CN103874404B - There is the intersection angular distribution metal ring array electric magnetic screen optical window of the sub-annulus of inscribe - Google Patents
There is the intersection angular distribution metal ring array electric magnetic screen optical window of the sub-annulus of inscribe Download PDFInfo
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- CN103874404B CN103874404B CN201410051906.6A CN201410051906A CN103874404B CN 103874404 B CN103874404 B CN 103874404B CN 201410051906 A CN201410051906 A CN 201410051906A CN 103874404 B CN103874404 B CN 103874404B
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Abstract
The intersection angular distribution metal ring array electric magnetic screen optical window with the sub-annulus of inscribe belongs to electromangnetic spectrum field; The metal ring of two kinds of different-diameters is arranged by triangular arranged contiguity respectively and cross-distribution formation two-dimensional metallic net grid load on optical window transparent substrate surface, the circumscribed connection of adjacent rings of same diameter, the wherein sub-annulus of annulus inside containing inscribe connection for diameter, the sub-annulus that this annulus is communicated with its inscribe forms the elementary cell of two-dimensional metallic net grid jointly; In the junction of the tangent connection of annulus, overlapping or the metal ensureing reliably to electrically connect between metal ring tangent point is set by lines, guarantee that all annulus are interconnected conduction.Relative to existing metallic mesh structure, metallic mesh structure of the present invention can reduce the inhomogeneities of net grid senior diffraction intensity distribution significantly, and the stray light that diffraction is caused distribution is more even, less to Imaging.
Description
Technical field
The invention belongs to electromagnetic shielding field, particularly a kind of intersection angular distribution metal ring array electric magnetic screen optical window with the sub-annulus of inscribe.
Background technology
Along with the broadening of electromagnetic wave application frequency spectrum and the increase of intensity, more and more higher to the requirement of the electromagnetic shielding optical window of the field such as space flight and aviation equipment, advanced optical instrument, communication apparatus, medical diagnostic equipment and secured facilities application, while mainly requiring that optical window has superpower broadband electromagnetic shielding capability, also there is high light transmittance, the smaller the better on the impact of optical imagery, observation, detection.Such as, the optical window of aircraft in space flight and aviation equipment field, must high-quality realize inside and outside cabin electromagnetic signal isolation, shielding external electromagnetic interference and harmful electromagnetic signal on the one hand, in order to avoid cause cabin inner electronic equipment to lose efficacy, when preventing cabin inner electronic equipment from working on the one hand, electromagnetic signal appears optical window and causes electromagnetic leakage, but the light transmission of optical window is the function of its indispensability, the impact that electromagnetic shielding should reduce its transparency is as much as possible carried out on optical window, does not particularly affect optical detection or optical imagery function as much as possible; Similar, the optical window of advanced optical instrument also will have light transmittance high as far as possible and the impact of alap image quality, to realize detection and the measurement of high-quality, electromagnetic interference will be prevented the impact of instrument internal photoelectric detector simultaneously; For the secret Architectural Equipment of Party and government offices, military commanding place, important R&D institution, need the glass pane in its house while guarantee daylighting, carry out design of Electromagnetic Shielding, during to prevent the electronic device works such as indoor electric brain, important information is divulged a secret to propagating to cause outside window with electromagnetic radiation form; Medical electric Magnetic isolation room optical window will ensure indoor electromagnetic wave overwhelming majority conductively-closed and prevent field operation personnel from being impaired one's health by electromagenetic wave radiation for a long time, etc.The electromagnetic shielding of current this kind of optical window mainly adopts transparent conductive film, metal inducement transmission-type multi-layer film structure, band resistance type frequency-selective surfaces and has millimeter metallic mesh etc. in submillimeter cycle.
The transparent metal oxide film of transparent conductive film to be a kind of with tin indium oxide be main material, is often applied to the occasion that visible light wave range is transparent, but can not takes into account wider transmission region, though it is not strong to have wider micro-wave screening wave band screening ability.Metal inducement transmission-type multi-layer film structure adopts multi-layer thin metal film and deielectric-coating composite construction to realize shielding electromagnetic waves, and comparatively strong to low frequency microwave screening ability, transmission region is mainly visible ray and ultraviolet light, but light transmittance is not high.Frequency-selective surfaces adopts periodically resonant element structure to realize being with logical or band stop filter function, because its metal coverage rate is higher, can interference electromagnetic wave well beyond reflective operation frequency band, but optics light transmittance is lower, reduce the image quality of optical detection, bring difficulty to optical image security, pattern recognition, target search and tracking.In sum, meet broadband high transmission rate and two requirements of wide-band electromagnetic shielding of optical window, all there is obvious deficiency in above-mentioned each technical scheme simultaneously.Comparatively speaking, there is millimeter metallic mesh in submillimeter cycle, because its period ratio interference electromagnetic wavelength is much smaller, stronger low width wave band electromagnetic shielding can be realized; And the metallic mesh cycle is much larger than optical wavelength, the light transmittance of optical region can be ensured.Therefore, the metallic mesh in millimeter submillimeter cycle has good electrically conducting transparent performance, can meet the requirement of optical window to high transmission rate and wide-band electromagnetic shielding, be widely used in optical window electromangnetic spectrum field:
1. patent 03135313.5 " a kind of electromagnetic shielding observation window " substance or multi-metal silk screen and based semiconductor quantum well structure is combined into electromagnetic armouring structure, can realize the shield effectiveness more than 50dB within 10GHz, this structure reaches more than 50% at the light transmittance of visible ray height regional transmission.
2. patent 93242068.0 " electromagnetic shielding glass " presss from both sides conductive metal mesh between layer glass, and make it to be bonded in form electromagnetic armouring structure on window frame of metal at glass outer side conductive transparent film, this structure has certain daylighting.
3. patent 94231862.5 " without Moire fringe electromagnetic shielding observation window " adopts by the parallel placement of the wire netting that two number of layers are different, and their warps or parallel have certain angle, overcome Moire fringe phenomenon to reach, and realizes the visual field more clearly.
4. patent 02157954.7 " high shielding effect Tempest glass " respectively has one deck polycarbonate film in woven wire both sides, each attaching one deck glass outside film, last hot pressing forms electromagnetic armouring structure, and this structure, when light transmittance reaches 60%, has stronger shield effectiveness.
5. patent 200610084149.8 " electromagnetic shielded film and manufacture method thereof " describes a kind of high transparency electromagnetic wave shield film with metal mesh pattern formed by photoetching process, and the main purpose of this invention is to reduce metal consumption and overcome the environmental pollution using solidification glue to cause between metal level and film substrate.
6. US Patent No. 4871220 " Short wavelength pass filter having a metal mesh on asemiconducting substrate " describes a kind of metallic mesh with square structure, for realizing the electromagnetism interference performance of optical window.
7. patent 201010239355.8 " a kind of electromagnetic shielding conformal optical window with longitude and latitude shape net grid structure " describes a kind of conformal electromagnetic shielding optical window with longitude and latitude shape metallic mesh structure realized by metallic mesh technology and conformal optics window setting technique, mainly solve the Structure Designing Problem of conformal optics window metallic mesh, improve the capability of electromagnetic shielding of conformal optics window.
8. patent 200610010066.4 " having the electromagnetic shielding optical window of annulus metallic mesh structure " describes a kind of metallic mesh unit with annulus profile, for realizing the electro-magnetic screen function of optical window; Compare individual layer grid metallic mesh, light transmittance and screening ability are improved, and the stray light that senior diffraction causes have also been obtained certain homogenizing.
9. patent 200810063988.0 " a kind of electromagnetic shielding optical window with double-layer pane metallic mesh structure " describes a kind of grid metallic mesh identical by structural parameters or woven wire and is placed in parallel in the electromagnetic shielding optical window that optical window or transparent substrates both sides form, while not reducing light transmittance, increase substantially electromagnetic shielding efficiency.
10. patent 200810063987.6 " a kind of electromagnetic shielding optical window with double-layer circular ring metallic mesh structure " describes and a kind ofly loads on by two-layer annulus metallic mesh the electromagnetic shielding optical window that optical window both sides form, and solves the problem that high transmission rate and strong electromagnetic shield effectiveness can not be taken into account simultaneously.
Hub-the spoke type arrangement based on annulus unit of people's exploitation such as 11. Battelle research institute of U.S. Jennifer I.Halman and perceptual metallic mesh (the Jennifer I.Halman etc. of many annulus overlapping configuration, " Predicted and measured transmission anddiffraction by a metallic mesh coating " .Proc.SPIE, 2009,7302:73020Y-1 ~ 73020Y-8), and think, this structure can make net grid senior Diffraction fringe distribution homogenizing, realize low sidelobe, favourable to imaging
12. the Ian B.Murray of Exotic Electro-Optics company of the U.S., the people such as the Victor Densmore of Arizona, USA university and Vaibhav Bora jointly report and introduce impact (Ian B.Murray on diffraction characteristic after stochastic parameter distribution design to the perceptual net grid of hub-spoke type arrangement and many annulus overlapping configuration, Victor Densmore, the people such as Vaibhav Bora, " Numerical comparision of grid pattern diffraction effects through measurement and modeling withOptiScan software ", Proc.SPIE, 2011, 8016:80160U-1 ~ 80160U-15), point out each ring interval and diameter random value within the specific limits, be conducive to the uniformity improving senior Diffraction fringe distribution.
Above-mentioned each scheme, owing to adopting metallic mesh (or woven wire) as the core devices of shielding, can realize good effectiveness and certain light transmittance.But adopt metallic mesh (or woven wire) as electromagnetic armouring structure, be just inevitably subject to the impact of net grid at optical region diffraction.Due to cycle of metallic mesh at millimeter to submillimeter magnitude, be realize higher light transmittance, its metal wire width generally at micron to sub-micrometer scale, such structural parameters have very strong diffraction effect at optical region.Incident light overwhelming majority energy is by metallic mesh transmission, transmissive portion comprises zero order diffracted light and senior diffraction light, and usually, zero level time diffraction light is the useful information for imaging and observation, senior time diffraction light then forms stray light, produces interference to imaging and detection.Therefore, should improve the proportion of zero level time shared by diffraction light as much as possible, meanwhile, under the prerequisite that senior diffraction light unavoidably occurs, make senior diffraction light distribution relatively more even as far as possible, its stray light formed becomes more uniform background or noise.
Metal current net grid are mainly traditional grid grid structure, (structure of patent 7 is because processing is on curved surface for the structure mainly adopted as above-mentioned patent 1-6, a kind grid structure), there is intrinsic contradiction in grid grid structure transmittancy and screening ability, be difficult to take into account high transmission rate and strong electromagnetic shield effectiveness simultaneously, particularly senior diffraction energy of grid grid mainly concentrates on mutually perpendicular diaxon, have a certain impact to image quality, the occasion even required at high imaging quality is difficult to application.Change net grid diffraction characteristic generally to need to change its architectural feature, above-mentioned patent 200610010066.4 " having the electromagnetic shielding optical window of annulus metallic mesh structure " proposition metal ring is built into annulus metallic mesh, improve the shortcoming of grid metallic mesh senior diffraction energy integrated distribution, and the contradiction of its transmittancy and screening ability can be alleviated.In above-mentioned document 11 and 12, the people such as the people such as Jennifer I.Halman and Ian B.Murray, also the metallic mesh structure be proposed based on annulus unit improves the uniformity of senior Diffraction fringe distribution, but the research of the people such as Jennifer I.Halman is also monocycle annulus arrangement architecture, and orientation is determined, its structure proposed the effect and patent 200610010066.4 that regulate senior diffraction is suitable, and although the research of the people such as Ian B.Murray further, random overlapping circular ring structure is proposed, make circle diameter and spacing random distribution value within the specific limits, realize improving senior Diffraction fringe distribution uniformity further, but the random distribution of circle diameter and spacing changes the uniformity of mesh distribution, electromagnetic shielding efficiency will be damaged.
Along with the complexity day by day of electromagnetic environment, the transmittancy of electromagnetic shielding optical window and the requirement of electromagnetic shielding capability are being improved constantly, especially at Aero-Space equipment field and advanced optical instrument field, while having required that optical window reaches 95% even higher light transmittance, also there is extremely low image quality impact, realize the shield effectiveness of more than 30dB in the microwave frequency range lower than 20GHz, this makes existing technology be difficult to realize.Patent 200810063988.0 and patent 200810063987.6 all have employed the both sides formation that double-level-metal net grid are placed in parallel in optical window transparent substrate or substrate, double layer of metal net grid have identical unit profile and structural parameters, by optimizing the spacing of two layers of mesh grid, while realizing not reducing light transmittance, increase substantially electromagnetic shielding efficiency.But this Double-level Reticulated grid structure senior diffraction stray light distributes, still identical with light transmittance monolayer net grid are suitable, not exclusively meet the requirement that the fields such as following Aero-Space equipment and advanced optical instrument affect low image quality.
Summary of the invention
The object of the invention is to the deficiency overcoming above-mentioned existing optical window electromangnetic spectrum scheme, the problem of the stray light distribution Relatively centralized that senior diffraction causes particularly is there is for existing individual layer grid metallic mesh, individual layer circular ring net grid, double-layer pane and circular ring net grid, research and develop a kind of intersection angular distribution metal ring array electric magnetic screen optical window with the sub-annulus of inscribe, reach the object of degree of depth homogenizing and the extremely low image quality impact realizing senior diffraction.
The object of the present invention is achieved like this: the intersection angular distribution metal ring array electric magnetic screen optical window with the sub-annulus of inscribe, it is characterized in that: the metallic mesh in electromagnetic shielding optical window is made up of by the arrangement of triangular arranged contiguity respectively the metal ring of two kinds of different-diameters and cross-distribution loads on optical window transparent substrate surface, the circumscribed connection of adjacent rings of same diameter, wherein a kind of metal ring of diameter is as basic annulus, basic annulus inside is containing being communicated with its inscribe, the sub-annulus of metal, the sub-annulus that basic annulus is communicated with its inscribe forms the elementary cell of two-dimensional mesh grid array structure jointly, another diameter metal annulus forms modulation circle ring array as modulation annulus, the basic circle ring array formed with elementary cell forms cross-distribution structure.Described basic annulus, sub-annulus and modulation annulus diameter be millimeter to submillimeter magnitude, described basic annulus, sub-annulus and modulation annulus metal wire width be that micron is to sub-micrometer scale; Described triangular arranged refers to that the circle center line connecting of three adjacent between two metal rings forms equilateral triangle; Described circumscribed connection comprises: 1. circumscribed the and circumscribed point of contact place of two annulus arranges the connection metal be communicated with by two annulus, 2. two annulus are seamless overlapping configuration at junction lines, 3. two annulus are while junction lines are seamless overlapping configuration, arrange the connection metal be communicated with by two annulus at overlapping place; Described inscribe is communicated with and comprises: 1. two annulus inscribes and inscribe point of contact place arranges the connection metal be communicated with by two annulus, 2. two annulus are seamless overlapping configuration at junction lines, 3. two annulus are while junction lines are seamless overlapping configuration, arrange the connection metal be communicated with by two annulus at overlapping place.
The above-mentioned intersection angular distribution metal ring array electric magnetic screen optical window with the sub-annulus of inscribe, in described each elementary cell, sub-annulus number is more than or equal to 2, and diameter is identical or different, the angle that the center of circle of adjacent sub-annulus and basic annulus circle center line connecting form is arbitrarily angled, sub-annulus in different elementary cell is equal diameter or non-equal diameter annulus, and number is identical or different.
As the preferred frame mode of one, the above-mentioned intersection angular distribution metal ring array electric magnetic screen optical window with the sub-annulus of inscribe, described basic annulus with the diameter ratio of modulation annulus is
and the array direction angle of two kinds of metal ring arrays differs 30 °, the minimum angle of adjacent rings line of centres and horizontal direction when wherein array direction angle is same diameter metal annulus composition two-dimensional metallic net grid.
As the preferred frame mode of one, the above-mentioned intersection angular distribution metal ring array electric magnetic screen optical window with the sub-annulus of inscribe, described each modulation annulus always forms donut structure by the basic annulus of correspondence with it.
As the preferred frame mode of one, the above-mentioned intersection angular distribution metal ring array electric magnetic screen optical window with the sub-annulus of inscribe, in described elementary cell adjacent sub-annulus can circumscribed connection or intersect, the modulation annulus tangent connection or crossing that sub-annulus is overlapping with this elementary cell, described tangent connection is that circumscribed connection or inscribe are communicated with.
As the preferred frame mode of one, the above-mentioned intersection angular distribution metal ring array electric magnetic screen optical window with the sub-annulus of inscribe, the diameter of described elementary cell neutron annulus is identical, and the angle that the center of circle of adjacent sub-annulus and basic annulus circle center line connecting form is equal; The number of neighboring unit cells neutron annulus is identical, equal diameters.
As the preferred frame mode of one, the above-mentioned intersection angular distribution metal ring array electric magnetic screen optical window with the sub-annulus of inscribe, sub-annulus relative position in described different elementary cells is identical, and forms two-dimensional metallic net grid by the arrangement of triangular arranged contiguity after an elementary cell copies.
As the preferred frame mode of one, the above-mentioned intersection angular distribution metal ring array electric magnetic screen optical window with the sub-annulus of inscribe, in described two-dimensional metallic net grid, sub-annulus relative position in neighboring unit cells is different, and two-dimensional metallic net grid are formed by the arrangement of triangular arranged contiguity after an elementary cell copies, wherein any one elementary cell rotates to an angle around self basic annulus center of circle in two dimensional surface relative to its neighboring unit cells.
As the preferred frame mode of one, the above-mentioned intersection angular distribution metal ring array electric magnetic screen optical window with the sub-annulus of inscribe, the angle that any elementary cell in described same a line rotates relative to neighboring unit cells is identical.
The above-mentioned intersection angular distribution metal ring array electric magnetic screen optical window with the sub-annulus of inscribe, described basic annulus, sub-annulus, modulation annulus and connection metal are made up of the alloy that electric conductivity is good, and alloy thickness is greater than 100nm.
The above-mentioned intersection angular distribution metal ring array electric magnetic screen optical window with the sub-annulus of inscribe, described adhesive linkage chromium or titanium material are formed.
Novelty of the present invention and good result are:
Novelty of the present invention is: the intersection angular distribution metal ring array electric magnetic screen optical window with the sub-annulus of inscribe, metallic mesh in electromagnetic shielding optical window is made up of by the arrangement of triangular arranged contiguity respectively the metal ring of two kinds of different-diameters and cross-distribution loads on optical window transparent substrate surface, the circumscribed connection of adjacent rings of same diameter, wherein a kind of metal ring of diameter is as basic annulus, basic annulus inside is containing being communicated with its inscribe, the sub-annulus of metal, the sub-annulus that basic annulus is communicated with its inscribe forms the elementary cell of two-dimensional metallic net grid structure jointly, another diameter metal annulus forms modulation circle ring array as modulation annulus, the basic circle ring array formed with elementary cell forms cross-distribution structure.Described basic annulus, sub-annulus and modulation annulus diameter be millimeter to submillimeter magnitude, described basic annulus, sub-annulus and modulation annulus metal wire width be that micron is to sub-micrometer scale; Described triangular arranged refers to that the circle center line connecting of three adjacent between two metal rings forms equilateral triangle; Described circumscribed connection comprises: 1. circumscribed the and circumscribed point of contact place of two annulus arranges the connection metal be communicated with by two annulus, 2. two annulus are seamless overlapping configuration at junction lines, 3. two annulus are while junction lines are seamless overlapping configuration, arrange the connection metal be communicated with by two annulus at overlapping place; Described inscribe is communicated with and comprises: 1. two annulus inscribes and inscribe point of contact place arranges the connection metal be communicated with by two annulus, 2. two annulus are seamless overlapping configuration at junction lines, 3. two annulus are while junction lines are seamless overlapping configuration, arrange the connection metal be communicated with by two annulus at overlapping place.The good result that novelty of the present invention produces mainly concentrates on senior diffraction energy distribution of homogenizing metallic mesh, specific as follows:
In metallic mesh, the annulus of two kinds of different-diameters is all distributed as basic arrangement mode with equilateral triangle, the shortcoming of senior the diffraction energy integrated distribution that traditional grid metallic mesh exists can be overcome, there is the characteristic of good homogenizing senior diffraction energy distribution, and, after the circle ring array formation intersection angular distribution of two kinds of diameters, when ensureing that light transmittance is identical, compared with only having the structure of single diameter circle ring array, need the diameter of increase by two kinds of annulus, senior diffraction energy of the circle ring array of two kinds of diameters all reduces, simultaneously, by the diameter ratio or position relationship that change two annulus, structure is optimized, their senior the order of diffraction is not superposed, thus can effectively regulate senior diffraction energy distribution of metallic mesh array structure, reach the object of homogenizing senior diffraction energy distribution, this is one of reason of homogenizing senior the diffraction energy distribution of metallic mesh of the present invention.
In the metal ring array intersecting angular distribution, add inscribe sub-annulus composition elementary cell using the metal ring of wherein a kind of diameter as basic annulus, is formed using another diameter metal annulus as modulation annulus and modulate circle ring array.Because the difference of sub-annulus number, diameter and position relationship in each elementary cell, make its short texture, arrange spuious, therefore senior diffraction energy is lower, and senior Diffraction fringe distribution is comparatively even, avoids the situation occurring senior the diffraction energy integrated distribution existed as traditional grid metallic mesh; Meanwhile, when ensureing that light transmittance is identical, with only have intersects angular distribution metal ring array structure compared with, need the diameter increasing further basic annulus and modulate annulus, reduce senior diffraction energy of each array on the whole; Again because senior diffraction producing of sub-circle ring array structure is with to intersect the probability that senior the diffraction of circle ring array structure of angular distribution superpose very low; Especially diameter ratio or the position relationship of basic annulus and the modulation annulus intersected in angular distribution metal ring array is changed, from different sub-circular ring structure acting in conjunction, after further Optimal Parameters, senior the diffraction that their energy are higher does not superpose, thus homogenizing senior diffraction energy distribution, this is the reason two of homogenizing senior the diffraction energy distribution of metallic mesh of the present invention.
Each elementary cell can rotate to an angle centered by the center of circle of the basic annulus of its correspondence, do not change the aperture ratio of metallic mesh and then do not affect light transmittance, but can modulate further senior order of diffraction Energy distribution, can distribute by homogenizing senior diffraction energy further, this is the reason three of homogenizing senior the diffraction energy distribution of metallic mesh of the present invention.
To sum up, metallic mesh structure of the present invention can realize the degree of depth homogenizing of net grid senior diffraction energy distribution, and this is the most outstanding effect of the present invention.In addition, the metal ring structure of intersection angular distribution and sub-circular ring structure acting in conjunction effectively improve the uniformity of round metal looped network grid structure, and elementary cell when rotating to an angle centered by the center of circle of basic annulus corresponding to its elementary cell, substantially the uniformity of metallic mesh structure can not be changed, while effectively modulation is carried out to senior order of diffraction Energy distribution, substantially do not affect effectiveness, even can improve effectiveness in some preferred version.
Accompanying drawing explanation
Fig. 1 is a kind of preferred structure generalized section of the intersection angular distribution metal ring array electric magnetic screen optical window with the sub-annulus of inscribe.
Fig. 2 is a kind of typical cross angular distribution schematic diagram of two kinds of diameter circle ring arrays.
Several elementary cell schematic diagrames of Fig. 3 when to be sub-annulus crossing with modulation annulus.
Several elementary cell schematic diagrames during Fig. 4 to be sub-annulus with modulation annulus exist tangent relation.
Fig. 5 is the metal ring position relationship change schematic diagram of intersection angular distribution.
Fig. 6 is the circumscribed mode of communicating schematic diagram of two annulus.
Fig. 7 is two annulus inscribe mode of communicating schematic diagrames.
Fig. 8 is a kind of rotation mode schematic diagram of the relative neighboring unit cells of elementary cell.
Fig. 9 is existing grid grid structural representation.
Figure 10 is existing grid grid senior diffraction and relative intensity distribution schematic diagram thereof.
Figure 11 is existing circular ring net grid structural representation.
Figure 12 is existing circular ring net grid senior diffraction and relative intensity distribution schematic diagram thereof.
Figure 13 is the metallic mesh structural representation of option A in the present invention.
Figure 14 is the metallic mesh of option A senior diffraction and relative intensity distribution schematic diagram thereof in the present invention.
Figure 15 is the metallic mesh structural representation of preferred version B in the present invention.
Figure 16 is the metallic mesh of preferred version B in the present invention senior diffraction and relative intensity distribution schematic diagram thereof.
Figure 17 is the metallic mesh structural representation of preferred version C in the present invention.
Figure 18 is the metallic mesh of preferred version C in the present invention senior diffraction and relative intensity distribution schematic diagram thereof.
Figure 19 is that five kinds of metallic mesh structures senior diffraction maximal phase is to intensity contrast figure.
In figure, piece number illustrates: 1. the sub-annulus 8. of the basic annulus 7. of adhesive linkage 2. protective layer 3. anti-reflection film 4. transparent substrate 5. metallic mesh 6. modulates annulus 9. connection metal
Embodiment
With preferred embodiment, the present invention is further described with reference to the accompanying drawings:
There is the intersection angular distribution metal ring array electric magnetic screen optical window of the sub-annulus of inscribe, metallic mesh 5 in electromagnetic shielding optical window is made up of by the arrangement of triangular arranged contiguity respectively the metal ring of two kinds of different-diameters and cross-distribution loads on optical window transparent substrate surface, the circumscribed connection of adjacent rings of same diameter, wherein a kind of metal ring of diameter is as basic annulus 6, basic annulus 6 inside is containing being communicated with its inscribe, the sub-annulus 7 of metal, the sub-annulus 7 that basic annulus 6 is communicated with its inscribe forms the elementary cell of two-dimensional metallic net grid structure jointly, the metal ring of another diameter forms modulation circle ring array as modulation annulus 8, the basic circle ring array formed with elementary cell forms cross-distribution structure.Described basic annulus 6, sub-annulus 7 and modulation annulus 8 diameter be millimeter to submillimeter magnitude, described basic annulus 6, sub-annulus 7 and modulation annulus 8 metal wire width be that micron is to sub-micrometer scale; Described triangular arranged refers to that the circle center line connecting of three adjacent between two metal rings forms equilateral triangle; Described circumscribed connection comprises: 1. circumscribed the and circumscribed point of contact place of two annulus arranges the connection metal 9 be communicated with by two annulus, 2. two annulus are seamless overlapping configuration at junction lines, 3. two annulus are while junction lines are seamless overlapping configuration, arrange the connection metal 9 be communicated with by two annulus at overlapping place; Described inscribe is communicated with and comprises: 1. two annulus inscribes and inscribe point of contact place arranges the connection metal 9 be communicated with by two annulus, 2. two annulus are seamless overlapping configuration at junction lines, 3. two annulus are while junction lines are seamless overlapping configuration, arrange the connection metal 9 be communicated with by two annulus at overlapping place.Described transparent substrate 4 can be any transparent material, as long as metallic mesh 5 as the transparent optical window material meeting use occasion requirement, can be processed thereon by certain technological process by it simultaneously; According to technological process, metallic mesh 5 is carried in transparent substrate 4 surface by adhesive linkage 1; Individual layer or multi-layered antireflection coating 3 strengthen the transmittancy of optical window, the protective layer 2 of individual layer or multilayer, and object prevents metallic member long term exposure from air, causing corrosion and oxidation, reduces screening ability, also prevent metallic mesh 5 to be scratched simultaneously.
The intersection angular distribution metal ring array electric magnetic screen optical window with the sub-annulus of inscribe of the present invention, form also cross-distribution by the arrangement of triangular arranged contiguity respectively by the metal ring of two kinds of different-diameters and load on optical window transparent substrate surface, the circumscribed connection of adjacent rings of same diameter, in the metal ring array intersecting angular distribution, using the metal ring of wherein a kind of diameter as basic annulus 6, basic annulus 6 inside has the sub-annulus 7 with its inscribe, basic annulus 6 forms basic circle ring array by the arrangement of triangular arranged contiguity, another diameter metal annulus forms modulation circle ring array as modulation annulus 8 by the arrangement of triangular arranged contiguity.Basic circle ring array typically intersects angular distribution as shown in Figure 2 with the one of modulation circle ring array, and basic annulus 6 with the diameter ratio of modulation annulus 8 is
and array direction angle θ and the η of two kinds of metal rings differs 30 °, the minimum angle of adjacent rings line of centres and horizontal direction when wherein array direction angle is same diameter metal annulus composition circle ring array, such orientation makes two kinds of circle ring arrays be cross-distribution, during cross-distribution, basic annulus 6 occurs overlapping with modulation annulus 8.As the typical arrangement mode of one, modulate in Fig. 2 in annulus 8 and always form donut structure by the basic annulus 6 of correspondence with it, point A, B, C is the center of circle of the basic annulus 6 of any three circumscribed connections between two, some C, D, E is the center of circle of the modulation annulus 8 of any three circumscribed connections between two, and some C is the center of circle of the donut that basic annulus 6 forms with corresponding modulation annulus 8; △ ABC, △ CDE is equilateral triangle, and such arrangement mode guarantees that basic annulus 6 and modulation annulus 8 are all form metallic mesh according to the arrangement of equilateral triangle contiguity.
The intersection angular distribution metal ring array electric magnetic screen optical window with the sub-annulus of inscribe of the present invention, the diameter of basic annulus and the sub-annulus of inscribe thereof, modulation annulus at millimeter to submillimeter magnitude, the metal wire width of basic annulus and the sub-annulus of inscribe thereof, modulation annulus at micron to sub-micrometer scale, to ensure high transmission rate and good effectiveness.In addition, each ring part and connection metal are made up of the metal that electric conductivity is good, and as simple metal and metal alloys such as gold, silver, copper, aluminium, and metal thickness is greater than 100nm.
The intersection angular distribution metal ring array electric magnetic screen optical window with the sub-annulus of inscribe of the present invention, in each elementary cell, sub-annulus 7 number is more than or equal to 2, and diameter is identical or different, the angle that the center of circle of adjacent sub-annulus 7 and basic annulus 6 circle center line connecting form is arbitrarily angled, sub-annulus 7 in different elementary cell is equal diameter or non-equal diameter annulus, and number is identical or different; In elementary cell adjacent sub-annulus 7 can circumscribed connection or intersect, the modulation annulus 8 tangent connection or crossing that sub-annulus 7 is overlapping with this elementary cell, described tangent connection be circumscribed connection or inscribe connection.
Several elementary cell schematic diagrames of Fig. 3 when to be neutron annulus 7 of the present invention crossing with modulation annulus 8, modulate annulus 8 in figure and only depict the partial arc overlapping with basic annulus 6, to lift the diameter of elementary cell neutron annulus 7 in preferred version identical, the angle that the center of circle of adjacent sub-annulus 7 and the circle center line connecting of basic annulus 6 form is equal, and Fig. 3 (a) (b) represents that the number of elementary cell neutron annulus 7 is two kinds of elementary cell schematic diagrames of 3; Fig. 3 (c) (d) represents that the number of sub-annulus 7 is two kinds of elementary cell schematic diagrames of 4;
Fig. 4 is that neutron annulus 7 of the present invention exists several elementary cell schematic diagrames of tangent relation with modulation annulus 8, modulate annulus 8 in figure and only depict the partial arc overlapping with basic annulus 6, to lift the diameter of elementary cell neutron annulus 7 in preferred version identical, Fig. 4 (a) (b) represents sub-annulus 7 modulation annulus 8 inscribes that all basic annulus 6 is overlapping with this all in elementary cell, Fig. 4 (c) represents that in elementary cell, 3 sub-annulus 7 intersect, but every sub-annulus 7 all with this overlapping one of basic annulus 6 to modulate annulus 8 circumscribed, to modulate annulus 8 crossing with two other, Fig. 4 (d) represents that in elementary cell, 3 sub-annulus 7 intersect, but every sub-annulus 7 all with this overlapping two of basic annulus 6 to modulate annulus 8 circumscribed, to modulate annulus 8 crossing with another one.
The metal ring array of the intersection angular distribution be made up of two kinds of diameter annulus is used in metallic mesh, when ensureing that light transmittance is identical, compared with only having the structure of single diameter circle ring array, need the diameter increasing basic annulus 6 and modulation annulus 8, senior diffraction energy of the circle ring array of two kinds of diameters all reduces senior the diffraction energy reducing single diameter annulus array structure on the whole; Simultaneously, by the diameter ratio or position relationship that change two annulus, structure is optimized, their senior the order of diffraction is not superposed, thus can effectively regulate senior diffraction energy distribution of metallic mesh array structure, reach the object of homogenizing senior diffraction energy distribution.Fig. 5 represents the intersection angular distribution metal ring array position relationship change schematic diagram be made up of two kinds of diameter annulus, select based on the intersection angular distribution structure in Fig. 2, Fig. 5 (a) represents modulation circle ring array and substantially there occurs relative rotation between circle ring array, and the anglec of rotation is θ; Fig. 5 (b) represents modulation circle ring array and substantially there occurs relative translation between circle ring array.
Fig. 6, Fig. 7 represent that the circumscribed connection of two annulus or inscribe are communicated with respectively, overlapping or arrange the metal that (as covered) ensure reliably to electrically connect between metal ring tangent point, to guarantee that between tangent metal ring, contiguity is communicated with conduction by lines.Wherein, when Fig. 6 (a) (b) (c) is illustrated respectively in circumscribed connection, two annulus are seamless overlapping configuration schematic diagram: Fig. 6 (a) is the seamless overlapping ordinary circumstance of two annulus, namely the distance of center circle of two annulus be less than two annulus circumscribed time distance of center circle, and be greater than two annulus circumscribed time distance of center circle and the difference of two annulus line thickness sums, Fig. 6 (b) is seamless overlapping a kind of special circumstances, the inside and outside contour of two annulus lines is mutually circumscribed, Fig. 6 (c) is seamless overlapping another kind of special circumstances, the distance of center circle of two annulus equal two annulus circumscribed time distance of center circle and the difference of two annulus line thickness sums, namely the Internal periphery of two annulus lines is circumscribed, and because two annulus are circumscribed in Fig. 6 (d), therefore need to arrange the connection metal 9 ensureing reliably to electrically connect between metal ring tangent point at point of contact place.Fig. 7 (a) (b) is illustrated respectively in two annulus when inscribe is communicated with is that seamless overlapping configuration schematic diagram: Fig. 7 (a) represents the seamless overlapping ordinary circumstance of two annulus when inscribe is communicated with, namely the distance of center circle when distance of center circle of two annulus is greater than two annulus inscribes, and distance of center circle when being less than two annulus inscribes and diameter compared with large circle line thickness and, Fig. 7 (b) represents the seamless overlapping a kind of special circumstances of two annulus when inscribe is communicated with, the distance of center circle when distance of center circle of two annulus equals two annulus inscribes and diameter compared with large circle line thickness and, the i.e. outline inscribe of two annulus lines, and Fig. 7 (c) represents that diameter is compared with the outline of small circle ring lines and the diameter Internal periphery inscribe compared with large circle lines, now need to arrange the connection metal 9 ensureing reliably to electrically connect between metal ring tangent point at point of contact place.In addition, if two annulus seamless overlapping time two metal rings overlapping area less, be not enough to guarantee to have between two metal rings to electrically connect reliably, also need to arrange the metal ensureing reliably to electrically connect between metal ring point of contact at point of contact place, to guarantee the circumscribed connection or the inscribe connection that realize becket.And shown in Fig. 6 (d) He Fig. 7 (c), be a kind of preferred point of contact place metal connected mode, the connection metal 9 that point of contact place covers is rectangle, the length of side of rectangle is greater than becket line thickness, rectangle will make rectangle limit drop on completely in becket lines when covering junction, point of contact, and its opposite side will drop in another tangent becket lines completely.According to different processing methods and technological level, annulus point of contact place also can adopt the connection metal of other form, electrically connects reliably as long as two tangent beckets can be made to have.
In the present invention, for reaching the object of the stray light that homogenizing senior diffraction causes, as a kind of preferred version, the diameter of elementary cell neutron annulus 7 is identical, and the angle that the center of circle of adjacent sub-annulus 7 and basic annulus 6 circle center line connecting form is equal; On this basis, sub-annulus 7 number in different elementary cell is identical, equal diameters.As a special case of this preferred version, sub-annulus 7 relative position in different elementary cell is identical, and forms two-dimensional metallic net grid 5 by the arrangement of triangular arranged contiguity after an elementary cell copies.In order to realize the stray light effect that good homogenizing senior diffraction causes, as another special case of this preferred version, sub-annulus 7 relative position in neighboring unit cells in the present invention in metallic mesh 5 is different, and two-dimensional metallic net grid are formed by the arrangement of triangular arranged contiguity after an elementary cell copies, wherein any one elementary cell rotates to an angle around self basic annulus 6 center of circle in two dimensional surface relative to its neighboring unit cells, can be identical relative to the angle that neighboring unit cells rotates with any elementary cell in a line; Such as, Fig. 8 is a kind of rotation mode schematic diagram of the relative neighboring unit cells of elementary cell of the present invention, wherein the elementary cell of metallic mesh contains the sub-annulus 7 of 5 same diameter, the angle that every sub-annulus 7 and the center of circle of adjacent sub-annulus 7 and basic annulus 6 circle center line connecting circumscribed with adjacent sub-annulus 7 form is equal, have rotated 18 ° of angles successively with the relative neighboring unit cells of elementary cell each in a line.
Fig. 9 and Figure 10 is respectively US Patent No. 4871220 existing grid grid structural representation and its senior diffraction and relative intensity distribution schematic diagram thereof, Figure 11 and Figure 12 is respectively patent 200610010066.4 existing circular ring net grid structural representation and its senior diffraction and relative intensity distribution schematic diagram thereof; Figure 13 and Figure 14 is respectively metallic mesh structural representation and its senior diffraction and the relative intensity distribution schematic diagram thereof of option A in the present invention, the position relationship modulating circle ring array and basic circle ring array in the intersection angular distribution metal ring array in the present invention makes that there is multiple preferred version owing to can carry out adjustment, here option A is not containing the intersection angular distribution metal ring array structure of sub-annulus 7, and the typical structure relatively described in Fig. 2, modulate circle ring array in option A and basic circle ring array adopts comparatively general position relationship exemplarily; Figure 15 and Figure 16 is respectively metallic mesh structural representation and its senior diffraction and the relative intensity distribution schematic diagram thereof of preferred version B in the present invention, metallic mesh in preferred version B is selected the structure described in Fig. 8 as elementary cell but is not relatively rotated between each elementary cell, and basic annulus 6 and modulation annulus 8 diameter and position relationship meet the typical structure described in Fig. 2, namely basic annulus 6 and modulation annulus 8 diameter are than meeting
the array direction angle of two kinds of metal rings differs 30 °, and modulates in annulus 8 and always form donut structure by the basic annulus 6 of correspondence with it; Figure 17 and Figure 18 is respectively metallic mesh structural representation and its senior diffraction and the relative intensity distribution schematic diagram thereof of preferred version C in the present invention, preferred version C and preferred version B uniquely unlike, the neighboring unit cells of preferred version C rotates according to the rotation mode shown in Fig. 8.
In order to illustrate that the present invention to distribute active superiority at homogenizing senior diffraction energy, based on scalar diffraction theory, theory calculate is carried out to senior diffraction energy distribution situation of above-mentioned five kinds of structures and senior the maximum relative intensity of diffraction, the light transmittance of each structure identical (being 95.4%) is made during calculating, its zero level relative intensity is 91%, and namely imaging useful information ratio is identical.Figure 10, Figure 12, Figure 14, Figure 16, Figure 18 sets forth senior diffraction homogenization degree of five kinds of structures, show: option A, preferred version B and the metallic mesh structure in preferred version C are compared with grid, circular ring net grid, and senior time the maximum relative intensity of diffraction obviously reduces, and obviously increase in the identical number investigating senior diffraction spot in interval, thus avoid senior diffraction energy and concentrate on problem in the minority order of diffraction time, make senior diffraction energy distribution more even, Figure 19 is the concrete numerical value of senior the maximum relative intensity of diffraction of above-mentioned five kinds of structures, visible, senior the maximum relative intensity of diffraction of grid metallic mesh structure is obviously higher relative to other structures, senior the maximum relative intensity of diffraction of the metallic mesh structure corresponding to the solution of the present invention A obviously reduces, 0.0131% is dropped to from 0.0259% (senior the maximum relative intensity of diffraction of existing circular ring net grid structure), reduce 49%, the homo-effect of senior diffraction is obvious, highlight the advantage of the metal ring intersection angular distribution of two kinds of different-diameters, preferred version B is compared with option A, senior the maximum relative intensity of diffraction of metallic mesh structure reduces further, 0.0076% is dropped to from 0.0131% (senior the maximum relative intensity of diffraction of option A), reduce 42%, complete the further homogenizing to senior diffraction, thus prove the metal ring intersection angular distribution of two kinds of different-diameters and sub-annulus acting in conjunction, after each parameter of optimization, to the homogenizing of senior diffraction, there is remarkable result, preferred version C is compared with preferred version B, senior the maximum relative intensity of diffraction of its metallic mesh structure reduces once again, 0.0039% is dropped to from 0.0076% (senior the maximum relative intensity of diffraction of preferred version B), reduce 49%, and reduce 85% relative to senior the maximum relative intensity of diffraction of existing circular ring net grid structure, further demonstrate metallic mesh structure of the present invention, to homogenizing senior diffraction energy distribution, there is significant effect, not only be better than US Patent No. 4871220 existing grid metallic mesh structure, also patent 200610010066.4 existing annulus metallic mesh structure is better than.
Building form of the present invention, make mesh relatively average, while senior the diffraction energy distribution of degree of depth homogenizing, still there is good light transmission and shielding properties, when for constructing double-level-metal net grid structure, the contradictory problems of light transmittance and shield effectiveness can be improved, meanwhile, due to the distribution of single layer structure degree of depth homogenizing of the present invention senior diffraction energy, can to solve again in existing double-level-metal net grid structure due to the restriction of monolayer net grid structure can not the problem that distributes of homogenizing senior diffraction energy further.
Metallic mesh 5 in the electromagnetic shielding optical window with the intersection angular distribution metal ring array of the sub-annulus of inscribe of the present invention can adopt following processing method processing and fabricating: make mask by modes such as electron-beam direct writings, optical window transparent substrate 4 carries out cleaning rear chromium plating or titanium as adhesive linkage 1, metal-coated films on it, then photoresist is applied, manufactured mask is utilized to carry out photoetching, finally carry out dry method or wet etching, after removing photoresist, obtain net gate pattern.Also can save mask manufacture link, and directly adopt the way of laser direct-writing to make the metallic mesh pattern of the intersection angular distribution metal ring array with the sub-annulus of inscribe.Other microelectronic processing technology flow process or binary optical elements Making programme etc. also can be used for making metallic mesh structure of the present invention.
Transparent substrate 4 involved in the present invention is determined by practical application, can be simple glass, quartz glass, infra-red material, transparent resin material etc., basic annulus 6 of the present invention, sub-annulus 7 and modulation annulus 8 metal structure will take suitable processing process to make it to be covered in completely on transparent substrate 4 according to optical window material, and can realize electrically connecting reliably or seal to ensure excellent electro-magnetic screen function with window frame etc.In practical application; transparent substrate 4 with net grid structure of the present invention can plate anti-reflection film to increase transmittancy; also can reduce screening ability at net gate layer plated surface protective layer to prevent from metal structure to be positioned over for a long time in air being corroded or be oxidized, also prevent net gate layer from suffering to scratch, wearing and tearing or other destroy.
Claims (10)
1. there is the intersection angular distribution metal ring array electric magnetic screen optical window of the sub-annulus of inscribe, it is characterized in that: the metallic mesh (5) in electromagnetic shielding optical window is made up of by the arrangement of triangular arranged contiguity respectively the metal ring of two kinds of different-diameters and cross-distribution loads on optical window transparent substrate surface, the circumscribed connection of adjacent rings of same diameter, wherein a kind of metal ring of diameter is as basic annulus (6), basic annulus (6) inside is containing being communicated with its inscribe, the sub-annulus (7) of metal, the sub-annulus (7) that basic annulus (6) is communicated with its inscribe forms the elementary cell of two-dimensional metallic net grid structure jointly, the metal ring of another diameter forms modulation circle ring array as modulation annulus (8), the basic circle ring array formed with elementary cell forms cross-distribution structure, described basic annulus (6), sub-annulus (7) and modulation annulus (8) diameter be millimeter to submillimeter magnitude, described basic annulus (6), sub-annulus (7) and modulate annulus (8) metal wire width be that micron is to sub-micrometer scale, described triangular arranged refers to that the circle center line connecting of three adjacent between two metal rings forms equilateral triangle, described circumscribed connection comprises: 1. circumscribed the and circumscribed point of contact place of two annulus arranges the connection metal (9) be communicated with by two annulus, 2. two annulus are seamless overlapping configuration at junction lines, 3. two annulus are while junction lines are seamless overlapping configuration, arrange the connection metal (9) be communicated with by two annulus at overlapping place, described inscribe is communicated with and comprises: 1. two annulus inscribes and inscribe point of contact place arranges the connection metal (9) be communicated with by two annulus, 2. two annulus are seamless overlapping configuration at junction lines, 3. two annulus are while junction lines are seamless overlapping configuration, arrange the connection metal (9) be communicated with by two annulus at overlapping place.
2. the intersection angular distribution metal ring array electric magnetic screen optical window with the sub-annulus of inscribe according to claim 1, it is characterized in that: in each elementary cell, sub-annulus (7) number is more than or equal to 2, and diameter is identical or different, the angle that the center of circle of adjacent sub-annulus (7) and basic annulus (6) circle center line connecting form is arbitrarily angled, sub-annulus (7) in different elementary cell is equal diameter or non-equal diameter annulus, and number is identical or different.
3. the intersection angular distribution metal ring array electric magnetic screen optical window with the sub-annulus of inscribe according to claim 1, is characterized in that: basic annulus (6) is 1 with the diameter ratio of modulation annulus (8):
and the array direction angle of two kinds of metal ring arrays differs 30 °, the minimum angle of adjacent rings line of centres and horizontal direction when wherein array direction angle is same diameter metal annulus composition two-dimensional metallic net grid.
4. the intersection angular distribution metal ring array electric magnetic screen optical window with the sub-annulus of inscribe according to claim 3, is characterized in that: each modulation annulus (8) always has corresponding basic annulus (6) and its composition donut structure.
5. the intersection angular distribution metal ring array electric magnetic screen optical window with the sub-annulus of inscribe according to claim 1, it is characterized in that: in elementary cell adjacent sub-annulus (7) can circumscribed connection or intersect, modulation annulus (8) the tangent connection or crossing that sub-annulus (7) is overlapping with this elementary cell, described tangent connection is that circumscribed connection or inscribe are communicated with.
6. according to the intersection angular distribution metal ring array electric magnetic screen optical window with the sub-annulus of inscribe according to claim 1 or claim 2, it is characterized in that: the diameter of elementary cell neutron annulus (7) is identical, the angle that the center of circle of adjacent sub-annulus (7) and basic annulus (6) circle center line connecting form is equal; The number of neighboring unit cells neutron annulus (7) is identical, equal diameters.
7. the intersection angular distribution metal ring array electric magnetic screen optical window with the sub-annulus of inscribe according to claim 6, it is characterized in that: sub-annulus (7) relative position in different elementary cell is identical, and form two-dimensional metallic net grid by the arrangement of triangular arranged contiguity after an elementary cell copies.
8. the intersection angular distribution metal ring array electric magnetic screen optical window with the sub-annulus of inscribe according to claim 6, it is characterized in that: in two-dimensional metallic net grid, sub-annulus (7) relative position in neighboring unit cells is different, and two-dimensional metallic net grid are formed by the arrangement of triangular arranged contiguity after an elementary cell copies, wherein any one elementary cell rotates to an angle around self basic annulus (6) center of circle in two dimensional surface relative to its neighboring unit cells.
9. the intersection angular distribution metal ring array electric magnetic screen optical window with the sub-annulus of inscribe according to claim 8, is characterized in that: the angle rotated relative to neighboring unit cells with any elementary cell in a line is identical.
10. the intersection angular distribution metal ring array electric magnetic screen optical window with the sub-annulus of inscribe according to claim 1, it is characterized in that: basic annulus (6), sub-annulus (7), modulation annulus (8) and connection metal (9) are made up of the alloy that electric conductivity is good, and alloy thickness is greater than 100nm.
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| US5084132A (en) * | 1989-04-13 | 1992-01-28 | Chomerics, Inc. | Non-moire' shielded window forming method |
| CN1889822A (en) * | 2006-05-22 | 2007-01-03 | 哈尔滨工业大学 | Electromagnetic screening optical window with circular ring metal meshed gate structure |
| CN101222839A (en) * | 2008-02-04 | 2008-07-16 | 哈尔滨工业大学 | Electromagnetic shielding optical window with double-layer circular ring metal gridding structure |
| CN103369939A (en) * | 2013-06-26 | 2013-10-23 | 中国科学院上海光学精密机械研究所 | Electromagnetic shielding optical window |
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| US5084132A (en) * | 1989-04-13 | 1992-01-28 | Chomerics, Inc. | Non-moire' shielded window forming method |
| CN1889822A (en) * | 2006-05-22 | 2007-01-03 | 哈尔滨工业大学 | Electromagnetic screening optical window with circular ring metal meshed gate structure |
| CN101222839A (en) * | 2008-02-04 | 2008-07-16 | 哈尔滨工业大学 | Electromagnetic shielding optical window with double-layer circular ring metal gridding structure |
| CN103369939A (en) * | 2013-06-26 | 2013-10-23 | 中国科学院上海光学精密机械研究所 | Electromagnetic shielding optical window |
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