CN103763900A - Orthogonal circular ring and sub circular ring array electromagnetic shielding optical window with externally-tangent connecting circular rings - Google Patents

Orthogonal circular ring and sub circular ring array electromagnetic shielding optical window with externally-tangent connecting circular rings Download PDF

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CN103763900A
CN103763900A CN201410051500.8A CN201410051500A CN103763900A CN 103763900 A CN103763900 A CN 103763900A CN 201410051500 A CN201410051500 A CN 201410051500A CN 103763900 A CN103763900 A CN 103763900A
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annulus
sub
basic
connection
circumscribed
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CN103763900B (en
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谭久彬
陆振刚
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Harbin Institute of Technology
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Harbin Institute of Technology
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Abstract

The invention discloses an orthogonal circular ring and sub circular ring array electromagnetic shielding optical window with externally-tangent connecting circular rings, and belongs to the technical field of electromagnetic shielding. Two kinds of metal circular rings of different diameters are used as basic circular rings and the connecting circular rings respectively, tightly connected to form a two-dimensional metallic mesh, and loaded on the surface of a transparent substrate of the optical window. The basic circular rings are orthogonally arranged in a two-dimensional mode and separated from each other in the arrangement direction at equal intervals. A connecting unit is composed of every two connecting circular rings communicated in an externally-tangent mode, and the connecting units are perpendicularly, alternately and orthogonally arranged in a two-dimensional mode. The separated basic circular rings are connected through the connecting units. The basic circular rings are internally provided with sub circular rings communicated with the basic circular rings in an internally-tangent mode, and a basic unit of the structure of the two-dimensional mesh is composed of the basic circular rings and the sub circular rings. It is ensured that all the circular rings are mutually conductive at the positions where the circular rings are communicated in a tangent mode through line overlapping or the arrangement of metal capable of ensuring reliable electric linkage between tangency points of the metal rings. According to the structure of the metallic mesh, inhomogeneity of high-level diffraction light distribution of the mesh can be remarkably reduced, so that distribution of stray light caused by diffraction is more even, and the influence on imaging is smaller.

Description

There is orthogonal annulus and the sub-circle ring array electromagnetic shielding optical window of circumscribed connection annulus
Technical field
The invention belongs to optical clear part electromagnetic shielding field, particularly a kind of orthogonal annulus and sub-circle ring array electromagnetic shielding optical window with circumscribed connection annulus.
Background technology
Along with the broadening of electromagnetic wave application frequency spectrum and the increase of intensity, the requirement of the electromagnetic shielding optical window to field application such as space flight and aviation equipment, advanced optical instrument, communication apparatus, medical diagnostic equipment and secret facilities is more and more higher, mainly that requirement optical window is when having superpower broadband electromagnetic shielding ability, also there is high light transmittance, the smaller the better on the impact of optical imagery, observation, detection.Such as, the optical window of aircraft in space flight and aviation equipment field, must high-quality realize the inside and outside electromagnetic signal isolation in cabin, shield on the one hand external electromagnetic interference and harmful electromagnetic signal, in order to avoid cause cabin inner electronic equipment to lose efficacy, while preventing on the one hand cabin inner electronic equipment work, electromagnetic signal appears optical window and causes electromagnetic leakage, but the light transmission of the optical window indispensable function that is it, optical window is carried out to electromagnetic shielding and should reduce as much as possible the impact on its transparency, particularly do not affect as much as possible optical detection or optical imagery function; Similarly, the optical window of advanced optical instrument also will have high as far as possible light transmittance and the impact of alap image quality, to realize detection and the measurement of high-quality, will prevent the impact of electromagnetic interference on instrument internal photoelectric detector simultaneously; For the secret Architectural Equipment of Party and government offices, military commanding place, important R&D institution, need to be to the glass pane in its house when guaranteeing daylighting, carry out design of Electromagnetic Shielding, important information is divulged a secret to propagating to cause outside window with electromagnetic radiation form when preventing the electronic device works such as indoor electric brain; Medical electromagnetism isolation ward optical window will guarantee the overwhelming majority conductively-closeds of indoor electromagnetic wave and prevent that field operation personnel from being impaired one's health by electromagenetic wave radiation for a long time, etc.At present the electromagnetic shielding of this class optical window mainly adopt transparent conductive film, metal inducement transmission-type multi-layer film structure, with resistance type frequency-selective surfaces with there is millimeter metallic mesh in submillimeter cycle etc.
Transparent conductive film is a kind of transparent metal oxide film take tin indium oxide as main material, is often applied to the occasion that visible light wave range is transparent, but can not take into account wider transmission region, though it is not strong to have wider micro-wave screening wave band screening ability.Metal inducement transmission-type multi-layer film structure adopts multi-layer thin metal film and deielectric-coating composite construction to realize shielding electromagnetic waves, and stronger to low frequency microwave screening ability, transmission region is mainly visible ray and ultraviolet light, but light transmittance is not high.Frequency-selective surfaces adopts periodically resonant element structure realization band to lead to or band stop filter function, because its metal coverage rate is higher, interference electromagnetic wave beyond reflective operation frequency band well, but optics light transmittance is lower, reduce the image quality of optical detection, to optical imagery processing, pattern recognition, target search and tracking, brought difficulty.In sum, meet broadband high transmission rate and two requirements of wide-band electromagnetic shielding of optical window, all there is obvious deficiency in above-mentioned each technical scheme simultaneously.Comparatively speaking, there is millimeter metallic mesh in submillimeter cycle, because its period ratio disturbs electromagnetic wavelength much smaller, can realize stronger low width wave band electromagnetic shielding; And the metallic mesh cycle much larger than optical wavelength, can guarantee the light transmittance of optical region.Therefore, the metallic mesh in millimeter submillimeter cycle has good electrically conducting transparent performance, can meet the requirement of optical window to high transmission rate and wide-band electromagnetic shielding, in optical window electromangnetic spectrum field, is widely used:
1. patent 03135313.5 " a kind of electromagnetic shielding observation window " is combined into electromagnetic armouring structure with substance or multi-metal silk screen and based semiconductor quantum well structure, can realize the shield effectiveness of 10GHz with the interior 50dB of exceeding, this structure reaches more than 50% at the light transmittance of the high regional transmission of visible ray.
2. patent 93242068.0 " electromagnetic shielding glass " is pressed from both sides conductive metal mesh between layer glass, at glass outer side, with conductive transparent film, makes it to be bonded on window frame of metal to form electromagnetic armouring structure, and this structure has certain daylighting.
3. patent 94231862.5 " without Moire fringe electromagnetic shielding observation window " adopts by the parallel placement of the different wire netting of two number of layers, and their warps or parallel have certain angle, to reach, overcomes Moire fringe phenomenon, realizes the visual field more clearly.
4. patent 02157954.7 " high shielding effect Tempest glass " respectively has one deck polycarbonate film in woven wire both sides, the each one deck glass that attaches in film outside, last hot pressing forms electromagnetic armouring structure, and this structure, in the situation that light transmittance reaches 60%, has stronger shield effectiveness.
5. patent 200610084149.8 " electromagnetic shielded film and manufacture method thereof " has been described a kind of high transparency electromagnetic wave shield film with metal mesh pattern being formed by photoetching process, and the main purpose of this invention is to reduce metal consumption and overcomes to use between metal level and film substrate to solidify the environmental pollution that glue causes.
6. U.S. Pat 4871220 " Short wavelength pass filter having a metal mesh on a semiconducting substrate " has been described a kind of metallic mesh with square structure, for realizing the anti-electromagnetic interference performance of optical window.
7. patent 201010239355.8 " a kind of electromagnetic shielding conformal optical window with longitude and latitude shape net grid structure " has been described a kind of conformal electromagnetic shielding optical window with longitude and latitude shape metallic mesh structure of realizing by metallic mesh technology and conformal optics window setting technique, mainly solve the Structure Designing Problem of conformal optics window metallic mesh, improve the capability of electromagnetic shielding of conformal optics window.
8. patent 200610010066.4 " has the electromagnetic shielding optical window of annulus metallic mesh structure " and has described a kind of metallic mesh unit with annulus profile, for realizing the electro-magnetic screen function of optical window; Compare individual layer grid metallic mesh, light transmittance and screening ability are improved, and the stray light that senior diffraction causes has also obtained certain homogenizing.
9. patent 200810063988.0 " a kind of electromagnetic shielding optical window with double-layer pane metallic mesh structure " has been described and a kind ofly by the identical grid metallic mesh of structural parameters or woven wire, has been placed in parallel in the electromagnetic shielding optical window that optical window or transparent substrates both sides form, when not reducing light transmittance, increased substantially electromagnetic shielding efficiency.
10. patent 200810063987.6 " a kind of electromagnetic shielding optical window with double-layer circular ring metallic mesh structure " has been described and a kind ofly by two-layer annulus metallic mesh, has been loaded on the electromagnetic shielding optical window that optical window both sides form, and solves the problem that high transmission rate and strong electromagnetic shield effectiveness can not be taken into account simultaneously.
Hub-spoke-type structure based on annulus unit of people's exploitations such as 11. U.S. Battelle research institute Jennifer I.Halman and perceptual metallic mesh (the Jennifer I.Halman etc. of the overlapping structure of many annulus, " Predicted and measured transmission and diffraction by a metallic mesh coating " .Proc.SPIE, 2009,7302:73020Y-1~73020Y-8), and think, this structure can make senior Diffraction fringe distribution homogenizing of net grid, realize low secondary lobe, favourable to imaging.
12. the Ian B.Murray of U.S. Exotic Electro-Optics company, the people such as the Victor Densmore of Arizona, USA university and Vaibhav Bora have jointly reported the perceptual net grid of hub-spoke-type structure and the overlapping structure of many annulus have been introduced to impact (the Ian B.Murray on diffraction characteristic after stochastic parameter distribution design, Victor Densmore, the people such as Vaibhav Bora, " Numerical comparision of grid pattern diffraction effects through measurement and modeling with OptiScan software ", Proc.SPIE, 2011, 8016:80160U-1~80160U-15), point out each ring interval and diameter random value within the specific limits, be conducive to improve the uniformity of senior Diffraction fringe distribution.
Above-mentioned each scheme, due to the core devices that adopts metallic mesh (or woven wire) as shielding, can realize good effectiveness and certain light transmittance.But adopt metallic mesh (or woven wire) as electromagnetic armouring structure, be just inevitably subject to the impact of net grid at optical region diffraction.Because cycle of metallic mesh is in millimeter or submillimeter magnitude, be to realize higher light transmittance, its metal wire width is generally in micron and sub-micrometer scale, and such structural parameters have very strong diffraction effect at optical region.Incident light overwhelming majority energy is by metallic mesh transmission, transmissive portion comprises zero order diffracted light and senior diffraction light, and conventionally, zero level time diffraction light is the useful information for imaging and observation, senior time diffraction light forms stray light, and imaging and detection are produced to interference.Therefore, should improve as much as possible the zero level time shared proportion of diffraction light, meanwhile, under senior the inevitable prerequisite occurring of diffraction light, make as far as possible senior diffraction light distribution more even, the stray light of its formation becomes more uniform background or noise.
Metal current net grid are mainly traditional grid grid structure, (structure of patent 7 is because processing is on curved surface for the structure mainly adopting as above-mentioned patent 1-6, a kind grid structure), there is intrinsic contradiction in grid grid structure transmittancy and screening ability, be difficult to take into account high transmission rate and strong electromagnetic shield effectiveness simultaneously, particularly senior diffraction energy of grid grid mainly concentrates on mutually perpendicular diaxon, image quality is had a certain impact, and the occasion even requiring at high imaging quality is difficult to application.Change net grid diffraction characteristic and generally need to change its architectural feature, above-mentioned patent 200610010066.4 " has the electromagnetic shielding optical window of annulus metallic mesh structure " and proposes to be built into annulus metallic mesh with metal ring, improve senior diffraction energy of grid metallic mesh and concentrated the shortcoming distributing, and can alleviate the contradiction of its transmittancy and screening ability.In above-mentioned document 11 and 12, the people such as the people such as Jennifer I.Halman and Ian B.Murray, the uniformity that metallic mesh structure based on annulus unit improves senior Diffraction fringe distribution has also all been proposed, but the people's such as Jennifer I.Halman research is also monocycle annulus arrangement architecture, and orientation is determined, it is to regulating the effect of senior diffraction and structure that patent 200610010066.4 proposes suitable, and although the people's such as Ian B.Murray research further, random overlapping circular ring structure is proposed, make circle diameter and spacing random distribution value within the specific limits, realize and further improve senior Diffraction fringe distribution uniformity, but the random distribution of circle diameter and spacing has changed the uniformity that mesh distributes, to damage electromagnetic shielding efficiency.
Along with the complexity day by day of electromagnetic environment, the requirement of the transmittancy to electromagnetic shielding optical window and electromagnetic shielding ability is improving constantly, especially at Aero-Space equipment field and advanced optical instrument field, when having required optical window to reach 95% even higher light transmittance, also there is extremely low image quality impact, lower than the microwave frequency range of 20GHz, realizing shield effectiveness more than 30dB, this makes existing technology be difficult to realize.The both sides that patent 200810063988.0 and patent 200810063987.6 have all adopted double-level-metal net grid to be placed in parallel in optical window transparent substrate or substrate form, double layer of metal net grid have identical unit profile and structural parameters, by optimizing the spacing of two layers of mesh grid, realize when not reducing light transmittance, increased substantially electromagnetic shielding efficiency.But senior diffraction stray light of this Double-level Reticulated grid structure distributes, still identical with light transmittance individual layer net grid are suitable, not exclusively meet the requirement that the fields such as following Aero-Space equipment and advanced optical instrument affect low image quality.
Summary of the invention
The object of the invention is to overcome the deficiency of above-mentioned existing optical window electromangnetic spectrum scheme, particularly for existing individual layer grid metallic mesh, individual layer circular ring net grid, double-layer pane and circular ring net grid, there is stray light that senior diffraction the causes relative concentrated problem that distributes, research and develop a kind of orthogonal annulus and sub-circle ring array electromagnetic shielding optical window with circumscribed connection annulus, reach and realize the degree of depth homogenizing of senior diffraction and the object that extremely low image quality affects.
The technical solution used in the present invention is: adopt a kind of orthogonal annulus and sub-circle ring array electromagnetic shielding optical window with circumscribed connection annulus, the metallic mesh in electromagnetic shielding optical window by the metal ring of two kinds of different-diameters respectively as basic annulus be connected annulus and connect airtight arrangement and form and load on optical window transparent substrate surface; Basic annulus press two-dimensional quadrature arrangement and in orientation uniformly-spaced from; By the connection annulus of two circumscribed connections, forming linkage unit arranges by vertical alternately two-dimensional quadrature; Adjacent basic annulus is connected by linkage unit, and the two-dimensional quadrature orientation of linkage unit is identical with the two-dimensional quadrature orientation of basic annulus; The array spacings of linkage unit is identical with basic annulus array spacings, each basic annulus all of the linkage unit adjacent with four is connected the circumscribed connection of annulus, one of each linkage unit connects annulus basic annulus circumscribed be communicated with adjacent with two, another connection annulus of this linkage unit and another two adjacent circumscribed connections of basic annulus; In each basic annulus, be provided with its inscribe be communicated with, the sub-annulus of metal, the sub-annulus that described basic annulus is communicated with its inscribe forms the elementary cell of two-dimensional metallic net grid structure jointly; The diameter of described basic annulus, connection annulus and sub-annulus is millimeter and submillimeter magnitude, and the metal wire width of described basic annulus, connection annulus and sub-annulus is micron and sub-micrometer scale; Described vertical alternately two-dimensional quadrature is arranged and is referred to that linkage unit arranges by two-dimensional quadrature, two connection annulus circle center line connecting directions of linkage unit are identical with the two-dimensional quadrature orientation of linkage unit, and orthogonal along two connection annulus circle center line connecting directions of adjacent linkage unit in two-dimensional quadrature orientation; Described circumscribed connection comprises: 1. place, the circumscribed and circumscribed point of contact of two annulus arranges the connection metal that two annulus are communicated with, 2. two annulus are seamless overlapping structure at junction lines, 3. two annulus, when junction lines are seamless overlapping structure, arrange the connection metal that two annulus are communicated with at overlapping place; Described inscribe is communicated with and comprises: 1. two annulus inscribes and place, inscribe point of contact arrange the connection metal that two annulus are communicated with, 2. two annulus are seamless overlapping structure at junction lines, 3. two annulus, when junction lines are seamless overlapping structure, arrange the connection metal that two annulus are communicated with at overlapping place.
The above-mentioned orthogonal annulus with circumscribed connection annulus and sub-circle ring array electromagnetic shielding optical window, in described each elementary cell, sub-annulus number is more than or equal to 2, and diameter is identical or different, the angle that the center of circle of adjacent sub-annulus and basic annulus circle center line connecting form is arbitrarily angled, sub-annulus in different elementary cells is equal diameter or non-equal diameter annulus, and number is identical or different.
The above-mentioned orthogonal annulus with circumscribed connection annulus and sub-circle ring array electromagnetic shielding optical window, in described elementary cell, adjacent sub-annulus can circumscribed connection or crossing.
As a kind of preferred structure, the above-mentioned orthogonal annulus with circumscribed connection annulus and sub-circle ring array electromagnetic shielding optical window, the diameter of described elementary cell neutron annulus is identical, and the angle that the center of circle of adjacent sub-annulus and basic annulus circle center line connecting form equates.
As a kind of preferred structure, the above-mentioned orthogonal annulus with circumscribed connection annulus and sub-circle ring array electromagnetic shielding optical window, the sub-annulus number in described different elementary cells is identical, equal diameters.
As a kind of preferred structure, the above-mentioned orthogonal annulus with circumscribed connection annulus and sub-circle ring array electromagnetic shielding optical window, the sub-annulus relative position in described different elementary cells is identical, and by two-dimensional quadrature, arranges after being copied by an elementary cell.
As a kind of preferred structure, the above-mentioned orthogonal annulus with circumscribed connection annulus and sub-circle ring array electromagnetic shielding optical window, sub-annulus relative position difference in described neighboring unit cells, and by two-dimensional quadrature, arrange after being copied by an elementary cell in two-dimensional metallic net grid, wherein any one elementary cell rotates to an angle around self basic annulus center of circle in two dimensional surface with respect to its neighboring unit cells.
As a kind of preferred structure, the above-mentioned orthogonal annulus with circumscribed connection annulus and sub-circle ring array electromagnetic shielding optical window, the angle that any elementary cell in described same a line is rotated relative to neighboring unit cells is identical.
The above-mentioned orthogonal annulus with circumscribed connection annulus and sub-circle ring array electromagnetic shielding optical window, described basic annulus, connection annulus, sub-annulus and connection metal form by the good alloy of electric conductivity, and alloy thickness is greater than 100nm.
The above-mentioned orthogonal annulus with circumscribed connection annulus and sub-circle ring array electromagnetic shielding optical window, described adhesive linkage forms with chromium or titanium material.
Novelty of the present invention and good result are:
Novelty of the present invention is: the metallic mesh in electromagnetic shielding optical window by the metal ring of two kinds of different-diameters respectively as basic annulus be connected annulus and connect airtight arrangement and form and load on optical window transparent substrate surface; Basic annulus press two-dimensional quadrature arrangement and in orientation uniformly-spaced from; By the connection annulus of two circumscribed connections, forming linkage unit arranges by vertical alternately two-dimensional quadrature; Adjacent basic annulus is connected by linkage unit, and the two-dimensional quadrature orientation of linkage unit is identical with the two-dimensional quadrature orientation of basic annulus; The array spacings of linkage unit is identical with basic annulus array spacings, each basic annulus all of the linkage unit adjacent with four is connected the circumscribed connection of annulus, one of each linkage unit connects annulus basic annulus circumscribed be communicated with adjacent with two, another connection annulus of this linkage unit and another two adjacent circumscribed connections of basic annulus; In each basic annulus, be provided with its inscribe be communicated with, the sub-annulus of metal, the sub-annulus that described basic annulus is communicated with its inscribe forms the elementary cell of two-dimensional metallic net grid structure jointly; The diameter of described basic annulus, connection annulus and sub-annulus is millimeter and submillimeter magnitude, and the metal wire width of described basic annulus, connection annulus and sub-annulus is micron and sub-micrometer scale; Described vertical alternately two-dimensional quadrature is arranged and is referred to that linkage unit arranges by two-dimensional quadrature, two connection annulus circle center line connecting directions of linkage unit are identical with the two-dimensional quadrature orientation of linkage unit, and orthogonal along two connection annulus circle center line connecting directions of adjacent linkage unit in two-dimensional quadrature orientation; Described circumscribed connection comprises: 1. place, the circumscribed and circumscribed point of contact of two annulus arranges the connection metal that two annulus are communicated with, 2. two annulus are seamless overlapping structure at junction lines, 3. two annulus, when junction lines are seamless overlapping structure, arrange the connection metal that two annulus are communicated with at overlapping place; Described inscribe is communicated with and comprises: 1. two annulus inscribes and place, inscribe point of contact arrange the connection metal that two annulus are communicated with, 2. two annulus are seamless overlapping structure at junction lines, 3. two annulus, when junction lines are seamless overlapping structure, arrange the connection metal that two annulus are communicated with at overlapping place.Senior the diffraction energy that the good result that novelty of the present invention produces mainly concentrates on homogenizing metallic mesh distributes, specific as follows:
In metallic mesh, basic annulus is arranged as basic arrangement mode with two-dimensional quadrature, and the vertical alternately two-dimensional quadrature that connects the linkage unit of annulus formation is arranged, can overcome the concentrated shortcoming distributing of senior diffraction energy that traditional grid metallic mesh exists, there is the characteristic that senior diffraction energy of good homogenizing distributes, basic annulus is arranged alternately two-dimensional quadrature vertical with linkage unit arrangement by two-dimensional quadrature and is connected airtight and arranged by circumscribed connection, the basic structure of common composition metallic mesh, when guaranteeing that light transmittance is identical, compared with only having the structure of single diameter circle ring array, need to increase the diameter of each annulus, senior diffraction energy of each circle ring array all reduces, simultaneously, the circle diameter of each circle ring array can regulate, can effectively senior diffraction energy of metallic mesh array structure be distributed and be regulated, reach the object that senior diffraction energy of homogenizing distributes, this be one of reason of senior diffraction energy distribution of metallic mesh homogenizing of the present invention.
In basic annulus, add sub-annulus composition elementary cell, because the difference of sub-annulus number, diameter and position relationship in each elementary cell, make its short texture, arrange spuious, therefore senior diffraction energy is lower, and senior Diffraction fringe distribution is more even, avoid occurring the concentrated situation about distributing of senior the diffraction energy existing as traditional grid metallic mesh; Meanwhile, when guaranteeing that light transmittance is identical, need further to increase the diameter of basic annulus, connection annulus, reduced on the whole senior diffraction energy of each array; Again because senior diffraction of sub-circle ring array structure generation and basic annulus, to be connected the probability that senior diffraction generation of circle ring array structure superpose very low; Especially further after Optimal Parameters, senior the diffraction that their energy are higher do not superpose, thus homogenizing senior diffraction energy distribute, this be senior diffraction energy of metallic mesh homogenizing of the present invention distribute former therefore two.
Each elementary cell can rotate to an angle centered by the center of circle of the basic annulus of its correspondence, do not change the aperture ratio of metallic mesh and then do not affect light transmittance, but can further modulate senior order of diffraction Energy distribution, further senior diffraction energy of homogenizing distributes, this be senior diffraction energy of metallic mesh homogenizing of the present invention distribute former therefore three.
To sum up, metallic mesh structure of the present invention can realize the degree of depth homogenizing that senior diffraction energy of net grid distributes, and this is the most outstanding effect of the present invention.In addition, by basic annulus, connect the uniformity that annulus connects airtight the metal ring structure of arranging and sub-circular ring structure acting in conjunction and effectively improved round metal looped network grid structures, and when elementary cell rotates to an angle centered by the center of circle of basic annulus corresponding to its elementary cell, when senior order of diffraction Energy distribution carried out to effectively modulation, substantially do not affect effectiveness, even in some preferred version, can improve effectiveness.
Accompanying drawing explanation
Fig. 1 is a kind of preferred structure generalized section with orthogonal annulus and the sub-circle ring array electromagnetic shielding optical window of circumscribed connection annulus.
Fig. 2 is the vertical alternately two-dimensional quadrature distribution schematic diagram of linkage unit.
Fig. 3 is basic annulus and be connected annulus and connect airtight to arrange and form metallic mesh basic structure schematic diagram.
The elementary cell preferred structure schematic diagram that Fig. 4 is comprised of basic annulus and sub-annulus.
Fig. 5 is the circumscribed mode of communicating schematic diagram of two annulus.
Fig. 6 is two annulus inscribe mode of communicating schematic diagrames.
Fig. 7 is a kind of rotation mode schematic diagram of elementary cell of the present invention.
Fig. 8 is existing grid grid structural representation.
Fig. 9 is existing senior diffraction of grid grid and relative intensity distribution schematic diagram thereof.
Figure 10 is existing circular ring net grid structural representation.
Figure 11 is existing senior diffraction of circular ring net grid and relative intensity distribution schematic diagram thereof.
Figure 12 is the metallic mesh structural representation of preferred version A in the present invention.
Figure 13 is senior diffraction of the metallic mesh of preferred version A in the present invention and relative intensity distribution schematic diagram thereof.
Figure 14 is the metallic mesh structural representation of preferred version B in the present invention.
Figure 15 is senior diffraction of the metallic mesh of preferred version B in the present invention and relative intensity distribution schematic diagram thereof.
Figure 16 is that senior diffraction maximal phase of four kinds of net grid structures is to intensity contrast figure.
Piece number explanation in figure: the 1. basic annulus 7. of adhesive linkage 2. protective layer 3. anti-reflection film 4. transparent substrate 5. metallic mesh 6. connects sub-annulus 9. connection metals of annulus 8.
Embodiment
With preferred embodiment, the present invention is further described with reference to the accompanying drawings:
There is orthogonal annulus and the sub-circle ring array electromagnetic shielding optical window of circumscribed connection annulus, the metallic mesh 5 in electromagnetic shielding optical window by the metal ring of two kinds of different-diameters respectively as basic annulus 6 be connected annulus 7 and connect airtight arrangement and form and load on optical window transparent substrate surface; Basic annulus 6 press two-dimensional quadrature arrangement and in orientation uniformly-spaced from; By the connection annulus 7 of two circumscribed connections, forming linkage unit arranges by vertical alternately two-dimensional quadrature; Adjacent basic annulus 6 is connected by linkage unit, and the two-dimensional quadrature orientation of linkage unit is identical with the two-dimensional quadrature orientation of basic annulus 6; The array spacings of linkage unit is identical with basic annulus array spacings, each basic annulus 6 all of the linkage unit adjacent with four is connected the circumscribed connection of annulus 7, one of each linkage unit connects annulus 7 basic annulus 6 circumscribed be communicated with adjacent with two, another connection annulus 7 of this linkage unit and another two adjacent circumscribed connections of basic annulus 6; In each basic annulus 6, be provided with its inscribe be communicated with, the sub-annulus 8 of metal, the common elementary cell that forms two-dimensional metallic net grid structure of sub-annulus 8 that described basic annulus 6 is communicated with its inscribe; Described basic annulus 6, to connect annulus 7 be millimeter and submillimeter magnitude with the diameter of sub-annulus 8, described basic annulus 6, connects annulus 7 and the metal wire width of sub-annulus 8 and be micron and sub-micrometer scale; Described vertical alternately two-dimensional quadrature is arranged and is referred to that linkage unit arranges by two-dimensional quadrature, two connection annulus 7 circle center line connecting directions of linkage unit are identical with the two-dimensional quadrature orientation of linkage unit, and orthogonal along two connection annulus 7 circle center line connecting directions of adjacent linkage unit in two-dimensional quadrature orientation; Described circumscribed connection comprises: 1. place, the circumscribed and circumscribed point of contact of two annulus arranges the connection metal 9 that two annulus are communicated with, 2. two annulus are seamless overlapping structure at junction lines, 3. two annulus, when junction lines are seamless overlapping structure, arrange the connection metal 9 that two annulus are communicated with at overlapping place; Described inscribe is communicated with and comprises: 1. two annulus inscribes and place, inscribe point of contact arrange the connection metal 9 that two annulus are communicated with, 2. two annulus are seamless overlapping structure at junction lines, 3. two annulus, when junction lines are seamless overlapping structure, arrange the connection metal 9 that two annulus are communicated with at overlapping place; Described transparent substrate 4 can be any transparent material, as long as it can, as the transparent optical window material that meets use occasion requirement, can be processed metallic mesh 5 thereon by certain technological process simultaneously; According to technological process, metallic mesh 5 can be carried in transparent substrate 4 surfaces by adhesive linkage 1; Individual layer or multi-layered antireflection coating 3 strengthen the transmittancy of optical window, the protective layer 2 of individual layer or multilayer, and object is to prevent that metal part long term exposure from causing corrosion and oxidation in air, reduces screening ability, also prevents that metallic mesh 5 is scratched simultaneously.
Orthogonal annulus and the sub-circle ring array electromagnetic shielding optical window with circumscribed connection annulus of the present invention, by the connection annulus 7 of two circumscribed connections, forming linkage unit arranges by vertical alternately two-dimensional quadrature, described vertical alternately two-dimensional quadrature is arranged and is referred to that two connection annulus 7 circle center line connecting directions of linkage unit are identical with the two-dimensional quadrature orientation of linkage unit, and two connection annulus 7 circle center line connecting directions along adjacent linkage unit in two-dimensional quadrature orientation are orthogonal, the vertical alternately two-dimensional quadrature distribution schematic diagram of linkage unit is as Fig. 2, figure mid point A, B, C, D is the symmetrical centre of four linkage units, quadrangle ABCD is square.
Orthogonal annulus and the sub-circle ring array electromagnetic shielding optical window with circumscribed connection annulus of the present invention, described basic annulus 6, connection annulus 7 are millimeter and submillimeter magnitude with the diameter of sub-annulus 8, described basic annulus 6, connection annulus 7 are micron and sub-micrometer scale with the metal wire width of sub-annulus 8, to guarantee high transmission rate and good effectiveness.In addition, basic annulus 6, connection annulus 7, sub-annulus 8 form by the good metal of electric conductivity with connection metal 9, and as simple metal and metal alloys such as gold, silver, copper, aluminium, and metal thickness is greater than 100nm.
Orthogonal annulus and the sub-circle ring array electromagnetic shielding optical window with circumscribed connection annulus of the present invention, the metallic mesh 5 in electromagnetic shielding optical window by the metal ring of two kinds of different-diameters respectively as basic annulus 6 be connected annulus 7 and connect airtight arrangement and form; Described basic annulus 6 press two-dimensional quadrature arrange and in orientation uniformly-spaced from, adjacent basic annulus 6 is connected by linkage unit, the two-dimensional quadrature orientation of linkage unit is identical with the two-dimensional quadrature orientation of basic annulus 6, and the array spacings of linkage unit is identical with basic annulus array spacings; Basic circle ring array and linkage unit array be circumscribed to be connected and to connect airtight and arrange as shown in Figure 3, each basic annulus 6 all of the linkage unit adjacent with four is connected the circumscribed connection of annulus 7, one of each linkage unit connects annulus 7 basic annulus 6 circumscribed be communicated with adjacent with two, another connection annulus 7 of this linkage unit and another two adjacent circumscribed connections of basic annulus 6.
Orthogonal annulus and the sub-circle ring array electromagnetic shielding optical window with circumscribed connection annulus of the present invention, in each elementary cell, sub-annulus 8 numbers are more than or equal to 2, and diameter is identical or different, the angle that the center of circle of adjacent sub-annulus 8 and basic annulus 6 circle center line connectings form is arbitrarily angled, sub-annulus 8 in different elementary cells is equal diameter or non-equal diameter annulus, and number is identical or different; The circumscribed connection of adjacent sub-annulus 8 or crossing in elementary cell.Fig. 4 represents the elementary cell preferred structure schematic diagram being comprised of basic annulus and sub-annulus.In Fig. 4, the diameter of elementary cell neutron annulus 8 is identical, and the angle that the center of circle of adjacent sub-annulus 8 and basic annulus circle center line connecting form equates.Fig. 4 (a) is (b) the circumscribed connection of sub-annulus 8 of same diameter in elementary cell, and Fig. 4 (c) is (d) the crossing connection of sub-annulus 8 of same diameter in elementary cell.
Fig. 5, Fig. 6 represents that respectively the circumscribed connection of two annulus or inscribe are communicated with, overlapping or (as covered) be set guarantee the metal reliably electrically connecting between metal ring tangent point by lines, connects airtight and is communicated with conduction guaranteeing between tangent metal ring.Wherein, Fig. 5 (a) (b) when (c) is illustrated respectively in circumscribed connection two annulus to be seamless overlapping structural representation: Fig. 5 (a) be the seamless overlapping ordinary circumstance of two annulus, the distance of center circle of two annulus is less than the distance of center circle of two annulus when circumscribed, and be greater than the distance of center circle of two annulus when circumscribed and the difference of two annulus line thickness sums, Fig. 5 (b) is seamless overlapping a kind of special circumstances, the inside and outside contour of two annulus lines is mutually circumscribed, Fig. 5 (c) is seamless overlapping another kind of special circumstances, the distance of center circle of two annulus equals the distance of center circle of two annulus when circumscribed and the difference of two annulus line thickness sums, the interior profile of two annulus lines is circumscribed, and in Fig. 5 (d) because two annulus are circumscribed, therefore need to the metal reliably electrically connecting between assurance metal ring tangent point be set at place, point of contact.Fig. 6 (a) is two annulus seamless overlapping ordinary circumstance when two annulus are seamless overlapping structural representation: Fig. 6 (a) and are illustrated in inscribe and are communicated with when being illustrated respectively in inscribe and being communicated with (b), distance of center circle when the distance of center circle of two annulus is greater than two annulus inscribes, and the distance of center circle while being less than two annulus inscribes and diameter compared with large circle line thickness and, the seamless overlapping a kind of special circumstances of two annulus when Fig. 6 (b) is illustrated in inscribe connection, the distance of center circle when distance of center circle of two annulus equals two annulus inscribes and diameter compared with large circle line thickness and, the i.e. outline inscribe of two annulus lines, and Fig. 6 (c) represent diameter compared with the outline of small circle ring lines and diameter compared with the interior profile inscribe of large circle lines, now need to the metal reliably electrically connecting between assurance metal ring tangent point be set at place, point of contact.In addition, if two annulus are seamless when overlapping, the overlapping area of two metal rings is less, being not enough to guarantee has reliably and electrically connects between two metal rings, also need to the metal reliably electrically connecting between assurance metal ring point of contact be set at place, point of contact, to guarantee that the circumscribed connection or the inscribe that realize becket are communicated with.And shown in Fig. 5 (d) and Fig. 6 (c), be place, a kind of preferred point of contact metal connected mode, the connection metal 9 that place, point of contact covers is rectangle, the length of side of rectangle is greater than becket line thickness, rectangle will make a limit of rectangle drop on completely in becket lines while covering junction, point of contact, and its opposite side will drop in another tangent becket lines completely.According to different processing method and technological level, place, annulus point of contact also can adopt the connection metal of other form, as long as can make two tangent beckets have reliably, electrically connects.
In the present invention, for reaching the object of the stray light that senior diffraction of homogenizing cause, as a kind of preferred version, the diameter of elementary cell neutron annulus 8 is identical, and the angle that the center of circle of adjacent sub-annulus 8 and basic annulus 6 circle center line connectings form equates; On this basis, sub-annulus 8 numbers in different elementary cells are identical, equal diameters.As a special case of this preferred version, sub-annulus 8 relative positions in different elementary cells are identical, and after being copied by an elementary cell by two-dimensional quadrature Strip and link cell formation metallic mesh.The stray light effect causing in order to realize senior diffraction of good homogenizing, as another special case of this preferred version, sub-annulus 8 relative position differences in neighboring unit cells in the present invention in metallic mesh 5 arrays, and by two-dimensional quadrature, arrange after being copied by an elementary cell in two-dimensional metallic net grid, wherein any one elementary cell rotates to an angle around self basic annulus 6 center of circle in two dimensional surface with respect to its neighboring unit cells, and the angle of rotating relative to neighboring unit cells with any elementary cell in a line can be identical; For example, Fig. 7 is a kind of rotation mode schematic diagram of the relative neighboring unit cells of elementary cell of the present invention, wherein in the elementary cell of metallic mesh 5, select the circumscribed connection of sub-annulus 8 of 6 same diameter, and the angle that the center of circle of adjacent sub-annulus 8 and basic annulus circle center line connecting form equates, with each elementary cell in a line, relative to neighboring unit cells, has rotated successively 15 ° of angles.
Fig. 8 and Fig. 9 are respectively the existing grid grid of U.S. Pat 4871220 structural representation and its senior diffraction and relative intensity distribution schematic diagram thereof, and Figure 10 and Figure 11 are respectively the existing circular ring net grid of patent 200610010066.4 structural representation and its senior diffraction and relative intensity distribution schematic diagram thereof; Figure 12 and Figure 13 are respectively metallic mesh 5 structural representations and its senior diffraction and the relative intensity distribution schematic diagram thereof of preferred version A in the present invention, basic structure shown in metallic mesh structure choice Fig. 3 of preferred version A also adds 6 sub-annulus composition elementary cells in basic annulus, and not rotation relatively between each elementary cell.Figure 14 and Figure 15 are respectively metallic mesh structural representation and its senior diffraction and the relative intensity distribution schematic diagram thereof of preferred version B in the present invention, the neighboring unit cells of different from preferred version A is preferred version B is rotated according to the rotation mode shown in Fig. 7, and the anglec of rotation is 15 °.
In order to illustrate that the present invention is in senior diffraction energy of homogenizing active superiority that distributes, based on scalar diffraction theory, senior the diffraction energy distribution situation to above-mentioned four kinds of structures and senior the maximum relative intensity of diffraction are carried out theory and are calculated, during calculating, make the light transmittance of each structure identical (being 95.4%), its zero level relative intensity is 91%, and imaging useful information ratio is identical.Metallic mesh structure of the present invention is compared with grid, circular ring net grid, senior time the maximum relative intensity of diffraction obviously reduces, and obviously increase in the identical number of investigating senior diffraction spot in interval, thereby avoided senior diffraction energy to concentrate on the problem in the minority order of diffraction time, make senior diffraction energy distribute more even; Figure 16 is the concrete numerical value of the maximum relative intensity of senior diffraction of above-mentioned four kinds of structures, visible, the maximum relative intensity of senior diffraction of grid metallic mesh structure is obviously higher with respect to other structures, the maximum relative intensity of senior diffraction of the corresponding metallic mesh structure of the solution of the present invention A obviously reduces, from 0.0259% (the maximum relative intensity of senior diffraction of existing circular ring net grid structure), drop to 0.00165%, reduced by 36%, the homo-effect of senior diffraction is obvious; Preferred version B is compared with option A, the maximum relative intensity of senior diffraction of metallic mesh structure further reduces, from 0.0165% (the maximum relative intensity of senior diffraction of preferred version A net grid structure), drop to 0.0043%, reduced by 74%, completed the further homogenizing to senior diffraction, thereby after proving to optimize each parameter, the homogenizing of senior diffraction is had to remarkable result, not only be better than the existing grid metallic mesh of U.S. Pat 4871220 structure, be also better than the existing annulus metallic mesh of patent 200610010066.4 structure.
Building form of the present invention, when senior diffraction energy of degree of depth homogenizing distributes, still there is good light transmission, when when constructing double-level-metal net grid structure, can improve the contradictory problems of light transmittance and shield effectiveness, meanwhile, because senior diffraction energy of single layer structure degree of depth homogenizing of the present invention distributes, can solve again the problem that in existing double-level-metal net grid structure, further senior diffraction energy of homogenizing distributes due to the restriction of individual layer net grid structure.
Metallic mesh 5 in orthogonal annulus and the sub-circle ring array electromagnetic shielding optical window with circumscribed connection annulus of the present invention can adopt following processing method processing and fabricating: by modes such as electron-beam direct writings, make mask, optical window transparent substrate 4 cleans rear chromium plating or titanium as adhesive linkage 1, metal-coated films on it, then apply photoresist, utilize manufactured mask to carry out photoetching, finally carry out dry method or wet etching, after removing photoresist, obtain net gate pattern.Also can save mask manufacture link, and directly adopt the way of laser direct-writing to make, there is the orthogonal annulus of circumscribed connection annulus and the metallic mesh pattern of sub-circle ring array.Other microelectronic processing technology flow process or binary optical elements making flow process etc. also can be used for making metallic mesh structure of the present invention.
Transparent substrate 4 involved in the present invention is determined by practical application, can be simple glass, quartz glass, infra-red material, transparent resin material etc., basic annulus 6 of the present invention, connect annulus 7 and will take suitable processing process to make it to be covered in completely on transparent substrate 4 according to transparent substrate 4 with sub-annulus 8 metal structures, and can electrically connect reliably or seal to guarantee good electro-magnetic screen function with the realization such as window frame.In practical application; with transparent substrate 4 surfaces of net grid structure of the present invention, can plate anti-reflection film and increase transmittancy; also can to prevent metal structure and corroded in being positioned over air for a long time or to be oxidized, reduce screening ability at net grid layer plated surface protective layer, also prevent that net grid layer from suffering to scratch, wearing and tearing or other destruction.

Claims (10)

1. orthogonal annulus and the sub-circle ring array electromagnetic shielding optical window with circumscribed connection annulus, is characterized in that: the metallic mesh (5) in electromagnetic shielding optical window by the metal ring of two kinds of different-diameters respectively as basic annulus (6) be connected annulus (7) and connect airtight arrangement and form and load on optical window transparent substrate surface; Basic annulus (6) press two-dimensional quadrature arrangement and in orientation uniformly-spaced from; By the connection annulus (7) of two circumscribed connections, forming linkage unit arranges by vertical alternately two-dimensional quadrature; Adjacent basic annulus (6) is connected by linkage unit, and the two-dimensional quadrature orientation of linkage unit is identical with the two-dimensional quadrature orientation of basic annulus (6); The array spacings of linkage unit is identical with basic annulus array spacings, each basic annulus (6) all of the linkage unit adjacent with four is connected the circumscribed connection of annulus (7), one of each linkage unit connects annulus (7) basic annulus (6) circumscribed be communicated with adjacent with two, another connection annulus (7) of this linkage unit and another two adjacent circumscribed connections of basic annulus (6); In each basic annulus (6), be provided with its inscribe be communicated with, the sub-annulus (8) of metal, the sub-annulus (8) that described basic annulus (6) is communicated with its inscribe forms the elementary cell of two-dimensional metallic net grid structure jointly; Described basic annulus (6), to connect annulus (7) be millimeter and submillimeter magnitude with the diameter of sub-annulus (8), and described basic annulus (6), the metal wire width that connects annulus (7) and sub-annulus (8) are micron and sub-micrometer scale; Described vertical alternately two-dimensional quadrature is arranged and is referred to that linkage unit arranges by two-dimensional quadrature, two connection annulus (7) circle center line connecting directions of linkage unit are identical with the two-dimensional quadrature orientation of linkage unit, and orthogonal along two connection annulus (7) circle center line connecting directions of adjacent linkage unit in two-dimensional quadrature orientation; Described circumscribed connection comprises: 1. place, the circumscribed and circumscribed point of contact of two annulus arranges the connection metal (9) that two annulus are communicated with, 2. two annulus are seamless overlapping structure at junction lines, 3. two annulus, when junction lines are seamless overlapping structure, arrange the connection metal (9) that two annulus are communicated with at overlapping place; Described inscribe is communicated with and comprises: 1. two annulus inscribes and place, inscribe point of contact arrange the connection metal (9) that two annulus are communicated with, 2. two annulus are seamless overlapping structure at junction lines, 3. two annulus, when junction lines are seamless overlapping structure, arrange the connection metal (9) that two annulus are communicated with at overlapping place.
2. orthogonal annulus and the sub-circle ring array electromagnetic shielding optical window with circumscribed connection annulus according to claim 1, it is characterized in that: in each elementary cell, sub-annulus (8) number is more than or equal to 2, and diameter is identical or different, the angle that the center of circle of adjacent sub-annulus (8) and basic annulus (6) circle center line connecting form is arbitrarily angled, sub-annulus (8) in different elementary cells is equal diameter or non-equal diameter annulus, and number is identical or different.
3. orthogonal annulus and the sub-circle ring array electromagnetic shielding optical window with circumscribed connection annulus according to claim 1 and 2, is characterized in that: in elementary cell, adjacent sub-annulus (8) can circumscribed connection or crossing.
4. orthogonal annulus and the sub-circle ring array electromagnetic shielding optical window with circumscribed connection annulus according to claim 2, it is characterized in that: the diameter of elementary cell neutron annulus (8) is identical, the angle that the center of circle of adjacent sub-annulus (8) and basic annulus (6) circle center line connecting form equates.
5. orthogonal annulus and the sub-circle ring array electromagnetic shielding optical window with circumscribed connection annulus according to claim 4, is characterized in that: sub-annulus (8) number in different elementary cells is identical, equal diameters.
6. orthogonal annulus and the sub-circle ring array electromagnetic shielding optical window with circumscribed connection annulus according to claim 5, it is characterized in that: sub-annulus (8) relative position in different elementary cells is identical, and by two-dimensional quadrature, arrange after being copied by an elementary cell.
7. orthogonal annulus and the sub-circle ring array electromagnetic shielding optical window with circumscribed connection annulus according to claim 5, it is characterized in that: sub-annulus (8) the relative position difference in neighboring unit cells, and by two-dimensional quadrature, arrange after being copied by an elementary cell in two-dimensional metallic net grid, wherein any one elementary cell rotates to an angle around self basic annulus (6) center of circle in two dimensional surface with respect to its neighboring unit cells.
8. orthogonal annulus and the sub-circle ring array electromagnetic shielding optical window with circumscribed connection annulus according to claim 7, is characterized in that: the angle of rotating relative to neighboring unit cells with any elementary cell in a line is identical.
9. orthogonal annulus and the sub-circle ring array electromagnetic shielding optical window with circumscribed connection annulus according to claim 1, it is characterized in that: basic annulus (6), connection annulus (7), sub-annulus (8) and connection metal (9) form by the good alloy of electric conductivity, and alloy thickness is greater than 100nm.
10. orthogonal annulus and the sub-circle ring array electromagnetic shielding optical window with circumscribed connection annulus according to claim 1, is characterized in that: adhesive linkage (1) chromium or titanium material form.
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104834040A (en) * 2015-05-21 2015-08-12 哈尔滨工业大学 Metal mesh frequency selection surface structure and manufacturing method
CN106793731A (en) * 2017-01-03 2017-05-31 哈尔滨工业大学 Middle point type infrared band dual band pass optical window electromagnetic armouring structure

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Publication number Priority date Publication date Assignee Title
KR100315537B1 (en) * 1996-08-30 2002-04-24 우메다 사다오 Window glass with electronic shield performance
CN100403866C (en) * 2006-05-22 2008-07-16 哈尔滨工业大学 Electromagnetic screening optical window with circular ring metal meshed gate structure
CN100556266C (en) * 2008-02-04 2009-10-28 哈尔滨工业大学 A kind of electromagnetic shielding optical window with double-layer circular ring metallic mesh structure

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104834040A (en) * 2015-05-21 2015-08-12 哈尔滨工业大学 Metal mesh frequency selection surface structure and manufacturing method
CN104834040B (en) * 2015-05-21 2017-07-28 哈尔滨工业大学 A kind of metallic mesh frequency-selective surfaces structure and preparation method
CN106793731A (en) * 2017-01-03 2017-05-31 哈尔滨工业大学 Middle point type infrared band dual band pass optical window electromagnetic armouring structure

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