring of the invention and the sub- circle ring array electromagnetic shielding optical window of inscribe, wherein metallic mesh
3 and 7 have identical unit profile and structural parameters.Every layer of metallic mesh is by the metal ring of same diameter as substantially round
Ring 10 is constituted the basic structure of metallic mesh and is loaded on optical window transparent substrate or lining by two-dimensional quadrature contiguity arrangement arranged evenly
Basal surface, and the circumscribed connection of adjacent basic annulus 10, the distribution of basic annulus 10 is as shown in Fig. 2 Fig. 2 midpoints A, B, C, D are four
The center of circle of individual adjacent basic annulus 10, any one annulus in four adjacent basic annulus it is all adjacent with two other annulus and
Circumscribed connection, a square, the base that other any fours are arranged by this adjacent fashion are may make up by summit of center of circle ABCD
The center of circle of this annulus also constitutes square for summit, i.e., the center of circle of all basic annulus 10 constitutes the equidistant dot matrix of two-dimensional quadrature,
Such arrangement mode ensures that all of basic annulus 10 is basic according to two-dimensional quadrature distribution contiguity arrangement composition metallic mesh
Structure.
Double-layer staggered orthogonal tangent circle ring of the invention and the sub- circle ring array electromagnetic shielding optical window of inscribe, each basic annulus
There is the sub- annulus 11 connected with the annulus inscribe, the sub- annulus 11 that basic annulus 10 is connected with its inscribe collectively constitutes two in 10
Tie up the elementary cell of grid structure.The diameter of basic annulus 10 and sub- annulus 11 is in millimeter to submillimeter magnitude, basic annulus 10
With the metal wire width of sub- annulus 11 in micron to sub-micrometer scale, to ensure that high transmission rate and good electromagnetic shielding are imitated
Really.Additionally, basic annulus 10, sub- annulus 11 and connection metal 12 are made up of the good alloy of electric conductivity, such as gold, silver, copper, aluminium
Deng simple metal and metal alloy, and metal thickness is more than 100nm.
Double-layer staggered orthogonal tangent circle ring of the invention and the sub- circle ring array electromagnetic shielding optical window of inscribe, each elementary cell
The number of interior sub- annulus 11 is more than or equal to 2, and diameter is identical or different, the center of circle of adjacent sub- annulus 11 and basic annulus 10
The angle that circle center line connecting is constituted is arbitrarily angled；The adjacent circumscribed connection or intersecting of sub- annulus 11 in elementary cell.Such as Fig. 3 and Tu
4 lift preferred scheme be elementary cell neutron annulus 11 diameter it is identical, and adjacent sub- annulus 11 the center of circle and basic annulus
The angle that 10 circle center line connectings are constituted is equal：Fig. 3 is the circumscribed connection of sub- annulus 11 of same diameter in elementary cell, wherein Fig. 3
A () (b) (c) (d) represents the elementary cell schematic diagram that the number of sub- annulus 11 is 2,3,4,5 respectively；Fig. 4 is identical in elementary cell
The intersecting connection of the sub- annulus 11 of diameter, wherein Fig. 4 (a) (b) (c) (d) represent respectively the number of sub- annulus 11 for 3,4,5,6 it is basic
Cell schematics.
Fig. 5, Fig. 6 represent that the circumscribed connection of two annulus is connected with inscribe respectively, (as covered) are overlapped or set by lines and is protected
The metal reliably electrically connected between card metal ring tangent point, to ensure to touch connection conduction between tangent metal ring.Wherein, Fig. 5
Two annulus are in seamless overlapping configuration schematic diagram when () (b) (c) is illustrated respectively in circumscribed connection a：Fig. 5 (a) is the seamless friendship of two annulus
The distance of center circle of folded ordinary circumstance, the i.e. distance of center circle of two annulus less than two annulus when circumscribed, and it is circumscribed more than or equal to two annulus
When distance of center circle and two annulus line thickness sums difference, Fig. 5 (b) is a kind of seamless overlapping special circumstances, two loop lines
The inside and outside contour of bar is mutually circumscribed, and Fig. 5 (c) is seamless overlapping another special circumstances, and the distance of center circle of two annulus is equal to two circles
The difference of distance of center circle and two annulus line thickness sums when ring is circumscribed, i.e. the Internal periphery of two annulus lines is circumscribed, and Fig. 5 (d)
In due to two annulus it is circumscribed, it is therefore desirable to the metal reliably electrically connected between ensureing metal ring tangent point is covered at the point of contact.Fig. 6 (a)
B it is in seamless overlapping configuration schematic diagram that () is illustrated respectively in two annulus when inscribe is connected：Fig. 6 (a) is represented and two justified when inscribe is connected
Overlapping ordinary circumstance that ring is seamless, the i.e. distance of center circle of two annulus are more than distance of center circle during two annulus inscribes, and less than or equal to two
Distance of center circle during annulus inscribe be relatively large in diameter annulus line thickness and, Fig. 6 (b) represents that two annulus are seamless when inscribe is connected
A kind of overlapping special circumstances, the distance of center circle when distance of center circle of two annulus is equal to two annulus inscribes is with to be relatively large in diameter annulus lines wide
The sum of degree, i.e. the outline inscribe of two annulus lines, and Fig. 6 (c) represents the outline of the smaller lines of diameter and is relatively large in diameter circle
The Internal periphery inscribe of loop wire bar, now needs the metal reliably electrically connected between guarantee metal ring tangent point is set at point of contact.Additionally,
If two annulus are seamless it is overlapping when two metal rings overlapping area it is smaller, be insufficient to assure that between two metal rings there is reliable
Electrically connect, it is also desirable to the metal reliably electrically connected between ensureing metal ring point of contact is covered at point of contact, to ensure to realize becket
Circumscribed connection or inscribe connection.And be metal connected mode at a kind of preferred point of contact shown in Fig. 5 (d) and Fig. 6 (c), point of contact
The connection metal 12 for locating covering is rectangle, and the length of side of rectangle is more than becket line thickness, will during rectangle covering point of contact junction
The a line of rectangle is set to entirely fall within a becket lines, and its opposite side will entirely fall within another tangent metal loop wire
In bar.According to different processing method and technological level, the connection metal that can also be taken other form at annulus point of contact, as long as
Can have two tangent beckets reliably to electrically connect.
In the present invention, sub- annulus 11 in different elementary cells is equal diameter or non-equal diameter annulus, and number is identical or not
Together, the purpose of the veiling glare that level diffraction high is caused is homogenized to reach.As a kind of preferred scheme, elementary cell neutron annulus 11
Diameter it is identical, the angle that the center of circle of adjacent sub- annulus 11 and the circle center line connecting of basic annulus 10 are constituted is equal；On this basis,
The number of sub- annulus 11 in different elementary cells is identical, equal diameters.It is different basic as a special case of this preferred scheme
The relative position of sub- annulus 11 in unit is identical, and by pressing two-dimensional quadrature contiguity arrangement arranged evenly after an elementary cell duplication
Constitute single-layer metal grid 3 and 7.In order to realize the spuious light effect that good homogenizing level diffraction high is caused, as this excellent
Another special case of scheme is selected, the sub- annulus 11 in neighboring unit cells in the present invention in the array of metallic mesh 3 and 7 of individual layer
Relative position is different, and constitutes two-dimensional mesh grid array by omnidirectional distribution arrangement contiguity arrangement by after an elementary cell duplication, its
In any one elementary cell relative to its neighboring unit cells in two dimensional surface around itself center of circle of basic annulus 10 rotation one
Determine angle, rotated according to identical direction of rotation successively relative to previous neighboring unit cells with any elementary cell in a line
Angle it is identical；For example, Fig. 7 be elementary cell of the invention with respect to a kind of rotation mode schematic diagram of neighboring unit cells, wherein
The elementary cell of single-layer metal grid is intersected from four sub- annulus 11 of diameter identical, and adjacent sub- annulus 11 the center of circle and base
The angle that the circle center line connecting of this annulus 10 is constituted is equal, with each elementary cell in a line relative to previous neighboring unit cells according to
60 ° of angles of secondary rotate counterclockwise.
Fig. 8 and Fig. 9 are respectively the existing grid grid structural representations of United States Patent (USP) US4871220 and Qi Gao level diffraction
And its relative intensity distribution schematic diagram, Figure 10 and Figure 11 is respectively the existing annulus grid structure of patent 200610010066.4 and shows
It is intended to and its level diffraction high and its relative intensity distribution schematic diagram；Figure 12 and Figure 13 are respectively preferred scheme A in the present invention
Metallic mesh structural representation and Qi Gao levels diffraction and its relative intensity distribution schematic diagram, the metallic mesh in preferred scheme A
The elementary cell of selection be four diameter identical circumscribed connections of sub- annulus 11, and adjacent sub- annulus 11 the center of circle and basic annulus
The angle that 10 circle center line connectings are constituted is equal, and neighboring unit cells are rotated according to the rotation mode shown in Fig. 7, and rotation
Angle is 22.5 °.Figure 14 and Figure 15 are respectively Double-layer symmetrical arrangement metallic mesh structural representation and Qi Gao levels in the present invention
Diffraction and its relative intensity distribution schematic diagram, double layer of metal grid structure select the individual layer grid structure of preferred scheme A, and right
Title is arranged in the both sides of transparent substrate 5；Figure 16 and Figure 17 are respectively double-layer staggered arrangement metallic mesh structural representation in the present invention
With its level diffraction high and its relative intensity distribution schematic diagram, double layer of metal grid structure is still from the list of preferred scheme A
Layer grid structure, but rotation be staggered in the both sides of transparent substrate 5, alternate angle α be 20 °, described alternate angle refers to when transparent
When the double layer of metal grid of substrate both sides is changed into rotation and is staggered from symmetric arrays, wherein layer of metal grid is relative in addition
The relative rotation angle when rotation of the angle that layer of metal grid rotates in plane where it, i.e. two-layer grid is staggered.
In order to illustrate that the present invention is being homogenized the active superiority of level diffraction energy distribution high, based on scalar diffraction reason
By level diffraction energy distribution situation high and level diffraction high the maximum relative intensity to above-mentioned five kinds of structures carry out theoretical meter
Calculate, make that the light transmittance of each structure is identical (being 95.4%) during calculating, its zero level relative intensity is 91%, that is, be imaged useful letter
Breath ratio is identical.The single-layer metal grid structure of preferred scheme A and double-deck grid structure compared with grid, annulus grid, most
Level diffraction relative intensity high is substantially reduced, and is substantially increased in the identical number for investigating level diffraction spot high in interval, thus
The problem that level diffraction energy high is concentrated in a small number of diffraction times is avoided, makes level diffraction energy distribution high more uniform；
Figure 18 is the concrete numerical value of the level diffraction high maximum relative intensity of above-mentioned five kinds of structures, it is seen then that grid metallic mesh structure
Level diffraction maximum relative intensity high is substantially higher relative to other structures, the metallic mesh structure corresponding to preferred scheme A
Level diffraction maximum relative intensity high is substantially reduced, from 0.0259% (the level diffraction high of existing annulus grid structure
Maximum relative intensity) drop to 0.0058%, 78% is reduced, the homo-effect of level diffraction high is obvious；Double-layer symmetrical is arranged
The level diffraction high maximum relative intensity reduction degree of metallic mesh structure is close with preferred scheme A, (existing from 0.0259%
The level diffraction high maximum relative intensity of annulus grid structure) drop to 0.0054%, 79% is reduced, and rotation is staggered
Introducing cause that level diffraction high maximum relative intensity is further reduced, be reduced to 0.0014% from 0.0054%, reduce
74%, 94% is reduced compared with the level diffraction high maximum relative intensity of existing annulus grid structure, complete to senior
The depth homogenizing of secondary diffraction.In sum, double-layer staggered metallic mesh structure of the invention is to being homogenized level diffraction energy distribution high
Effect it is very notable, not only better than the existing grid metallic mesh structures of United States Patent (USP) US4871220, also superior to patent
200610010066.4 existing annulus metallic mesh structures.
Double-layer staggered orthogonal tangent circle ring of the invention and the sub- circle ring array electromagnetic shielding optical window of inscribe, double-level-metal grid
Stagger angle can have many preferred scopes, for example, when double-level-metal grid stagger angle selection range 1 °~
25 °, 27 °~35 °, 37 °~52 °, 54 °~88 ° within the scope of these when, excellent homogenizing level diffraction energy high can be reached
Amount distributed effect；And double-deck grid spacing, the i.e. thickness of transparent substrate or substrate, during reasonable selection, electromagnetic screen can be significantly increased
Efficiency is covered, for example, when the transparent substrate or substrate thickness with double-level-metal grid are less than 5mm, can be obtained in low frequency microwave wave band
Obtain shield effectiveness well.
Metallic mesh 3 in double-layer staggered orthogonal tangent circle ring of the invention and the sub- circle ring array electromagnetic shielding optical window of inscribe
Following processing method processing and fabricating can be used with 7：Mask is made by modes such as electron-beam direct writings, optical window transparent substrate 5 enters
, used as adhesive linkage 4 and 6, metal-coated films, are then coated with photoresist thereon, using manufactured for chromium plating or titanium after row cleaning
Mask carries out photoetching, finally carries out dry method or wet etching, and grid pattern is obtained after removing photoresist.Mask manufacture ring can also be saved
Section, and the wire netting based on the tangent annulus of omnidirectional distribution and the sub- circle ring array of inscribe is directly made using the method for laser direct-writing
Gate pattern.Other microelectronic processing technology flows or binary optical elements Making programme etc. may also be used for making of the invention
Metallic mesh structure.
Transparent substrate 5 involved in the present invention determines by practical application, can be simple glass, quartz glass, red
Outer material, transparent resin material etc., basic annulus 10 of the invention and the metal structure of sub- annulus 11 will be taken according to transparent substrate 5
Suitable processing process is allowed to be completely covered by transparent substrate 5, and can realize reliable Electricity Federation with window frame etc.
Connect or seal to ensure excellent electro-magnetic screen function.In practical application, transparent substrate 5 with grid structure of the present invention can be with
Plating anti-reflection film increases transmittancy, it is also possible in grid layer surface plating preventing the metal structure to be positioned over air for a long time
In corroded or aoxidize and reduce screening ability, be also prevented from grid layer and scratched, wear and tear or other destructions.
Claims (11)
1. double-layer staggered orthogonal tangent circle ring and inscribe sub- circle ring array electromagnetic shielding optical window, in optical window transparent substrate or substrate
Both sides are placed in parallel double layer of metal grid, and double layer of metal grid has identical unit profile and structural parameters, every layer of wire netting
Grid are constituted and loaded as basic annulus (10) by the metal ring of same diameter by two-dimensional quadrature contiguity arranged evenly arrangement
In optical window transparent substrate or substrate surface, and adjacent basic annulus (10) circumscribed connection；It is characterized in that：Double layer of metal grid
(3) be staggered with (7) rotation, be provided with each basic annulus (10) in single-layer metal grid connected with its inscribe, metal
Sub- annulus (11), the sub- annulus (11) that described basic annulus (10) is connected with its inscribe collectively constitutes two-dimentional grid structure
Elementary cell；A diameter of millimeter of the sub- annulus (11) that described basic annulus (10) is connected with its inscribe to submillimeter magnitude,
The metal wire width of the sub- annulus (11) that described basic annulus (10) is connected with its inscribe is micron to sub-micrometer scale；Institute
The rotation stated is staggered and refers to：When the metallic mesh of transparent substrate or substrate both sides presses asymmetric placement, double layer of metal grid
Between have rotate against, relative rotation angle is alternate angle；Described circumscribed connection includes：1. two annulus it is circumscribed and it is outer earnestly
The connection metal (12) that two annulus are connected is set at point, and 2. two annulus are in seamless overlapping configuration in junction lines, 3. two circles
Ring sets the connection metal (12) for connecting two annulus at overlapping place while junction lines are in seamless overlapping configuration；Institute
The inscribe connection stated includes：1. the connection metal (12) that two annulus are connected is set at two annulus inscribes and inscribe point of contact, 2. two
Annulus is in seamless overlapping configuration in junction lines, and 3. two annulus are being handed over while junction lines are in seamless overlapping configuration
Folded place sets the connection metal (12) for connecting two annulus.
2. double-layer staggered orthogonal tangent circle ring according to claim 1 and the sub- circle ring array of inscribe are electromagnetically shielded optical window, its
It is characterised by：Sub- annulus (11) number is more than or equal to 2 in each elementary cell, and diameter is identical or different, adjacent son circle
The angle that the center of circle of ring (11) and basic annulus (10) circle center line connecting are constituted is arbitrarily angled, the son circle in different elementary cells
Ring (11) is equal diameter or non-equal diameter annulus, and number is identical or different.
3. double-layer staggered orthogonal tangent circle ring according to claim 1 and 2 and the sub- circle ring array of inscribe are electromagnetically shielded optical window,
It is characterized in that：Adjacent sub- annulus (11) circumscribed connection or intersecting in elementary cell.
4. double-layer staggered orthogonal tangent circle ring according to claim 2 and the sub- circle ring array of inscribe are electromagnetically shielded optical window, its
It is characterised by：The diameter of elementary cell neutron annulus (11) is identical, and the center of circle of adjacent sub- annulus (11) and basic annulus (10) are round
The angle that heart line is constituted is equal；Sub- annulus (11) number in different elementary cells is identical, equal diameters.
5. double-layer staggered orthogonal tangent circle ring according to claim 4 and the sub- circle ring array of inscribe are electromagnetically shielded optical window, its
It is characterised by：Sub- annulus (11) relative position in different elementary cells is identical, and by pressing two dimension after an elementary cell duplication
Omnidirectional distribution arrangement contiguity arrangement constitutes individual layer two-dimensional metallic grid.
6. double-layer staggered orthogonal tangent circle ring according to claim 4 and the sub- circle ring array of inscribe are electromagnetically shielded optical window, its
It is characterised by：In an individual layer two-dimensional metallic grid array, sub- annulus (11) relative position in neighboring unit cells is different, and
Two-dimensional metallic grid array is constituted by two-dimensional quadrature contiguity arranged evenly arrangement after being replicated by an elementary cell, wherein any one
Individual elementary cell rotates to an angle in two dimensional surface relative to its neighboring unit cells around itself basic annulus (10) center of circle.
7. double-layer staggered orthogonal tangent circle ring according to claim 6 and the sub- circle ring array of inscribe are electromagnetically shielded optical window, its
It is characterised by：Revolved according to identical direction of rotation successively relative to previous neighboring unit cells with any elementary cell in a line
The angle for turning is identical.
8. double-layer staggered orthogonal tangent circle ring according to claim 1 and the sub- circle ring array of inscribe are electromagnetically shielded optical window, its
It is characterised by：Basic annulus (10) is constituted with sub- annulus (11) by the good alloy of electric conductivity, and alloy thickness is more than
100nm。
9. double-layer staggered orthogonal tangent circle ring according to claim 1 and the sub- circle ring array of inscribe are electromagnetically shielded optical window, its
It is characterised by：Adhesive linkage between metallic mesh and optical window transparent substrate or backing material with chromium or titanium material composition is Nian Jie.
10. double-layer staggered orthogonal tangent circle ring according to claim 1 and the sub- circle ring array of inscribe are electromagnetically shielded optical window, its
It is characterised by：The stagger angle selection range of double-level-metal grid is at 1 °~25 °, 27 °~35 °, 37 °~52 °, 54 °~88 °.
11. double-layer staggered orthogonal tangent circle rings according to claim 1 and the sub- circle ring array electromagnetic shielding optical window of inscribe, its
It is characterised by：Transparent substrate or substrate thickness with double-level-metal grid are less than 5mm.
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| CN106793733A (en) * | 2017-01-03 | 2017-05-31 | 哈尔滨工业大学 | Double mesh-type infrared band dual band pass optical window electromagnetic armouring structures |
| CN110545653B (en) * | 2019-09-09 | 2020-08-28 | 中国科学院福建物质结构研究所 | Metal mesh and electromagnetic shielding optical window |
| CN110572998B (en) * | 2019-09-27 | 2021-04-16 | 南京理工大学 | Miniaturized transparent electromagnetic shielding body based on hollowed-out regular hexagonal grid structure |
| CN111954453B (en) * | 2020-06-29 | 2022-11-29 | 西安电子科技大学 | Non-contact rotatable broadband electromagnetic shielding structure, design method and application |
| CN113056183B (en) * | 2021-01-18 | 2022-10-28 | 哈尔滨工业大学 | Electromagnetic shielding optical window with mesh grid structure based on medium-ultrathin doped metal-medium |
| CN113359220B (en) * | 2021-06-10 | 2022-04-19 | 浙江大学 | Spectral filter based on three-dimensional annular structure and application |
| CN113766821A (en) * | 2021-09-14 | 2021-12-07 | 惠州市中为柔性光电子智能制造研究院有限公司 | Electromagnetic pulse protective film |
| CN116471824A (en) * | 2023-04-20 | 2023-07-21 | 深圳品微光学科技有限公司 | Metal mesh grid structure for electromagnetic shielding optical window |
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