CN103763909B - Arraye electromagnetic shielding optical window with concentric circular ring clusters and internally-tangent sub circular rings - Google Patents
Arraye electromagnetic shielding optical window with concentric circular ring clusters and internally-tangent sub circular rings Download PDFInfo
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- CN103763909B CN103763909B CN201410051750.1A CN201410051750A CN103763909B CN 103763909 B CN103763909 B CN 103763909B CN 201410051750 A CN201410051750 A CN 201410051750A CN 103763909 B CN103763909 B CN 103763909B
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Abstract
The invention discloses an array electromagnetic shielding optical window with concentric circular ring clusters and internally-tangent sub circular rings, and belongs to the technical field of electromagnetic shielding of optical transparent parts such as aerospace devices and advanced optical instruments. The array electromagnetic shielding optical window is characterized in that the concentric circular ring clusters composed of a plurality of circular rings of different diameters are arranged according to an equilateral triangle, tightly connected to form a metallic mesh and loaded on the surface of a transparent substrate of the optical window, external circular rings of the adjacent concentric circular ring clusters are tangent with each other, each concentric circular ring cluster is internally provided with sub circular rings, the sub circular rings are communicated with the external circular rings in an internally-tangent mode, a basic unit of the structure of the two-dimensional metallic mesh is composed of the sub circular rings and the external circular rings, and it is ensured that all the circular rings are mutually conductive at the positions where the circular rings are communicated with the sub circular rings in a tangent mode through line overlapping or the arrangement of metal capable of ensuring reliable electric linkage between tangency points of the metal rings. Compared with structures of existing metallic meshes, the structure of the metallic mesh can remarkably reduce inhomogeneity of high-level diffraction light distribution of the mesh, and reduce the influence of stray light caused by diffraction on the imaging quality.
Description
Technical field
The invention belongs to optical clear part electromagnetic shielding field, particularly a kind of electromagnetic shielding optical window with donut bunch and the sub-circle ring array of inscribe.
Background technology
Along with the broadening of electromagnetic wave application frequency spectrum and the increase of intensity, more and more higher to the requirement of the electromagnetic shielding optical window of the field such as space flight and aviation equipment, advanced optical instrument, communication apparatus, medical diagnostic equipment and secured facilities application, while mainly requiring that optical window has superpower broadband electromagnetic shielding capability, also there is high light transmittance, the smaller the better on the impact of optical imagery, observation, detection.Such as, the optical window of aircraft in space flight and aviation equipment field, must high-quality realize inside and outside cabin electromagnetic signal isolation, shielding external electromagnetic interference and harmful electromagnetic signal on the one hand, in order to avoid cause cabin inner electronic equipment to lose efficacy, when preventing cabin inner electronic equipment from working on the one hand, electromagnetic signal appears optical window and causes electromagnetic leakage, but the light transmission of optical window is the function of its indispensability, the impact that electromagnetic shielding should reduce its transparency is as much as possible carried out on optical window, does not particularly affect optical detection or optical imagery function as much as possible; Similar, the optical window of advanced optical instrument also will have light transmittance high as far as possible and the impact of alap image quality, to realize detection and the measurement of high-quality, electromagnetic interference will be prevented the impact of instrument internal photoelectric detector simultaneously; For the secret Architectural Equipment of Party and government offices, military commanding place, important R&D institution, need the glass pane in its house while guarantee daylighting, carry out design of Electromagnetic Shielding, during to prevent the electronic device works such as indoor electric brain, important information is divulged a secret to propagating to cause outside window with electromagnetic radiation form; Medical electric Magnetic isolation room optical window will ensure indoor electromagnetic wave overwhelming majority conductively-closed and prevent field operation personnel from being impaired one's health by electromagenetic wave radiation for a long time, etc.The electromagnetic shielding of current this kind of optical window mainly adopts transparent conductive film, metal inducement transmission-type multi-layer film structure, band resistance type frequency-selective surfaces and has millimeter metallic mesh etc. in submillimeter cycle.
The transparent metal oxide film of transparent conductive film to be a kind of with tin indium oxide be main material, is often applied to the occasion that visible light wave range is transparent, but can not takes into account wider transmission region, has wider micro-wave screening wave band but screening ability is not strong.Metal inducement transmission-type multi-layer film structure adopts multi-layer thin metal film and deielectric-coating composite construction to realize shielding electromagnetic waves, and comparatively strong to low frequency microwave screening ability, transmission region is mainly visible ray and ultraviolet light, but light transmittance is not high.Frequency-selective surfaces adopts periodically resonant element structure to realize being with logical or band stop filter function, because its metal coverage rate is higher, can interference electromagnetic wave well beyond reflective operation frequency band, but optics light transmittance is lower, reduce the image quality of optical detection, bring difficulty to optical image security, pattern recognition, target search and tracking.In sum, meet broadband high transmission rate and two requirements of wide-band electromagnetic shielding of optical window, all there is obvious deficiency in above-mentioned each technical scheme simultaneously.Comparatively speaking, there is millimeter metallic mesh in submillimeter cycle, because its period ratio interference electromagnetic wavelength is much smaller, stronger low width wave band electromagnetic shielding can be realized; And the metallic mesh cycle is much larger than optical wavelength, the light transmittance of optical wavelength can be ensured again.Therefore, the metallic mesh in millimeter submillimeter cycle has good electrically conducting transparent performance, can meet the requirement of optical window to high transmission rate and wide-band electromagnetic shielding, be widely used in optical window electromangnetic spectrum field:
1. patent 03135313.5 " a kind of electromagnetic shielding observation window " substance or multi-metal silk screen and based semiconductor quantum well structure is combined into electromagnetic armouring structure, can realize the shield effectiveness more than 50dB within 10GHz, this structure reaches more than 50% at the light transmittance of visible ray height regional transmission.
2. patent 93242068.0 " electromagnetic shielding glass " presss from both sides conductive metal mesh between layer glass, and make it to be bonded in form electromagnetic armouring structure on window frame of metal at glass outer side conductive transparent film, this structure has certain daylighting.
3. patent 94231862.5 " without Moire fringe electromagnetic shielding observation window " adopts by the parallel placement of the wire netting that two number of layers are different, and their warps or parallel have certain angle, overcome Moire fringe phenomenon to reach, and realizes the visual field more clearly.
4. patent 02157954.7 " high shielding effect Tempest glass " respectively has one deck polycarbonate film in woven wire both sides, each attaching one deck glass outside film, last hot pressing forms electromagnetic armouring structure, and this structure, when light transmittance reaches 60%, has stronger shield effectiveness.
5. patent 200610084149.8 " electromagnetic shielded film and manufacture method thereof " describes a kind of high transparency electromagnetic wave shield film with metal mesh pattern formed by photoetching process, and the main purpose of this invention is to reduce metal consumption and overcome the environmental pollution using solidification glue to cause between metal level and film substrate.
6. US Patent No. 4871220 " Short wavelength pass filter having a metal mesh on a semiconducting substrate " describes a kind of metallic mesh with square structure, for realizing the electromagnetism interference performance of optical window.
7. patent 201010239355.8 " a kind of electromagnetic shielding conformal optical window with longitude and latitude shape net grid structure " describes a kind of conformal electromagnetic shielding optical window with longitude and latitude shape metallic mesh structure realized by metallic mesh technology and conformal optics window setting technique, mainly solve the Structure Designing Problem of conformal optics window metallic mesh, improve the capability of electromagnetic shielding of conformal optics window.
8. patent 200610010066.4 " having the electromagnetic shielding optical window of annulus metallic mesh structure " describes a kind of metallic mesh unit with annulus profile, for realizing the electro-magnetic screen function of optical window; Compare individual layer grid metallic mesh, light transmittance and screening ability are improved, and the stray light that senior diffraction causes have also been obtained certain homogenizing.
9. patent 200810063988.0 " a kind of electromagnetic shielding optical window with double-layer pane metallic mesh structure " describes a kind of grid metallic mesh identical by structural parameters or woven wire and is placed in parallel in the electromagnetic shielding optical window that optical window or transparent substrates both sides form, while not reducing light transmittance, increase substantially electromagnetic shielding efficiency.
10. patent 200810063987.6 " a kind of electromagnetic shielding optical window with double-layer circular ring metallic mesh structure " describes and a kind ofly loads on by two-layer annulus metallic mesh the electromagnetic shielding optical window that optical window both sides form, and solves the problem that high transmission rate and strong electromagnetic shield effectiveness can not be taken into account simultaneously.
Hub-the spoke type arrangement based on annulus unit of people's exploitation such as 11. Battelle research institute of U.S. Jennifer I.Halman and perceptual metallic mesh (the Jennifer I.Halman etc. of many annulus overlapping configuration, " Predicted and measured transmission and diffraction by a metallic mesh coating " .Proc.SPIE, 2009,7302:73020Y-1 ~ 73020Y-8), and think, this structure can make net grid senior Diffraction fringe distribution homogenizing, realize low sidelobe, favourable to imaging.
12. the Ian B.Murray of Exotic Electro-Optics company of the U.S., the people such as the Victor Densmore of Arizona, USA university and Vaibhav Bora jointly report and introduce impact (Ian B.Murray on diffraction characteristic after stochastic parameter distribution design to the perceptual net grid of hub-spoke type arrangement and many annulus overlapping configuration, Victor Densmore, the people such as Vaibhav Bora, " Numerical comparision of grid pattern diffraction effects through measurement and modeling with OptiScan software ", Proc.SPIE, 2011, 8016:80160U-1 ~ 80160U-15), point out each ring interval and diameter random value within the specific limits, be conducive to the uniformity improving senior Diffraction fringe distribution.
Above-mentioned each scheme, owing to adopting metallic mesh (or woven wire) as the core devices of shielding, can realize good effectiveness and certain light transmittance.But adopt metallic mesh (or woven wire) as electromagnetic armouring structure, be just inevitably subject to the impact of net grid at optical region diffraction.Because the cycle of metallic mesh is in millimeter or submillimeter magnitude, for realizing higher light transmittance, its metal wire width is generally in micron and sub-micrometer scale, and such structural parameters have very strong diffraction effect at optical region.Incident light overwhelming majority energy is by metallic mesh transmission, transmissive portion comprises zero order diffracted light and senior diffraction light, and usually, zero level time diffraction light is the useful information for imaging and observation, senior time diffraction light then forms stray light, produces interference to imaging and detection.Therefore, should improve the proportion of zero level time shared by diffraction light as much as possible, meanwhile, under the prerequisite that senior diffraction light unavoidably occurs, make senior diffraction light distribution relatively more even as far as possible, its stray light formed becomes more uniform background or noise.
Metal current net grid are mainly traditional grid grid structure, (structure of patent 7 is because processing is on curved surface for the structure mainly adopted as above-mentioned patent 1-6, a kind grid structure), there is intrinsic contradiction in grid grid structure transmittancy and screening ability, be difficult to take into account high transmission rate and strong electromagnetic shield effectiveness simultaneously, particularly senior diffraction energy of grid grid mainly concentrates on mutually perpendicular diaxon, have a certain impact to image quality, the occasion even required at high imaging quality is difficult to application.Change net grid diffraction characteristic generally to need to change its architectural feature, above-mentioned patent 200610010066.4 " having the electromagnetic shielding optical window of annulus metallic mesh structure " proposition metal ring is built into annulus metallic mesh, improve the shortcoming of grid metallic mesh senior diffraction energy integrated distribution, and the contradiction of its transmittancy and screening ability can be alleviated.In above-mentioned document 11 and 12, the people such as the people such as Jennifer I.Halman and Ian B.Murray, also the metallic mesh structure be proposed based on annulus unit improves the uniformity of senior Diffraction fringe distribution, but the research of the people such as Jennifer I.Halman is also monocycle annulus arrangement architecture, and orientation is determined, its structure proposed the effect and patent 200610010066.4 that regulate senior diffraction is suitable, and although the research of the people such as Ian B.Murray further, random overlapping circular ring structure is proposed, make circle diameter and spacing random distribution value within the specific limits, realize improving senior Diffraction fringe distribution uniformity further, but the random distribution of circle diameter and spacing changes the uniformity of mesh distribution, electromagnetic shielding efficiency will be damaged.
Along with the complexity day by day of electromagnetic environment, the transmittancy of electromagnetic shielding optical window and the requirement of electromagnetic shielding capability are being improved constantly, especially at Aero-Space equipment field and advanced optical instrument field, while having required that optical window reaches 95% even higher light transmittance, also there is extremely low image quality impact, realize the shield effectiveness of more than 30dB in the microwave frequency range lower than 20GHz, this makes existing technology be difficult to realize.Patent 200810063988.0 and patent 200810063987.6 all have employed the both sides formation that double-level-metal net grid are placed in parallel in optical window transparent substrate or substrate, double layer of metal net grid have identical unit profile and structural parameters, by optimizing the spacing of two layers of mesh grid, while realizing not reducing light transmittance, increase substantially electromagnetic shielding efficiency.But this Double-level Reticulated grid structure senior diffraction stray light distributes, still identical with light transmittance monolayer net grid are suitable, not exclusively meet the requirement that the fields such as following Aero-Space equipment and advanced optical instrument affect low image quality.
Summary of the invention
The object of the invention is to the deficiency overcoming above-mentioned existing optical window electromangnetic spectrum scheme, the problem of the stray light distribution Relatively centralized that senior diffraction causes particularly is there is for existing individual layer grid metallic mesh, individual layer circular ring net grid, double-layer pane and circular ring net grid, research and develop a kind of electromagnetic shielding optical window with donut bunch and the sub-circle ring array of inscribe, reach the object of degree of depth homogenizing and the extremely low image quality impact realizing senior diffraction.
The object of the present invention is achieved like this: the electromagnetic shielding optical window with donut bunch and the sub-circle ring array of inscribe, metallic mesh in electromagnetic shielding optical window touches arrangement by multiple concentric metal annulus bunch by triangular arranged and forms and load on optical window transparent substrate surface, each concentric metal annulus bunch forms planar structure by the metal ring being more than or equal to three different-diameters by concentric mode, the circumscribed connection of outermost annulus of the equal and neighboring concentric annulus of the outermost circle ring diameter of each concentric metal annulus bunch bunch.Have in each donut bunch be communicated with the outermost annulus inscribe of this donut bunch, the sub-annulus of metal, this donut bunch sub-annulus be communicated with its inscribe forms the elementary cell of two-dimensional metallic net grid structure jointly; In donut bunch, the diameter of each annulus and sub-annulus is millimeter and submillimeter magnitude, and in donut bunch, the metal wire width of each annulus and sub-annulus is micron and sub-micrometer scale; Described triangular arranged refers to that the circle center line connecting of three adjacent between two concentric metal annulus bunch forms equilateral triangle; Described circumscribed connection comprises: 1. circumscribed the and circumscribed point of contact place of two annulus arranges the connection metal be communicated with by two annulus, 2. two annulus are seamless overlapping configuration at junction lines, 3. two annulus are while junction lines are seamless overlapping configuration, arrange the connection metal be communicated with by two annulus at overlapping place; Described inscribe is communicated with and comprises: 1. two annulus inscribes and inscribe point of contact place arranges the connection metal be communicated with by two annulus, 2. two annulus are seamless overlapping configuration at junction lines, 3. two annulus are while junction lines are seamless overlapping configuration, arrange the connection metal be communicated with by two annulus at overlapping place.
The above-mentioned electromagnetic shielding optical window with donut bunch and the sub-circle ring array of inscribe, in each elementary cell, sub-annulus number is more than or equal to 2, and diameter is identical or different, the angle that the center of circle of adjacent sub-annulus and donut bunch circle center line connecting form is arbitrarily angled; Sub-annulus in different elementary cell is equal diameter or non-equal diameter annulus, and number is identical or different; The each interior annulus of donut in different elementary cell bunch is equal diameter or non-equal diameter annulus, and number is identical or different.
As the preferred frame mode of one, the above-mentioned electromagnetic shielding optical window with donut bunch and the sub-circle ring array of inscribe, the each interior circle diameter of described donut bunch and outermost circle ring diameter ratio are within the scope of 0.2-0.8, in each elementary cell adjacent sub-annulus can circumscribed connection or intersect, the each interior annulus tangent connection or crossing of sub-annulus and the donut in the elementary cell of place bunch, described tangent connection is that circumscribed connection or inscribe are communicated with.
As the preferred frame mode of one, the above-mentioned electromagnetic shielding optical window with donut bunch and the sub-circle ring array of inscribe, the diameter of described same elementary cell neutron annulus is identical, and the circumscribed connection of interior annulus of donut bunch; The angle that the circle center line connecting of the center of circle of adjacent sub-annulus and donut bunch forms is equal.
As the preferred frame mode of one, the above-mentioned electromagnetic shielding optical window with donut bunch and the sub-circle ring array of inscribe, the number of described neighboring unit cells neutron annulus is identical, and equal diameters.
As the preferred frame mode of one, the above-mentioned electromagnetic shielding optical window with donut bunch and the sub-circle ring array of inscribe, sub-annulus relative position in described different elementary cells is identical, and forms two-dimensional metallic net grid by the arrangement of triangular arranged contiguity after an elementary cell copies.
As the preferred frame mode of one, the above-mentioned electromagnetic shielding optical window with donut bunch and the sub-circle ring array of inscribe, in described two-dimensional metallic net grid, sub-annulus relative position in neighboring unit cells is different, and form two-dimensional metallic net grid by touching arrangement by triangular arranged after an elementary cell copies, wherein any one elementary cell rotates to an angle relative to the center of circle of its neighboring unit cells around self donut bunch in two dimensional surface.
As the preferred frame mode of one, the above-mentioned electromagnetic shielding optical window with donut bunch and the sub-circle ring array of inscribe, the angle that any elementary cell in described same a line rotates relative to neighboring unit cells is identical.
The above-mentioned electromagnetic shielding optical window with donut bunch and the sub-circle ring array of inscribe, each annulus in described donut bunch and sub-annulus are formed by the alloy that electric conductivity is good, and alloy thickness is greater than 100nm.
The above-mentioned electromagnetic shielding optical window with donut bunch and the sub-circle ring array of inscribe, described adhesive linkage chromium or titanium material are formed.
Novelty of the present invention and good result are:
Novelty of the present invention is: the metallic mesh in electromagnetic shielding optical window touches arrangement by multiple concentric metal annulus bunch by triangular arranged and forms and load on optical window transparent substrate surface, each concentric metal annulus bunch forms planar structure by the metal ring being more than or equal to three different-diameters by concentric mode, the circumscribed connection of outermost annulus of the equal and neighboring concentric annulus of the outermost circle ring diameter of each concentric metal annulus bunch bunch.Have in each donut bunch be communicated with the outermost annulus inscribe of this donut bunch, the sub-annulus of metal, this donut bunch sub-annulus be communicated with its inscribe forms the elementary cell of two-dimensional metallic net grid structure jointly; In donut bunch, the diameter of each annulus and sub-annulus is millimeter and submillimeter magnitude, and in donut bunch, the metal wire width of each annulus and sub-annulus is micron and sub-micrometer scale; Described triangular arranged refers to that the circle center line connecting of three adjacent between two concentric metal annulus bunch forms equilateral triangle; Described circumscribed connection comprises: 1. circumscribed the and circumscribed point of contact place of two annulus arranges the connection metal be communicated with by two annulus, 2. two annulus are seamless overlapping configuration at junction lines, 3. two annulus are while junction lines are seamless overlapping configuration, arrange the connection metal be communicated with by two annulus at overlapping place; Described inscribe is communicated with and comprises: 1. two annulus inscribes and inscribe point of contact place arranges the connection metal be communicated with by two annulus, 2. two annulus are seamless overlapping configuration at junction lines, 3. two annulus are while junction lines are seamless overlapping configuration, arrange the connection metal be communicated with by two annulus at overlapping place.The good result that novelty of the present invention produces mainly concentrates on senior diffraction energy distribution of homogenizing metallic mesh, specific as follows:
Metal ring in donut in metallic mesh bunch is all distributed as with equilateral triangle the shortcoming that basic arrangement mode overcomes senior the diffraction energy integrated distribution that traditional grid metallic mesh exists well, have the characteristic of good homogenizing senior diffraction energy distribution, this is one of reason of metallic mesh homogenizing of the present invention senior diffraction energy distribution.
Use donut bunch as the basic structure of each unit in metallic mesh, when ensureing that light transmittance is identical, compared with the basic structure of single circle ring array, need the diameter increasing outermost annulus in basic structure, reduce senior diffraction energy of outermost circle ring array on the whole; And for other circle ring arrays in donut bunch, because the diameter of each annulus is relatively little and interval is larger, senior lower and senior time Diffraction fringe distribution of diffraction energy itself is more even; Simultaneously, by changing each interior circle diameter in donut bunch and outermost circle ring diameter ratio, effectively can be optimized adjustment to the maximum relative intensity that Advanced Diffraction level is secondary, thus senior diffraction energy distribution of homogenizing metallic mesh structural entity, this is the reason two of metallic mesh homogenizing of the present invention senior diffraction energy distribution.
Sub-circle ring array in metallic mesh, because the difference of sub-annulus number, diameter and position relationship in each elementary cell, make its short texture, arrange spuious, therefore senior diffraction energy is lower, and senior Diffraction fringe distribution is comparatively even, avoids the situation occurring senior the diffraction energy integrated distribution existed as traditional grid metallic mesh, this is the reason three of metallic mesh homogenizing of the present invention senior diffraction energy distribution.
In donut bunch, add sub-annulus composition elementary cell, if keep light transmittance constant, the diameter of donut bunch each annulus need be increased, reduce senior diffraction energy of donut cluster array structure on the whole; The probability that senior the diffraction produced because of sub-circle ring array structure again superposes with senior diffraction of donut cluster array structure is very low, especially to optimize structure and after parameter, higher senior the diffraction of their energy does not superpose, thus homogenizing senior diffraction energy distribution, this is the reason four of metallic mesh homogenizing of the present invention senior diffraction energy distribution.
Each interior circle diameter and outermost circle ring diameter ratio in donut bunch is changed in elementary cell, change the diameter and number etc. of sub-annulus simultaneously, carry out complex optimum parameter, can effectively regulate for the strongest Advanced Diffraction level time, thus senior diffraction energy distribution of homogenizing metallic mesh structure, this is the reason five of homogenizing senior the diffraction energy distribution of metallic mesh of the present invention.
Each elementary cell can rotate to an angle centered by the center of circle of its donut bunch, do not change the aperture ratio of metallic mesh and then do not affect light transmittance, but can modulate further senior order of diffraction Energy distribution, can distribute by homogenizing senior diffraction energy better, this is the reason six of homogenizing senior the diffraction energy distribution of metallic mesh of the present invention.
To sum up, metallic mesh structure of the present invention can realize the degree of depth homogenizing of net grid senior diffraction energy distribution, and this is the most outstanding effect of the present invention.In addition, be donut clustering architecture or add the uniformity that sub-annulus all effectively improves round metal looped network grid structure in the structure, and elementary cell when rotating to an angle centered by the center of circle of its donut, also the uniformity of metallic mesh structure can not be changed, while effectively modulation is carried out to senior order of diffraction Energy distribution, substantially do not affect effectiveness, even can improve effectiveness in some preferred version.
Accompanying drawing explanation
Fig. 1 is a kind of preferred structure generalized section of the electromagnetic shielding optical window with donut bunch and the sub-circle ring array of inscribe.
Fig. 2 has the donut bunch angular distribution schematic diagram in the electromagnetic shielding optical window of donut bunch and the sub-circle ring array of inscribe.
Fig. 3 is sub-annulus and the circumscribed several elementary cell schematic diagrames be communicated with of interior annulus in donut bunch.
Fig. 4 is sub-annulus and several elementary cell schematic diagrames of the crossing connection of each interior annulus in donut bunch.
Fig. 5 is circle diameter relative outermost circle ring diameter excursion schematic diagram in donut bunch.
Fig. 6 is the circumscribed mode of communicating schematic diagram of two annulus.
Fig. 7 is two annulus inscribe mode of communicating schematic diagrames.
Fig. 8 is a kind of rotation mode schematic diagram of the relative neighboring unit cells of elementary cell of the present invention.
Fig. 9 is existing grid grid structural representation.
Figure 10 is existing grid grid senior diffraction and relative intensity distribution schematic diagram thereof.
Figure 11 is existing circular ring net grid structural representation.
Figure 12 is existing circular ring net grid senior diffraction and relative intensity distribution schematic diagram thereof.
Figure 13 is the metallic mesh structural representation of preferred version A in the present invention.
Figure 14 is the metallic mesh of preferred version A in the present invention senior diffraction and relative intensity distribution schematic diagram thereof.
Figure 15 is the metallic mesh structural representation of preferred version B in the present invention.
Figure 16 is the metallic mesh of preferred version B in the present invention senior diffraction and relative intensity distribution schematic diagram thereof.
Figure 17 is the metallic mesh structural representation of preferred version C in the present invention.
Figure 18 is the metallic mesh of preferred version C in the present invention senior diffraction and relative intensity distribution schematic diagram thereof.
Figure 19 is the metallic mesh structural representation of preferred version D in the present invention.
Figure 20 is the metallic mesh of preferred version D in the present invention senior diffraction and relative intensity distribution schematic diagram thereof.
Figure 21 is that six kinds of net grid structures senior diffraction maximal phase is to intensity contrast figure.
In figure, piece number illustrates: 1. the interior annulus of adhesive linkage 2. protective layer 3. anti-reflection film 4. transparent substrate 5. metallic mesh 6. outermost annulus 8. connection metal 9. of annulus 7.
Embodiment
With preferred embodiment, the present invention is further described with reference to the accompanying drawings:
There is the electromagnetic shielding optical window of donut bunch and the sub-circle ring array of inscribe, metallic mesh 5 in electromagnetic shielding optical window touches arrangement by multiple concentric metal annulus bunch by triangular arranged and forms and load on optical window transparent substrate surface, each concentric metal annulus bunch forms planar structure by the metal ring being more than or equal to three different-diameters by concentric mode, the circumscribed connection of outermost annulus 6 of outermost annulus 6 equal diameters of each concentric metal annulus bunch and neighboring concentric annulus bunch; Have in each donut bunch be communicated with outermost annulus 6 inscribe of this donut bunch, the sub-annulus 7 of metal, this donut bunch sub-annulus 7 be communicated with its inscribe forms the elementary cell of two-dimensional metallic net grid structure jointly; In donut bunch, the diameter of each annulus and sub-annulus 7 is millimeter and submillimeter magnitude, and in donut bunch, the metal wire width of each annulus and sub-annulus 7 is micron and sub-micrometer scale; Described triangular arranged refers to that the circle center line connecting of three adjacent between two concentric metal annulus bunch forms equilateral triangle; Described circumscribed connection comprises: 1. circumscribed the and circumscribed point of contact place of two annulus arranges the connection metal 8 be communicated with by two annulus, 2. two annulus are seamless overlapping configuration at junction lines, 3. two annulus are while junction lines are seamless overlapping configuration, arrange the connection metal 8 be communicated with by two annulus at overlapping place; Described inscribe is communicated with and comprises: 1. two annulus inscribes and inscribe point of contact place arranges the connection metal 8 be communicated with by two annulus, 2. two annulus are seamless overlapping configuration at junction lines, 3. two annulus are while junction lines are seamless overlapping configuration, arrange the connection metal 8 be communicated with by two annulus at overlapping place.Described transparent substrate 4 can be any transparent material, as long as metallic mesh 5 as the transparent optical window material meeting use occasion requirement, can be processed thereon by certain technological process by it simultaneously; According to technological process, metallic mesh 5 is carried in transparent substrate 4 surface by adhesive linkage 1; Individual layer or multi-layered antireflection coating 3 strengthen the transmittancy of optical window, the protective layer 2 of individual layer or multilayer, and object prevents metallic member long term exposure from air, causing corrosion and oxidation, reduces screening ability, also prevent metallic mesh 5 to be scratched simultaneously.
The electromagnetic shielding optical window with donut bunch and the sub-circle ring array of inscribe of the present invention, touch arrangement by concentric metal annulus bunch by triangular arranged form net grid array and load on optical window transparent substrate surface, and the circumscribed connection of outermost annulus 6 of neighboring concentric metal ring bunch as shown in Figure 2, figure mid point A, B, C is the center of circle of the circumscribed between two concentric metal annulus of any three groups of outermost annulus 6 bunch, △ ABC is equilateral triangle, and such arrangement mode guarantees that all concentric metal annulus bunch form metallic mesh according to the arrangement of equilateral triangle contiguity.
The electromagnetic shielding optical window with donut bunch and the sub-circle ring array of inscribe of the present invention, have the sub-annulus 7 be communicated with outermost annulus 6 inscribe of this donut bunch in each donut bunch, this donut bunch sub-annulus 7 be communicated with its inscribe forms an elementary cell of two-dimensional metallic net grid structure jointly.In donut bunch, the diameter of each annulus and sub-annulus 7 is millimeter and submillimeter magnitude, and in donut bunch, the metal wire width of each annulus and sub-annulus 7 is micron and sub-micrometer scale, to ensure high transmission rate and good effectiveness.In addition, each ring part is made up of the metal that electric conductivity is good, and as simple metal and metal alloys such as gold, silver, copper, aluminium, and metal thickness is greater than 100nm.
The electromagnetic shielding optical window with donut bunch and the sub-circle ring array of inscribe of the present invention, in each elementary cell, sub-annulus 7 number is more than or equal to 2, and diameter is identical or different, the angle that the center of circle of adjacent sub-annulus 7 and donut bunch circle center line connecting form is arbitrarily angled; Sub-annulus 7 in different elementary cell is equal diameter or non-equal diameter annulus, and number is identical or different; The each interior annulus of donut in different elementary cell bunch is equal diameter or non-equal diameter annulus, and number is identical or different; In each elementary cell adjacent sub-annulus 7 can circumscribed connection or intersect, sub-annulus 7 and bunch each interior annulus tangent connection or crossing of the donut in the elementary cell of place.As Fig. 3 with Fig. 4 to lift preferred version be that the diameter of elementary cell neutron annulus 7 is identical, and the angle that the center of circle of adjacent sub-annulus 7 forms with donut bunch circle center line connecting is equal: several elementary cell schematic diagrames that Fig. 3 represents that the interior annulus 9 in sub-annulus 7 and donut bunch is circumscribed when being communicated with, wherein Fig. 3 (a) (b) (c) (d) represents that sub-annulus 7 number is 3 respectively, 4, the elementary cell schematic diagram of 5,6, several elementary cell schematic diagrames when Fig. 4 represents that sub-annulus 7 and donut bunch each interior annulus homogeneous phase are handed over, wherein Fig. 4 (a) represents that in elementary cell, 4 sub-annulus 7 intersect connection, and all connect with in donut bunch, each annulus is crossing, Fig. 4 (b) represents that in elementary cell, 4 sub-annulus 7 are tangent, but all bunch each interior annulus is crossing connects with donut, Fig. 4 (c) represents that in elementary cell, 5 sub-annulus 7 intersect connection, and all bunch each interior annulus is crossing connects with donut, Fig. 4 (d) represents that in elementary cell, 5 sub-annulus 7 are tangent, but all bunch each interior annulus is crossing connects with donut.
Of the present invention have in the electromagnetic shielding optical window of donut bunch and the sub-circle ring array of inscribe, uses donut bunch as the basic structure of each unit, reduce senior diffraction energy of single diameter annulus array structure on the whole; Meanwhile, with the diameter ratio of outermost annulus 6, structure being optimized by changing donut bunch each interior circle diameter, can effectively regulating the strongest Advanced Diffraction level time, thus senior diffraction energy distribution of homogenizing metallic mesh array structure.In preferred parameter, in donut bunch, each circle diameter is chosen than within the scope of 0.2-0.8 with outer toroid 6 diameter, as shown in Figure 5, D1, D2 are respectively the diameter of the arbitrary interior annulus in the outermost annulus 6 of donut bunch and donut bunch, and D3=0.2 × D1, D4=0.8 × D1, when supposing that outermost annulus 6 diameter D1 is constant, then value within the scope of the arbitrary interior circle diameter D2 in donut bunch is respectively the annulus composition of D3 and D4 ring belt at diameter; In the donut of different elementary cell bunch, each interior circle diameter can be different from outermost annulus 6 diameter ratio.
Fig. 6, Fig. 7 represent that the circumscribed connection of two annulus or inscribe are communicated with respectively, overlapping or arrange the metal that (as covered) ensure reliably to electrically connect between metal ring tangent point, to guarantee that between tangent metal ring, contiguity is communicated with conduction by lines.Wherein, when Fig. 6 (a) (b) (c) is illustrated respectively in circumscribed connection, two annulus are seamless overlapping configuration schematic diagram: Fig. 6 (a) is the seamless overlapping ordinary circumstance of two annulus, namely the distance of center circle of two annulus be less than two annulus circumscribed time distance of center circle, and be greater than two annulus circumscribed time distance of center circle and the difference of two annulus line thickness sums, Fig. 6 (b) is seamless overlapping a kind of special circumstances, the inside and outside contour of two annulus lines is mutually circumscribed, Fig. 6 (c) is seamless overlapping another kind of special circumstances, the distance of center circle of two annulus equal two annulus circumscribed time distance of center circle and the difference of two annulus line thickness sums, namely the Internal periphery of two annulus lines is circumscribed, and because two annulus are circumscribed in Fig. 6 (d), therefore need to arrange the metal ensureing reliably to electrically connect between metal ring tangent point at point of contact place.Fig. 7 (a) (b) is illustrated respectively in two annulus when inscribe is communicated with is that seamless overlapping configuration schematic diagram: Fig. 7 (a) represents the seamless overlapping ordinary circumstance of two annulus when inscribe is communicated with, namely the distance of center circle when distance of center circle of two annulus is greater than two annulus inscribes, and distance of center circle when being less than two annulus inscribes and diameter compared with large circle line thickness and, Fig. 7 (b) represents the seamless overlapping a kind of special circumstances of two annulus when inscribe is communicated with, the distance of center circle when distance of center circle of two annulus equals two annulus inscribes and diameter compared with large circle line thickness and, the i.e. outline inscribe of two annulus lines, and Fig. 7 (c) represents that diameter is compared with the outline of small circle ring lines and the diameter Internal periphery inscribe compared with large circle lines, now need to arrange the metal ensureing reliably to electrically connect between metal ring tangent point at point of contact place.In addition, if two annulus seamless overlapping time two metal rings overlapping area less, be not enough to guarantee to have between two metal rings to electrically connect reliably, also need to arrange the metal ensureing reliably to electrically connect between metal ring point of contact at point of contact place, to guarantee the circumscribed connection or the inscribe connection that realize becket.And shown in Fig. 6 (d) He Fig. 7 (c), be a kind of preferred point of contact place metal connected mode, the connection metal 8 that point of contact place covers is rectangle, the length of side of rectangle is greater than becket line thickness, rectangle will make rectangle limit drop on completely in becket lines when covering junction, point of contact, and its opposite side will drop in another tangent becket lines completely.According to different processing methods and technological level, annulus point of contact place also can adopt the connection metal of other form, electrically connects reliably as long as two tangent beckets can be made to have.
In the present invention, for reaching the object of the stray light that homogenizing senior diffraction causes, as a kind of preferred version, the diameter of elementary cell neutron annulus 7 is identical, and the angle that the center of circle of adjacent sub-annulus 7 and donut bunch circle center line connecting form is equal; Each circle diameter of donut in different elementary cell bunch is equal; On this basis, sub-annulus 7 number in different elementary cell is identical, equal diameters.As a special case of this preferred version, sub-annulus 7 relative position in different elementary cell is identical, and forms two-dimensional metallic net grid 5 by the arrangement of triangular arranged contiguity after an elementary cell copies.In order to realize the stray light effect that good homogenizing senior diffraction causes, as another special case of this preferred version, sub-annulus 7 relative position in neighboring unit cells in the present invention in metallic mesh 5 array is different, and two-dimensional mesh grid array is formed by the arrangement of triangular arranged contiguity after an elementary cell copies, wherein any one elementary cell rotates to an angle relative to the center of circle of its neighboring unit cells around self donut bunch in two dimensional surface, can be identical relative to the angle that neighboring unit cells rotates with any elementary cell in a line; Such as, Fig. 8 is a kind of rotation mode schematic diagram of the relative neighboring unit cells of elementary cell of the present invention, wherein the elementary cell of metallic mesh 5 selects the structure of Fig. 3 (c), have rotated 18 ° of angles successively with the relative neighboring unit cells of elementary cell each in a line.
Fig. 9 and Figure 10 is respectively US Patent No. 4871220 existing grid grid structural representation and its senior diffraction and relative intensity distribution schematic diagram thereof, Figure 11 and Figure 12 is respectively patent 200610010066.4 existing circular ring net grid structural representation and its senior diffraction and relative intensity distribution schematic diagram thereof; Figure 13 and Figure 14 is respectively metallic mesh structural representation and its senior diffraction and the relative intensity distribution schematic diagram thereof of preferred version A in the present invention, metallic mesh in preferred version A is selected the structure of Fig. 3 (d) as elementary cell and is not relatively rotated between each elementary cell, each interior annulus in donut bunch is respectively 1:3 with the diameter ratio of outermost annulus 6,1:2,2:3; Figure 15 and Figure 16 is respectively metallic mesh structural representation and its senior diffraction and the relative intensity distribution schematic diagram thereof of preferred version B in the present invention, the metallic mesh of preferred version B still selects the structure of Fig. 3 (d) as elementary cell, but with preferred version A unlike, the diameter ratio of each interior annulus in adjustment donut bunch and outermost annulus 6, be respectively: 1:3,3:5,17:30.Figure 17 and Figure 18 is respectively metallic mesh structural representation and its senior diffraction and the relative intensity distribution schematic diagram thereof of preferred version C in the present invention, the metallic mesh of preferred version C still selects the structure of Fig. 3 (d) as elementary cell, the diameter of each interior annulus in donut bunch and outermost annulus 6 is than identical with preferred version A, but with preferred version A unlike, rotate according to the rotation mode shown in Fig. 8 with the neighboring unit cells of a line in preferred version C, the anglec of rotation elects 15 ° as.Figure 19 and Figure 20 is respectively metallic mesh structural representation and its senior diffraction and the relative intensity distribution schematic diagram thereof of preferred version D in the present invention, the metallic mesh structure of preferred version D is on the architecture basics of preferred version C, under the prerequisite of position relationship not changing each annulus, regulate the diameter ratio of each interior annulus in annulus bunch and outermost annulus 6, be respectively: 1:3,3:5,17:30, thus obtain this metallic mesh structure.
In order to illustrate that the present invention to distribute active superiority at homogenizing senior diffraction energy, based on scalar diffraction theory, theory calculate is carried out to senior diffraction energy distribution situation of above-mentioned six kinds of structures and senior the maximum relative intensity of diffraction, the light transmittance of each structure identical (being 95.4%) is made during calculating, its zero level relative intensity is 91%, and namely imaging useful information ratio is identical.Preferred version A, B, metallic mesh structure in C with D is compared with grid, circular ring net grid, senior time the maximum relative intensity of diffraction obviously reduces, and obviously increase in the identical number investigating senior diffraction spot in interval, thus avoid senior diffraction energy and concentrate on problem in the minority order of diffraction time, make senior diffraction energy distribution more even, Figure 21 is the concrete numerical value of senior the maximum relative intensity of diffraction of above-mentioned six kinds of structures, visible, senior the maximum relative intensity of diffraction of grid metallic mesh structure is obviously higher relative to other structures, senior the maximum relative intensity of diffraction of the metallic mesh structure corresponding to preferred version A of the present invention obviously reduces, 0.0093% is dropped to from 0.0259% (senior the maximum relative intensity of diffraction of existing circular ring net grid structure), reduce 64%, the homo-effect of senior diffraction is obvious, preferred version B adopts the method change metallic mesh structure of adjustment donut bunch inner and outer diameter ratio that senior the maximum relative intensity of diffraction is reduced further, 0.0077% is dropped to from 0.0093% (senior the maximum relative intensity of diffraction of preferred version A), reduce 17%, complete the further homogenizing to senior diffraction, preferred version C is compared with preferred version A, adopt the rotation mode shown in Fig. 8, the anglec of rotation is 15 °, senior the maximum relative intensity of diffraction of its metallic mesh structure also obviously reduces, 0.0035% is dropped to from 0.0093% (senior the maximum relative intensity of diffraction of preferred version A), reduce 62%, also complete the further homogenizing to senior diffraction, the method that preferred version D adopts in conjunction with preferred version B and preferred version C, relative to preferred version A, by the diameter of each annulus in donut bunch and outer toroid 6 than respectively from 1:3, 1:2, 2:3 adjusts to 1:3, 3:5, 17:30, and the neighboring unit cells of same a line is rotated according to the rotation mode shown in Fig. 8, the anglec of rotation is 15 °, senior the maximum relative intensity of diffraction of its metallic mesh structure reduces once again, 0.0024% is dropped to from 0.0093% (senior the maximum relative intensity of diffraction of preferred version A), reduce 74%, and reduce 91% relative to senior the maximum relative intensity of diffraction of existing circular ring structure, thus demonstrate that to introduce the effect that diameter adopts the mode of rotation to distribute to homogenizing senior diffraction energy than variable donut bunch and corresponding sub-annulus coefficient metallic mesh structure further very remarkable.In sum, metallic mesh structure of the present invention has significant effect to homogenizing senior diffraction energy distribution, not only be better than US Patent No. 4871220 existing grid metallic mesh structure, be also better than patent 200610010066.4 existing annulus metallic mesh structure.。
The building form of donut of the present invention bunch and sub-annulus, make mesh relatively average, while senior the diffraction energy distribution of degree of depth homogenizing, still there is good light transmission and shielding properties, when for constructing double-level-metal net grid structure, the contradictory problems of light transmittance and shield effectiveness can be improved, meanwhile, due to the distribution of single layer structure degree of depth homogenizing of the present invention senior diffraction energy, can to solve again in existing double-level-metal net grid structure due to the restriction of monolayer net grid structure can not the problem that distributes of homogenizing senior diffraction energy further.
Metallic mesh 5 in the electromagnetic shielding optical window with donut bunch and the sub-circle ring array of inscribe of the present invention can adopt following processing method processing and fabricating: make mask by modes such as electron-beam direct writings, optical window transparent substrate 4 carries out cleaning rear chromium plating or titanium as adhesive linkage 1, metal-coated films on it, then photoresist is applied, manufactured mask is utilized to carry out photoetching, finally carry out dry method or wet etching, after removing photoresist, obtain net gate pattern.Also can save mask manufacture link, and directly adopt the way of laser direct-writing to make the metallic mesh pattern with donut bunch and the sub-circle ring array of inscribe.Other microelectronic processing technology flow process or binary optical elements Making programme etc. also can be used for making metallic mesh structure of the present invention.
Transparent substrate 4 involved in the present invention is determined by practical application, can be simple glass, quartz glass, infra-red material, transparent resin material etc., metal ring metal structure of the present invention will take suitable processing process to make it to be covered in completely on transparent substrate 4 according to transparent substrate 4, and can realize electrically connecting reliably or seal to ensure excellent electro-magnetic screen function with window frame etc.In practical application; transparent substrate 4 with net grid structure of the present invention can plate anti-reflection film to increase transmittancy; also can reduce screening ability at net gate layer plated surface protective layer to prevent from metal structure to be positioned over for a long time in air being corroded or be oxidized, also prevent net gate layer from suffering to scratch, wearing and tearing or other destroy.
Claims (10)
1. there is the electromagnetic shielding optical window of donut bunch and the sub-circle ring array of inscribe, it is characterized in that: the metallic mesh (5) in electromagnetic shielding optical window touches arrangement by multiple concentric metal annulus bunch by triangular arranged and forms and load on optical window transparent substrate surface, each concentric metal annulus bunch forms planar structure by the metal ring being more than or equal to three different-diameters by concentric mode, outermost annulus (6) the circumscribed connection of outermost annulus (6) equal diameters of each concentric metal annulus bunch and neighboring concentric annulus bunch; Have in each donut bunch be communicated with outermost annulus (6) inscribe of this donut bunch, the sub-annulus (7) of metal, the sub-annulus (7) that this donut bunch is communicated with its inscribe forms the elementary cell of two-dimensional metallic net grid structure jointly; In donut bunch, the diameter of each annulus and sub-annulus (7) is millimeter and submillimeter magnitude, and in donut bunch, the metal wire width of each annulus and sub-annulus (7) is micron and sub-micrometer scale; Described triangular arranged refers to that the circle center line connecting of three adjacent between two concentric metal annulus bunch forms equilateral triangle; Described circumscribed connection comprises: 1. circumscribed the and circumscribed point of contact place of two annulus arranges the connection metal (8) be communicated with by two annulus, 2. two annulus are seamless overlapping configuration at junction lines, 3. two annulus are while junction lines are seamless overlapping configuration, arrange the connection metal (8) be communicated with by two annulus at overlapping place; Described inscribe is communicated with and comprises: 1. two annulus inscribes and inscribe point of contact place arranges the connection metal (8) be communicated with by two annulus, 2. two annulus are seamless overlapping configuration at junction lines, 3. two annulus are while junction lines are seamless overlapping configuration, arrange the connection metal (8) be communicated with by two annulus at overlapping place.
2. the electromagnetic shielding optical window with donut bunch and the sub-circle ring array of inscribe according to claim 1, it is characterized in that: in each elementary cell, sub-annulus (7) number is more than or equal to 2, and diameter is identical or different, the angle that the center of circle of adjacent sub-annulus (7) and donut bunch circle center line connecting form is arbitrarily angled; Sub-annulus (7) in different elementary cell is equal diameter or non-equal diameter annulus, and number is identical or different; The each interior annulus of donut in different elementary cell bunch is equal diameter or non-equal diameter annulus, and number is identical or different.
3. the electromagnetic shielding optical window with donut bunch and the sub-circle ring array of inscribe according to claim 2, it is characterized in that: each interior circle diameter of donut bunch and outermost annulus (6) diameter ratio are within the scope of 0.2-0.8, in each elementary cell adjacent sub-annulus (7) can circumscribed connection or intersect, the each interior annulus tangent connection or crossing of sub-annulus (7) and the donut in the elementary cell of place bunch, described tangent connection is that circumscribed connection or inscribe are communicated with.
4. the electromagnetic shielding optical window with donut bunch and the sub-circle ring array of inscribe according to claim 2, it is characterized in that: the diameter of same elementary cell neutron annulus (7) is identical, and be communicated with the interior annulus (9) of donut bunch is circumscribed; The angle that the circle center line connecting of the center of circle of adjacent sub-annulus (7) and donut bunch forms is equal.
5. the electromagnetic shielding optical window with donut bunch and the sub-circle ring array of inscribe according to claim 4, is characterized in that: the number of neighboring unit cells neutron annulus (7) is identical, and equal diameters.
6. the electromagnetic shielding optical window with donut bunch and the sub-circle ring array of inscribe according to claim 5, it is characterized in that: sub-annulus (7) relative position in different elementary cell is identical, and form two-dimensional metallic net grid by the arrangement of triangular arranged contiguity after an elementary cell copies.
7. the electromagnetic shielding optical window with donut bunch and the sub-circle ring array of inscribe according to claim 5, it is characterized in that: in two-dimensional metallic net grid, sub-annulus (7) relative position in neighboring unit cells is different, and form two-dimensional metallic net grid by touching arrangement by triangular arranged after an elementary cell copies, wherein any one elementary cell rotates to an angle relative to the center of circle of its neighboring unit cells around self donut bunch in two dimensional surface.
8. the electromagnetic shielding optical window with donut bunch and the sub-circle ring array of inscribe according to claim 7, is characterized in that: the angle rotated relative to neighboring unit cells with any elementary cell in a line is identical.
9. the electromagnetic shielding optical window with donut bunch and the sub-circle ring array of inscribe according to claim 1, it is characterized in that: each annulus in donut bunch and sub-annulus (7) are formed by the alloy that electric conductivity is good, and alloy thickness is greater than 100nm.
10. the electromagnetic shielding optical window with donut bunch and the sub-circle ring array of inscribe according to claim 1, is characterized in that: adhesive linkage (1) chromium or titanium material are formed.
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| CN1200231A (en) * | 1996-08-30 | 1998-11-25 | 鹿岛建设株式会社 | Windowpane having electromagnetic shielding ability |
| JP3241348B2 (en) * | 1999-01-28 | 2001-12-25 | 住友ゴム工業株式会社 | Method for manufacturing translucent electromagnetic wave shielding member |
| CN1889822A (en) * | 2006-05-22 | 2007-01-03 | 哈尔滨工业大学 | Electromagnetic screening optical window with circular ring metal meshed gate structure |
| CN103369939A (en) * | 2013-06-26 | 2013-10-23 | 中国科学院上海光学精密机械研究所 | Electromagnetic shielding optical window |
| CN103491754A (en) * | 2013-08-30 | 2014-01-01 | 中国科学院长春光学精密机械与物理研究所 | High-performance radar/infrared dual-waveband band-pass frequency selective surface |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US8361540B2 (en) * | 2008-12-16 | 2013-01-29 | Lockheed Martin Corporation | Randomized circular grids for low-scatter EM shielding of a sensor window |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1200231A (en) * | 1996-08-30 | 1998-11-25 | 鹿岛建设株式会社 | Windowpane having electromagnetic shielding ability |
| JP3241348B2 (en) * | 1999-01-28 | 2001-12-25 | 住友ゴム工業株式会社 | Method for manufacturing translucent electromagnetic wave shielding member |
| CN1889822A (en) * | 2006-05-22 | 2007-01-03 | 哈尔滨工业大学 | Electromagnetic screening optical window with circular ring metal meshed gate structure |
| CN103369939A (en) * | 2013-06-26 | 2013-10-23 | 中国科学院上海光学精密机械研究所 | Electromagnetic shielding optical window |
| CN103491754A (en) * | 2013-08-30 | 2014-01-01 | 中国科学院长春光学精密机械与物理研究所 | High-performance radar/infrared dual-waveband band-pass frequency selective surface |
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